[Scan]
initial_time=2016-02-16T04:18:40
final_time=2016-02-16T04:18:59
ip_count=19
run=1030
dataset=9
scan=701
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.40192E-2
qbias_imon=-3.79026E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-5.95701E-10
ql2_vset=
ql2_vmon=-2.14577E-4
ql2_imon=3.92449E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.68105E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=7.6704E-10
mult1=-9.88488E-9
mult2=-2.73608E-9
rf_tmon=-3.59767E-3
rf_agc=3.48672E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.76973E-3
ql5_imon=3.9624E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64498E0
bslens_imon=2.47247E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19978E1
lens5a_imon=2.00881E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.05125E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53094E1
cs_ef1b_imon=3.07392E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.0273E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05118E1
cs_ea1_imon=2.17021E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02829E0
lens1_imon=1.64779E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65118E1
os_ef1alow_imon=2.99121E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03749E1
cs_ea2_imon=1.5901E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84869E1
cs_ef1a_imon=3.02179E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=3.91054E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11998E1
os_restr1_imon=2.89738E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15518E1
os_ea1_imon=1.89059E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63606E1
os_ef1bup_imon=3.10937E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26154E0
cs_ionrep_imon=1.27226E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9192E2
cs_nozzle_imon=1.93501E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01995E1
cs_anode1_imon=3.28869E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20563E0
olens4_imon=7.29394E-10
tplens_vset=1.4E-1
tplens_vmon=1.61725E0
tplens_imon=-1.36074E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25814E1
iondef3_imon=1.50126E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26747E1
iondef2_imon=1.57948E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02926E2
lens6_imon=2.98657E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=3.54147E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28395E0
ionrepsh_imon=2.00173E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33522E1
lens5b_imon=2.20737E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74507E1
cs_ef2b_imon=3.12674E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.00587E-1
os_ea2_imon=-5.50185E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00817E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70788E1
cs_ef2a_imon=3.19833E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60828E0
os_ef2alow_imon=-2.68927E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.50315E-1
os_ef2bup_imon=-5.12542E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10527E1
os_restr2_imon=2.87166E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.231E2
cs_ionfoca_imon=6.31167E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01977E1
cs_anode2_imon=2.2972E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7311E1
iondef1_imon=1.10201E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6792E1
iondef4_imon=1.1031E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.89602E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=3.49486E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10871E0
cs_ionaccel_imon=-1.66754E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02095E2
cs_ionfocb_imon=1.47438E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56451E1
einzel_imon=7.62528E-6
window_vset=0.0E0
window_vmon=1.96834E-1
window_imon=-1.0698E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82577E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.86292E1
mask2_imon=-9.82917E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.49489E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.69145E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.39579E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4528E0
defgridb_imon=6.35874E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33958E1
os_fil1_imon=3.61523E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.82029E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66217E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30781E1
cs_fil1_imon=1.0082E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64208E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66318E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26858E-2
os_fil2_imon=-2.50122E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.06067E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.53571E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29902E-1
