[Scan]
initial_time=2016-02-16T04:26:39
final_time=2016-02-16T04:26:59
ip_count=19
run=1030
dataset=9
scan=719
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.76844E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-6.62899E-10
ql2_vset=
ql2_vmon=-8.34465E-4
ql2_imon=3.70622E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.70966E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=8.28815E-10
mult1=-9.38114E-9
mult2=-2.80361E-9
rf_tmon=-3.61872E-3
rf_agc=3.41232E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.8651E-3
ql5_imon=3.99137E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65972E0
bslens_imon=2.59281E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19807E1
lens5a_imon=1.96917E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.05203E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53682E1
cs_ef1b_imon=3.06487E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.02241E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05059E1
cs_ea1_imon=2.19817E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02534E0
lens1_imon=1.51329E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64795E1
os_ef1alow_imon=3.00504E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03743E1
cs_ea2_imon=1.59151E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84382E1
cs_ef1a_imon=3.0209E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=3.63195E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1131E1
os_restr1_imon=2.86665E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15311E1
os_ea1_imon=1.90015E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63599E1
os_ef1bup_imon=3.09406E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26095E0
cs_ionrep_imon=1.25739E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.93625E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01689E1
cs_anode1_imon=3.29841E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20525E0
olens4_imon=7.48551E-10
tplens_vset=1.4E-1
tplens_vmon=1.62728E0
tplens_imon=-1.67929E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26071E1
iondef3_imon=1.51259E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26974E1
iondef2_imon=1.59187E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02985E2
lens6_imon=2.98572E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=3.84438E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25859E0
ionrepsh_imon=2.04562E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33386E1
lens5b_imon=2.19605E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74814E1
cs_ef2b_imon=3.13082E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.88199E-1
os_ea2_imon=-4.617E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00619E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7136E1
cs_ef2a_imon=3.20038E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61317E0
os_ef2alow_imon=-2.45012E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.5718E-1
os_ef2bup_imon=-5.19634E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10823E1
os_restr2_imon=2.8771E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.30848E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01905E1
cs_anode2_imon=2.30083E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7298E1
iondef1_imon=1.11228E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6795E1
iondef4_imon=1.11476E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.99493E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=3.26431E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10071E0
cs_ionaccel_imon=-2.00323E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02051E2
cs_ionfocb_imon=1.47388E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56429E1
einzel_imon=7.81758E-6
window_vset=0.0E0
window_vmon=2.26352E-1
window_imon=-9.40055E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39167E-4
mask2_vset=0.0E0
mask2_vmon=-1.86332E1
mask2_imon=-5.65243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.43118E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.80117E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.48781E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.67132E0
defgridb_imon=6.18177E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33931E1
os_fil1_imon=5.34685E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.14883E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6676E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30798E1
cs_fil1_imon=1.00793E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63111E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66867E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25591E-2
