[Scan]
initial_time=2016-02-16T04:25:46
final_time=2016-02-16T04:26:06
ip_count=19
run=1030
dataset=9
scan=717
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.40192E-2
qbias_imon=-3.82704E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-5.81312E-10
ql2_vset=
ql2_vmon=-2.14577E-4
ql2_imon=3.91185E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.69317E-9
ql4_vset=
ql4_vmon=5.96046E-4
ql4_imon=7.66647E-10
mult1=-1.06555E-8
mult2=-2.71661E-9
rf_tmon=-5.56988E-3
rf_agc=3.24864E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=3.54493E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6408E0
bslens_imon=2.76409E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19932E1
lens5a_imon=1.99087E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12511E2
lens4a_imon=2.05215E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5358E1
cs_ef1b_imon=3.07809E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02124E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05052E1
cs_ea1_imon=2.18936E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0099E0
lens1_imon=1.52656E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64713E1
os_ef1alow_imon=2.99295E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0398E1
cs_ea2_imon=1.56643E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84064E1
cs_ef1a_imon=3.02005E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=3.77452E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11239E1
os_restr1_imon=2.8807E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15161E1
os_ea1_imon=1.8925E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.10276E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26369E0
cs_ionrep_imon=1.29007E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91871E2
cs_nozzle_imon=1.93521E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02006E1
cs_anode1_imon=3.28104E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=6.98757E-10
tplens_vset=1.4E-1
tplens_vmon=1.60493E0
tplens_imon=-1.76778E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26158E1
iondef3_imon=1.50907E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26723E1
iondef2_imon=1.58311E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98718E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=3.80373E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30308E0
ionrepsh_imon=2.01625E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33965E1
lens5b_imon=2.20223E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74252E1
cs_ef2b_imon=3.14203E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.65435E-1
os_ea2_imon=-3.47112E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.00859E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70945E1
cs_ef2a_imon=3.19034E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63666E0
os_ef2alow_imon=-2.56068E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.52053E-1
os_ef2bup_imon=-5.20882E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10602E1
os_restr2_imon=2.87722E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.30415E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01722E1
cs_anode2_imon=2.29164E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73093E1
iondef1_imon=1.09227E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67604E1
iondef4_imon=1.10866E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.82687E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81832E-1
olens1_imon=3.53503E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12261E0
cs_ionaccel_imon=-1.96294E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47417E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56405E1
einzel_imon=7.80252E-6
window_vset=0.0E0
window_vmon=2.02626E-1
window_imon=-1.04547E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82614E2
mask1_imon=2.39108E-4
mask2_vset=0.0E0
mask2_vmon=-1.86414E1
mask2_imon=-5.51985E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.57516E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.77216E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.31792E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.58051E0
defgridb_imon=6.18468E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33943E1
os_fil1_imon=4.86632E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.06152E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66439E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30797E1
cs_fil1_imon=1.00955E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63217E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66301E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.19531E-2
