[Scan]
initial_time=2016-02-16T04:37:28
final_time=2016-02-16T04:37:48
ip_count=19
run=1030
dataset=10
scan=743
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08837E-4
ql1_vset=
ql1_vmon=-8.18348E-1
ql1_imon=9.0642E-10
ql2_vset=
ql2_vmon=-7.98488E-1
ql2_imon=2.5866E-10
ql3_vset=
ql3_vmon=-9.13122E0
ql3_imon=1.46612E-9
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=4.25386E-10
mult1=-8.72898E-9
mult2=-2.78249E-9
rf_tmon=-4.42831E-3
rf_agc=3.35439E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=3.42333E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63069E0
bslens_imon=2.69998E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20379E1
lens5a_imon=1.98307E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.05136E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53634E1
cs_ef1b_imon=3.07352E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02373E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04808E1
cs_ea1_imon=2.18098E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38998E0
lens1_imon=2.66393E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64458E1
os_ef1alow_imon=2.99351E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03792E1
cs_ea2_imon=1.57211E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84214E1
cs_ef1a_imon=3.01514E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=3.37827E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11153E1
os_restr1_imon=2.88251E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15462E1
os_ea1_imon=1.88105E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63773E1
os_ef1bup_imon=3.09046E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21064E0
cs_ionrep_imon=1.26064E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.93561E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01533E1
cs_anode1_imon=3.28976E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20568E0
olens4_imon=6.56247E-10
tplens_vset=1.4E-1
tplens_vmon=1.6192E0
tplens_imon=-2.27247E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25894E1
iondef3_imon=1.51731E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26855E1
iondef2_imon=1.57355E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02981E2
lens6_imon=2.98814E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=3.22509E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28995E0
ionrepsh_imon=2.01876E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33628E1
lens5b_imon=2.21199E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7339E1
cs_ef2b_imon=3.13082E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.75756E-1
os_ea2_imon=-6.45421E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06107E2
lens4b_imon=2.00626E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71096E1
cs_ef2a_imon=3.18993E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62399E0
os_ef2alow_imon=-2.38525E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.06123E-1
os_ef2bup_imon=-5.06299E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10487E1
os_restr2_imon=2.88143E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23092E2
cs_ionfoca_imon=6.32127E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01731E1
cs_anode2_imon=2.29578E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73231E1
iondef1_imon=1.12185E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68148E1
iondef4_imon=1.11224E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=1.84848E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=2.39456E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13074E0
cs_ionaccel_imon=-2.08972E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47262E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56147E1
einzel_imon=7.88606E-6
window_vset=0.0E0
window_vmon=2.10135E-1
window_imon=-1.14909E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39315E-4
mask2_vset=0.0E0
mask2_vmon=-1.86398E1
mask2_imon=-6.19302E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92605E3
multa_neg_imon=7.86587E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.79881E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.10883E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30532E0
defgridb_imon=6.16794E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33915E1
os_fil1_imon=4.34975E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.58732E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6676E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30844E1
cs_fil1_imon=1.00876E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63159E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67071E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26717E-2
os_fil2_imon=-2.32359E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.89945E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.51743E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31335E-1
