[Scan]
initial_time=2016-02-16T04:32:52
final_time=2016-02-16T04:33:12
ip_count=19
run=1030
dataset=9
scan=733
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.83392E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-5.69856E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=3.84808E-10
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.57154E-9
ql4_vset=
ql4_vmon=5.72205E-4
ql4_imon=7.75552E-10
mult1=-1.33632E-8
mult2=-2.69935E-9
rf_tmon=-4.34384E-3
rf_agc=3.46278E-2
counter1=7
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=4.00531E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65619E0
bslens_imon=2.69191E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19759E1
lens5a_imon=1.97483E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.05086E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53841E1
cs_ef1b_imon=3.07844E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02333E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04882E1
cs_ea1_imon=2.16525E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03006E0
lens1_imon=1.70796E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64324E1
os_ef1alow_imon=2.98113E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03791E1
cs_ea2_imon=1.59612E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8444E1
cs_ef1a_imon=3.02283E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=3.81339E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11372E1
os_restr1_imon=2.87791E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15648E1
os_ea1_imon=1.90227E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63456E1
os_ef1bup_imon=3.09929E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22909E0
cs_ionrep_imon=1.28465E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93629E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01728E1
cs_anode1_imon=3.28139E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=7.39539E-10
tplens_vset=1.4E-1
tplens_vmon=1.61607E0
tplens_imon=-1.14838E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26171E1
iondef3_imon=1.51329E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2647E1
iondef2_imon=1.60213E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02972E2
lens6_imon=2.9865E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=3.85451E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26979E0
ionrepsh_imon=2.02332E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33492E1
lens5b_imon=2.20737E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75133E1
cs_ef2b_imon=3.15559E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.89379E-1
os_ea2_imon=-2.2456E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06128E2
lens4b_imon=2.00754E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70765E1
cs_ef2a_imon=3.17296E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64188E0
os_ef2alow_imon=-2.39734E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.8333E-1
os_ef2bup_imon=-5.17407E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10938E1
os_restr2_imon=2.87305E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.31627E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.29338E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7272E1
iondef1_imon=1.11369E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6792E1
iondef4_imon=1.09581E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.86768E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=3.68321E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12319E0
cs_ionaccel_imon=-2.00464E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02048E2
cs_ionfocb_imon=1.47438E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56643E1
einzel_imon=7.74692E-6
window_vset=0.0E0
window_vmon=2.21161E-1
window_imon=-8.36956E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.39126E-4
mask2_vset=0.0E0
mask2_vmon=-1.86645E1
mask2_imon=-5.38084E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92676E3
multa_neg_imon=7.52321E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.54633E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.26483E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53253E0
defgridb_imon=6.21009E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33951E1
os_fil1_imon=4.57092E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.59439E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6674E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30826E1
cs_fil1_imon=1.00964E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63588E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66936E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.39696E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.29236E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.50154E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-2.11894E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.30419E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22418E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31761E-3
