[Scan]
initial_time=2016-02-16T04:37:55
final_time=2016-02-16T04:38:15
ip_count=19
run=1030
dataset=10
scan=744
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08795E-4
ql1_vset=
ql1_vmon=-8.17847E-1
ql1_imon=8.72064E-10
ql2_vset=
ql2_vmon=-7.98249E-1
ql2_imon=2.68328E-10
ql3_vset=
ql3_vmon=-9.13117E0
ql3_imon=1.32129E-9
ql4_vset=
ql4_vmon=-9.14207E0
ql4_imon=4.32122E-10
mult1=-1.0653E-8
mult2=-2.79921E-9
rf_tmon=-3.7564E-3
rf_agc=3.33896E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=3.39437E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69317E0
bslens_imon=2.5017E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19845E1
lens5a_imon=2.00506E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.05197E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53589E1
cs_ef1b_imon=3.06046E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.02168E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04982E1
cs_ea1_imon=2.16945E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40801E0
lens1_imon=2.63869E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65003E1
os_ef1alow_imon=2.97343E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03828E1
cs_ea2_imon=1.60095E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8403E1
cs_ef1a_imon=3.02888E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=3.6056E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11185E1
os_restr1_imon=2.87686E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14945E1
os_ea1_imon=1.88538E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63798E1
os_ef1bup_imon=3.08983E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.3296E0
cs_ionrep_imon=1.26857E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93553E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01772E1
cs_anode1_imon=3.2962E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=6.39296E-10
tplens_vset=1.4E-1
tplens_vmon=1.58496E0
tplens_imon=-1.09497E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26505E1
iondef3_imon=1.4946E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26578E1
iondef2_imon=1.57463E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03007E2
lens6_imon=2.98595E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=3.77119E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26892E0
ionrepsh_imon=2.04904E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33688E1
lens5b_imon=2.17377E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74764E1
cs_ef2b_imon=3.12398E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.95584E-1
os_ea2_imon=-4.50754E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71013E1
cs_ef2a_imon=3.19669E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64544E0
os_ef2alow_imon=-2.4578E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99056E-1
os_ef2bup_imon=-5.24115E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10701E1
os_restr2_imon=2.8618E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.31911E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02121E1
cs_anode2_imon=2.29449E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73039E1
iondef1_imon=1.10058E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67926E1
iondef4_imon=1.09375E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.82608E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=2.1199E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12525E0
cs_ionaccel_imon=-1.83724E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47487E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56185E1
einzel_imon=7.7062E-6
window_vset=0.0E0
window_vmon=2.06451E-1
window_imon=-1.05144E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82609E2
mask1_imon=2.39143E-4
mask2_vset=0.0E0
mask2_vmon=-1.86656E1
mask2_imon=-5.55723E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92595E3
multa_neg_imon=7.79017E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.98987E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50152E3
multb_neg_imon=7.34315E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.10081E0
defgridb_imon=6.30132E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33951E1
os_fil1_imon=5.21822E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.62948E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6669E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3084E1
cs_fil1_imon=1.00989E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62268E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6695E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.39615E-2
