[Scan]
initial_time=2016-02-16T04:23:33
final_time=2016-02-16T04:23:52
ip_count=19
run=1030
dataset=9
scan=712
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.83864E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-6.00564E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=3.66271E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.69252E-9
ql4_vset=
ql4_vmon=4.76837E-4
ql4_imon=7.85172E-10
mult1=-1.02441E-8
mult2=-2.82321E-9
rf_tmon=-5.24095E-3
rf_agc=3.32678E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=3.97074E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64543E0
bslens_imon=2.778E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19967E1
lens5a_imon=1.99713E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.05246E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53372E1
cs_ef1b_imon=3.08226E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.02416E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04895E1
cs_ea1_imon=2.19666E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03887E0
lens1_imon=1.55437E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6444E1
os_ef1alow_imon=2.99781E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03934E1
cs_ea2_imon=1.57755E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84249E1
cs_ef1a_imon=3.02075E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=3.75736E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=2.89286E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15259E1
os_ea1_imon=1.90119E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63548E1
os_ef1bup_imon=3.09303E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22892E0
cs_ionrep_imon=1.25705E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91901E2
cs_nozzle_imon=1.93545E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01583E1
cs_anode1_imon=3.28973E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=7.42996E-10
tplens_vset=1.4E-1
tplens_vmon=1.67214E0
tplens_imon=-1.42016E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26119E1
iondef3_imon=1.49412E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26531E1
iondef2_imon=1.57721E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02932E2
lens6_imon=2.98676E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=3.84903E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28454E0
ionrepsh_imon=2.01347E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33629E1
lens5b_imon=2.19771E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74519E1
cs_ef2b_imon=3.14342E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.63697E-1
os_ea2_imon=-2.01111E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00463E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71206E1
cs_ef2a_imon=3.18791E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63898E0
os_ef2alow_imon=-2.446E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.6827E-1
os_ef2bup_imon=-5.26443E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10816E1
os_restr2_imon=2.86957E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23094E2
cs_ionfoca_imon=6.31527E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01763E1
cs_anode2_imon=2.28886E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7275E1
iondef1_imon=1.11904E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67937E1
iondef4_imon=1.08573E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.9209E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81832E-1
olens1_imon=3.22461E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13593E0
cs_ionaccel_imon=-1.93514E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47351E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55953E1
einzel_imon=7.83033E-6
window_vset=0.0E0
window_vmon=1.91621E-1
window_imon=-9.93342E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.39129E-4
mask2_vset=0.0E0
mask2_vmon=-1.86344E1
mask2_imon=-5.65886E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.40135E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.51839E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.26578E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46741E0
defgridb_imon=6.29939E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33946E1
os_fil1_imon=4.97058E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.61177E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66448E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30772E1
cs_fil1_imon=1.00868E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62447E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66398E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.12069E-2
os_fil2_imon=-2.42592E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.74038E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.66645E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31774E-1