inlet_lpb_pmon=1.98854E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.52262E-3
foreline_cvt_pmon=2.52262E-3
chamber_tmon=1.40018E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.72731E-1
res40_imon=-2.53288E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4351E4	1.5E1	1.47E2	4.1E1	-7.26282E-2	-8.8002E1	-6.67572E-4	-8.80002E1	4.52995E-4	5.4121E-3	9.32217E-2	2.73234E1	-3.26685E1	-3.26095E1	2.67976E1	1.73531E-7	2.52169E-3	2.52169E-3	6.32356E-3	1.9917E-1
2.0E0	5.304E3	6.0E0	3.16E2	1.6E2	-7.22418E-2	-8.80019E1	-2.6226E-4	-8.80004E1	7.39098E-4	5.05447E-3	9.32693E-2	2.72775E1	-3.26963E1	-3.2623E1	2.67904E1	1.73605E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.9951E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.23189E-2	-8.80019E1	-7.15256E-5	-8.80003E1	6.4373E-4	5.126E-3	9.29832E-2	2.73039E1	-3.26266E1	-3.26726E1	2.67555E1	1.73528E-7	2.51693E-3	2.51693E-3	6.29067E-3	1.99754E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.21643E-2	-8.80018E1	-4.52995E-4	-8.80004E1	7.86781E-4	5.4121E-3	9.30309E-2	2.72973E1	-3.26657E1	-3.26482E1	2.68034E1	1.73457E-7	2.5131E-3	2.5131E-3	6.31278E-3	1.9883E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80019E1	-7.15256E-4	-8.80002E1	6.4373E-4	5.48363E-3	9.35316E-2	2.73216E1	-3.26661E1	-3.26413E1	2.681E1	1.73531E-7	2.51739E-3	2.51739E-3	6.30202E-3	1.9883E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.19325E-2	-8.80019E1	-5.48363E-4	-8.80003E1	5.48363E-4	5.48363E-3	9.34362E-2	2.73088E1	-3.26927E1	-3.25789E1	2.67908E1	1.73529E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.99283E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.19325E-2	-8.80018E1	-6.67572E-4	-8.80003E1	8.58307E-4	5.126E-3	9.33409E-2	2.72889E1	-3.26711E1	-3.26116E1	2.6792E1	1.73529E-7	2.52318E-3	2.52318E-3	6.32936E-3	1.98764E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80018E1	-6.19888E-4	-8.80006E1	3.8147E-4	5.45979E-3	9.31263E-2	2.73081E1	-3.26891E1	-3.26314E1	2.67734E1	1.73529E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.9911E-1
1.2E1	3.13E2	0.0E0	4.85E2	3.23E2	-7.16233E-2	-8.80017E1	-4.76837E-4	-8.80003E1	5.96046E-4	5.05447E-3	9.31978E-2	2.72895E1	-3.26494E1	-3.2596E1	2.67662E1	1.73528E-7	2.5147E-3	2.5147E-3	6.3074E-3	1.99224E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.10825E-2	-8.80017E1	-2.14577E-4	-8.80007E1	4.76837E-4	4.98295E-3	9.30071E-2	2.72703E1	-3.26254E1	-3.26378E1	2.67878E1	1.73531E-7	2.51096E-3	2.51096E-3	6.32896E-3	1.9883E-1
1.4E1	6.22E2	0.0E0	5.66E2	3.82E2	-7.19325E-2	-8.80015E1	-3.8147E-4	-8.80007E1	4.52995E-4	5.4121E-3	9.3174E-2	2.73314E1	-3.26836E1	-3.26389E1	2.68208E1	1.73531E-7	2.51739E-3	2.51739E-3	6.3074E-3	1.9951E-1
1.5E1	6.7E1	0.0E0	6.06E2	4.11E2	-7.20871E-2	-8.80015E1	-3.57628E-4	-8.80004E1	6.67572E-4	5.24521E-3	9.33409E-2	2.72638E1	-3.26738E1	-3.2649E1	2.67848E1	1.73374E-7	2.51693E-3	2.51693E-3	6.31299E-3	1.98696E-1
1.6E1	3.022E3	0.0E0	6.47E2	4.41E2	-7.20871E-2	-8.80015E1	-1.43051E-4	-8.80004E1	5.24521E-4	5.24521E-3	9.32932E-2	2.72925E1	-3.26915E1	-3.25978E1	2.67806E1	1.73457E-7	2.52061E-3	2.52061E-3	6.31278E-3	1.9883E-1
1.7E1	3.646E4	1.0E1	6.87E2	4.7E2	-7.16233E-2	-8.80019E1	-1.66893E-4	-8.80002E1	7.39098E-4	5.00679E-3	9.30071E-2	2.73123E1	-3.26927E1	-3.26344E1	2.67848E1	1.73529E-7	2.51116E-3	2.51116E-3	6.33486E-3	2.00847E-1
1.8E1	1.57702E5	1.02E2	7.27E2	5.0E2	-7.18554E-2	-8.80018E1	-9.53674E-5	-8.80002E1	3.8147E-4	5.24521E-3	9.31025E-2	2.73129E1	-3.26771E1	-3.26356E1	2.67937E1	1.73529E-7	2.51662E-3	2.51662E-3	6.32936E-3	1.99456E-1
1.9E1	2.235E3	3.0E0	7.68E2	5.29E2	-7.12368E-2	-8.80017E1	-3.57628E-4	-8.80005E1	-4.76837E-5	5.4121E-3	9.33647E-2	2.72805E1	-3.26434E1	-3.262E1	2.68032E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.9911E-1
2.0E1	2.78E2	0.0E0	8.08E2	5.58E2	-7.201E-2	-8.80017E1	-2.14577E-4	-8.80006E1	1.43051E-4	5.19753E-3	9.3174E-2	2.7275E1	-3.25505E1	-3.25965E1	2.67833E1	1.73492E-7	2.51716E-3	2.51716E-3	6.34037E-3	1.98764E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.19325E-2	-8.8002E1	-4.52995E-4	-8.80006E1	2.86102E-4	5.38826E-3	9.35793E-2	2.72943E1	-3.26494E1	-3.26134E1	2.67878E1					
2.2E1	4.6E1	0.0E0	8.89E2	6.17E2	-7.20871E-2	-8.80018E1	-2.86102E-4	-8.80005E1	9.53674E-5	5.24521E-3	9.30786E-2	2.73001E1	-3.26534E1	-3.26724E1	2.6773E1	1.73383E-7	2.51417E-3	2.51417E-3	6.33436E-3	1.9934E-1
2.3E1	7.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80016E1	-5.96046E-4	-8.80005E1	5.72205E-4	5.17368E-3	9.31978E-2	2.7272E1	-3.2647E1	-3.26171E1	2.6792E1	1.73605E-7	2.52262E-3	2.52262E-3	6.31761E-3	1.98854E-1