[Scan]
initial_time=2016-02-16T04:35:42
final_time=2016-02-16T04:36:01
ip_count=19
run=1030
dataset=10
scan=739
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08762E-4
ql1_vset=
ql1_vmon=-8.19278E-1
ql1_imon=1.31675E-9
ql2_vset=
ql2_vmon=-7.98965E-1
ql2_imon=2.34199E-10
ql3_vset=
ql3_vmon=-9.13067E0
ql3_imon=2.7771E-9
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=2.96295E-10
mult1=-9.33101E-9
mult2=-2.82241E-9
rf_tmon=-4.59053E-3
rf_agc=3.26486E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.00679E-3
ql5_imon=2.91812E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66193E0
bslens_imon=2.84778E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20205E1
lens5a_imon=1.99244E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12463E2
lens4a_imon=2.05288E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53532E1
cs_ef1b_imon=3.07965E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04642E2
lens23_imon=1.02262E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04928E1
cs_ea1_imon=2.17522E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36715E0
lens1_imon=2.76486E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65089E1
os_ef1alow_imon=2.99531E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03907E1
cs_ea2_imon=1.57103E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8446E1
cs_ef1a_imon=3.02631E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=3.07143E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11153E1
os_restr1_imon=2.8872E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15011E1
os_ea1_imon=1.89835E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63593E1
os_ef1bup_imon=3.10163E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23227E0
cs_ionrep_imon=1.27506E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93463E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02248E1
cs_anode1_imon=3.28579E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=5.63455E-10
tplens_vset=1.4E-1
tplens_vmon=1.62281E0
tplens_imon=-2.52482E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25852E1
iondef3_imon=1.4928E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26753E1
iondef2_imon=1.60599E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02972E2
lens6_imon=2.9845E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=2.98476E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22146E0
ionrepsh_imon=2.03426E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3382E1
lens5b_imon=2.20478E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74639E1
cs_ef2b_imon=3.13515E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.59534E-1
os_ea2_imon=-5.66113E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06161E2
lens4b_imon=2.00789E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71126E1
cs_ef2a_imon=3.19209E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62338E0
os_ef2alow_imon=-2.57626E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.60784E-1
os_ef2bup_imon=-5.17471E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10709E1
os_restr2_imon=2.87458E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.3101E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.30299E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73021E1
iondef1_imon=1.10707E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6787E1
iondef4_imon=1.09819E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.82104E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=2.07031E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10491E0
cs_ionaccel_imon=-1.91673E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47291E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56129E1
einzel_imon=7.87885E-6
window_vset=0.0E0
window_vmon=2.27554E-1
window_imon=-9.40055E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82597E2
mask1_imon=2.39192E-4
mask2_vset=0.0E0
mask2_vmon=-1.86554E1
mask2_imon=-6.22906E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92613E3
multa_neg_imon=7.61353E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.91056E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.39723E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35645E0
defgridb_imon=6.00572E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33938E1
os_fil1_imon=5.03451E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.77953E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66675E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30869E1
cs_fil1_imon=1.00885E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63501E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67067E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35745E-2
