[Scan]
initial_time=2016-02-16T04:15:07
final_time=2016-02-16T04:15:26
ip_count=19
run=1030
dataset=9
scan=693
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.78705E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.31571E-10
ql2_vset=
ql2_vmon=-4.52995E-4
ql2_imon=3.95155E-10
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.78275E-9
ql4_vset=
ql4_vmon=5.72205E-4
ql4_imon=7.57575E-10
mult1=-9.60794E-9
mult2=-2.8284E-9
rf_tmon=-3.85152E-3
rf_agc=3.35499E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=3.91424E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65972E0
bslens_imon=2.63882E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20072E1
lens5a_imon=2.00173E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12518E2
lens4a_imon=2.05043E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53488E1
cs_ef1b_imon=3.07948E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04601E2
lens23_imon=1.02305E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04953E1
cs_ea1_imon=2.17516E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03124E0
lens1_imon=1.71504E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64718E1
os_ef1alow_imon=2.9714E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03844E1
cs_ea2_imon=1.56957E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84209E1
cs_ef1a_imon=3.04959E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=3.87454E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11355E1
os_restr1_imon=2.87513E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15205E1
os_ea1_imon=1.91218E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63757E1
os_ef1bup_imon=3.11388E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23912E0
cs_ionrep_imon=1.25421E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91915E2
cs_nozzle_imon=1.93576E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01902E1
cs_anode1_imon=3.27097E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=7.38192E-10
tplens_vset=1.4E-1
tplens_vmon=1.63022E0
tplens_imon=-3.83833E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26206E1
iondef3_imon=1.51188E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27077E1
iondef2_imon=1.57983E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02971E2
lens6_imon=2.98388E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=4.38499E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25859E0
ionrepsh_imon=2.0127E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33722E1
lens5b_imon=2.18543E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74634E1
cs_ef2b_imon=3.14377E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.58704E-1
os_ea2_imon=-3.55518E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06153E2
lens4b_imon=2.00541E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71437E1
cs_ef2a_imon=3.18304E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63493E0
os_ef2alow_imon=-2.30004E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.65954E-1
os_ef2bup_imon=-5.18102E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1073E1
os_restr2_imon=2.87444E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.32583E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01746E1
cs_anode2_imon=2.27565E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72781E1
iondef1_imon=1.08538E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67818E1
iondef4_imon=1.09476E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.9192E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=3.44193E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13246E0
cs_ionaccel_imon=-2.00117E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02044E2
cs_ionfocb_imon=1.474E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56336E1
einzel_imon=7.58011E-6
window_vset=0.0E0
window_vmon=2.25795E-1
window_imon=-8.33481E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82618E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.86315E1
mask2_imon=-4.51203E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.68602E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93735E3
defgrida_imon=6.45784E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.38871E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31402E0
defgridb_imon=6.32689E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33949E1
os_fil1_imon=5.33548E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.34534E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66562E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30757E1
cs_fil1_imon=1.00888E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62661E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66571E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.0913E-2
os_fil2_imon=-2.29849E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.74038E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.76984E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32274E-1
