[Scan]
initial_time=2016-02-16T04:36:35
final_time=2016-02-16T04:36:55
ip_count=19
run=1030
dataset=10
scan=741
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08751E-4
ql1_vset=
ql1_vmon=-8.18515E-1
ql1_imon=1.06502E-9
ql2_vset=
ql2_vmon=-7.98416E-1
ql2_imon=2.67398E-10
ql3_vset=
ql3_vmon=-9.13107E0
ql3_imon=1.90526E-9
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=4.03345E-10
mult1=-9.83671E-9
mult2=-2.8264E-9
rf_tmon=-1.41216E-3
rf_agc=3.54966E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=3.38233E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68686E0
bslens_imon=2.82641E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19559E1
lens5a_imon=1.98262E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12504E2
lens4a_imon=2.05284E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53609E1
cs_ef1b_imon=3.0833E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02082E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04947E1
cs_ea1_imon=2.2187E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40088E0
lens1_imon=2.58573E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64493E1
os_ef1alow_imon=2.99156E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03566E1
cs_ea2_imon=1.58514E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84585E1
cs_ef1a_imon=3.02978E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=3.55458E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11025E1
os_restr1_imon=2.88209E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15553E1
os_ea1_imon=1.89484E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6356E1
os_ef1bup_imon=3.08956E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20963E0
cs_ionrep_imon=1.27898E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.9314E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01798E1
cs_anode1_imon=3.29425E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20561E0
olens4_imon=6.88839E-10
tplens_vset=1.4E-1
tplens_vmon=1.58244E0
tplens_imon=-6.52862E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26464E1
iondef3_imon=1.50621E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26729E1
iondef2_imon=1.58019E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02942E2
lens6_imon=2.98661E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=3.25298E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25033E0
ionrepsh_imon=2.00952E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33923E1
lens5b_imon=2.23179E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.73795E1
cs_ef2b_imon=3.1323E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.19181E-1
os_ea2_imon=-5.32488E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0615E2
lens4b_imon=2.00725E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71345E1
cs_ef2a_imon=3.18756E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61176E0
os_ef2alow_imon=-2.38344E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.45102E-1
os_ef2bup_imon=-5.22273E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11048E1
os_restr2_imon=2.88556E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23031E2
cs_ionfoca_imon=6.30707E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02076E1
cs_anode2_imon=2.28955E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72997E1
iondef1_imon=1.10378E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68099E1
iondef4_imon=1.09581E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.80111E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=2.4929E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09944E0
cs_ionaccel_imon=-1.87953E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02061E2
cs_ionfocb_imon=1.47313E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56492E1
einzel_imon=7.54883E-6
window_vset=0.0E0
window_vmon=2.24057E-1
window_imon=-8.9256E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.39001E-4
mask2_vset=0.0E0
mask2_vmon=-1.86587E1
mask2_imon=-4.37302E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92683E3
multa_neg_imon=7.73557E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.98876E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=7.09848E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.16637E0
defgridb_imon=5.95171E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33907E1
os_fil1_imon=5.27177E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.61177E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.67017E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3081E1
cs_fil1_imon=1.00818E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63345E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67092E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.15461E-2
os_fil2_imon=-2.32166E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.98741E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.44459E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30151E-1
