[Scan]
initial_time=2016-02-16T04:21:20
final_time=2016-02-16T04:21:39
ip_count=19
run=1030
dataset=9
scan=707
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.38649E-2
qbias_imon=-3.86143E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-5.79143E-10
ql2_vset=
ql2_vmon=-7.15256E-5
ql2_imon=3.7154E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.61924E-9
ql4_vset=
ql4_vmon=1.66893E-4
ql4_imon=7.48658E-10
mult1=-1.01522E-8
mult2=-2.7777E-9
rf_tmon=-3.94645E-3
rf_agc=3.37614E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=4.21751E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67742E0
bslens_imon=2.66006E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19954E1
lens5a_imon=1.97943E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1253E2
lens4a_imon=2.05397E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53634E1
cs_ef1b_imon=3.06379E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02171E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05041E1
cs_ea1_imon=2.16278E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04599E0
lens1_imon=1.54868E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6462E1
os_ef1alow_imon=2.99784E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04156E1
cs_ea2_imon=1.57523E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84346E1
cs_ef1a_imon=3.01946E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=4.0853E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11208E1
os_restr1_imon=2.87999E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15541E1
os_ea1_imon=1.88918E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63683E1
os_ef1bup_imon=3.08974E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23322E0
cs_ionrep_imon=1.28571E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91906E2
cs_nozzle_imon=1.93463E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01713E1
cs_anode1_imon=3.29228E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20525E0
olens4_imon=6.90937E-10
tplens_vset=1.4E-1
tplens_vmon=1.62963E0
tplens_imon=-2.17481E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26152E1
iondef3_imon=1.52391E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26866E1
iondef2_imon=1.58868E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0294E2
lens6_imon=2.98413E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=4.03059E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27333E0
ionrepsh_imon=2.01731E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33811E1
lens5b_imon=2.19215E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74435E1
cs_ef2b_imon=3.13154E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.46906E-1
os_ea2_imon=-3.34281E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06125E2
lens4b_imon=2.00722E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71174E1
cs_ef2a_imon=3.18777E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6354E0
os_ef2alow_imon=-2.56184E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.4877E-1
os_ef2bup_imon=-5.27923E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10727E1
os_restr2_imon=2.88323E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.29433E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01899E1
cs_anode2_imon=2.29831E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7313E1
iondef1_imon=1.13033E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67892E1
iondef4_imon=1.09062E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.94446E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8176E-1
olens1_imon=3.51238E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10912E0
cs_ionaccel_imon=-1.97079E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.4736E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56171E1
einzel_imon=7.76713E-6
window_vset=0.0E0
window_vmon=1.98121E-1
window_imon=-9.14827E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82603E2
mask1_imon=2.39257E-4
mask2_vset=0.0E0
mask2_vmon=-1.86722E1
mask2_imon=-5.7245E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92623E3
multa_neg_imon=7.59399E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.67375E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.5763E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48233E0
defgridb_imon=6.08267E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3393E1
os_fil1_imon=5.2988E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.4852E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66111E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30721E1
cs_fil1_imon=1.00875E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62636E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66475E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.14195E-2
