[Scan]
initial_time=2016-02-16T04:21:47
final_time=2016-02-16T04:22:06
ip_count=19
run=1030
dataset=9
scan=708
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.44831E-2
qbias_imon=-3.86005E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-5.78439E-10
ql2_vset=
ql2_vmon=-2.6226E-4
ql2_imon=3.49748E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.58666E-9
ql4_vset=
ql4_vmon=3.8147E-4
ql4_imon=7.50029E-10
mult1=-9.95712E-9
mult2=-2.80444E-9
rf_tmon=-4.68666E-3
rf_agc=3.33576E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.67436E-3
ql5_imon=3.91603E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6367E0
bslens_imon=1.66896E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20007E1
lens5a_imon=2.01443E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12521E2
lens4a_imon=2.05158E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53454E1
cs_ef1b_imon=3.09334E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04583E2
lens23_imon=1.02485E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0518E1
cs_ea1_imon=2.20442E-5
lens1_vset=-2.7E0
lens1_vmon=-2.9993E0
lens1_imon=1.56802E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64885E1
os_ef1alow_imon=3.0018E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04231E1
cs_ea2_imon=1.54904E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8428E1
cs_ef1a_imon=3.03352E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=3.86441E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=2.86161E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14735E1
os_ea1_imon=1.89367E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63467E1
os_ef1bup_imon=3.09154E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27793E0
cs_ionrep_imon=1.27902E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91858E2
cs_nozzle_imon=1.93528E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01791E1
cs_anode1_imon=3.28832E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=7.08783E-10
tplens_vset=1.4E-1
tplens_vmon=1.70091E0
tplens_imon=-1.08283E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2614E1
iondef3_imon=1.51767E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26819E1
iondef2_imon=1.59302E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02804E2
lens6_imon=2.98598E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=4.26984E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.38128E0
ionrepsh_imon=2.01083E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.32684E1
lens5b_imon=2.20514E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74513E1
cs_ef2b_imon=3.13226E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.65279E-1
os_ea2_imon=-4.0389E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.05948E2
lens4b_imon=2.00551E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71324E1
cs_ef2a_imon=3.18236E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65222E0
os_ef2alow_imon=-2.35281E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.3015E-1
os_ef2bup_imon=-5.26842E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10991E1
os_restr2_imon=2.8771E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.32704E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01419E1
cs_anode2_imon=2.28533E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73051E1
iondef1_imon=1.11103E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68022E1
iondef4_imon=1.11801E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.8991E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81283E-1
olens1_imon=3.47769E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14155E0
cs_ionaccel_imon=-1.92754E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47107E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56177E1
einzel_imon=7.79236E-6
window_vset=0.0E0
window_vmon=2.84016E-1
window_imon=-1.03376E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82644E2
mask1_imon=2.39084E-4
mask2_vset=0.0E0
mask2_vmon=-1.8608E1
mask2_imon=-4.13876E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92664E3
multa_neg_imon=6.17875E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=5.56952E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=8.66257E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4166E0
defgridb_imon=8.56163E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33944E1
os_fil1_imon=4.71015E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.79154E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66104E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30751E1
cs_fil1_imon=1.01013E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6296E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67042E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.30586E-2
os_fil2_imon=-2.16742E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.83939E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.61668E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31335E-1
