[Scan]
initial_time=2016-02-16T04:35:15
final_time=2016-02-16T04:35:35
ip_count=19
run=1030
dataset=10
scan=738
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08766E-4
ql1_vset=
ql1_vmon=-8.19635E-1
ql1_imon=1.73101E-9
ql2_vset=
ql2_vmon=-7.99012E-1
ql2_imon=2.43223E-10
ql3_vset=
ql3_vmon=-9.13038E0
ql3_imon=3.79448E-9
ql4_vset=
ql4_vmon=-9.14178E0
ql4_imon=2.06792E-10
mult1=-1.03932E-8
mult2=-2.74506E-9
rf_tmon=-2.66424E-3
rf_agc=3.52496E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.98295E-3
ql5_imon=2.84481E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6727E0
bslens_imon=2.67422E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1983E1
lens5a_imon=1.98333E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12507E2
lens4a_imon=2.05323E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53676E1
cs_ef1b_imon=3.0937E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02425E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05082E1
cs_ea1_imon=2.17906E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34837E0
lens1_imon=2.57511E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64578E1
os_ef1alow_imon=2.99063E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03985E1
cs_ea2_imon=1.57842E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84262E1
cs_ef1a_imon=3.0155E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=3.42154E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11466E1
os_restr1_imon=2.88828E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15359E1
os_ea1_imon=1.87467E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63575E1
os_ef1bup_imon=3.10163E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2285E0
cs_ionrep_imon=1.26589E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93512E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01677E1
cs_anode1_imon=3.28832E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2057E0
olens4_imon=6.21426E-10
tplens_vset=1.4E-1
tplens_vmon=1.67565E0
tplens_imon=-2.74111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26359E1
iondef3_imon=1.4917E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26892E1
iondef2_imon=1.6085E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02962E2
lens6_imon=2.98495E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=2.87378E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26921E0
ionrepsh_imon=2.01377E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33705E1
lens5b_imon=2.19888E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74549E1
cs_ef2b_imon=3.14019E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.7994E-1
os_ea2_imon=-4.90015E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0612E2
lens4b_imon=2.00637E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71342E1
cs_ef2a_imon=3.20038E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61257E0
os_ef2alow_imon=-2.48616E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.61384E-1
os_ef2bup_imon=-5.18192E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10505E1
os_restr2_imon=2.87746E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.34105E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.2911E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72964E1
iondef1_imon=1.07972E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68088E1
iondef4_imon=1.09278E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.75598E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81879E-1
olens1_imon=1.95527E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08449E0
cs_ionaccel_imon=-1.95637E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47385E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56129E1
einzel_imon=7.77434E-6
window_vset=0.0E0
window_vmon=2.0593E-1
window_imon=-1.03376E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82605E2
mask1_imon=2.39297E-4
mask2_vset=0.0E0
mask2_vmon=-1.86284E1
mask2_imon=-4.67935E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.74619E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.65605E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=7.03831E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52072E0
defgridb_imon=6.3375E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33946E1
os_fil1_imon=4.69814E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.79154E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66967E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30867E1
cs_fil1_imon=1.00826E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61747E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67003E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.33189E-2
