[Scan]
initial_time=2016-02-16T04:20:00
final_time=2016-02-16T04:20:19
ip_count=19
run=1030
dataset=9
scan=704
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.83904E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-5.89597E-10
ql2_vset=
ql2_vmon=-5.48363E-4
ql2_imon=3.73745E-10
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-1.70538E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=7.7939E-10
mult1=-1.05471E-8
mult2=-2.78249E-9
rf_tmon=-4.67465E-3
rf_agc=3.37542E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=3.84879E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65472E0
bslens_imon=2.62427E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20049E1
lens5a_imon=2.00542E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12494E2
lens4a_imon=2.05244E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53805E1
cs_ef1b_imon=3.0832E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.02427E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05036E1
cs_ea1_imon=2.1799E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01792E0
lens1_imon=1.70861E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64409E1
os_ef1alow_imon=2.99712E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03636E1
cs_ea2_imon=1.57066E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84288E1
cs_ef1a_imon=3.02182E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=3.81875E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11317E1
os_restr1_imon=2.88559E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15438E1
os_ea1_imon=1.90052E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63535E1
os_ef1bup_imon=3.10415E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22987E0
cs_ionrep_imon=1.27506E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93337E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01859E1
cs_anode1_imon=3.27818E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=6.92129E-10
tplens_vset=1.4E-1
tplens_vmon=1.61019E0
tplens_imon=-5.06042E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26476E1
iondef3_imon=1.48595E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26579E1
iondef2_imon=1.5977E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02982E2
lens6_imon=2.98483E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=3.89218E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26171E0
ionrepsh_imon=2.05697E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33363E1
lens5b_imon=2.18639E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74489E1
cs_ef2b_imon=3.13185E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.60736E-1
os_ea2_imon=-3.85865E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00565E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71264E1
cs_ef2a_imon=3.18836E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6409E0
os_ef2alow_imon=-2.44332E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.77048E-1
os_ef2bup_imon=-5.23155E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=2.88446E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23098E2
cs_ionfoca_imon=6.29496E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01715E1
cs_anode2_imon=2.29164E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73015E1
iondef1_imon=1.09842E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67746E1
iondef4_imon=1.09626E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.89753E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=3.44682E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10581E0
cs_ionaccel_imon=-1.91562E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47488E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56249E1
einzel_imon=7.80386E-6
window_vset=0.0E0
window_vmon=1.95765E-1
window_imon=-8.86411E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39013E-4
mask2_vset=0.0E0
mask2_vmon=-1.86506E1
mask2_imon=-4.74728E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92663E3
multa_neg_imon=7.07639E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.60774E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.44049E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41059E0
defgridb_imon=6.29772E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3393E1
os_fil1_imon=5.12206E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.84791E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66688E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30775E1
cs_fil1_imon=1.00961E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62665E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66132E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.22848E-2
os_fil2_imon=-2.40676E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.05424E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.65922E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29248E-1
