[Scan]
initial_time=2016-02-16T04:17:20
final_time=2016-02-16T04:17:40
ip_count=19
run=1030
dataset=9
scan=698
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.20871E-2
qbias_imon=-3.72568E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-5.88632E-10
ql2_vset=
ql2_vmon=-4.29153E-4
ql2_imon=3.72612E-10
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-1.69994E-9
ql4_vset=
ql4_vmon=5.00679E-4
ql4_imon=7.71666E-10
mult1=-1.04989E-8
mult2=-2.92621E-9
rf_tmon=-4.21201E-3
rf_agc=3.44932E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=3.81935E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65497E0
bslens_imon=2.71421E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1986E1
lens5a_imon=1.96639E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.05233E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53603E1
cs_ef1b_imon=3.07531E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02271E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05011E1
cs_ea1_imon=2.18155E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05306E0
lens1_imon=1.4779E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64539E1
os_ef1alow_imon=2.99156E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04026E1
cs_ea2_imon=1.55008E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84325E1
cs_ef1a_imon=3.01693E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=3.90148E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1132E1
os_restr1_imon=2.88139E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15647E1
os_ea1_imon=1.88101E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63537E1
os_ef1bup_imon=3.09095E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24014E0
cs_ionrep_imon=1.27242E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93505E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01896E1
cs_anode1_imon=3.27583E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=6.71518E-10
tplens_vset=1.4E-1
tplens_vmon=1.62663E0
tplens_imon=-2.98018E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26236E1
iondef3_imon=1.51661E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26422E1
iondef2_imon=1.58765E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02952E2
lens6_imon=2.98616E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=3.88289E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27714E0
ionrepsh_imon=2.01865E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33731E1
lens5b_imon=2.1959E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74797E1
cs_ef2b_imon=3.13265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.56562E-1
os_ea2_imon=-3.56077E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00657E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7113E1
cs_ef2a_imon=3.20077E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65346E0
os_ef2alow_imon=-2.39387E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.52053E-1
os_ef2bup_imon=-5.2262E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10637E1
os_restr2_imon=2.85845E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23088E2
cs_ionfoca_imon=6.3085E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.29373E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72925E1
iondef1_imon=1.088E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6786E1
iondef4_imon=1.09129E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.93613E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=3.64232E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09944E0
cs_ionaccel_imon=-1.81698E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02092E2
cs_ionfocb_imon=1.47376E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56197E1
einzel_imon=7.76082E-6
window_vset=0.0E0
window_vmon=1.91042E-1
window_imon=-9.51639E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.3923E-4
mask2_vset=0.0E0
mask2_vmon=-1.86553E1
mask2_imon=-6.9447E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=8.00096E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.68952E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.59455E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56983E0
defgridb_imon=6.06112E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33926E1
os_fil1_imon=4.8837E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.1736E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66744E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30755E1
cs_fil1_imon=1.0089E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62916E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66252E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.14906E-2
os_fil2_imon=-2.5128E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.58196E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.55325E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29527E-1