cs_fil2_imon=-1.89712E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.14823E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22327E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=1.9917E-1
chamber_ion_pmon=1.73531E-7
chamber_cvt_pmon=2.51096E-3
foreline_cvt_pmon=2.51096E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.78513E-1
res40_imon=-2.47534E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=141
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.503E4	1.0E1	1.47E2	4.1E1	-7.40967E-2	-8.80017E1	-3.8147E-4	-8.80003E1	4.29153E-4	5.4121E-3	9.31025E-2	2.72491E1	-3.2659E1	-3.26012E1	2.67532E1	1.73528E-7	2.51136E-3	2.51136E-3	6.32418E-3	1.97294E-1
2.0E0	5.581E3	3.0E0	3.16E2	1.6E2	-7.39421E-2	-8.80016E1	-9.53674E-5	-8.80003E1	6.4373E-4	5.29289E-3	9.3174E-2	2.72237E1	-3.26585E1	-3.26042E1	2.6804E1	1.73532E-7	2.52025E-3	2.52025E-3	6.3074E-3	1.97731E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.44059E-2	-8.80017E1	-6.19888E-4	-8.80003E1	4.52995E-4	5.14984E-3	9.30071E-2	2.73508E1	-3.27101E1	-3.26272E1	2.67926E1	1.73529E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.97903E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.80016E1	-3.8147E-4	-8.80002E1	6.4373E-4	5.43594E-3	9.32932E-2	2.73269E1	-3.26343E1	-3.26178E1	2.68111E1	1.73457E-7	2.51417E-3	2.51417E-3	6.32356E-3	1.9934E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80017E1	-5.00679E-4	-8.80004E1	5.72205E-4	5.29289E-3	9.30071E-2	2.72947E1	-3.2667E1	-3.26334E1	2.67789E1	1.73605E-7	2.51739E-3	2.51739E-3	6.29128E-3	1.99E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.80016E1	-6.19888E-4	-8.80004E1	6.67572E-4	5.79357E-3	9.32217E-2	2.73748E1	-3.26308E1	-3.26248E1	2.67734E1	1.73605E-7	2.51359E-3	2.51359E-3	6.33538E-3	1.99754E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80013E1	-5.24521E-4	-8.8E1	6.4373E-4	5.38826E-3	9.31978E-2	2.73033E1	-3.26693E1	-3.2644E1	2.68154E1	1.73529E-7	2.51552E-3	2.51552E-3	6.29098E-3	2.00151E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.35556E-2	-8.80014E1	-4.05312E-4	-8.80002E1	5.24521E-4	5.50747E-3	9.32693E-2	2.72827E1	-3.26166E1	-3.26461E1	2.68204E1	1.73528E-7	2.51025E-3	2.51025E-3	6.31299E-3	2.00818E-1
1.2E1	3.29E2	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.80013E1	-2.6226E-4	-8.80001E1	1.19209E-4	5.19753E-3	9.33886E-2	2.73027E1	-3.26506E1	-3.26038E1	2.67746E1	1.73605E-7	2.51393E-3	2.51393E-3	6.3074E-3	2.00231E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.80016E1	-2.6226E-4	-8.80003E1	1.90735E-4	4.91142E-3	9.31978E-2	2.72703E1	-3.26349E1	-3.2603E1	2.67818E1	1.73454E-7	2.51552E-3	2.51552E-3	6.34037E-3	2.00673E-1
1.4E1	6.56E2	0.0E0	5.66E2	3.82E2	-7.42513E-2	-8.80015E1	-1.66893E-4	-8.80004E1	7.15256E-5	5.05447E-3	9.33886E-2	2.73237E1	-3.26873E1	-3.25689E1	2.68665E1	1.73457E-7	2.52169E-3	2.52169E-3	6.30202E-3	1.9934E-1
1.5E1	6.0E1	1.0E0	6.06E2	4.11E2	-7.38649E-2	-8.80018E1	-4.76837E-4	-8.80006E1	3.33786E-4	5.34058E-3	9.34362E-2	2.73273E1	-3.27059E1	-3.26771E1	2.68064E1	1.73605E-7	2.51693E-3	2.51693E-3	6.31299E-3	1.97994E-1
1.6E1	3.087E3	0.0E0	6.47E2	4.41E2	-7.35556E-2	-8.80015E1	-3.09944E-4	-8.80004E1	4.29153E-4	5.53131E-3	9.33409E-2	2.73523E1	-3.26903E1	-3.25877E1	2.68106E1	1.73531E-7	2.52169E-3	2.52169E-3	6.32356E-3	1.98322E-1
1.7E1	3.654E4	1.4E1	6.87E2	4.7E2	-7.31692E-2	-8.80014E1	-2.86102E-4	-8.80003E1	5.00679E-4	5.6982E-3	9.32217E-2	2.7311E1	-3.26697E1	-3.2606E1	2.67937E1	1.73379E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.98764E-1
1.8E1	1.59343E5	8.3E1	7.27E2	5.0E2	-7.30918E-2	-8.80013E1	-4.29153E-4	-8.80005E1	5.00679E-4	5.29289E-3	9.30786E-2	2.72935E1	-3.26395E1	-3.26309E1	2.68154E1	1.73531E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.9968E-1
1.9E1	2.122E3	0.0E0	7.68E2	5.29E2	-7.35556E-2	-8.80015E1	-7.15256E-4	-8.80004E1	4.52995E-4	5.62668E-3	9.33409E-2	2.73237E1	-3.26615E1	-3.2593E1	2.6804E1	1.73567E-7	2.51007E-3	2.51007E-3	6.32386E-3	1.9911E-1
2.0E1	2.9E2	1.0E0	8.08E2	5.58E2	-7.32464E-2	-8.80016E1	-5.24521E-4	-8.80004E1	4.76837E-4	5.57899E-3	9.32932E-2	2.72955E1	-3.27041E1	-3.25942E1	2.67788E1					
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.39421E-2	-8.80016E1	-3.8147E-4	-8.80005E1	3.57628E-4	5.26905E-3	9.31263E-2	2.7278E1	-3.27068E1	-3.26714E1	2.67824E1	1.73529E-7	2.51116E-3	2.51116E-3	6.31288E-3	1.99283E-1
2.2E1	3.8E1	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.80015E1	-6.91414E-4	-8.80004E1	2.38419E-4	5.29289E-3	9.28164E-2	2.73086E1	-3.26714E1	-3.25818E1	2.68354E1	1.73679E-7	2.5131E-3	2.5131E-3	6.32356E-3	1.98322E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.44831E-2	-8.80015E1	-2.6226E-4	-8.80003E1	3.8147E-4	5.67436E-3	9.35555E-2	2.73051E1	-3.26819E1	-3.2614E1	2.68022E1	1.73531E-7	2.51096E-3	2.51096E-3	6.29665E-3	1.9917E-1