[Scan]
initial_time=2016-02-16T04:28:26
final_time=2016-02-16T04:28:45
ip_count=19
run=1030
dataset=9
scan=723
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.82002E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.19841E-10
ql2_vset=
ql2_vmon=-3.8147E-4
ql2_imon=3.6881E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.67317E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=7.49493E-10
mult1=-1.17512E-8
mult2=-2.65274E-9
rf_tmon=-5.22741E-3
rf_agc=3.2931E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=3.67188E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6609E0
bslens_imon=2.52556E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20084E1
lens5a_imon=1.96988E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12507E2
lens4a_imon=2.05036E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53941E1
cs_ef1b_imon=3.07388E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04627E2
lens23_imon=1.02259E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05018E1
cs_ea1_imon=2.18083E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00764E0
lens1_imon=1.4779E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64566E1
os_ef1alow_imon=3.01622E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04321E1
cs_ea2_imon=1.57948E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84496E1
cs_ef1a_imon=2.98522E-5
olens2_vset=9.7E-1
olens2_vmon=9.70626E-1
olens2_imon=3.80588E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=2.8926E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15252E1
os_ea1_imon=1.87785E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63281E1
os_ef1bup_imon=3.10415E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24443E0
cs_ionrep_imon=1.27403E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91897E2
cs_nozzle_imon=1.93569E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02133E1
cs_anode1_imon=3.30309E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=7.04265E-10
tplens_vset=1.4E-1
tplens_vmon=1.63376E0
tplens_imon=-1.67929E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26621E1
iondef3_imon=1.49666E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26615E1
iondef2_imon=1.58762E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02996E2
lens6_imon=2.98438E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=4.01044E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27569E0
ionrepsh_imon=2.02792E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33888E1
lens5b_imon=2.19994E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.73955E1
cs_ef2b_imon=3.13046E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.59884E-1
os_ea2_imon=-5.32488E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06113E2
lens4b_imon=2.00669E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.72471E1
cs_ef2a_imon=3.19786E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.59756E0
os_ef2alow_imon=-2.38885E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.67991E-1
os_ef2bup_imon=-5.27923E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10409E1
os_restr2_imon=2.88287E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23095E2
cs_ionfoca_imon=6.33786E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02049E1
cs_anode2_imon=2.31164E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73201E1
iondef1_imon=1.07759E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67866E1
iondef4_imon=1.11332E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=1.8752E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=3.23021E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10912E0
cs_ionaccel_imon=-1.8915E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02103E2
cs_ionfocb_imon=1.47478E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56477E1
einzel_imon=7.5581E-6
window_vset=0.0E0
window_vmon=2.25752E-1
window_imon=-1.1635E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82589E2
mask1_imon=2.39091E-4
mask2_vset=0.0E0
mask2_vmon=-1.86752E1
mask2_imon=-3.23777E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.6931E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93738E3
defgrida_imon=6.73392E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=7.07016E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42918E0
defgridb_imon=6.23486E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33957E1
os_fil1_imon=5.24474E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.3951E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66595E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30776E1
cs_fil1_imon=1.009E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6281E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6706E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.36988E-2