os_fil2_imon=-2.28755E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.17866E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.52517E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31464E-1
cs_fil2_imon=-2.21547E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.23872E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22588E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=1.96135E-1
chamber_ion_pmon=1.73531E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.1215E-1
res40_imon=-2.56544E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.19325E-1	-7.98464E-1	-9.13088E0	-9.14192E0	5.45979E-3	9.31263E-2	2.73033E1	-3.26602E1	-3.25918E1	2.68076E1	1.73457E-7	2.51954E-3	2.51954E-3	6.30202E-3	1.98491E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.19635E-1	-7.98249E-1	-9.13084E0	-9.14173E0	5.31673E-3	9.28879E-2	2.73027E1	-3.26444E1	-3.26205E1	2.67842E1	1.73529E-7	2.51334E-3	2.51334E-3	6.32936E-3	1.9963E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.19468E-1	-7.98965E-1	-9.13067E0	-9.14195E0	5.53131E-3	9.31978E-2	2.72638E1	-3.26667E1	-3.25953E1	2.67902E1	1.73451E-7	2.50803E-3	2.50803E-3	6.31858E-3	1.98872E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.1923E-1	-7.98321E-1	-9.13062E0	-9.14223E0	5.67436E-3	9.35078E-2	2.72827E1	-3.26626E1	-3.26207E1	2.67821E1	1.73605E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.9968E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.19421E-1	-7.98631E-1	-9.13074E0	-9.14199E0	5.8651E-3	9.33647E-2	2.72715E1	-3.26591E1	-3.26609E1	2.68154E1	1.73383E-7	2.51847E-3	2.51847E-3	6.29128E-3	1.99E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.19159E-1	-7.98607E-1	-9.13067E0	-9.14202E0	5.53131E-3	9.31501E-2	2.72985E1	-3.26392E1	-3.26543E1	2.67968E1	1.73605E-7	2.51443E-3	2.51443E-3	6.30192E-3	1.98764E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.19468E-1	-7.98941E-1	-9.13048E0	-9.14242E0	5.48363E-3	9.31978E-2	2.73112E1	-3.26401E1	-3.27031E1	2.68142E1	1.73454E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.98764E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.19421E-1	-7.98798E-1	-9.13036E0	-9.14197E0	4.93526E-3	9.31025E-2	2.73222E1	-3.26897E1	-3.26301E1	2.68322E1	1.73379E-7	2.51225E-3	2.51225E-3	6.31837E-3	1.98937E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.19564E-1	-7.98488E-1	-9.13064E0	-9.14183E0	5.14984E-3	9.30548E-2	2.7269E1	-3.26639E1	-3.2638E1	2.6822E1	1.73454E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.00325E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.19516E-1	-7.98845E-1	-9.13067E0	-9.1418E0	5.17368E-3	9.29117E-2	2.73195E1	-3.26627E1	-3.26494E1	2.67734E1	1.73454E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.9911E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.19516E-1	-7.98512E-1	-9.13038E0	-9.14187E0	5.22137E-3	9.32693E-2	2.72931E1	-3.26813E1	-3.2602E1	2.6825E1	1.73605E-7	2.51225E-3	2.51225E-3	6.3074E-3	1.99977E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.19325E-1	-7.98512E-1	-9.1306E0	-9.14178E0	5.36442E-3	9.30309E-2	2.73237E1	-3.26783E1	-3.26248E1	2.67926E1	1.73529E-7	2.51771E-3	2.51771E-3	6.34037E-3	1.99283E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.1954E-1	-7.98583E-1	-9.13081E0	-9.14195E0	4.98295E-3	9.27448E-2	2.72696E1	-3.26591E1	-3.25972E1	2.67541E1	1.73379E-7	2.51225E-3	2.51225E-3	6.32936E-3	1.95341E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.19302E-1	-7.98416E-1	-9.13074E0	-9.14173E0	5.14984E-3	9.27687E-2	2.73346E1	-3.26862E1	-3.25735E1	2.6777E1	1.73454E-7	2.5188E-3	2.5188E-3	6.29645E-3	1.9585E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.19302E-1	-7.98416E-1	-9.13074E0	-9.1419E0	5.10216E-3	9.29594E-2	2.72831E1	-3.26627E1	-3.26315E1	2.6798E1	1.73531E-7	2.51954E-3	2.51954E-3	6.32356E-3	1.95134E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.19612E-1	-7.98702E-1	-9.13084E0	-9.14195E0	4.88758E-3	9.31263E-2	2.72751E1	-3.26603E1	-3.26386E1	2.68292E1	1.73528E-7	2.51581E-3	2.51581E-3	6.31299E-3	1.95037E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.19349E-1	-7.98202E-1	-9.13048E0	-9.14199E0	5.03063E-3	9.30071E-2	2.73604E1	-3.26699E1	-3.26332E1	2.67782E1	1.73531E-7	2.5131E-3	2.5131E-3	6.31817E-3	1.95467E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-8.19492E-1	-7.98368E-1	-9.13095E0	-9.14209E0	5.26905E-3	9.31025E-2	2.72691E1	-3.26655E1	-3.26508E1	2.68124E1	1.73605E-7	2.51915E-3	2.51915E-3	6.32978E-3	1.95555E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.19445E-1	-7.98559E-1	-9.13093E0	-9.14214E0	5.38826E-3	9.31978E-2	2.72937E1	-3.27083E1	-3.26098E1	2.68476E1	1.73531E-7	2.51096E-3	2.51096E-3	6.32896E-3	1.97142E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.19278E-1	-7.98965E-1	-9.13067E0	-9.1418E0	5.00679E-3	9.31263E-2	2.73021E1	-3.26753E1	-3.25852E1	2.6787E1	1.73531E-7	2.51203E-3	2.51203E-3	6.32356E-3	1.96135E-1