os_fil2_imon=-2.20947E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.01958E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.80274E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.2758E-1
cs_fil2_imon=-2.13739E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.20229E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22315E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.41292E-1
res40_imon=-2.65915E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.471E4	1.5E1	1.47E2	4.1E1	-7.44059E-2	-8.80014E1	-6.91414E-4	-8.80003E1	4.52995E-4	5.48363E-3	9.34362E-2	2.73122E1	-3.26909E1	-3.26467E1	2.67589E1	1.73529E-7	2.51334E-3	2.51334E-3	6.30192E-3	1.99283E-1
2.0E0	5.441E3	5.0E0	3.16E2	1.6E2	-7.40967E-2	-8.80013E1	-5.00679E-4	-8.8E1	1.90735E-4	5.38826E-3	9.32455E-2	2.72806E1	-3.2678E1	-3.26438E1	2.68028E1	1.73605E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.00363E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.33239E-2	-8.80012E1	-1.90735E-4	-8.80001E1	2.38419E-4	5.55515E-3	9.34124E-2	2.7308E1	-3.26384E1	-3.26413E1	2.68076E1	1.73528E-7	2.51136E-3	2.51136E-3	6.29067E-3	1.99224E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.286E-2	-8.80014E1	-4.52995E-4	-8.80004E1	3.33786E-4	5.17368E-3	9.36747E-2	2.72859E1	-3.26735E1	-3.26356E1	2.68059E1	1.73531E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.98661E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80015E1	-5.00679E-4	-8.80004E1	6.4373E-4	5.31673E-3	9.36985E-2	2.72961E1	-3.26488E1	-3.26356E1	2.68118E1	1.73531E-7	2.5131E-3	2.5131E-3	6.31817E-3	1.9951E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80014E1	-5.24521E-4	-8.80002E1	1.43051E-4	5.34058E-3	9.33886E-2	2.73039E1	-3.26803E1	-3.25989E1	2.67728E1	1.73454E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.97731E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80013E1	-5.24521E-4	-8.80003E1	5.72205E-4	5.05447E-3	9.34362E-2	2.72973E1	-3.26476E1	-3.2605E1	2.67836E1	1.73379E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.98764E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80013E1	-5.00679E-4	-8.80004E1	3.57628E-4	5.53131E-3	9.34124E-2	2.72672E1	-3.26855E1	-3.2605E1	2.67776E1	1.73379E-7	2.51552E-3	2.51552E-3	6.29645E-3	1.98592E-1
1.2E1	3.2E2	1.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80012E1	-1.66893E-4	-8.80005E1	3.09944E-4	5.26905E-3	9.3174E-2	2.73291E1	-3.26488E1	-3.26536E1	2.68034E1	1.73457E-7	2.51847E-3	2.51847E-3	6.32356E-3	1.97984E-1
1.3E1	1.9E1	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80013E1	-2.14577E-4	-8.80004E1	3.8147E-4	5.36442E-3	9.35555E-2	2.73231E1	-3.2638E1	-3.26452E1	2.67992E1	1.73528E-7	2.51581E-3	2.51581E-3	6.32418E-3	1.98696E-1
1.4E1	6.83E2	0.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80013E1	-2.38419E-4	-8.80008E1	1.19209E-4	5.96046E-3	9.33409E-2	2.72889E1	-3.26573E1	-3.26476E1	2.68575E1	1.73457E-7	2.51739E-3	2.51739E-3	6.3074E-3	1.9917E-1
1.5E1	8.6E1	0.0E0	6.06E2	4.11E2	-7.30146E-2	-8.80013E1	-3.09944E-4	-8.80004E1	1.43051E-4	5.65052E-3	9.3317E-2	2.7265E1	-3.26183E1	-3.26567E1	2.67998E1	1.73605E-7	2.5199E-3	2.5199E-3	6.28552E-3	1.99803E-1
1.6E1	3.133E3	1.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80013E1	-5.24521E-4	-8.80007E1	2.6226E-4	5.8651E-3	9.34362E-2	2.73057E1	-3.27077E1	-3.262E1	2.67896E1	1.73454E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.9911E-1
1.7E1	3.6373E4	1.6E1	6.87E2	4.7E2	-7.24736E-2	-8.80011E1	-3.57628E-4	-8.80006E1	2.14577E-4	5.65052E-3	9.3317E-2	2.73388E1	-3.26499E1	-3.26205E1	2.67932E1	1.73454E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.00151E-1
1.8E1	1.58837E5	7.2E1	7.27E2	5.0E2	-7.30918E-2	-8.80012E1	-4.76837E-4	-8.80003E1	2.86102E-4	5.45979E-3	9.35793E-2	2.73334E1	-3.26579E1	-3.26272E1	2.68163E1	1.73454E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.00499E-1
1.9E1	2.225E3	0.0E0	7.68E2	5.29E2	-7.23189E-2	-8.80011E1	-2.38419E-4	-8.80003E1	2.14577E-4	5.45979E-3	9.35078E-2	2.73216E1	-3.26178E1	-3.26449E1	2.67836E1	1.73383E-7	2.51525E-3	2.51525E-3	6.3074E-3	1.9968E-1
2.0E1	3.06E2	0.0E0	8.08E2	5.58E2	-7.22418E-2	-8.80014E1	-2.86102E-4	-8.80004E1	2.14577E-4	5.67436E-3	9.34839E-2	2.72954E1	-3.2673E1	-3.26338E1	2.68093E1	1.73489E-7	2.51822E-3	2.51822E-3	6.32001E-3	1.99416E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.80013E1	-4.29153E-4	-8.80006E1	3.33786E-4	5.34058E-3	9.33409E-2	2.73001E1	-3.26739E1	-3.26458E1	2.67141E1					
2.2E1	4.7E1	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.80014E1	-6.19888E-4	-8.80006E1	3.09944E-4	5.48363E-3	9.37462E-2	2.73017E1	-3.26678E1	-3.26192E1	2.68065E1	1.73521E-7	2.51528E-3	2.51528E-3	6.31042E-3	1.99442E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.38649E-2	-8.80018E1	-7.15256E-5	-8.80002E1	1.66893E-4	5.45979E-3	9.35316E-2	2.7313E1	-3.26866E1	-3.26152E1	2.67892E1