os_fil2_imon=-2.37765E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.83939E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.63569E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3004E-1
cs_fil2_imon=-2.73805E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22031E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22581E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=1.9951E-1
chamber_ion_pmon=1.73309E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.77622E-1
res40_imon=-2.46814E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4671E4	1.2E1	1.47E2	4.1E1	-7.31692E-2	-8.80014E1	9.53674E-5	-8.80002E1	5.48363E-4	5.43594E-3	9.34839E-2	2.73446E1	-3.26254E1	-3.26526E1	2.67816E1	1.73387E-7	2.51814E-3	2.51814E-3	6.31798E-3	1.99061E-1
2.0E0	5.482E3	4.0E0	3.16E2	1.6E2	-7.31692E-2	-8.80015E1	-1.90735E-4	-8.79999E1	2.6226E-4	5.22137E-3	9.34124E-2	2.73435E1	-3.26176E1	-3.26254E1	2.6798E1	1.73605E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.00192E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80017E1	-1.43051E-4	-8.80004E1	4.05312E-4	5.26905E-3	9.29117E-2	2.73205E1	-3.26761E1	-3.26391E1	2.68166E1	1.73605E-7	2.51804E-3	2.51804E-3	6.33538E-3	2.00108E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.29374E-2	-8.80016E1	-3.09944E-4	-8.80003E1	5.24521E-4	5.05447E-3	9.33886E-2	2.73513E1	-3.26522E1	-3.26335E1	2.68244E1	1.73605E-7	2.51752E-3	2.51752E-3	6.31251E-3	2.00307E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.80017E1	-5.96046E-4	-8.80001E1	2.38419E-4	5.62668E-3	9.31025E-2	2.72949E1	-3.27486E1	-3.26098E1	2.67818E1	1.73526E-7	2.51838E-3	2.51838E-3	6.3245E-3	1.98625E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80019E1	-3.57628E-4	-8.80002E1	-1.43051E-4	5.48363E-3	9.32217E-2	2.73267E1	-3.26224E1	-3.26536E1	2.68022E1	1.73454E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.98764E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80018E1	-4.29153E-4	-8.80003E1	2.38419E-4	5.36442E-3	9.29832E-2	2.73051E1	-3.2638E1	-3.26314E1	2.67607E1	1.73529E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.99456E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.35556E-2	-8.80016E1	-7.62939E-4	-8.80002E1	2.86102E-4	5.38826E-3	9.27925E-2	2.73033E1	-3.26476E1	-3.26074E1	2.68016E1	1.73379E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.98075E-1
1.2E1	3.2E2	0.0E0	4.85E2	3.23E2	-7.21643E-2	-8.80015E1	-5.24521E-4	-8.80001E1	2.86102E-4	5.17368E-3	9.29832E-2	2.72462E1	-3.26567E1	-3.25695E1	2.67818E1	1.73605E-7	2.50898E-3	2.50898E-3	6.31288E-3	1.99283E-1
1.3E1	2.1E1	0.0E0	5.25E2	3.53E2	-7.23189E-2	-8.80014E1	-7.15256E-4	-8.80003E1	2.38419E-4	5.43594E-3	9.31263E-2	2.73117E1	-3.26374E1	-3.26026E1	2.6804E1	1.73529E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.98764E-1
1.4E1	6.7E2	0.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80014E1	-2.6226E-4	-8.80006E1	4.52995E-4	5.45979E-3	9.30786E-2	2.73253E1	-3.26634E1	-3.26205E1	2.68124E1	1.73605E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.00325E-1
1.5E1	7.5E1	0.0E0	6.06E2	4.11E2	-7.18554E-2	-8.80018E1	-5.24521E-4	-8.80005E1	2.14577E-4	5.38826E-3	9.31025E-2	2.72768E1	-3.26396E1	-3.26278E1	2.68046E1	1.73451E-7	2.51359E-3	2.51359E-3	6.32978E-3	2.00463E-1
1.6E1	3.148E3	2.0E0	6.47E2	4.41E2	-7.20871E-2	-8.80015E1	-1.66893E-4	-8.80004E1	3.57628E-4	5.38826E-3	9.28879E-2	2.7351E1	-3.27068E1	-3.26009E1	2.68256E1	1.73531E-7	2.5131E-3	2.5131E-3	6.31817E-3	2.00876E-1
1.7E1	3.6677E4	1.8E1	6.87E2	4.7E2	-7.286E-2	-8.80016E1	-3.09944E-4	-8.80003E1	2.86102E-4	5.6982E-3	9.33409E-2	2.72968E1	-3.27092E1	-3.25776E1	2.67926E1	1.73528E-7	2.5225E-3	2.5225E-3	6.3074E-3	1.99224E-1
1.8E1	1.58497E5	8.7E1	7.27E2	5.0E2	-7.32464E-2	-8.80018E1	-3.57628E-4	-8.80003E1	7.39098E-4	5.43594E-3	9.32932E-2	2.72684E1	-3.26561E1	-3.26621E1	2.67511E1	1.73605E-7	2.5131E-3	2.5131E-3	6.32896E-3	2.00363E-1
1.9E1	2.277E3	1.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80021E1	-4.52995E-4	-8.80003E1	5.96046E-4	5.36442E-3	9.32693E-2	2.73382E1	-3.26756E1	-3.26076E1	2.67698E1	1.73529E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.00325E-1
2.0E1	2.85E2	0.0E0	8.08E2	5.58E2	-7.39421E-2	-8.80018E1	-8.34465E-4	-8.80003E1	5.48363E-4	5.43594E-3	9.33886E-2	2.73216E1	-3.27015E1	-3.26313E1	2.68322E1	1.73528E-7	2.5147E-3	2.5147E-3	6.31299E-3	2.00996E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.40192E-2	-8.80016E1	-2.86102E-4	-8.80002E1	7.15256E-4	5.67436E-3	9.35555E-2	2.72745E1	-3.27318E1	-3.26098E1	2.67986E1	1.73309E-7	2.51203E-3	2.51203E-3	6.29665E-3	2.00021E-1
2.2E1	5.0E1	0.0E0	8.89E2	6.17E2	-7.35556E-2	-8.80018E1	-1.43051E-4	-8.80002E1	6.67572E-4	5.19753E-3	9.34362E-2	2.73222E1	-3.26791E1	-3.2629E1	2.68001E1	1.73454E-7	2.51116E-3	2.51116E-3	6.32386E-3	1.99456E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80018E1	-3.8147E-4	-8.80002E1	2.86102E-4	5.53131E-3	9.3317E-2	2.73201E1	-3.26615E1	-3.26621E1	2.67866E1	1.73309E-7	2.5131E-3	2.5131E-3	6.33977E-3	1.9951E-1