[Scan]
initial_time=2016-02-16T04:32:25
final_time=2016-02-16T04:32:45
ip_count=19
run=1030
dataset=9
scan=732
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.77432E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-5.76186E-10
ql2_vset=
ql2_vmon=-7.39098E-4
ql2_imon=3.65043E-10
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-1.55785E-9
ql4_vset=
ql4_vmon=5.48363E-4
ql4_imon=7.67052E-10
mult1=-9.81263E-9
mult2=-2.87431E-9
rf_tmon=-4.66864E-3
rf_agc=3.37722E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.65052E-3
ql5_imon=4.25732E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67094E0
bslens_imon=2.68195E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19941E1
lens5a_imon=2.00074E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.05154E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53376E1
cs_ef1b_imon=3.09154E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04663E2
lens23_imon=1.02283E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04814E1
cs_ea1_imon=2.18747E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04316E0
lens1_imon=1.5536E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64795E1
os_ef1alow_imon=2.97225E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03648E1
cs_ea2_imon=1.56742E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84112E1
cs_ef1a_imon=3.04217E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=4.05502E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11316E1
os_restr1_imon=2.85584E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15588E1
os_ea1_imon=1.88718E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63557E1
os_ef1bup_imon=3.12109E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24909E0
cs_ionrep_imon=1.25775E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91923E2
cs_nozzle_imon=1.93514E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01983E1
cs_anode1_imon=3.25804E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2057E0
olens4_imon=7.23064E-10
tplens_vset=1.4E-1
tplens_vmon=1.62761E0
tplens_imon=-2.74111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26206E1
iondef3_imon=1.51046E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26825E1
iondef2_imon=1.58689E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02962E2
lens6_imon=2.98569E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=4.06301E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26231E0
ionrepsh_imon=2.02092E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33658E1
lens5b_imon=2.19901E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.73186E1
cs_ef2b_imon=3.16326E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.28291E-1
os_ea2_imon=-3.28186E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06107E2
lens4b_imon=2.00659E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71636E1
cs_ef2a_imon=3.182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61197E0
os_ef2alow_imon=-2.37804E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.28658E-1
os_ef2bup_imon=-5.09182E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10325E1
os_restr2_imon=2.86665E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.31623E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01473E1
cs_anode2_imon=2.25866E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73219E1
iondef1_imon=1.10707E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68046E1
iondef4_imon=1.13639E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.93981E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=3.16417E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13074E0
cs_ionaccel_imon=-2.32037E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47637E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56645E1
einzel_imon=7.50404E-6
window_vset=0.0E0
window_vmon=2.40168E-1
window_imon=-8.13916E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82614E2
mask1_imon=2.39016E-4
mask2_vset=0.0E0
mask2_vmon=-1.86386E1
mask2_imon=-3.92252E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.33955E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.70508E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50153E3
multb_neg_imon=7.12686E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38352E0
defgridb_imon=6.29772E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33935E1
os_fil1_imon=4.14553E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.22692E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66862E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3078E1
cs_fil1_imon=1.00968E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62966E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67161E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.40904E-2
