[Scan]
initial_time=2016-02-16T04:29:46
final_time=2016-02-16T04:30:05
ip_count=19
run=1030
dataset=9
scan=726
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.76176E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-5.88357E-10
ql2_vset=
ql2_vmon=-4.29153E-4
ql2_imon=3.73924E-10
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.60215E-9
ql4_vset=
ql4_vmon=5.48363E-4
ql4_imon=7.707E-10
mult1=-1.03545E-8
mult2=-2.75055E-9
rf_tmon=-6.14667E-3
rf_agc=3.19517E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=4.0791E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64321E0
bslens_imon=2.86888E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19901E1
lens5a_imon=1.97519E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.05606E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53569E1
cs_ef1b_imon=3.07218E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04648E2
lens23_imon=1.01948E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04681E1
cs_ea1_imon=2.20277E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01472E0
lens1_imon=1.24783E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64232E1
os_ef1alow_imon=3.00372E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04021E1
cs_ea2_imon=1.58904E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84666E1
cs_ef1a_imon=3.01136E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=3.99327E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1095E1
os_restr1_imon=2.87583E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15754E1
os_ea1_imon=1.89307E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63716E1
os_ef1bup_imon=3.1045E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21729E0
cs_ionrep_imon=1.3204E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91865E2
cs_nozzle_imon=1.93381E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01914E1
cs_anode1_imon=3.27027E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=7.23433E-10
tplens_vset=1.4E-1
tplens_vmon=1.61076E0
tplens_imon=-1.99784E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25948E1
iondef3_imon=1.49595E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27095E1
iondef2_imon=1.5901E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02938E2
lens6_imon=2.98671E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=3.75378E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.32112E0
ionrepsh_imon=1.99218E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33298E1
lens5b_imon=2.20454E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74148E1
cs_ef2b_imon=3.15107E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.49855E-1
os_ea2_imon=-3.90912E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06132E2
lens4b_imon=2.00662E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71067E1
cs_ef2a_imon=3.17088E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.59786E0
os_ef2alow_imon=-2.58848E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.57265E-1
os_ef2bup_imon=-4.98988E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10857E1
os_restr2_imon=2.85567E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.29114E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02064E1
cs_anode2_imon=2.28156E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72997E1
iondef1_imon=1.11723E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6768E1
iondef4_imon=1.09337E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.87495E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=3.55244E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1174E0
cs_ionaccel_imon=-1.77875E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47261E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5611E1
einzel_imon=7.81295E-6
window_vset=0.0E0
window_vmon=1.783E-1
window_imon=-9.27312E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82607E2
mask1_imon=2.3924E-4
mask2_vset=0.0E0
mask2_vmon=-1.86442E1
mask2_imon=-4.65104E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92662E3
multa_neg_imon=7.65416E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.36582E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.59045E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.76876E0
defgridb_imon=6.11806E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33982E1
os_fil1_imon=5.75251E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.20632E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66756E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30807E1
cs_fil1_imon=1.00924E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62447E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67009E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.42053E-2
os_fil2_imon=-2.22899E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.10325E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.80021E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31275E-1
