[Scan]
initial_time=2016-02-16T04:34:49
final_time=2016-02-16T04:35:08
ip_count=19
run=1030
dataset=10
scan=737
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08807E-4
ql1_vset=
ql1_vmon=-8.19921E-1
ql1_imon=3.21033E-9
ql2_vset=
ql2_vmon=-7.98726E-1
ql2_imon=1.35863E-10
ql3_vset=
ql3_vmon=-9.13012E0
ql3_imon=7.10785E-9
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=-8.3077E-11
mult1=-1.01136E-8
mult2=-2.79446E-9
rf_tmon=-4.13991E-3
rf_agc=3.37962E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=1.21558E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64769E0
bslens_imon=2.68263E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19854E1
lens5a_imon=1.98464E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12508E2
lens4a_imon=2.05034E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5337E1
cs_ef1b_imon=3.071E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02205E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.053E1
cs_ea1_imon=2.19437E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37623E0
lens1_imon=2.61652E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64518E1
os_ef1alow_imon=2.96864E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03574E1
cs_ea2_imon=1.59935E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84532E1
cs_ef1a_imon=3.02126E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=3.13556E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11141E1
os_restr1_imon=2.88107E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15091E1
os_ea1_imon=1.88143E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63593E1
os_ef1bup_imon=3.10848E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26373E0
cs_ionrep_imon=1.27172E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91861E2
cs_nozzle_imon=1.93416E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02085E1
cs_anode1_imon=3.27642E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20518E0
olens4_imon=4.64141E-10
tplens_vset=1.4E-1
tplens_vmon=1.57838E0
tplens_imon=-5.98438E-9
iondef3_vset=-3.249E1
iondef3_vmon=-3.26122E1
iondef3_imon=1.51818E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2653E1
iondef2_imon=1.60669E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02976E2
lens6_imon=2.98629E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=2.1174E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26006E0
ionrepsh_imon=2.02321E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33572E1
lens5b_imon=2.19106E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74591E1
cs_ef2b_imon=3.14091E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.81821E-1
os_ea2_imon=-6.15698E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06125E2
lens4b_imon=2.00906E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71234E1
cs_ef2a_imon=3.21912E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61678E0
os_ef2alow_imon=-2.55103E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.38559E-1
os_ef2bup_imon=-5.21075E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10451E1
os_restr2_imon=2.86701E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23119E2
cs_ionfoca_imon=6.33969E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01917E1
cs_anode2_imon=2.3138E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73141E1
iondef1_imon=1.09027E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67806E1
iondef4_imon=1.09711E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=1.22797E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=3.65853E-11
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13134E0
cs_ionaccel_imon=-1.94917E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47432E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56796E1
einzel_imon=7.62297E-6
window_vset=0.0E0
window_vmon=2.29956E-1
window_imon=-8.46352E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82603E2
mask1_imon=2.39127E-4
mask2_vset=0.0E0
mask2_vmon=-1.86518E1
mask2_imon=-4.28292E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92668E3
multa_neg_imon=7.98273E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.57598E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.46117E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36371E0
defgridb_imon=5.98096E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33953E1
os_fil1_imon=4.82427E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.77953E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66969E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30862E1
cs_fil1_imon=1.00948E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63099E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66781E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.39712E-2
os_fil2_imon=-2.27554E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.92058E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.4722E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28746E-1
