[Scan]
initial_time=2016-02-16T04:19:33
final_time=2016-02-16T04:19:53
ip_count=19
run=1030
dataset=9
scan=703
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.40192E-2
qbias_imon=-3.80337E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-6.09231E-10
ql2_vset=
ql2_vmon=9.53674E-5
ql2_imon=4.01568E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.77909E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=7.8876E-10
mult1=-9.31897E-9
mult2=-2.86632E-9
rf_tmon=-5.04115E-3
rf_agc=3.2192E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.50747E-3
ql5_imon=4.02594E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67936E0
bslens_imon=2.82615E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19574E1
lens5a_imon=1.96288E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.05421E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53562E1
cs_ef1b_imon=3.08397E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02662E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05168E1
cs_ea1_imon=2.18964E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00771E0
lens1_imon=1.74827E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64614E1
os_ef1alow_imon=2.98811E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03858E1
cs_ea2_imon=1.55841E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8422E1
cs_ef1a_imon=3.0191E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=3.70777E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11189E1
os_restr1_imon=2.88611E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15029E1
os_ea1_imon=1.90809E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63833E1
os_ef1bup_imon=3.09911E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28034E0
cs_ionrep_imon=1.24586E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91878E2
cs_nozzle_imon=1.94444E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01311E1
cs_anode1_imon=3.29156E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=7.28524E-10
tplens_vset=1.4E-1
tplens_vmon=1.62641E0
tplens_imon=-1.18977E-6
iondef3_vset=-3.249E1
iondef3_vmon=-3.2611E1
iondef3_imon=1.61284E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26158E1
iondef2_imon=1.56021E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02987E2
lens6_imon=2.98645E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=3.94905E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29055E0
ionrepsh_imon=2.01263E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3373E1
lens5b_imon=2.17522E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.12866E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.70349E-1
os_ea2_imon=-4.29124E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.00879E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71174E1
cs_ef2a_imon=3.20074E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65702E0
os_ef2alow_imon=-2.47895E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94421E-1
os_ef2bup_imon=-5.12426E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10979E1
os_restr2_imon=2.88251E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.33137E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01653E1
cs_anode2_imon=2.27452E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72438E1
iondef1_imon=1.07895E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67908E1
iondef4_imon=1.10035E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.89763E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81855E-1
olens1_imon=3.63421E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11753E0
cs_ionaccel_imon=-1.85186E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02061E2
cs_ionfocb_imon=1.47255E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56405E1
einzel_imon=7.78875E-6
window_vset=0.0E0
window_vmon=2.29956E-1
window_imon=-9.58075E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39171E-4
mask2_vset=0.0E0
mask2_vmon=-1.86356E1
mask2_imon=-5.7245E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92665E3
multa_neg_imon=7.31792E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.69426E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.22419E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42262E0
defgridb_imon=6.17155E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33944E1
os_fil1_imon=4.92038E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.70745E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6678E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30742E1
cs_fil1_imon=1.00926E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62648E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66219E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24138E-2
os_fil2_imon=-2.30557E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.1182E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.57286E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29134E-1
