[Scan]
initial_time=2016-02-16T04:23:06
final_time=2016-02-16T04:23:26
ip_count=19
run=1030
dataset=9
scan=711
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.78072E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-5.67651E-10
ql2_vset=
ql2_vmon=2.38419E-5
ql2_imon=3.83008E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.63516E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=7.57217E-10
mult1=-9.68382E-9
mult2=-2.7809E-9
rf_tmon=-4.60731E-3
rf_agc=3.36467E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=4.16327E-10
bslens_vset=-6.2E0
bslens_vmon=-6.70453E0
bslens_imon=2.75366E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19498E1
lens5a_imon=1.98149E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12533E2
lens4a_imon=2.04944E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53511E1
cs_ef1b_imon=3.07183E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.0225E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04727E1
cs_ea1_imon=2.17894E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01801E0
lens1_imon=1.51961E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64272E1
os_ef1alow_imon=2.98912E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04241E1
cs_ea2_imon=1.5786E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84081E1
cs_ef1a_imon=3.02144E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=3.79193E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11303E1
os_restr1_imon=2.87235E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15491E1
os_ea1_imon=1.87581E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63265E1
os_ef1bup_imon=3.09477E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21096E0
cs_ionrep_imon=1.25878E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91902E2
cs_nozzle_imon=1.93403E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01601E1
cs_anode1_imon=3.27687E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=7.48312E-10
tplens_vset=1.4E-1
tplens_vmon=1.62173E0
tplens_imon=-1.28111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26499E1
iondef3_imon=1.50699E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26591E1
iondef2_imon=1.59702E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02966E2
lens6_imon=2.98547E-4
ql6_vset=1.0E-1
ql6_vmon=9.29356E-2
ql6_imon=3.8805E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26832E0
ionrepsh_imon=2.02842E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33779E1
lens5b_imon=2.19145E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75608E1
cs_ef2b_imon=3.13856E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.39364E-1
os_ea2_imon=-3.26254E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0614E2
lens4b_imon=2.00748E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71061E1
cs_ef2a_imon=3.18374E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62855E0
os_ef2alow_imon=-2.60238E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.58424E-1
os_ef2bup_imon=-5.27138E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10747E1
os_restr2_imon=2.89147E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23084E2
cs_ionfoca_imon=6.31944E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01775E1
cs_anode2_imon=2.27948E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72959E1
iondef1_imon=1.11174E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68126E1
iondef4_imon=1.08642E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.90099E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81879E-1
olens1_imon=3.42476E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1342E0
cs_ionaccel_imon=-1.93514E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47188E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56185E1
einzel_imon=7.74692E-6
window_vset=0.0E0
window_vmon=2.24636E-1
window_imon=-1.01072E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39216E-4
mask2_vset=0.0E0
mask2_vmon=-1.86159E1
mask2_imon=-5.38084E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92661E3
multa_neg_imon=7.80111E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93745E3
defgrida_imon=6.49754E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50154E3
multb_neg_imon=7.32835E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42971E0
defgridb_imon=6.28201E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33943E1
os_fil1_imon=5.52662E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.72761E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66517E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30767E1
cs_fil1_imon=1.00882E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62725E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66557E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20775E-2
os_fil2_imon=-2.35062E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.16117E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.76712E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3115E-1