cs_fil2_imon=-2.24057E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01458E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2235E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30197E-3
inlet_lpb_pmon=2.00603E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51214E-3
foreline_cvt_pmon=2.51214E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.20023E-1
res40_imon=-2.57458E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4613E4	1.8E1	1.47E2	4.1E1	-7.30146E-2	-8.80016E1	-2.14577E-4	-8.80002E1	4.29153E-4	5.48363E-3	9.32217E-2	2.7334E1	-3.26596E1	-3.26508E1	2.67833E1	1.73605E-7	2.50867E-3	2.50867E-3	6.31798E-3	1.98063E-1
2.0E0	5.383E3	5.0E0	3.16E2	1.6E2	-7.27053E-2	-8.80017E1	-4.76837E-4	-8.80006E1	6.4373E-4	5.76973E-3	9.33886E-2	2.73165E1	-3.26729E1	-3.26362E1	2.6771E1	1.73531E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.9731E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.35556E-2	-8.80015E1	-3.09944E-4	-8.8E1	2.38419E-4	5.76973E-3	9.3317E-2	2.73069E1	-3.26697E1	-3.26284E1	2.67962E1	1.73529E-7	2.50898E-3	2.50898E-3	6.31288E-3	1.98075E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-7.3401E-2	-8.80014E1	-4.76837E-5	-8.80003E1	5.24521E-4	5.31673E-3	9.32932E-2	2.73177E1	-3.26585E1	-3.26302E1	2.68142E1	1.73457E-7	2.51525E-3	2.51525E-3	6.30202E-3	1.99E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80016E1	-9.53674E-5	-8.80004E1	5.48363E-4	5.53131E-3	9.33409E-2	2.73051E1	-3.26705E1	-3.26074E1	2.67812E1	1.73529E-7	2.52538E-3	2.52538E-3	6.3074E-3	1.98764E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80015E1	-7.15256E-5	-8.80004E1	7.86781E-4	5.84126E-3	9.32932E-2	2.7298E1	-3.26579E1	-3.26278E1	2.67781E1	1.73457E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.9968E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80013E1	-2.14577E-4	-8.80005E1	6.4373E-4	5.4121E-3	9.32932E-2	2.72865E1	-3.26585E1	-3.26188E1	2.67995E1	1.73379E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.98075E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80015E1	-4.76837E-5	-8.80004E1	5.72205E-4	5.24521E-3	9.33647E-2	2.73207E1	-3.26777E1	-3.26092E1	2.67868E1	1.73374E-7	2.51915E-3	2.51915E-3	6.32418E-3	1.98344E-1
1.2E1	3.74E2	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80017E1	-1.66893E-4	-8.80005E1	6.19888E-4	5.4121E-3	9.34124E-2	2.72991E1	-3.26591E1	-3.26416E1	2.67938E1	1.73531E-7	2.51632E-3	2.51632E-3	6.32896E-3	1.97478E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.80014E1	-9.53674E-5	-8.80003E1	7.86781E-4	5.4121E-3	9.29594E-2	2.73063E1	-3.26675E1	-3.26128E1	2.68124E1	1.73379E-7	2.51116E-3	2.51116E-3	6.29645E-3	1.97731E-1
1.4E1	7.06E2	3.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80016E1	-2.86102E-4	-8.80002E1	2.38419E-4	5.72205E-3	9.32693E-2	2.73075E1	-3.26945E1	-3.26392E1	2.68208E1	1.73605E-7	2.51007E-3	2.51007E-3	6.30192E-3	1.98592E-1
1.5E1	5.6E1	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80013E1	-2.86102E-4	-8.80008E1	3.09944E-4	5.6982E-3	9.32217E-2	2.74066E1	-3.276E1	-3.25197E1	2.67854E1	1.73379E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.9963E-1
1.6E1	3.057E3	1.0E0	6.47E2	4.41E2	-7.286E-2	-8.80016E1	-2.6226E-4	-8.80007E1	3.57628E-4	5.22137E-3	9.36031E-2	2.73393E1	-3.26579E1	-3.26416E1	2.67968E1	1.73529E-7	2.51116E-3	2.51116E-3	6.33486E-3	1.98075E-1
1.7E1	3.6528E4	1.7E1	6.87E2	4.7E2	-7.27053E-2	-8.80016E1	-5.48363E-4	-8.80007E1	2.6226E-4	5.24521E-3	9.32693E-2	2.73234E1	-3.26296E1	-3.26024E1	2.67878E1	1.73379E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.99456E-1
1.8E1	1.58488E5	8.0E1	7.27E2	5.0E2	-7.25507E-2	-8.80015E1	-3.09944E-4	-8.80008E1	3.09944E-4	5.45979E-3	9.35078E-2	2.72849E1	-3.26578E1	-3.26058E1	2.68112E1	1.73531E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.01047E-1
1.9E1	2.176E3	5.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80013E1	-1.19209E-4	-8.80005E1	1.66893E-4	5.34058E-3	9.32932E-2	2.73291E1	-3.26615E1	-3.25972E1	2.67974E1	1.73451E-7	2.52027E-3	2.52027E-3	6.31858E-3	2.00285E-1
2.0E1	3.18E2	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80013E1	-3.09944E-4	-8.80005E1	3.57628E-4	5.48363E-3	9.36031E-2	2.72929E1	-3.26683E1	-3.2622E1	2.67978E1	1.73457E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.00192E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80012E1	-4.76837E-4	-8.80004E1	5.72205E-4	5.19753E-3	9.33647E-2	2.72965E1	-3.2678E1	-3.26095E1	2.68057E1	1.73531E-7	2.51096E-3	2.51096E-3	6.3074E-3	2.00534E-1
2.2E1	4.1E1	0.0E0	8.89E2	6.17E2	-7.36328E-2	-8.80013E1	-6.4373E-4	-8.80003E1	3.8147E-4	5.60284E-3	9.32693E-2	2.72973E1	-3.2653E1	-3.26314E1	2.68172E1	1.73298E-7	2.51581E-3	2.51581E-3	6.3074E-3	2.00285E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80013E1	-6.19888E-4	-8.80003E1	4.76837E-4	5.19753E-3	9.32455E-2	2.7275E1	-3.26531E1	-3.26119E1	2.67937E1	1.73605E-7	2.51214E-3	2.51214E-3	6.30197E-3	2.00603E-1