cs_fil2_imon=-2.5823E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.06671E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22542E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.9917E-1
chamber_ion_pmon=1.73457E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.47825E-1
res40_imon=-2.40429E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4607E4	1.4E1	1.47E2	4.1E1	-7.29374E-2	-8.80017E1	-7.86781E-4	-8.80006E1	5.96046E-4	5.34058E-3	9.31978E-2	2.73198E1	-3.26502E1	-3.26231E1	2.684E1	1.73383E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.00021E-1
2.0E0	5.471E3	8.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80018E1	-7.15256E-4	-8.80004E1	2.86102E-4	5.57899E-3	9.31978E-2	2.73027E1	-3.26266E1	-3.26272E1	2.6819E1	1.73383E-7	2.50989E-3	2.50989E-3	6.31278E-3	1.99E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80019E1	-6.91414E-4	-8.80003E1	5.96046E-4	5.36442E-3	9.30786E-2	2.73163E1	-3.2659E1	-3.26478E1	2.68052E1	1.73528E-7	2.51804E-3	2.51804E-3	6.3074E-3	1.99754E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.80018E1	-6.67572E-4	-8.80002E1	4.76837E-4	5.29289E-3	9.29832E-2	2.73075E1	-3.26425E1	-3.26071E1	2.68198E1	1.73605E-7	2.51203E-3	2.51203E-3	6.32896E-3	2.00363E-1
5.0E0	0.0E0	1.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80018E1	-5.24521E-4	-8.80003E1	6.91414E-4	5.29289E-3	9.32455E-2	2.73009E1	-3.26524E1	-3.26068E1	2.67944E1	1.73383E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.00534E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80015E1	-5.24521E-4	-8.80004E1	2.6226E-4	5.36442E-3	9.33409E-2	2.72922E1	-3.26774E1	-3.26327E1	2.68363E1	1.73529E-7	2.52099E-3	2.52099E-3	6.3074E-3	1.99977E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80015E1	-4.05312E-4	-8.80004E1	4.76837E-4	5.29289E-3	9.30071E-2	2.72997E1	-3.26735E1	-3.26314E1	2.6777E1	1.73528E-7	2.52027E-3	2.52027E-3	6.30182E-3	1.99754E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.80016E1	-5.72205E-4	-8.80003E1	3.09944E-4	5.17368E-3	9.30309E-2	2.7288E1	-3.26744E1	-3.259E1	2.67723E1	1.73379E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.00325E-1
1.2E1	3.19E2	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80018E1	-7.86781E-4	-8.80001E1	6.19888E-4	5.43594E-3	9.30786E-2	2.73201E1	-3.26891E1	-3.26212E1	2.67854E1	1.73531E-7	2.52061E-3	2.52061E-3	6.31278E-3	1.99E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80017E1	-2.6226E-4	-8.80004E1	5.24521E-4	5.19753E-3	9.31501E-2	2.73063E1	-3.26699E1	-3.26092E1	2.67824E1	1.73529E-7	2.51007E-3	2.51007E-3	6.3074E-3	1.9911E-1
1.4E1	6.79E2	0.0E0	5.66E2	3.82E2	-7.30146E-2	-8.8002E1	-3.09944E-4	-8.80001E1	6.91414E-4	5.00679E-3	9.32217E-2	2.72811E1	-3.26374E1	-3.2653E1	2.67896E1	1.73454E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.98764E-1
1.5E1	6.7E1	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.80015E1	-3.57628E-4	-8.80002E1	4.05312E-4	5.34058E-3	9.31978E-2	2.72913E1	-3.26627E1	-3.26296E1	2.68202E1	1.73529E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.98764E-1
1.6E1	3.121E3	2.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80017E1	-3.09944E-4	-8.80004E1	4.76837E-4	5.55515E-3	9.29832E-2	2.72829E1	-3.26306E1	-3.26442E1	2.68244E1	1.73605E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.98764E-1
1.7E1	3.6768E4	2.0E1	6.87E2	4.7E2	-7.31692E-2	-8.80017E1	-7.15256E-4	-8.80002E1	5.24521E-4	5.43594E-3	9.29117E-2	2.73573E1	-3.27793E1	-3.27024E1	2.68562E1	1.73533E-7	2.51886E-3	2.51886E-3	6.31779E-3	1.99447E-1
1.8E1	1.5917E5	1.09E2	7.27E2	5.0E2	-7.25507E-2	-8.80016E1	-5.00679E-4	-8.80003E1	2.14577E-4	5.57899E-3	9.31501E-2	2.72907E1	-3.26705E1	-3.26044E1	2.67529E1	1.73525E-7	2.5199E-3	2.5199E-3	6.33648E-3	1.98004E-1
1.9E1	2.283E3	2.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80014E1	-4.76837E-5	-8.80004E1	3.8147E-4	5.57899E-3	9.31263E-2	2.73496E1	-3.26765E1	-3.26404E1	2.68082E1	1.73529E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.97903E-1
2.0E1	3.46E2	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.80015E1	-9.53674E-5	-8.80006E1	3.33786E-4	5.29289E-3	9.29832E-2	2.72775E1	-3.26308E1	-3.26561E1	2.67776E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.98419E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80017E1	-1.19209E-4	-8.80006E1	1.90735E-4	5.36442E-3	9.3174E-2	2.73063E1	-3.26608E1	-3.26384E1	2.67896E1	1.73457E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.97478E-1
2.2E1	3.9E1	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80014E1	-7.15256E-5	-8.80007E1	3.8147E-4	4.93526E-3	9.31025E-2	2.73305E1	-3.26478E1	-3.26685E1	2.6807E1	1.73605E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.9911E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.80018E1	-4.29153E-4	-8.80004E1	5.48363E-4	5.29289E-3	9.32693E-2	2.72997E1	-3.27095E1	-3.25948E1	2.6768E1	1.73457E-7	2.52276E-3	2.52276E-3	6.31817E-3	1.9917E-1