cs_fil2_imon=-2.02326E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25635E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2236E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=2.00705E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.2988E-1
res40_imon=-2.54382E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4696E4	1.2E1	1.47E2	4.1E1	-7.32464E-2	-8.80017E1	-4.05312E-4	-8.79999E1	7.62939E-4	5.17368E-3	9.32693E-2	2.72609E1	-3.26638E1	-3.26331E1	2.68123E1	1.73529E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.97731E-1
2.0E0	5.505E3	9.0E0	3.16E2	1.6E2	-7.30918E-2	-8.80018E1	-4.05312E-4	-8.80003E1	4.52995E-4	5.126E-3	9.34839E-2	2.73153E1	-3.26296E1	-3.2608E1	2.68196E1	1.73605E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.98153E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80017E1	-2.6226E-4	-8.80003E1	6.91414E-4	5.17368E-3	9.30309E-2	2.73275E1	-3.26484E1	-3.26054E1	2.67764E1	1.73454E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.9911E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.286E-2	-8.80012E1	-2.14577E-4	-8.80003E1	6.91414E-4	4.8399E-3	9.29594E-2	2.73139E1	-3.26638E1	-3.26284E1	2.68082E1	1.73531E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.9951E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80015E1	-1.90735E-4	-8.80001E1	5.48363E-4	4.81606E-3	9.35555E-2	2.72985E1	-3.26597E1	-3.2623E1	2.68018E1	1.73531E-7	2.51847E-3	2.51847E-3	6.32896E-3	1.98491E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80014E1	-4.76837E-5	-8.8E1	5.72205E-4	5.31673E-3	9.32455E-2	2.73171E1	-3.26397E1	-3.26419E1	2.67821E1	1.73379E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.99283E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.8001E1	-4.76837E-5	-8.79999E1	5.00679E-4	5.31673E-3	9.33886E-2	2.72847E1	-3.2619E1	-3.26368E1	2.67801E1	1.7339E-7	2.51472E-3	2.51472E-3	6.31779E-3	1.98955E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.8001E1	2.38419E-5	-8.8E1	7.15256E-4	5.03063E-3	9.33409E-2	2.73189E1	-3.26386E1	-3.26338E1	2.68157E1	1.73525E-7	2.51411E-3	2.51411E-3	6.29002E-3	1.991E-1
1.2E1	3.52E2	1.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80013E1	-9.53674E-5	-8.80001E1	4.52995E-4	5.07832E-3	9.31263E-2	2.72955E1	-3.26494E1	-3.26242E1	2.67995E1	1.73529E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.98764E-1
1.3E1	2.2E1	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80013E1	-4.76837E-5	-8.80001E1	3.33786E-4	5.26905E-3	9.28879E-2	2.72848E1	-3.26532E1	-3.25988E1	2.67845E1	1.73529E-7	2.51662E-3	2.51662E-3	6.29645E-3	1.99456E-1
1.4E1	7.07E2	0.0E0	5.66E2	3.82E2	-7.3401E-2	-8.80015E1	-4.05312E-4	-8.8E1	6.19888E-4	5.29289E-3	9.28879E-2	2.72641E1	-3.26542E1	-3.26542E1	2.67914E1	1.73605E-7	2.51077E-3	2.51077E-3	6.33919E-3	1.99227E-1
1.5E1	6.8E1	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80013E1	-1.19209E-4	-8.8E1	4.29153E-4	5.53131E-3	9.3174E-2	2.72348E1	-3.26482E1	-3.27444E1	2.6813E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.00151E-1
1.6E1	3.127E3	1.0E0	6.47E2	4.41E2	-7.33239E-2	-8.80013E1	-4.29153E-4	-8.80002E1	4.76837E-4	5.38826E-3	9.31025E-2	2.73611E1	-3.27216E1	-3.25942E1	2.67955E1	1.73605E-7	2.5199E-3	2.5199E-3	6.29645E-3	2.00847E-1
1.7E1	3.688E4	2.8E1	6.87E2	4.7E2	-7.38649E-2	-8.80013E1	-1.90735E-4	-8.80001E1	4.05312E-4	5.14984E-3	9.3317E-2	2.73387E1	-3.26254E1	-3.26176E1	2.67896E1	1.73529E-7	2.5199E-3	2.5199E-3	6.29098E-3	2.00325E-1
1.8E1	1.59397E5	8.4E1	7.27E2	5.0E2	-7.29374E-2	-8.80014E1	-9.53674E-5	-8.80002E1	3.57628E-4	5.22137E-3	9.30786E-2	2.73149E1	-3.26787E1	-3.26499E1	2.67627E1	1.73529E-7	2.51007E-3	2.51007E-3	6.31288E-3	2.00499E-1
1.9E1	2.238E3	0.0E0	7.68E2	5.29E2	-7.23964E-2	-8.80018E1	-3.33786E-4	-8.79999E1	3.09944E-4	5.14984E-3	9.30786E-2	2.73175E1	-3.26785E1	-3.26402E1	2.67966E1	1.73454E-7	2.51334E-3	2.51334E-3	6.29098E-3	1.99977E-1
2.0E1	3.46E2	0.0E0	8.08E2	5.58E2	-7.33239E-2	-8.80018E1	2.6226E-4	-8.79998E1	1.43051E-4	5.38826E-3	9.32455E-2	2.72955E1	-3.2626E1	-3.2602E1	2.6786E1	1.73454E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.98592E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.8002E1	0.0E0	-8.79999E1	1.43051E-4	5.36442E-3	9.33647E-2	2.72739E1	-3.26795E1	-3.26236E1	2.67583E1	1.73605E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.99456E-1
2.2E1	3.4E1	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.80016E1	-2.14577E-4	-8.80001E1	4.29153E-4	5.48363E-3	9.34124E-2	2.7357E1	-3.26762E1	-3.26461E1	2.68142E1	1.73457E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.00192E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.40192E-2	-8.80013E1	9.53674E-5	-8.8E1	3.33786E-4	5.50747E-3	9.29832E-2	2.72438E1	-3.26158E1	-3.2611E1	2.67908E1	1.73605E-7	2.51847E-3	2.51847E-3	6.33977E-3	2.00705E-1