cs_fil2_imon=-2.08418E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.00879E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22158E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=1.98161E-1
chamber_ion_pmon=1.73454E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.39981E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.35083E-1
res40_imon=-2.4738E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4306E4	2.2E1	1.47E2	4.1E1	-7.20871E-2	-8.80017E1	2.38419E-5	-8.80003E1	5.00679E-4	5.53131E-3	9.31263E-2	2.73086E1	-3.2659E1	-3.26225E1	2.67891E1	1.73462E-7	2.51265E-3	2.51265E-3	6.3282E-3	1.98792E-1
2.0E0	5.515E3	6.0E0	3.16E2	1.6E2	-7.14689E-2	-8.80018E1	1.90735E-4	-8.80001E1	5.24521E-4	5.17368E-3	9.31025E-2	2.72702E1	-3.26897E1	-3.26158E1	2.67808E1	1.73383E-7	2.51203E-3	2.51203E-3	6.32896E-3	1.9951E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.17779E-2	-8.80018E1	2.38419E-5	-8.80002E1	3.8147E-4	5.76973E-3	9.32693E-2	2.73171E1	-3.2647E1	-3.25894E1	2.68047E1	1.73529E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.99283E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.201E-2	-8.80018E1	0.0E0	-8.80003E1	5.48363E-4	5.19753E-3	9.29356E-2	2.73087E1	-3.26585E1	-3.2599E1	2.6795E1	1.73303E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.98937E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.80017E1	-4.05312E-4	-8.80004E1	4.29153E-4	5.48363E-3	9.33886E-2	2.73351E1	-3.26615E1	-3.26374E1	2.68142E1	1.73605E-7	2.51225E-3	2.51225E-3	6.31837E-3	1.9911E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80013E1	-1.66893E-4	-8.80006E1	5.48363E-4	5.55515E-3	9.34601E-2	2.73033E1	-3.26815E1	-3.26337E1	2.67722E1	1.73529E-7	2.51116E-3	2.51116E-3	6.31288E-3	1.97903E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.33239E-2	-8.80012E1	-3.09944E-4	-8.80004E1	6.91414E-4	5.43594E-3	9.32455E-2	2.73171E1	-3.26723E1	-3.25912E1	2.6801E1	1.73605E-7	2.51417E-3	2.51417E-3	6.3074E-3	1.97815E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80014E1	-5.24521E-4	-8.80003E1	7.62939E-4	5.57899E-3	9.3174E-2	2.73231E1	-3.26765E1	-3.2644E1	2.68028E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.98937E-1
1.2E1	3.36E2	1.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80012E1	-4.76837E-4	-8.80007E1	3.57628E-4	5.29289E-3	9.33409E-2	2.72811E1	-3.26693E1	-3.2638E1	2.67914E1	1.73454E-7	2.5199E-3	2.5199E-3	6.34037E-3	1.9963E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.23189E-2	-8.80014E1	-4.29153E-4	-8.80002E1	4.29153E-4	5.48363E-3	9.32455E-2	2.73257E1	-3.26809E1	-3.26231E1	2.68094E1	1.73529E-7	2.51552E-3	2.51552E-3	6.34588E-3	1.99456E-1
1.4E1	6.54E2	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80013E1	-5.24521E-4	-8.80003E1	2.38419E-4	5.126E-3	9.32932E-2	2.73081E1	-3.26609E1	-3.26212E1	2.68188E1	1.7353E-7	2.51809E-3	2.51809E-3	6.31827E-3	2.00603E-1
1.5E1	5.7E1	0.0E0	6.06E2	4.11E2	-7.19325E-2	-8.80016E1	-5.24521E-4	-8.80003E1	4.29153E-4	5.17368E-3	9.35555E-2	2.72821E1	-3.26632E1	-3.27552E1	2.67728E1					
1.6E1	3.006E3	1.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80018E1	-5.00679E-4	-8.80004E1	7.15256E-5	5.45979E-3	9.34839E-2	2.73285E1	-3.26597E1	-3.26218E1	2.67962E1	1.73383E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.00363E-1
1.7E1	3.6381E4	2.0E1	6.87E2	4.7E2	-7.26282E-2	-8.80018E1	-3.33786E-4	-8.80006E1	5.96046E-4	5.14984E-3	9.34124E-2	2.72727E1	-3.26597E1	-3.2641E1	2.68196E1	1.73605E-7	2.50898E-3	2.50898E-3	6.34037E-3	1.99456E-1
1.8E1	1.59361E5	1.07E2	7.27E2	5.0E2	-7.286E-2	-8.80016E1	-5.24521E-4	-8.80006E1	7.86781E-4	4.86374E-3	9.33647E-2	2.72931E1	-3.2653E1	-3.25864E1	2.68238E1	1.73379E-7	2.52647E-3	2.52647E-3	6.30192E-3	1.97903E-1
1.9E1	2.286E3	0.0E0	7.68E2	5.29E2	-7.33239E-2	-8.80015E1	-7.39098E-4	-8.80005E1	5.48363E-4	5.10216E-3	9.3317E-2	2.72862E1	-3.2639E1	-3.26172E1	2.67716E1	1.73529E-7	2.51607E-3	2.51607E-3	6.31837E-3	1.99456E-1
2.0E1	3.04E2	0.0E0	8.08E2	5.58E2	-7.38649E-2	-8.80016E1	-6.67572E-4	-8.80004E1	5.00679E-4	5.17368E-3	9.32932E-2	2.73357E1	-3.26615E1	-3.26086E1	2.6796E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80016E1	-5.00679E-4	-8.80006E1	5.24521E-4	5.24521E-3	9.32217E-2	2.73157E1	-3.26508E1	-3.26254E1	2.67728E1	1.73605E-7	2.51739E-3	2.51739E-3	6.33436E-3	1.97815E-1
2.2E1	4.3E1	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80015E1	-5.00679E-4	-8.80005E1	6.91414E-4	5.05447E-3	9.34124E-2	2.73309E1	-3.265E1	-3.26368E1	2.67884E1	1.73531E-7	2.51417E-3	2.51417E-3	6.31278E-3	1.9951E-1
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.20871E-2	-8.80014E1	-4.29153E-4	-8.80006E1	5.00679E-4	4.88758E-3	9.31263E-2	2.72925E1	-3.26422E1	-3.26236E1	2.6786E1	1.73454E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.98161E-1