cs_fil2_imon=-2.31008E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.27523E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22625E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.9883E-1
chamber_ion_pmon=1.73457E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.45884E-1
res40_imon=-2.47032E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.18682E-1	-7.98965E-1	-9.13086E0	-9.14216E0	5.126E-3	9.34124E-2	2.72937E1	-3.26458E1	-3.26212E1	2.68136E1	1.73457E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.9934E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09387E0	-8.1892E-1	-7.98583E-1	-9.13103E0	-9.14183E0	5.55515E-3	9.32455E-2	2.72901E1	-3.26567E1	-3.265E1	2.67992E1	1.73531E-7	2.51954E-3	2.51954E-3	6.31817E-3	1.9968E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09379E0	-8.18801E-1	-7.9813E-1	-9.13103E0	-9.14204E0	5.8651E-3	9.33886E-2	2.73039E1	-3.26116E1	-3.26464E1	2.68184E1	1.73528E-7	2.51248E-3	2.51248E-3	6.33538E-3	2.00285E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.19016E-1	-7.98321E-1	-9.13069E0	-9.14178E0	5.38826E-3	9.32932E-2	2.73328E1	-3.2685E1	-3.26254E1	2.67866E1	1.73457E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.00705E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09402E0	-8.18682E-1	-7.98035E-1	-9.13088E0	-9.1419E0	5.57899E-3	9.34362E-2	2.73249E1	-3.26669E1	-3.2614E1	2.68046E1	1.73529E-7	2.52318E-3	2.52318E-3	6.3074E-3	2.01022E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09371E0	-8.18634E-1	-7.97939E-1	-9.13093E0	-9.14209E0	5.05447E-3	9.32932E-2	2.72901E1	-3.26561E1	-3.26356E1	2.67872E1	1.73529E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.99456E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09426E0	-8.18706E-1	-7.98631E-1	-9.13107E0	-9.1419E0	5.05447E-3	9.31978E-2	2.72967E1	-3.26861E1	-3.26062E1	2.67775E1	1.73379E-7	2.50898E-3	2.50898E-3	6.32386E-3	2.00673E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-8.18658E-1	-7.98368E-1	-9.13084E0	-9.14192E0	5.24521E-3	9.3174E-2	2.73216E1	-3.26738E1	-3.26189E1	2.68004E1	1.73605E-7	2.51096E-3	2.51096E-3	6.32896E-3	2.01047E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09371E0	-8.18515E-1	-7.97868E-1	-9.13079E0	-9.14178E0	5.6982E-3	9.30309E-2	2.72962E1	-3.26431E1	-3.26154E1	2.67938E1	1.73605E-7	2.51334E-3	2.51334E-3	6.29098E-3	1.99977E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09402E0	-8.18467E-1	-7.98035E-1	-9.13086E0	-9.1418E0	5.00679E-3	9.31978E-2	2.73375E1	-3.26585E1	-3.26182E1	2.67866E1	1.73383E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.00705E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-8.18586E-1	-7.97963E-1	-9.13112E0	-9.14171E0	4.95911E-3	9.28879E-2	2.72847E1	-3.26398E1	-3.26567E1	2.67896E1	1.73454E-7	2.51225E-3	2.51225E-3	6.30192E-3	1.98937E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.18682E-1	-7.98082E-1	-9.13098E0	-9.14185E0	4.98295E-3	9.34124E-2	2.73207E1	-3.26428E1	-3.26386E1	2.6795E1	1.73605E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.98419E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.18729E-1	-7.97987E-1	-9.13093E0	-9.14192E0	5.10216E-3	9.32217E-2	2.73094E1	-3.26799E1	-3.26193E1	2.6804E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.9963E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.18706E-1	-7.98392E-1	-9.13086E0	-9.14166E0	5.43594E-3	9.31263E-2	2.72949E1	-3.26428E1	-3.26801E1	2.6801E1	1.73374E-7	2.51693E-3	2.51693E-3	6.29624E-3	1.98872E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.18563E-1	-7.98321E-1	-9.13119E0	-9.14161E0	5.07832E-3	9.30548E-2	2.73069E1	-3.26756E1	-3.26095E1	2.68088E1	1.73457E-7	2.5131E-3	2.5131E-3	6.32356E-3	1.9917E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.18539E-1	-7.98416E-1	-9.13076E0	-9.14178E0	5.72205E-3	9.31263E-2	2.73187E1	-3.26826E1	-3.25965E1	2.67811E1	1.73529E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.9911E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.18539E-1	-7.98416E-1	-9.131E0	-9.1419E0	5.19753E-3	9.31978E-2	2.73309E1	-3.26194E1	-3.26693E1	2.67944E1	1.73605E-7	2.5131E-3	2.5131E-3	6.32896E-3	2.00876E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.18586E-1	-7.98845E-1	-9.1311E0	-9.14209E0	5.22137E-3	9.31501E-2	2.72871E1	-3.26795E1	-3.25876E1	2.67716E1	1.73454E-7	2.51225E-3	2.51225E-3	6.31288E-3	2.00499E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.18515E-1	-7.98106E-1	-9.13091E0	-9.14199E0	5.4121E-3	9.31263E-2	2.72898E1	-3.2649E1	-3.26508E1	2.68112E1	1.73454E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.00151E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.18515E-1	-7.98416E-1	-9.13107E0	-9.14202E0	5.07832E-3	9.31025E-2	2.72997E1	-3.26729E1	-3.26464E1	2.68099E1	1.73457E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.9883E-1