os_fil2_imon=-2.35362E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.56018E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.45092E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30817E-1
cs_fil2_imon=-2.20346E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.99846E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22508E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.00021E-1
chamber_ion_pmon=1.73309E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.50592E-1
res40_imon=-2.42849E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.19731E-1	-7.98631E-1	-9.13067E0	-9.14192E0	5.26905E-3	9.29594E-2	2.72992E1	-3.26443E1	-3.26408E1	2.68244E1	1.73383E-7	2.51847E-3	2.51847E-3	6.32896E-3	1.98153E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.19921E-1	-7.98345E-1	-9.13079E0	-9.14209E0	5.10216E-3	9.29117E-2	2.73222E1	-3.26658E1	-3.26395E1	2.68126E1	1.73531E-7	2.50989E-3	2.50989E-3	6.31278E-3	1.98322E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.19731E-1	-7.98178E-1	-9.13036E0	-9.14202E0	5.05447E-3	9.28879E-2	2.72609E1	-3.26897E1	-3.25806E1	2.68065E1	1.73605E-7	2.51136E-3	2.51136E-3	6.32418E-3	1.98344E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.19612E-1	-7.98202E-1	-9.13019E0	-9.14183E0	5.57899E-3	9.3174E-2	2.73243E1	-3.26651E1	-3.26561E1	2.68082E1	1.73605E-7	2.5131E-3	2.5131E-3	6.31278E-3	1.98153E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.1954E-1	-7.98464E-1	-9.13017E0	-9.1418E0	5.29289E-3	9.2411E-2	2.72925E1	-3.26669E1	-3.25882E1	2.68058E1	1.73379E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.9911E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.19564E-1	-7.98106E-1	-9.13022E0	-9.14214E0	5.38826E-3	9.27687E-2	2.73045E1	-3.26791E1	-3.26183E1	2.67956E1	1.73454E-7	2.51116E-3	2.51116E-3	6.32386E-3	1.9911E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.19731E-1	-7.98607E-1	-9.13043E0	-9.14202E0	5.79357E-3	9.30309E-2	2.73087E1	-3.26428E1	-3.2635E1	2.67758E1	1.73605E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.9934E-1
8.0E0	2.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.19874E-1	-7.98225E-1	-9.13069E0	-9.14202E0	5.19753E-3	9.32693E-2	2.72543E1	-3.26829E1	-3.25881E1	2.6822E1	1.73379E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.00673E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.19564E-1	-7.9813E-1	-9.13038E0	-9.14197E0	5.00679E-3	9.3317E-2	2.72514E1	-3.26838E1	-3.26001E1	2.68064E1	1.73529E-7	2.51116E-3	2.51116E-3	6.30192E-3	1.99977E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.19826E-1	-7.98607E-1	-9.13067E0	-9.14168E0	5.14984E-3	9.32932E-2	2.73111E1	-3.26272E1	-3.26843E1	2.68292E1	1.73454E-7	2.52099E-3	2.52099E-3	6.28006E-3	1.9911E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.19778E-1	-7.98488E-1	-9.13062E0	-9.1419E0	5.38826E-3	9.35555E-2	2.7266E1	-3.27083E1	-3.25695E1	2.67932E1	1.73529E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.9911E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.19826E-1	-7.98011E-1	-9.13074E0	-9.14187E0	4.93526E-3	9.32455E-2	2.7261E1	-3.27258E1	-3.25899E1	2.67908E1	1.73529E-7	2.52209E-3	2.52209E-3	6.29098E-3	1.98419E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.19492E-1	-7.98559E-1	-9.13088E0	-9.14211E0	5.34058E-3	9.31025E-2	2.73404E1	-3.26839E1	-3.26109E1	2.68233E1	1.73529E-7	2.52209E-3	2.52209E-3	6.30192E-3	1.98419E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.19421E-1	-7.98321E-1	-9.13043E0	-9.14204E0	5.07832E-3	9.32455E-2	2.73724E1	-3.26487E1	-3.26707E1	2.67619E1	1.73531E-7	2.5131E-3	2.5131E-3	6.31817E-3	1.97478E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.19588E-1	-7.98607E-1	-9.13043E0	-9.14187E0	5.17368E-3	9.32455E-2	2.73261E1	-3.26825E1	-3.2617E1	2.68176E1	1.73529E-7	2.51771E-3	2.51771E-3	6.29645E-3	1.99283E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.19492E-1	-7.98512E-1	-9.13045E0	-9.14185E0	4.88758E-3	9.32217E-2	2.73171E1	-3.26915E1	-3.2614E1	2.67746E1	1.73605E-7	2.52027E-3	2.52027E-3	6.31858E-3	1.99401E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.19254E-1	-7.98392E-1	-9.13069E0	-9.14154E0	5.34058E-3	9.31978E-2	2.73063E1	-3.26404E1	-3.26242E1	2.67864E1	1.73605E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.01047E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.19683E-1	-7.98559E-1	-9.13055E0	-9.14166E0	5.26905E-3	9.32455E-2	2.73063E1	-3.26669E1	-3.26098E1	2.6796E1	1.73605E-7	2.5147E-3	2.5147E-3	6.31299E-3	2.00285E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.19635E-1	-7.98869E-1	-9.13055E0	-9.14211E0	4.95911E-3	9.3317E-2	2.73051E1	-3.26425E1	-3.26024E1	2.6786E1	1.73454E-7	2.51771E-3	2.51771E-3	6.29645E-3	1.99977E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.19635E-1	-7.99012E-1	-9.13038E0	-9.14178E0	4.98295E-3	9.31978E-2	2.72964E1	-3.26892E1	-3.26359E1	2.68088E1	1.73309E-7	2.52169E-3	2.52169E-3	6.33436E-3	2.00021E-1