cs_fil2_imon=-2.17107E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.12463E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22337E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3126E-3
inlet_lpb_pmon=1.97975E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51265E-3
foreline_cvt_pmon=2.51265E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.8837E-1
res40_imon=-2.46337E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4655E4	1.2E1	1.47E2	4.1E1	-7.34782E-2	-8.80017E1	-6.19888E-4	-8.80007E1	7.39098E-4	6.05583E-3	9.33886E-2	2.73231E1	-3.26399E1	-3.2659E1	2.68151E1	1.73532E-7	2.51498E-3	2.51498E-3	6.32858E-3	1.99227E-1
2.0E0	5.467E3	3.0E0	3.16E2	1.6E2	-7.37874E-2	-8.80018E1	-8.82149E-4	-8.80003E1	5.00679E-4	5.53131E-3	9.31978E-2	2.73112E1	-3.26634E1	-3.26144E1	2.68045E1	1.73532E-7	2.51709E-3	2.51709E-3	6.32858E-3	1.98727E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.45602E-2	-8.80016E1	-5.72205E-4	-8.80005E1	5.00679E-4	5.43594E-3	9.34362E-2	2.73219E1	-3.26573E1	-3.26296E1	2.6783E1	1.73451E-7	2.51804E-3	2.51804E-3	6.31299E-3	1.99048E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.40192E-2	-8.80016E1	-3.57628E-4	-8.80001E1	3.09944E-4	5.43594E-3	9.32932E-2	2.73147E1	-3.26506E1	-3.26398E1	2.67878E1	1.73529E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.99283E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37874E-2	-8.80019E1	-3.57628E-4	-8.80004E1	4.52995E-4	5.43594E-3	9.35316E-2	2.7298E1	-3.26537E1	-3.26124E1	2.6785E1	1.73605E-7	2.51007E-3	2.51007E-3	6.31288E-3	1.99803E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.44831E-2	-8.80016E1	-4.76837E-4	-8.80005E1	5.48363E-4	5.26905E-3	9.31978E-2	2.73021E1	-3.26434E1	-3.26567E1	2.67956E1	1.73605E-7	2.51096E-3	2.51096E-3	6.31817E-3	1.9934E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.38649E-2	-8.80016E1	-3.57628E-4	-8.80004E1	2.86102E-4	5.43594E-3	9.3317E-2	2.72929E1	-3.26805E1	-3.26095E1	2.67914E1	1.73528E-7	2.52063E-3	2.52063E-3	6.30464E-3	1.99167E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37103E-2	-8.80018E1	-4.29153E-4	-8.80003E1	4.52995E-4	5.88894E-3	9.34362E-2	2.72927E1	-3.26461E1	-3.2626E1	2.6796E1					
1.2E1	2.98E2	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.80018E1	-5.24521E-4	-8.80004E1	4.52995E-4	5.17368E-3	9.35555E-2	2.73237E1	-3.2647E1	-3.26344E1	2.67505E1	1.73605E-7	2.51632E-3	2.51632E-3	6.29128E-3	1.9968E-1
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.80019E1	-3.09944E-4	-8.80005E1	3.57628E-4	5.17368E-3	9.34839E-2	2.73045E1	-3.2653E1	-3.25906E1	2.67974E1	1.73379E-7	2.51552E-3	2.51552E-3	6.30192E-3	1.99803E-1
1.4E1	6.59E2	0.0E0	5.66E2	3.82E2	-7.30918E-2	-8.80017E1	-5.00679E-4	-8.80006E1	1.43051E-4	5.45979E-3	9.34362E-2	2.73003E1	-3.26464E1	-3.265E1	2.67097E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.99283E-1
1.5E1	7.1E1	0.0E0	6.06E2	4.11E2	-7.26282E-2	-8.80015E1	-2.86102E-4	-8.80004E1	0.0E0	5.93662E-3	9.30071E-2	2.71663E1	-3.2611E1	-3.2772E1	2.67926E1	1.73605E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.00325E-1
1.6E1	3.062E3	2.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80018E1	-2.38419E-5	-8.80006E1	9.53674E-5	5.67436E-3	9.30071E-2	2.73141E1	-3.26609E1	-3.26122E1	2.6774E1	1.73454E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.99283E-1
1.7E1	3.6193E4	1.6E1	6.87E2	4.7E2	-7.23964E-2	-8.80018E1	-1.66893E-4	-8.80003E1	3.09944E-4	5.36442E-3	9.32693E-2	2.72898E1	-3.26561E1	-3.25971E1	2.67944E1	1.73454E-7	2.51662E-3	2.51662E-3	6.34037E-3	2.00325E-1
1.8E1	1.58745E5	1.0E2	7.27E2	5.0E2	-7.23189E-2	-8.80019E1	1.43051E-4	-8.80003E1	6.67572E-4	5.4121E-3	9.32932E-2	2.73237E1	-3.26398E1	-3.25809E1	2.67649E1	1.73457E-7	2.51417E-3	2.51417E-3	6.29665E-3	2.00534E-1
1.9E1	2.166E3	1.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80018E1	2.38419E-4	-8.80002E1	5.48363E-4	5.26905E-3	9.29594E-2	2.73213E1	-3.26729E1	-3.26062E1	2.68028E1	1.73529E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.00325E-1
2.0E1	3.22E2	0.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80016E1	-2.14577E-4	-8.80008E1	5.48363E-4	5.50747E-3	9.34839E-2	2.73177E1	-3.26819E1	-3.26176E1	2.67938E1	1.73454E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.98764E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.80018E1	-1.43051E-4	-8.80001E1	4.52995E-4	5.00679E-3	9.32932E-2	2.73275E1	-3.26891E1	-3.26231E1	2.67723E1	1.73454E-7	2.51225E-3	2.51225E-3	6.3074E-3	1.98937E-1
2.2E1	4.6E1	0.0E0	8.89E2	6.17E2	-7.26282E-2	-8.80014E1	-1.66893E-4	-8.80003E1	4.05312E-4	5.19753E-3	9.30071E-2	2.73267E1	-3.26402E1	-3.26345E1	2.68094E1	1.73531E-7	2.51632E-3	2.51632E-3	6.32896E-3	1.98661E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80019E1	2.38419E-5	-8.80003E1	3.57628E-4	5.14984E-3	9.29356E-2	2.72959E1	-3.26591E1	-3.26499E1	2.68126E1	1.73605E-7	2.51265E-3	2.51265E-3	6.3126E-3	1.97975E-1