os_fil2_imon=-2.29356E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.99846E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.43107E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29781E-1
cs_fil2_imon=-2.07131E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.46658E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22549E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.9917E-1
chamber_ion_pmon=1.73383E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.04342E-1
res40_imon=-2.29875E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4631E4	1.7E1	1.47E2	4.1E1	-7.286E-2	-8.80017E1	0.0E0	-8.80004E1	4.29153E-4	5.43594E-3	9.31978E-2	2.73016E1	-3.26608E1	-3.26065E1	2.68004E1	1.73605E-7	2.51116E-3	2.51116E-3	6.32936E-3	1.98764E-1
2.0E0	5.576E3	2.0E0	3.16E2	1.6E2	-7.41738E-2	-8.80021E1	-2.14577E-4	-8.80003E1	4.76837E-4	5.74589E-3	9.31978E-2	2.72947E1	-3.26747E1	-3.26115E1	2.67856E1	1.73309E-7	2.51739E-3	2.51739E-3	6.33436E-3	1.9951E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80019E1	-3.09944E-4	-8.80004E1	6.19888E-4	5.36442E-3	9.30548E-2	2.73124E1	-3.26768E1	-3.26174E1	2.68556E1	1.73387E-7	2.51709E-3	2.51709E-3	6.32328E-3	1.99394E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.39421E-2	-8.80018E1	-2.6226E-4	-8.80003E1	3.57628E-4	5.26905E-3	9.30309E-2	2.73328E1	-3.26573E1	-3.2626E1	2.68256E1	1.73526E-7	2.51384E-3	2.51384E-3	6.31879E-3	1.99703E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.80018E1	-2.38419E-5	-8.80002E1	6.91414E-4	5.10216E-3	9.3317E-2	2.7332E1	-3.26578E1	-3.26168E1	2.68238E1	1.73605E-7	2.51417E-3	2.51417E-3	6.31817E-3	1.9917E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.45602E-2	-8.80019E1	-2.14577E-4	-8.80002E1	4.52995E-4	5.4121E-3	9.29594E-2	2.72883E1	-3.2641E1	-3.2632E1	2.68016E1	1.73528E-7	2.51248E-3	2.51248E-3	6.31299E-3	1.99577E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.40192E-2	-8.80018E1	3.09944E-4	-8.80002E1	6.4373E-4	5.22137E-3	9.30786E-2	2.72721E1	-3.26644E1	-3.26284E1	2.68088E1	1.73605E-7	2.51203E-3	2.51203E-3	6.31278E-3	1.99E-1
8.0E0	1.0E0	1.0E0	1.332E3	8.73E2	-7.37103E-2	-8.80018E1	0.0E0	-8.80002E1	6.4373E-4	5.07832E-3	9.28879E-2	2.73075E1	-3.26425E1	-3.25966E1	2.67956E1	1.73605E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.9911E-1
1.2E1	3.29E2	0.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80015E1	9.53674E-5	-8.80002E1	1.43051E-4	5.00679E-3	9.31263E-2	2.72721E1	-3.26449E1	-3.26378E1	2.67824E1	1.73454E-7	2.51334E-3	2.51334E-3	6.32936E-3	1.98247E-1
1.3E1	1.9E1	0.0E0	5.25E2	3.53E2	-7.30146E-2	-8.80017E1	7.15256E-5	-8.8E1	1.43051E-4	5.14984E-3	9.29117E-2	2.72997E1	-3.26338E1	-3.2653E1	2.6789E1	1.73454E-7	2.5188E-3	2.5188E-3	6.29098E-3	1.98764E-1
1.4E1	7.7E2	0.0E0	5.66E2	3.82E2	-7.29374E-2	-8.8002E1	-1.66893E-4	-8.80004E1	5.48363E-4	5.26905E-3	9.3174E-2	2.72949E1	-3.27035E1	-3.26068E1	2.67938E1	1.73454E-7	2.51662E-3	2.51662E-3	6.28552E-3	1.99283E-1
1.5E1	7.3E1	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80019E1	-2.14577E-4	-8.80003E1	5.72205E-4	5.07832E-3	9.32455E-2	2.72847E1	-3.27017E1	-3.2587E1	2.68112E1	1.73605E-7	2.51096E-3	2.51096E-3	6.32356E-3	1.99E-1
1.6E1	3.05E3	0.0E0	6.47E2	4.41E2	-7.38649E-2	-8.80019E1	-2.86102E-4	-8.80006E1	3.57628E-4	5.07832E-3	9.30071E-2	2.73526E1	-3.26693E1	-3.26074E1	2.68148E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.99283E-1
1.7E1	3.6623E4	2.0E1	6.87E2	4.7E2	-7.45602E-2	-8.80018E1	-2.14577E-4	-8.80005E1	4.29153E-4	5.34058E-3	9.31263E-2	2.73345E1	-3.27065E1	-3.26098E1	2.6783E1	1.73454E-7	2.51116E-3	2.51116E-3	6.31288E-3	1.99283E-1
1.8E1	1.58903E5	8.3E1	7.27E2	5.0E2	-7.40967E-2	-8.80019E1	-4.52995E-4	-8.80003E1	5.00679E-4	5.45979E-3	9.31263E-2	2.73067E1	-3.26409E1	-3.26207E1	2.6799E1	1.73529E-7	2.5199E-3	2.5199E-3	6.29645E-3	1.9963E-1
1.9E1	2.225E3	0.0E0	7.68E2	5.29E2	-7.42513E-2	-8.80022E1	-4.29153E-4	-8.80007E1	9.53674E-5	5.93662E-3	9.32217E-2	2.72871E1	-3.26765E1	-3.25984E1	2.67848E1	1.73404E-7	2.51474E-3	2.51474E-3	6.32197E-3	1.98569E-1
2.0E1	3.17E2	0.0E0	8.08E2	5.58E2	-7.41738E-2	-8.80023E1	-3.8147E-4	-8.80004E1	5.96046E-4	5.60284E-3	9.30309E-2	2.74938E1	-3.28525E1	-3.24992E1	2.67794E1	1.73298E-7	2.5147E-3	2.5147E-3	6.32418E-3	1.99048E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80021E1	-3.57628E-4	-8.80003E1	7.62939E-4	5.79357E-3	9.32932E-2	2.7301E1	-3.26986E1	-3.26236E1	2.67868E1	1.73605E-7	2.51954E-3	2.51954E-3	6.3074E-3	1.98153E-1
2.2E1	4.1E1	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80021E1	-7.39098E-4	-8.80003E1	5.72205E-4	5.43594E-3	9.30548E-2	2.73086E1	-3.26319E1	-3.26785E1	2.68142E1	1.73457E-7	2.51525E-3	2.51525E-3	6.32356E-3	1.9883E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80022E1	-7.39098E-4	-8.80007E1	5.48363E-4	5.65052E-3	9.3317E-2	2.73219E1	-3.26825E1	-3.26206E1	2.68046E1	1.73383E-7	2.51739E-3	2.51739E-3	6.3074E-3	1.9917E-1