cs_fil2_imon=-2.55785E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.98064E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22751E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=1.98592E-1
chamber_ion_pmon=1.73454E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.79424E-1
res40_imon=-2.45372E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=217
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09657E0	-8.21424E-1	-7.98416E-1	-9.13198E0	-9.14168E0	5.36442E-3	9.34839E-2	2.72957E1	-3.26602E1	-3.2636E1	2.67752E1	1.73605E-7	2.51693E-3	2.51693E-3	6.29067E-3	1.99401E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.20684E-1	-7.98106E-1	-9.13198E0	-9.14164E0	5.50747E-3	9.35078E-2	2.72985E1	-3.26675E1	-3.26116E1	2.68232E1	1.73605E-7	2.51632E-3	2.51632E-3	6.32896E-3	1.98661E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.20613E-1	-7.98416E-1	-9.13188E0	-9.14142E0	5.55515E-3	9.35078E-2	2.72925E1	-3.26422E1	-3.26074E1	2.67896E1	1.73454E-7	2.51007E-3	2.51007E-3	6.3074E-3	1.99283E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.20208E-1	-7.98678E-1	-9.132E0	-9.14161E0	5.29289E-3	9.34124E-2	2.73417E1	-3.2649E1	-3.26337E1	2.68046E1	1.73605E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.99283E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.19969E-1	-7.98202E-1	-9.13174E0	-9.1418E0	5.43594E-3	9.32932E-2	2.73201E1	-3.26813E1	-3.2629E1	2.68232E1	1.73531E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.99E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.20041E-1	-7.98869E-1	-9.13205E0	-9.14187E0	5.36442E-3	9.30071E-2	2.72847E1	-3.26326E1	-3.26104E1	2.68466E1	1.73379E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.9963E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.19826E-1	-7.98631E-1	-9.13169E0	-9.1418E0	5.126E-3	9.29832E-2	2.72898E1	-3.26726E1	-3.26301E1	2.67879E1	1.73454E-7	2.51116E-3	2.51116E-3	6.32386E-3	1.99456E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.2016E-1	-7.98535E-1	-9.13188E0	-9.14185E0	5.45979E-3	9.31501E-2	2.72805E1	-3.2632E1	-3.26032E1	2.67944E1	1.73531E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.9934E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.20255E-1	-7.98464E-1	-9.13169E0	-9.14168E0	5.19753E-3	9.30071E-2	2.72644E1	-3.26272E1	-3.25924E1	2.6822E1	1.73529E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.99283E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.20184E-1	-7.99203E-1	-9.13148E0	-9.1418E0	4.95911E-3	9.31263E-2	2.72945E1	-3.26738E1	-3.26555E1	2.67729E1	1.73531E-7	2.51203E-3	2.51203E-3	6.29128E-3	1.98661E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.20017E-1	-7.98941E-1	-9.1316E0	-9.14187E0	5.126E-3	9.2864E-2	2.73147E1	-3.26807E1	-3.26038E1	2.6819E1	1.73531E-7	2.51203E-3	2.51203E-3	6.32356E-3	1.9968E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.20136E-1	-7.98845E-1	-9.13162E0	-9.14161E0	5.00679E-3	9.3317E-2	2.73122E1	-3.26809E1	-3.2649E1	2.681E1	1.73529E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.01197E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.19945E-1	-7.98678E-1	-9.13153E0	-9.14187E0	4.91142E-3	9.30071E-2	2.73333E1	-3.26768E1	-3.26462E1	2.67698E1	1.73457E-7	2.51203E-3	2.51203E-3	6.3074E-3	2.00876E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.20112E-1	-7.98726E-1	-9.13148E0	-9.14199E0	5.14984E-3	9.31025E-2	2.73249E1	-3.26765E1	-3.26458E1	2.68124E1	1.73374E-7	2.51359E-3	2.51359E-3	6.31858E-3	2.00463E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.19778E-1	-7.98965E-1	-9.13143E0	-9.14202E0	5.38826E-3	9.2721E-2	2.73145E1	-3.26579E1	-3.26095E1	2.68022E1	1.73529E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.99283E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.19588E-1	-7.99131E-1	-9.13084E0	-9.14216E0	5.38826E-3	9.34362E-2	2.72732E1	-3.26478E1	-3.26301E1	2.67943E1	1.73531E-7	2.51417E-3	2.51417E-3	6.31278E-3	1.98661E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.1985E-1	-7.9875E-1	-9.13076E0	-9.14207E0	5.26905E-3	9.27448E-2	2.72787E1	-3.2641E1	-3.26224E1	2.67692E1	1.73309E-7	2.51203E-3	2.51203E-3	6.3074E-3	1.98322E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.19898E-1	-7.98678E-1	-9.13057E0	-9.14204E0	4.95911E-3	9.30309E-2	2.73283E1	-3.26834E1	-3.2655E1	2.67364E1	1.73605E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.98592E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.19802E-1	-7.99036E-1	-9.13048E0	-9.14183E0	5.24521E-3	9.34124E-2	2.72991E1	-3.26536E1	-3.26428E1	2.68148E1	1.73605E-7	2.51603E-3	2.51603E-3	6.32858E-3	1.99061E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.19921E-1	-7.98726E-1	-9.13012E0	-9.14185E0	4.95911E-3	9.33886E-2	2.73141E1	-3.2653E1	-3.26122E1	2.67806E1	1.73454E-7	2.52209E-3	2.52209E-3	6.30192E-3	1.98592E-1