cs_fil2_imon=-2.24057E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28681E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22375E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33388E-3
inlet_lpb_pmon=1.97897E-1
chamber_ion_pmon=1.73532E-7
chamber_cvt_pmon=2.51814E-3
foreline_cvt_pmon=2.51814E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.04964E-1
res40_imon=-2.51898E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4735E4	1.1E1	1.47E2	4.1E1	-7.43285E-2	-8.80013E1	-2.38419E-4	-8.80002E1	5.24521E-4	4.91142E-3	9.32693E-2	2.72998E1	-3.26384E1	-3.26036E1	2.68274E1	1.73529E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.00151E-1
2.0E0	5.453E3	6.0E0	3.16E2	1.6E2	-7.39421E-2	-8.80014E1	-5.00679E-4	-8.80002E1	3.09944E-4	4.95911E-3	9.36031E-2	2.73267E1	-3.26506E1	-3.25671E1	2.67896E1	1.73531E-7	2.51417E-3	2.51417E-3	6.31817E-3	1.97984E-1
3.0E0	7.0E0	0.0E0	4.85E2	2.79E2	-7.40192E-2	-8.80013E1	-3.09944E-4	-8.80005E1	4.05312E-4	5.36442E-3	9.32455E-2	2.72973E1	-3.26663E1	-3.26092E1	2.68118E1	1.7368E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.96703E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.37103E-2	-8.80011E1	-2.86102E-4	-8.80003E1	8.34465E-4	5.48363E-3	9.3174E-2	2.73111E1	-3.26639E1	-3.26158E1	2.6795E1	1.73605E-7	2.51739E-3	2.51739E-3	6.32356E-3	1.96303E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.80015E1	-2.14577E-4	-8.80003E1	4.52995E-4	5.36442E-3	9.32217E-2	2.73069E1	-3.26753E1	-3.2644E1	2.68028E1	1.73529E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.9568E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80015E1	-2.6226E-4	-8.80003E1	5.48363E-4	5.126E-3	9.36031E-2	2.72951E1	-3.26697E1	-3.26213E1	2.67854E1	1.73529E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.96532E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.80017E1	-1.90735E-4	-8.80007E1	4.29153E-4	5.07832E-3	9.33886E-2	2.72931E1	-3.26669E1	-3.26657E1	2.68007E1	1.73379E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.96874E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80016E1	-1.19209E-4	-8.80006E1	5.24521E-4	4.98295E-3	9.33409E-2	2.73009E1	-3.26645E1	-3.26074E1	2.67932E1	1.73457E-7	2.51739E-3	2.51739E-3	6.35059E-3	1.96805E-1
1.2E1	3.25E2	0.0E0	4.85E2	3.23E2	-7.21643E-2	-8.80014E1	-5.00679E-4	-8.80006E1	2.86102E-4	5.22137E-3	9.32932E-2	2.72727E1	-3.26573E1	-3.26356E1	2.67917E1	1.73528E-7	2.5225E-3	2.5225E-3	6.32978E-3	1.98169E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80013E1	-1.43051E-4	-8.80006E1	5.24521E-4	4.8399E-3	9.31263E-2	2.72964E1	-3.27048E1	-3.26167E1	2.67846E1	1.73605E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.98419E-1
1.4E1	7.1E2	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80013E1	-1.66893E-4	-8.80006E1	5.00679E-4	4.57764E-3	9.3317E-2	2.73147E1	-3.26422E1	-3.2596E1	2.67842E1	1.73605E-7	2.52131E-3	2.52131E-3	6.2863E-3	1.98395E-1
1.5E1	6.3E1	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80012E1	-4.76837E-5	-8.80003E1	9.53674E-5	4.74453E-3	9.32455E-2	2.72396E1	-3.25996E1	-3.2641E1	2.68124E1	1.73303E-7	2.51443E-3	2.51443E-3	6.30192E-3	1.99803E-1
1.6E1	3.066E3	2.0E0	6.47E2	4.41E2	-7.33239E-2	-8.80012E1	1.66893E-4	-8.80006E1	3.57628E-4	4.95911E-3	9.31501E-2	2.72594E1	-3.26591E1	-3.2602E1	2.68001E1	1.73529E-7	2.51662E-3	2.51662E-3	6.34588E-3	1.99803E-1
1.7E1	3.6496E4	1.8E1	6.87E2	4.7E2	-7.36328E-2	-8.80011E1	1.43051E-4	-8.80006E1	2.86102E-4	5.19753E-3	9.3627E-2	2.72951E1	-3.26832E1	-3.26443E1	2.6798E1	1.73457E-7	2.5131E-3	2.5131E-3	6.29665E-3	2.00192E-1
1.8E1	1.59653E5	8.1E1	7.27E2	5.0E2	-7.41738E-2	-8.8001E1	-2.86102E-4	-8.80006E1	5.24521E-4	4.98295E-3	9.31501E-2	2.73442E1	-3.26999E1	-3.26554E1	2.67998E1	1.73303E-7	2.52538E-3	2.52538E-3	6.32936E-3	2.00499E-1
1.9E1	2.212E3	1.0E0	7.68E2	5.29E2	-7.35556E-2	-8.80011E1	-1.43051E-4	-8.80002E1	3.09944E-4	4.93526E-3	9.3627E-2	2.72594E1	-3.26266E1	-3.2626E1	2.68262E1	1.73303E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.9963E-1
2.0E1	2.87E2	0.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80013E1	-3.57628E-4	-8.80004E1	2.38419E-4	5.14984E-3	9.36508E-2	2.73123E1	-3.26981E1	-3.2599E1	2.68058E1	1.73531E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.9968E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80014E1	-2.38419E-4	-8.80004E1	4.29153E-4	5.07832E-3	9.35078E-2	2.72786E1	-3.26579E1	-3.25971E1	2.68262E1	1.73303E-7	2.5188E-3	2.5188E-3	6.29645E-3	1.98592E-1
2.2E1	3.1E1	0.0E0	8.89E2	6.17E2	-7.33239E-2	-8.80015E1	-3.57628E-4	-8.80002E1	5.24521E-4	5.00679E-3	9.33886E-2	2.72909E1	-3.26779E1	-3.26431E1	2.67792E1	1.73379E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.98247E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80018E1	-4.52995E-4	-8.79999E1	5.72205E-4	4.69685E-3	9.35078E-2	2.72781E1	-3.27077E1	-3.26206E1	2.67818E1	1.73532E-7	2.51814E-3	2.51814E-3	6.33388E-3	1.97897E-1