cs_fil2_imon=-2.14339E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2083E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2251E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=1.98937E-1
chamber_ion_pmon=1.73454E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.578E-1
res40_imon=-2.70239E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09673E0	-8.18372E-1	-7.98225E-1	-9.13112E0	-9.14202E0	5.14984E-3	9.30786E-2	2.72831E1	-3.26503E1	-3.26596E1	2.68007E1	1.73529E-7	2.51116E-3	2.51116E-3	6.30192E-3	1.9963E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.183E-1	-7.98297E-1	-9.13093E0	-9.14204E0	5.26905E-3	9.30548E-2	2.73137E1	-3.26701E1	-3.26493E1	2.67914E1	1.73605E-7	2.52131E-3	2.52131E-3	6.32858E-3	1.98894E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.18443E-1	-7.98678E-1	-9.1311E0	-9.14187E0	5.38826E-3	9.30309E-2	2.7311E1	-3.27098E1	-3.26213E1	2.67746E1	1.73214E-7	2.51611E-3	2.51611E-3	6.29603E-3	2.00244E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09688E0	-8.18491E-1	-7.98678E-1	-9.13088E0	-9.14226E0	5.29289E-3	9.28879E-2	2.72968E1	-3.26236E1	-3.26767E1	2.67656E1	1.73459E-7	2.51182E-3	2.51182E-3	6.32858E-3	1.99896E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09688E0	-8.18515E-1	-7.98368E-1	-9.13105E0	-9.14187E0	5.74589E-3	9.30071E-2	2.73045E1	-3.26874E1	-3.2629E1	2.67956E1	1.73605E-7	2.52318E-3	2.52318E-3	6.29645E-3	2.00499E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0968E0	-8.18229E-1	-7.98368E-1	-9.13105E0	-9.14164E0	5.34058E-3	9.30071E-2	2.73039E1	-3.26446E1	-3.26134E1	2.68088E1	1.73531E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.99E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-8.18014E-1	-7.97987E-1	-9.131E0	-9.14176E0	6.03199E-3	9.32455E-2	2.73143E1	-3.26719E1	-3.26132E1	2.6807E1	1.73379E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.99456E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-8.18014E-1	-7.98321E-1	-9.13119E0	-9.14221E0	5.34058E-3	9.31263E-2	2.72762E1	-3.26555E1	-3.25894E1	2.67788E1	1.73529E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.9963E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.18133E-1	-7.98392E-1	-9.13122E0	-9.1418E0	5.38826E-3	9.3174E-2	2.73105E1	-3.26242E1	-3.26164E1	2.67848E1	1.73529E-7	2.5199E-3	2.5199E-3	6.28552E-3	1.9963E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.17823E-1	-7.98488E-1	-9.13117E0	-9.14192E0	5.38826E-3	9.35555E-2	2.72745E1	-3.26585E1	-3.26152E1	2.68178E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.99283E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.18157E-1	-7.98655E-1	-9.13084E0	-9.1419E0	5.36442E-3	9.28879E-2	2.73231E1	-3.26795E1	-3.26422E1	2.67854E1	1.73529E-7	2.51443E-3	2.51443E-3	6.29098E-3	1.98592E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09611E0	-8.18443E-1	-7.98607E-1	-9.13119E0	-9.14207E0	5.6982E-3	9.30786E-2	2.72865E1	-3.26639E1	-3.26302E1	2.68148E1	1.73529E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.00673E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.17966E-1	-7.98297E-1	-9.13095E0	-9.14226E0	5.55515E-3	9.32217E-2	2.73617E1	-3.26767E1	-3.26089E1	2.67758E1	1.73605E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.99803E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09688E0	-8.18539E-1	-7.98678E-1	-9.13117E0	-9.14221E0	5.50747E-3	9.33409E-2	2.73075E1	-3.26664E1	-3.26132E1	2.684E1	1.73531E-7	2.51847E-3	2.51847E-3	6.30202E-3	1.99E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0968E0	-8.18181E-1	-7.98559E-1	-9.13136E0	-9.14218E0	5.53131E-3	9.3317E-2	2.73291E1	-3.26681E1	-3.26254E1	2.68352E1	1.73529E-7	2.51279E-3	2.51279E-3	6.32386E-3	1.97645E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.18396E-1	-7.98345E-1	-9.13091E0	-9.14216E0	5.45979E-3	9.34362E-2	2.7255E1	-3.26797E1	-3.26024E1	2.68142E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.18253E-1	-7.98202E-1	-9.13131E0	-9.14221E0	5.50747E-3	9.34362E-2	2.73195E1	-3.26663E1	-3.26146E1	2.67938E1	1.73605E-7	2.52061E-3	2.52061E-3	6.3074E-3	1.97984E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.18133E-1	-7.98488E-1	-9.1311E0	-9.14214E0	5.17368E-3	9.34601E-2	2.73128E1	-3.26756E1	-3.26107E1	2.681E1	1.73451E-7	2.51804E-3	2.51804E-3	6.31858E-3	1.97818E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.18229E-1	-7.98488E-1	-9.13134E0	-9.14204E0	5.50747E-3	9.31263E-2	2.7308E1	-3.2636E1	-3.26484E1	2.68076E1	1.73677E-7	2.51498E-3	2.51498E-3	6.30212E-3	1.98727E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.18348E-1	-7.98488E-1	-9.13122E0	-9.14195E0	5.48363E-3	9.32217E-2	2.73231E1	-3.26855E1	-3.25894E1	2.68148E1	1.73454E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.98937E-1