[Scan]
initial_time=2016-02-16T04:31:32
final_time=2016-02-16T04:31:52
ip_count=19
run=1030
dataset=9
scan=730
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.80691E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-5.94199E-10
ql2_vset=
ql2_vmon=-1.43051E-4
ql2_imon=4.15456E-10
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.69504E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=7.84421E-10
mult1=-1.02581E-8
mult2=-2.61481E-9
rf_tmon=-4.44633E-3
rf_agc=3.38082E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.50747E-3
ql5_imon=4.0139E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67683E0
bslens_imon=2.77686E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19394E1
lens5a_imon=2.00386E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1252E2
lens4a_imon=2.05079E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53621E1
cs_ef1b_imon=3.09095E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04555E2
lens23_imon=1.02273E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05165E1
cs_ea1_imon=2.17375E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01885E0
lens1_imon=1.55222E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64632E1
os_ef1alow_imon=2.99607E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04198E1
cs_ea2_imon=1.56001E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84296E1
cs_ef1a_imon=3.03117E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=3.91901E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11454E1
os_restr1_imon=2.88417E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14957E1
os_ea1_imon=1.89732E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63467E1
os_ef1bup_imon=3.09477E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25269E0
cs_ionrep_imon=1.25952E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91868E2
cs_nozzle_imon=1.93622E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01809E1
cs_anode1_imon=3.28487E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=7.59399E-10
tplens_vset=1.4E-1
tplens_vmon=1.62079E0
tplens_imon=-3.4136E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25737E1
iondef3_imon=1.50905E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26801E1
iondef2_imon=1.58054E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02983E2
lens6_imon=2.98696E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=3.85177E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22968E0
ionrepsh_imon=2.02084E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33687E1
lens5b_imon=2.18826E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74553E1
cs_ef2b_imon=3.14377E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.35698E-1
os_ea2_imon=-2.8473E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06154E2
lens4b_imon=2.00757E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71159E1
cs_ef2a_imon=3.18826E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65809E0
os_ef2alow_imon=-2.56416E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.05137E-1
os_ef2bup_imon=-5.21577E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10567E1
os_restr2_imon=2.88035E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.30141E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01653E1
cs_anode2_imon=2.29755E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72805E1
iondef1_imon=1.08573E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6818E1
iondef4_imon=1.09824E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.89974E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=3.66902E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11161E0
cs_ionaccel_imon=-1.90733E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02061E2
cs_ionfocb_imon=1.47289E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5622E1
einzel_imon=7.67046E-6
window_vset=0.0E0
window_vmon=2.13052E-1
window_imon=-9.16887E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39279E-4
mask2_vset=0.0E0
mask2_vmon=-1.86645E1
mask2_imon=-5.97163E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.6754E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.80825E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.16927E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.25791E0
defgridb_imon=5.96233E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33943E1
os_fil1_imon=4.55355E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.84345E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66731E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30802E1
cs_fil1_imon=1.00901E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62719E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67042E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.2939E-2
os_fil2_imon=-2.33324E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.33493E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.45725E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28653E-1