cs_fil2_imon=-2.29849E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.97607E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2277E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28552E-3
inlet_lpb_pmon=1.9963E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.22543E-1
res40_imon=-2.69274E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4332E4	1.4E1	1.47E2	4.1E1	-7.38649E-2	-8.80013E1	-5.72205E-4	-8.80001E1	1.66893E-4	5.29289E-3	9.31978E-2	2.72939E1	-3.26803E1	-3.26419E1	2.67571E1	1.73605E-7	2.51632E-3	2.51632E-3	6.30202E-3	1.9883E-1
2.0E0	5.616E3	6.0E0	3.16E2	1.6E2	-7.43285E-2	-8.80012E1	-4.29153E-4	-8.80005E1	3.57628E-4	5.31673E-3	9.30786E-2	2.73225E1	-3.26663E1	-3.26398E1	2.67992E1	1.73457E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.00192E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.48695E-2	-8.80011E1	0.0E0	-8.80003E1	4.76837E-4	5.126E-3	9.34124E-2	2.73129E1	-3.26573E1	-3.26518E1	2.67535E1	1.73605E-7	2.52428E-3	2.52428E-3	6.29645E-3	1.99977E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.43285E-2	-8.80014E1	-1.90735E-4	-8.80002E1	4.76837E-4	5.62668E-3	9.3317E-2	2.73204E1	-3.2662E1	-3.26207E1	2.68273E1	1.73383E-7	2.51203E-3	2.51203E-3	6.31278E-3	2.00876E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.44831E-2	-8.80018E1	-4.76837E-5	-8.80002E1	7.15256E-4	5.60284E-3	9.31025E-2	2.73393E1	-3.26975E1	-3.25689E1	2.6819E1	1.73454E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.00499E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.38649E-2	-8.80018E1	-1.43051E-4	-8.80002E1	3.33786E-4	5.60284E-3	9.31501E-2	2.72656E1	-3.26649E1	-3.26101E1	2.67884E1	1.73529E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.00499E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80017E1	2.38419E-5	-8.80002E1	4.29153E-4	5.6982E-3	9.29117E-2	2.72733E1	-3.26224E1	-3.2614E1	2.68112E1	1.73531E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.00534E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.80016E1	2.38419E-5	-8.80001E1	5.00679E-4	5.45979E-3	9.32932E-2	2.73165E1	-3.26945E1	-3.26314E1	2.67806E1	1.73605E-7	2.51443E-3	2.51443E-3	6.33486E-3	2.00499E-1
1.2E1	3.21E2	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.80018E1	0.0E0	-8.80001E1	4.29153E-4	5.34058E-3	9.3317E-2	2.73075E1	-3.26729E1	-3.26002E1	2.67908E1	1.73605E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.00151E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.37103E-2	-8.80018E1	-2.6226E-4	-8.80004E1	2.38419E-4	5.31673E-3	9.31263E-2	2.72907E1	-3.26194E1	-3.2632E1	2.68034E1	1.73379E-7	2.51007E-3	2.51007E-3	6.32386E-3	1.9911E-1
1.4E1	6.26E2	0.0E0	5.66E2	3.82E2	-7.36328E-2	-8.80018E1	-2.38419E-4	-8.80003E1	1.19209E-4	5.17368E-3	9.29356E-2	2.72817E1	-3.26723E1	-3.26302E1	2.69109E1	1.73529E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.97903E-1
1.5E1	7.6E1	0.0E0	6.06E2	4.11E2	-7.40967E-2	-8.80018E1	-3.33786E-4	-8.80004E1	3.8147E-4	5.29289E-3	9.31978E-2	2.7465E1	-3.28242E1	-3.25647E1	2.67381E1	1.73605E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.98247E-1
1.6E1	3.002E3	1.0E0	6.47E2	4.41E2	-7.51788E-2	-8.80015E1	-3.09944E-4	-8.80001E1	1.66893E-4	5.6982E-3	9.31501E-2	2.72636E1	-3.26374E1	-3.26206E1	2.68412E1	1.73457E-7	2.51632E-3	2.51632E-3	6.33436E-3	1.97984E-1
1.7E1	3.7087E4	1.5E1	6.87E2	4.7E2	-7.51013E-2	-8.80017E1	-7.15256E-5	-8.80003E1	3.09944E-4	5.53131E-3	9.32693E-2	2.72801E1	-3.26653E1	-3.26306E1	2.68111E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.98764E-1
1.8E1	1.60449E5	7.6E1	7.27E2	5.0E2	-7.47923E-2	-8.80018E1	-3.57628E-4	-8.80005E1	2.14577E-4	5.19753E-3	9.31501E-2	2.72784E1	-3.26553E1	-3.2633E1	2.67939E1	1.73533E-7	2.51886E-3	2.51886E-3	6.323E-3	1.98138E-1
1.9E1	2.305E3	1.0E0	7.68E2	5.29E2	-7.51013E-2	-8.80015E1	-1.66893E-4	-8.80005E1	2.6226E-4	5.14984E-3	9.31978E-2	2.73122E1	-3.26461E1	-3.26284E1	2.68232E1	1.73525E-7	2.51065E-3	2.51065E-3	6.3016E-3	1.99834E-1
2.0E1	3.22E2	2.0E0	8.08E2	5.58E2	-7.46377E-2	-8.80017E1	-2.6226E-4	-8.80006E1	4.05312E-4	5.50747E-3	9.2864E-2	2.72793E1	-3.26693E1	-3.25948E1	2.6807E1	1.73383E-7	2.51417E-3	2.51417E-3	6.33977E-3	1.99E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.45602E-2	-8.80015E1	-5.00679E-4	-8.80003E1	3.8147E-4	5.22137E-3	9.30786E-2	2.72839E1	-3.26585E1	-3.26384E1	2.68647E1	1.73529E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.00151E-1
2.2E1	3.1E1	0.0E0	8.89E2	6.17E2	-7.40967E-2	-8.80016E1	-3.09944E-4	-8.80003E1	3.8147E-4	5.24521E-3	9.31025E-2	2.73129E1	-3.26446E1	-3.26464E1	2.68146E1	1.73457E-7	2.50668E-3	2.50668E-3	6.29665E-3	2.00192E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.40192E-2	-8.80014E1	-2.14577E-4	-8.80001E1	2.38419E-4	5.76973E-3	9.31025E-2	2.7311E1	-3.26747E1	-3.25814E1	2.6792E1	1.73605E-7	2.51443E-3	2.51443E-3	6.28552E-3	1.9963E-1