os_fil2_imon=-2.32155E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.60819E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.60637E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28926E-1
cs_fil2_imon=-2.19915E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.70978E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22448E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=1.9883E-1
chamber_ion_pmon=1.73457E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.74086E-1
res40_imon=-2.46514E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.183E-1	-7.98821E-1	-9.13124E0	-9.14173E0	5.22137E-3	9.35078E-2	2.72957E1	-3.2672E1	-3.26018E1	2.68153E1	1.73605E-7	2.51662E-3	2.51662E-3	6.33486E-3	1.98937E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.18062E-1	-7.98702E-1	-9.1311E0	-9.1419E0	5.50747E-3	9.35316E-2	2.73277E1	-3.26456E1	-3.2615E1	2.67988E1	1.73457E-7	2.51847E-3	2.51847E-3	6.34518E-3	1.99E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.18372E-1	-7.9875E-1	-9.13093E0	-9.14237E0	5.53131E-3	9.35555E-2	2.7324E1	-3.26708E1	-3.26254E1	2.67897E1	1.73605E-7	2.51693E-3	2.51693E-3	6.33538E-3	1.99048E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.18324E-1	-7.98535E-1	-9.13091E0	-9.14218E0	5.38826E-3	9.31025E-2	2.72805E1	-3.26476E1	-3.25942E1	2.68088E1	1.73529E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.99283E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.18563E-1	-7.99108E-1	-9.13126E0	-9.14221E0	5.50747E-3	9.32693E-2	2.73442E1	-3.26657E1	-3.26338E1	2.67764E1	1.73605E-7	2.51739E-3	2.51739E-3	6.3074E-3	1.9934E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.18467E-1	-7.98678E-1	-9.1311E0	-9.14204E0	5.43594E-3	9.32693E-2	2.72985E1	-3.2647E1	-3.26609E1	2.68166E1	1.73605E-7	2.52318E-3	2.52318E-3	6.31288E-3	1.98764E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.18443E-1	-7.98297E-1	-9.13098E0	-9.14207E0	5.07832E-3	9.34362E-2	2.72751E1	-3.26633E1	-3.2587E1	2.67818E1	1.73529E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.98937E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.1811E-1	-7.98297E-1	-9.13136E0	-9.14202E0	4.76837E-3	9.32217E-2	2.72803E1	-3.26508E1	-3.26048E1	2.67601E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.18276E-1	-7.98345E-1	-9.13119E0	-9.14185E0	5.126E-3	9.34124E-2	2.73099E1	-3.26669E1	-3.26326E1	2.6829E1	1.73454E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.99803E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.18348E-1	-7.98774E-1	-9.13119E0	-9.14209E0	5.29289E-3	9.34839E-2	2.72935E1	-3.27054E1	-3.26046E1	2.6781E1	1.73531E-7	2.51954E-3	2.51954E-3	6.28592E-3	1.98491E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-8.18133E-1	-7.98726E-1	-9.13143E0	-9.14187E0	5.53131E-3	9.34124E-2	2.72815E1	-3.26537E1	-3.26183E1	2.68334E1	1.73532E-7	2.51393E-3	2.51393E-3	6.3074E-3	1.99729E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.18086E-1	-7.98726E-1	-9.1315E0	-9.1419E0	5.24521E-3	9.33409E-2	2.73094E1	-3.26701E1	-3.26138E1	2.68322E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.98592E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.18205E-1	-7.98464E-1	-9.13146E0	-9.14195E0	5.14984E-3	9.34124E-2	2.73405E1	-3.2682E1	-3.26349E1	2.6804E1	1.73379E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.9911E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.183E-1	-7.98512E-1	-9.13107E0	-9.1418E0	5.00679E-3	9.30786E-2	2.73149E1	-3.26468E1	-3.25991E1	2.67373E1	1.73531E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.9934E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.18491E-1	-7.98845E-1	-9.13098E0	-9.14192E0	5.05447E-3	9.30786E-2	2.72962E1	-3.26555E1	-3.26248E1	2.67565E1	1.73451E-7	2.51915E-3	2.51915E-3	6.31858E-3	1.99048E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.17823E-1	-7.98392E-1	-9.131E0	-9.14204E0	4.93526E-3	9.30071E-2	2.73025E1	-3.26585E1	-3.26286E1	2.67669E1	1.73309E-7	2.51632E-3	2.51632E-3	6.3074E-3	1.9883E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.18157E-1	-7.9844E-1	-9.13093E0	-9.14199E0	5.07832E-3	9.33409E-2	2.7311E1	-3.26673E1	-3.2554E1	2.67992E1	1.73473E-7	2.51736E-3	2.51736E-3	6.3074E-3	1.98631E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09418E0	-8.17895E-1	-7.98607E-1	-9.13112E0	-9.14211E0	5.05447E-3	9.31263E-2	2.73051E1	-3.26831E1	-3.2614E1	2.67798E1	1.7353E-7	2.51647E-3	2.51647E-3	6.32644E-3	1.99483E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.17823E-1	-7.98869E-1	-9.13136E0	-9.14166E0	5.45979E-3	9.30548E-2	2.73225E1	-3.26585E1	-3.26492E1	2.67728E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.17847E-1	-7.98249E-1	-9.13117E0	-9.14207E0	5.36442E-3	9.32932E-2	2.73039E1	-3.26578E1	-3.26505E1	2.67926E1	1.73457E-7	2.52169E-3	2.52169E-3	6.33436E-3	1.9883E-1