cs_fil2_imon=-2.2174E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.53008E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22394E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=1.94801E-1
chamber_ion_pmon=1.73531E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.76786E-1
res40_imon=-2.37649E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4891E4	1.5E1	1.47E2	4.1E1	-7.37103E-2	-8.80013E1	-2.86102E-4	-8.80003E1	3.33786E-4	5.22137E-3	9.32217E-2	2.73178E1	-3.26834E1	-3.2593E1	2.6807E1	1.73531E-7	2.51632E-3	2.51632E-3	6.29665E-3	1.9934E-1
2.0E0	5.568E3	1.2E1	3.16E2	1.6E2	-7.38649E-2	-8.8002E1	-4.05312E-4	-8.80004E1	3.33786E-4	5.34058E-3	9.32693E-2	2.73326E1	-3.27001E1	-3.25936E1	2.67938E1	1.73457E-7	2.51847E-3	2.51847E-3	6.3074E-3	1.99E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.45602E-2	-8.80016E1	-4.05312E-4	-8.80006E1	3.57628E-4	5.65052E-3	9.3317E-2	2.72823E1	-3.27131E1	-3.26008E1	2.67992E1	1.73528E-7	2.51804E-3	2.51804E-3	6.3074E-3	1.98169E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.46377E-2	-8.80017E1	-4.29153E-4	-8.80004E1	5.96046E-4	5.43594E-3	9.33886E-2	2.72943E1	-3.26554E1	-3.26284E1	2.67992E1	1.73605E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.97903E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.44831E-2	-8.80018E1	-5.72205E-4	-8.80005E1	1.90735E-4	5.43594E-3	9.31263E-2	2.73341E1	-3.26824E1	-3.25611E1	2.68279E1	1.73383E-7	2.51417E-3	2.51417E-3	6.31817E-3	1.97478E-1
6.0E0	0.0E0	1.0E0	9.93E2	6.35E2	-7.44059E-2	-8.80018E1	-5.48363E-4	-8.80003E1	3.09944E-4	5.65052E-3	9.29594E-2	2.72873E1	-3.26689E1	-3.26309E1	2.67926E1	1.7339E-7	2.51886E-3	2.51886E-3	6.323E-3	1.99611E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.36328E-2	-8.80018E1	-9.05991E-4	-8.80006E1	4.52995E-4	5.126E-3	9.34124E-2	2.72822E1	-3.26585E1	-3.26088E1	2.68113E1	1.73528E-7	2.51693E-3	2.51693E-3	6.3074E-3	1.98872E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.33239E-2	-8.80018E1	-6.91414E-4	-8.80006E1	3.8147E-4	5.24521E-3	9.33409E-2	2.73129E1	-3.2644E1	-3.26116E1	2.68004E1	1.73605E-7	2.51296E-3	2.51296E-3	6.3016E-3	1.98734E-1
1.2E1	3.45E2	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.80018E1	-9.05991E-4	-8.80004E1	4.52995E-4	5.14984E-3	9.33409E-2	2.73209E1	-3.2651E1	-3.26144E1	2.68321E1	1.73529E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.98419E-1
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.80018E1	-9.53674E-4	-8.80003E1	5.24521E-4	5.34058E-3	9.32693E-2	2.72985E1	-3.26868E1	-3.26392E1	2.68016E1	1.73446E-7	2.51402E-3	2.51402E-3	6.31125E-3	1.97912E-1
1.4E1	7.04E2	3.0E0	5.66E2	3.82E2	-7.30918E-2	-8.80016E1	-5.96046E-4	-8.80002E1	3.57628E-4	5.29289E-3	9.33409E-2	2.73167E1	-3.26762E1	-3.26499E1	2.67968E1	1.73605E-7	2.51475E-3	2.51475E-3	6.33021E-3	1.97802E-1
1.5E1	7.8E1	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.80016E1	-4.52995E-4	-8.80003E1	1.90735E-4	5.24521E-3	9.36031E-2	2.73008E1	-3.26859E1	-3.26195E1	2.68148E1	1.73526E-7	2.51271E-3	2.51271E-3	6.3131E-3	1.98267E-1
1.6E1	3.065E3	3.0E0	6.47E2	4.41E2	-7.25507E-2	-8.80014E1	-7.62939E-4	-8.80005E1	1.19209E-4	5.60284E-3	9.36747E-2	2.73009E1	-3.26302E1	-3.26338E1	2.67775E1	1.73605E-7	2.51947E-3	2.51947E-3	6.3074E-3	1.98337E-1
1.7E1	3.6615E4	1.7E1	6.87E2	4.7E2	-7.22418E-2	-8.80015E1	-6.67572E-4	-8.80002E1	3.09944E-4	5.36442E-3	9.32693E-2	2.72673E1	-3.25617E1	-3.26189E1	2.678E1	1.73529E-7	2.51552E-3	2.51552E-3	6.34037E-3	1.98937E-1
1.8E1	1.59093E5	9.2E1	7.27E2	5.0E2	-7.30918E-2	-8.80013E1	-5.72205E-4	-8.80001E1	1.90735E-4	5.10216E-3	9.3174E-2	2.72997E1	-3.26188E1	-3.26218E1	2.66989E1	1.73529E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.99977E-1
1.9E1	2.259E3	2.0E0	7.68E2	5.29E2	-7.33239E-2	-8.80016E1	-5.24521E-4	-8.80005E1	2.6226E-4	5.24521E-3	9.31025E-2	2.72909E1	-3.2652E1	-3.26514E1	2.67914E1	1.73531E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.00705E-1
2.0E1	3.3E2	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.80015E1	-5.96046E-4	-8.80004E1	5.00679E-4	5.17368E-3	9.33647E-2	2.73605E1	-3.2672E1	-3.25706E1	2.67439E1	1.73454E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.9911E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.40192E-2	-8.80016E1	-4.29153E-4	-8.80004E1	3.8147E-4	5.50747E-3	9.33647E-2	2.73039E1	-3.26354E1	-3.26608E1	2.68022E1	1.73457E-7	2.51847E-3	2.51847E-3	6.3074E-3	1.97647E-1
2.2E1	3.7E1	0.0E0	8.89E2	6.17E2	-7.37103E-2	-8.80016E1	-2.6226E-4	-8.80002E1	4.29153E-4	5.53131E-3	9.34124E-2	2.73039E1	-3.27029E1	-3.25948E1	2.67686E1	1.73531E-7	2.52169E-3	2.52169E-3	6.30202E-3	1.95634E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80016E1	-1.43051E-4	-8.80005E1	2.38419E-4	5.50747E-3	9.33886E-2	2.72805E1	-3.26801E1	-3.25737E1	2.6818E1	1.73531E-7	2.51739E-3	2.51739E-3	6.32356E-3	1.94801E-1