os_fil2_imon=-2.35362E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.50011E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.54077E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-2.10135E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.24434E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22353E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.99E-1
chamber_ion_pmon=1.73309E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.93239E-1
res40_imon=-2.57626E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4589E4	1.7E1	1.47E2	4.1E1	-7.26282E-2	-8.80016E1	-5.48363E-4	-8.80005E1	3.8147E-4	5.65052E-3	9.32455E-2	2.72974E1	-3.26726E1	-3.26402E1	2.6781E1	1.73531E-7	2.50561E-3	2.50561E-3	6.3074E-3	1.99E-1
2.0E0	5.469E3	7.0E0	3.16E2	1.6E2	-7.31692E-2	-8.80013E1	-3.33786E-4	-8.80003E1	4.52995E-4	5.14984E-3	9.27448E-2	2.72949E1	-3.26975E1	-3.26194E1	2.67968E1	1.73605E-7	2.51662E-3	2.51662E-3	6.28552E-3	1.99456E-1
3.0E0	7.0E0	1.0E0	4.85E2	2.79E2	-7.286E-2	-8.80019E1	-1.19209E-4	-8.79998E1	2.14577E-4	5.60284E-3	9.30309E-2	2.7266E1	-3.27029E1	-3.26176E1	2.67752E1	1.73454E-7	2.52099E-3	2.52099E-3	6.34037E-3	1.9963E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27828E-2	-8.80016E1	-3.33786E-4	-8.79998E1	3.09944E-4	5.48363E-3	9.3174E-2	2.73051E1	-3.26402E1	-3.26366E1	2.67824E1	1.73303E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.99456E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80018E1	-4.52995E-4	-8.79998E1	5.00679E-4	5.79357E-3	9.33409E-2	2.72901E1	-3.26729E1	-3.26194E1	2.68076E1	1.73605E-7	2.51814E-3	2.51814E-3	6.2863E-3	1.99061E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80015E1	-2.86102E-4	-8.79998E1	3.57628E-4	5.67436E-3	9.34362E-2	2.7298E1	-3.26585E1	-3.26006E1	2.68169E1	1.73454E-7	2.52099E-3	2.52099E-3	6.29645E-3	2.00325E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.8002E1	-4.05312E-4	-8.79999E1	3.8147E-4	5.48363E-3	9.3317E-2	2.73075E1	-3.26783E1	-3.259E1	2.67944E1	1.73454E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.00325E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80019E1	-3.8147E-4	-8.80004E1	3.57628E-4	5.60284E-3	9.33886E-2	2.72955E1	-3.26266E1	-3.26536E1	2.67866E1	1.73529E-7	2.51007E-3	2.51007E-3	6.31288E-3	1.99977E-1
1.2E1	3.45E2	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.8002E1	-6.19888E-4	-8.80002E1	2.86102E-4	4.86374E-3	9.34124E-2	2.72968E1	-3.26413E1	-3.26437E1	2.68064E1	1.73457E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.00021E-1
1.3E1	9.0E0	1.0E0	5.25E2	3.53E2	-7.37103E-2	-8.80022E1	-2.14577E-4	-8.80002E1	5.72205E-4	5.126E-3	9.33409E-2	2.73105E1	-3.26855E1	-3.26549E1	2.67836E1	1.73605E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.99283E-1
1.4E1	6.98E2	0.0E0	5.66E2	3.82E2	-7.39421E-2	-8.80021E1	-2.6226E-4	-8.79999E1	5.24521E-4	5.43594E-3	9.36747E-2	2.73317E1	-3.26874E1	-3.26295E1	2.67456E1	1.73379E-7	2.51225E-3	2.51225E-3	6.31837E-3	1.99803E-1
1.5E1	7.7E1	0.0E0	6.06E2	4.11E2	-7.42513E-2	-8.80021E1	9.53674E-5	-8.79998E1	2.38419E-4	5.29289E-3	9.33886E-2	2.73094E1	-3.26738E1	-3.26456E1	2.67836E1	1.73533E-7	2.51265E-3	2.51265E-3	6.30221E-3	2.00105E-1
1.6E1	3.208E3	3.0E0	6.47E2	4.41E2	-7.38649E-2	-8.8002E1	-3.33786E-4	-8.79999E1	2.86102E-4	5.38826E-3	9.33409E-2	2.73237E1	-3.27041E1	-3.26308E1	2.68094E1	1.73605E-7	2.51498E-3	2.51498E-3	6.3245E-3	2.00968E-1
1.7E1	3.6525E4	1.9E1	6.87E2	4.7E2	-7.35556E-2	-8.80019E1	-2.38419E-4	-8.8E1	4.52995E-4	5.45979E-3	9.3174E-2	2.72847E1	-3.26404E1	-3.26056E1	2.6795E1	1.73531E-7	2.51525E-3	2.51525E-3	6.32896E-3	1.9951E-1
1.8E1	1.59701E5	9.0E1	7.27E2	5.0E2	-7.3401E-2	-8.80019E1	-3.8147E-4	-8.79999E1	5.48363E-4	5.53131E-3	9.33886E-2	2.73165E1	-3.26464E1	-3.26428E1	2.67986E1	1.73529E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.9963E-1
1.9E1	2.164E3	0.0E0	7.68E2	5.29E2	-7.37103E-2	-8.80017E1	-3.09944E-4	-8.79998E1	1.43051E-4	5.14984E-3	9.3317E-2	2.73163E1	-3.25971E1	-3.26472E1	2.67794E1	1.73454E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.98764E-1
2.0E1	2.96E2	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.80018E1	-3.57628E-4	-8.79997E1	2.38419E-4	5.22137E-3	9.36031E-2	2.73503E1	-3.26677E1	-3.26382E1	2.67966E1	1.73454E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.00325E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.44059E-2	-8.80018E1	-2.6226E-4	-8.8E1	1.43051E-4	5.34058E-3	9.35078E-2	2.73082E1	-3.2679E1	-3.26404E1	2.68381E1	1.73532E-7	2.52131E-3	2.52131E-3	6.29157E-3	2.00903E-1
2.2E1	4.0E1	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80018E1	-4.05312E-4	-8.79999E1	2.38419E-4	5.34058E-3	9.3317E-2	2.73169E1	-3.26307E1	-3.26101E1	2.67845E1	1.73528E-7	2.51359E-3	2.51359E-3	6.32418E-3	1.98696E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80019E1	-8.34465E-4	-8.8E1	2.38419E-4	5.8651E-3	9.34124E-2	2.7298E1	-3.26974E1	-3.26071E1	2.6795E1	1.73309E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.99E-1