os_fil2_imon=-2.4375E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.98741E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.77085E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29527E-1
cs_fil2_imon=-2.13052E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0725E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22377E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=1.99E-1
chamber_ion_pmon=1.73531E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.38761E-1
res40_imon=-2.62324E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4623E4	2.3E1	1.47E2	4.1E1	-7.30918E-2	-8.80017E1	-2.86102E-4	-8.80001E1	4.05312E-4	5.84126E-3	9.33647E-2	2.73045E1	-3.26909E1	-3.26119E1	2.67776E1					
2.0E0	5.455E3	6.0E0	3.16E2	1.6E2	-7.32464E-2	-8.80018E1	-1.90735E-4	-8.80003E1	3.57628E-4	5.67436E-3	9.35316E-2	2.73002E1	-3.2645E1	-3.26236E1	2.68028E1	1.73383E-7	2.50989E-3	2.50989E-3	6.31278E-3	1.9917E-1
3.0E0	7.0E0	0.0E0	4.85E2	2.79E2	-7.36328E-2	-8.80018E1	-1.19209E-4	-8.80002E1	5.24521E-4	5.79357E-3	9.32217E-2	2.72691E1	-3.26638E1	-3.26325E1	2.68112E1	1.73605E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.99283E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.33239E-2	-8.80017E1	-7.15256E-4	-8.80001E1	7.39098E-4	5.55515E-3	9.32217E-2	2.7288E1	-3.26514E1	-3.26425E1	2.68094E1	1.73418E-7	2.51484E-3	2.51484E-3	6.32916E-3	1.99569E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80016E1	-2.6226E-4	-8.80003E1	8.10623E-4	5.53131E-3	9.32693E-2	2.73003E1	-3.2647E1	-3.26476E1	2.67824E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80015E1	-3.09944E-4	-8.80004E1	8.58307E-4	5.38826E-3	9.34839E-2	2.73345E1	-3.26523E1	-3.26083E1	2.68038E1	1.73605E-7	2.51116E-3	2.51116E-3	6.31288E-3	1.99803E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80016E1	-2.14577E-4	-8.80001E1	5.72205E-4	5.45979E-3	9.34124E-2	2.72955E1	-3.26591E1	-3.26404E1	2.6804E1	1.73454E-7	2.51225E-3	2.51225E-3	6.31837E-3	1.99283E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80017E1	0.0E0	-8.80003E1	5.00679E-4	5.38826E-3	9.32217E-2	2.72685E1	-3.26236E1	-3.26095E1	2.68024E1	1.73451E-7	2.5147E-3	2.5147E-3	6.33538E-3	2.00285E-1
1.2E1	3.2E2	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80016E1	-5.96046E-4	-8.80002E1	6.4373E-4	5.19753E-3	9.32455E-2	2.73147E1	-3.26903E1	-3.25984E1	2.67758E1	1.73605E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.00021E-1
1.3E1	2.2E1	0.0E0	5.25E2	3.53E2	-7.37103E-2	-8.80018E1	0.0E0	-8.80005E1	7.15256E-4	5.62668E-3	9.34124E-2	2.73357E1	-3.26212E1	-3.26122E1	2.67956E1	1.73529E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.99456E-1
1.4E1	6.57E2	2.0E0	5.66E2	3.82E2	-7.3401E-2	-8.80016E1	-6.4373E-4	-8.80001E1	5.72205E-4	5.26905E-3	9.33886E-2	2.73586E1	-3.26735E1	-3.26134E1	2.6816E1	1.73457E-7	2.51525E-3	2.51525E-3	6.32896E-3	1.98661E-1
1.5E1	7.1E1	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80018E1	-2.38419E-4	-8.80001E1	5.96046E-4	5.53131E-3	9.32932E-2	2.73812E1	-3.27166E1	-3.25785E1	2.6773E1	1.73454E-7	2.51116E-3	2.51116E-3	6.31288E-3	1.98764E-1
1.6E1	3.163E3	3.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80017E1	-2.6226E-4	-8.80003E1	8.82149E-4	4.91142E-3	9.31978E-2	2.73259E1	-3.26481E1	-3.26429E1	2.67998E1	1.73319E-7	2.51265E-3	2.51265E-3	6.3074E-3	1.99447E-1
1.7E1	3.6529E4	1.3E1	6.87E2	4.7E2	-7.25507E-2	-8.80017E1	-4.76837E-4	-8.80005E1	4.05312E-4	5.45979E-3	9.34601E-2	2.72812E1	-3.26539E1	-3.26044E1	2.67804E1	1.73525E-7	2.51642E-3	2.51642E-3	6.32483E-3	1.99283E-1
1.8E1	1.57541E5	1.07E2	7.27E2	5.0E2	-7.17007E-2	-8.80017E1	-5.24521E-4	-8.80005E1	5.96046E-4	5.126E-3	9.33886E-2	2.73382E1	-3.26117E1	-3.26273E1	2.67932E1	1.73462E-7	2.51369E-3	2.51369E-3	6.3074E-3	1.98301E-1
1.9E1	2.182E3	1.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80013E1	-1.19209E-4	-8.80002E1	6.91414E-4	5.53131E-3	9.33647E-2	2.72739E1	-3.2647E1	-3.2623E1	2.681E1	1.73605E-7	2.51642E-3	2.51642E-3	6.31321E-3	1.98734E-1
2.0E1	2.9E2	0.0E0	8.08E2	5.58E2	-7.23964E-2	-8.80016E1	-5.00679E-4	-8.80004E1	3.09944E-4	5.65052E-3	9.33886E-2	2.73022E1	-3.26474E1	-3.26185E1	2.68017E1	1.73605E-7	2.52169E-3	2.52169E-3	6.29665E-3	1.9968E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.80015E1	-4.76837E-5	-8.80003E1	3.8147E-4	5.22137E-3	9.35555E-2	2.72648E1	-3.26849E1	-3.25828E1	2.67929E1	1.73605E-7	2.51954E-3	2.51954E-3	6.31817E-3	1.99E-1
2.2E1	4.3E1	0.0E0	8.89E2	6.17E2	-7.40967E-2	-8.80015E1	0.0E0	-8.80001E1	3.09944E-4	5.19753E-3	9.3317E-2	2.72833E1	-3.26573E1	-3.26408E1	2.67528E1	1.73529E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.99977E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.40192E-2	-8.80016E1	-2.14577E-4	-8.80001E1	5.96046E-4	5.45979E-3	9.31978E-2	2.73093E1	-3.26723E1	-3.26158E1	2.67604E1	1.73531E-7	2.51739E-3	2.51739E-3	6.32896E-3	1.99E-1