cs_fil2_imon=-2.17597E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.20483E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22331E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33919E-3
inlet_lpb_pmon=1.99061E-1
chamber_ion_pmon=1.73314E-7
chamber_cvt_pmon=2.51919E-3
foreline_cvt_pmon=2.51919E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.2488E-1
res40_imon=-2.48449E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=201
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4398E4	1.4E1	1.47E2	4.1E1	-7.27053E-2	-8.80016E1	-1.66893E-4	-8.80004E1	5.24521E-4	5.03063E-3	9.28879E-2	2.73128E1	-3.26667E1	-3.26272E1	2.67792E1	1.73529E-7	2.51225E-3	2.51225E-3	6.32386E-3	1.98764E-1
2.0E0	5.491E3	8.0E0	3.16E2	1.6E2	-7.24736E-2	-8.80016E1	-1.90735E-4	-8.80001E1	8.10623E-4	5.126E-3	9.25779E-2	2.73039E1	-3.26597E1	-3.26432E1	2.67914E1	1.73605E-7	2.51525E-3	2.51525E-3	6.29665E-3	1.98153E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80018E1	9.53674E-5	-8.80004E1	5.24521E-4	5.65052E-3	9.31025E-2	2.72698E1	-3.2655E1	-3.26173E1	2.6807E1	1.73605E-7	2.51334E-3	2.51334E-3	6.29645E-3	1.97388E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80013E1	-2.14577E-4	-8.80004E1	2.86102E-4	5.50747E-3	9.29356E-2	2.72968E1	-3.26663E1	-3.2633E1	2.6824E1	1.73531E-7	2.51739E-3	2.51739E-3	6.32356E-3	1.98153E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23189E-2	-8.80012E1	-4.76837E-5	-8.80001E1	3.09944E-4	5.43594E-3	9.29832E-2	2.72931E1	-3.26422E1	-3.26338E1	2.68148E1	1.73546E-7	2.51456E-3	2.51456E-3	6.32434E-3	1.97996E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.80014E1	0.0E0	-8.80002E1	3.8147E-4	5.34058E-3	9.32455E-2	2.7242E1	-3.26714E1	-3.26384E1	2.67884E1	1.73457E-7	2.51632E-3	2.51632E-3	6.3074E-3	1.9934E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80015E1	-2.86102E-4	-8.80004E1	3.8147E-4	5.34058E-3	9.31025E-2	2.73237E1	-3.26554E1	-3.25948E1	2.68166E1	1.73529E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.99283E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.80017E1	1.19209E-4	-8.80004E1	4.05312E-4	5.79357E-3	9.32217E-2	2.72456E1	-3.26284E1	-3.26512E1	2.67908E1	1.73454E-7	2.5199E-3	2.5199E-3	6.29645E-3	1.99283E-1
1.2E1	3.22E2	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.80014E1	-3.09944E-4	-8.80007E1	4.29153E-4	5.55515E-3	9.32693E-2	2.73051E1	-3.27017E1	-3.26224E1	2.67944E1	1.73531E-7	2.51739E-3	2.51739E-3	6.29128E-3	1.9951E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80014E1	-1.66893E-4	-8.80006E1	2.14577E-4	5.43594E-3	9.32932E-2	2.73123E1	-3.26789E1	-3.26218E1	2.67728E1	1.73529E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.98937E-1
1.4E1	6.39E2	0.0E0	5.66E2	3.82E2	-7.33239E-2	-8.80014E1	-2.6226E-4	-8.80006E1	3.57628E-4	5.76973E-3	9.32217E-2	2.72757E1	-3.26657E1	-3.2611E1	2.68665E1	1.73605E-7	2.51915E-3	2.51915E-3	6.3074E-3	1.98872E-1
1.5E1	5.8E1	1.0E0	6.06E2	4.11E2	-7.34782E-2	-8.80014E1	-4.05312E-4	-8.80005E1	4.05312E-4	5.55515E-3	9.36985E-2	2.73039E1	-3.26392E1	-3.27011E1	2.68112E1	1.73531E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.9985E-1
1.6E1	3.053E3	1.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80012E1	-5.00679E-4	-8.80004E1	5.00679E-4	5.76973E-3	9.3317E-2	2.72931E1	-3.26591E1	-3.26332E1	2.68286E1	1.73605E-7	2.51915E-3	2.51915E-3	6.28511E-3	1.9852E-1
1.7E1	3.6889E4	1.6E1	6.87E2	4.7E2	-7.30918E-2	-8.80013E1	-4.05312E-4	-8.80003E1	4.29153E-4	5.36442E-3	9.31263E-2	2.72833E1	-3.26744E1	-3.26136E1	2.68238E1	1.73454E-7	2.51443E-3	2.51443E-3	6.30192E-3	1.99977E-1
1.8E1	1.59628E5	8.4E1	7.27E2	5.0E2	-7.286E-2	-8.80015E1	-3.57628E-4	-8.80002E1	7.62939E-4	5.81741E-3	9.30071E-2	2.72965E1	-3.26719E1	-3.26413E1	2.68328E1	1.73383E-7	2.5131E-3	2.5131E-3	6.31278E-3	1.9985E-1
1.9E1	2.245E3	0.0E0	7.68E2	5.29E2	-7.26282E-2	-8.80016E1	-2.86102E-4	-8.80001E1	6.19888E-4	5.34058E-3	9.33647E-2	2.73255E1	-3.26663E1	-3.26356E1	2.6828E1	1.73529E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.99803E-1
2.0E1	2.95E2	0.0E0	8.08E2	5.58E2	-7.35556E-2	-8.80013E1	-4.05312E-4	-8.80007E1	5.48363E-4	5.43594E-3	9.31978E-2	2.73105E1	-3.2644E1	-3.2614E1	2.67722E1	1.73605E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.00285E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.23189E-2	-8.80016E1	-4.05312E-4	-8.80006E1	4.05312E-4	5.24521E-3	9.32932E-2	2.73393E1	-3.26759E1	-3.26254E1	2.67998E1	1.73379E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.9963E-1
2.2E1	3.7E1	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80016E1	-4.05312E-4	-8.80003E1	4.29153E-4	5.34058E-3	9.35078E-2	2.72874E1	-3.26579E1	-3.25971E1	2.67792E1	1.73529E-7	2.51116E-3	2.51116E-3	6.3074E-3	1.98592E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80016E1	-5.48363E-4	-8.80006E1	4.52995E-4	5.36442E-3	9.33647E-2	2.73015E1	-3.26579E1	-3.26476E1	2.67746E1	1.73314E-7	2.51919E-3	2.51919E-3	6.33919E-3	1.99061E-1