[Scan]
initial_time=2016-02-16T04:40:35
final_time=2016-02-16T04:40:54
ip_count=19
run=1030
dataset=10
scan=750
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08802E-4
ql1_vset=
ql1_vmon=-8.17442E-1
ql1_imon=7.65562E-10
ql2_vset=
ql2_vmon=-7.98416E-1
ql2_imon=2.67541E-10
ql3_vset=
ql3_vmon=-9.13136E0
ql3_imon=9.46212E-10
ql4_vset=
ql4_vmon=-9.14168E0
ql4_imon=4.8399E-10
mult1=-9.46345E-9
mult2=-2.70065E-9
rf_tmon=-4.09185E-3
rf_agc=3.26546E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.88894E-3
ql5_imon=3.45528E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64451E0
bslens_imon=2.6423E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19797E1
lens5a_imon=1.99605E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12524E2
lens4a_imon=2.05349E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53262E1
cs_ef1b_imon=3.08539E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02013E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05036E1
cs_ea1_imon=2.18062E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39058E0
lens1_imon=2.70719E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64649E1
os_ef1alow_imon=2.9853E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03901E1
cs_ea2_imon=1.5685E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84458E1
cs_ef1a_imon=3.02561E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=3.66163E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11425E1
os_restr1_imon=2.86714E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15149E1
os_ea1_imon=1.89078E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.10172E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25931E0
cs_ionrep_imon=1.25848E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93589E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01659E1
cs_anode1_imon=3.27236E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=6.33717E-10
tplens_vset=1.4E-1
tplens_vmon=1.59217E0
tplens_imon=-1.91197E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26236E1
iondef3_imon=1.51659E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26753E1
iondef2_imon=1.58725E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02943E2
lens6_imon=2.98544E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=3.57866E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2521E0
ionrepsh_imon=2.03715E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3373E1
lens5b_imon=2.20189E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74565E1
cs_ef2b_imon=3.12674E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.58333E-1
os_ea2_imon=-3.20976E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00745E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71067E1
cs_ef2a_imon=3.20181E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63493E0
os_ef2alow_imon=-2.37302E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.79855E-1
os_ef2bup_imon=-5.18102E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10573E1
os_restr2_imon=2.87062E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.32452E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01659E1
cs_anode2_imon=2.29268E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72967E1
iondef1_imon=1.10454E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67976E1
iondef4_imon=1.09511E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.835E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81975E-1
olens1_imon=2.52211E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10176E0
cs_ionaccel_imon=-1.94904E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47306E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56492E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=2.31008E-1
window_imon=-1.04547E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.39202E-4
mask2_vset=0.0E0
mask2_vmon=-1.86437E1
mask2_imon=-4.33827E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92615E3
multa_neg_imon=7.61353E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.77718E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=6.93579E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.76548E0
defgridb_imon=6.29772E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33933E1
os_fil1_imon=4.77365E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.27583E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66783E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30826E1
cs_fil1_imon=1.00817E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62777E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67064E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35745E-2
os_fil2_imon=-2.44329E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.27701E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.57286E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28403E-1
cs_fil2_imon=-2.46067E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25785E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22465E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.9951E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51096E-3
foreline_cvt_pmon=2.51096E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.71573E-1
res40_imon=-2.57111E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=182
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.17323E-1	-7.98488E-1	-9.1311E0	-9.14216E0	5.29289E-3	9.31263E-2	2.72856E1	-3.26744E1	-3.26443E1	2.67914E1	1.73605E-7	2.51007E-3	2.51007E-3	6.31288E-3	1.99456E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.17513E-1	-7.98178E-1	-9.13126E0	-9.1419E0	5.6982E-3	9.31025E-2	2.73363E1	-3.2667E1	-3.26248E1	2.67788E1	1.73531E-7	2.50989E-3	2.50989E-3	6.3074E-3	1.9934E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.17466E-1	-7.98512E-1	-9.13138E0	-9.14183E0	5.4121E-3	9.31501E-2	2.73175E1	-3.26413E1	-3.26313E1	2.67746E1	1.73221E-7	2.52139E-3	2.52139E-3	6.31299E-3	1.99401E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.17323E-1	-7.98345E-1	-9.13143E0	-9.14207E0	5.17368E-3	9.30786E-2	2.72973E1	-3.26675E1	-3.26627E1	2.68148E1	1.73531E-7	2.52276E-3	2.52276E-3	6.30202E-3	1.98491E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.17418E-1	-7.98583E-1	-9.13134E0	-9.1423E0	5.43594E-3	9.30786E-2	2.73027E1	-3.26657E1	-3.26266E1	2.67589E1	1.73605E-7	2.51225E-3	2.51225E-3	6.31288E-3	2.00673E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.17227E-1	-7.98202E-1	-9.13119E0	-9.14216E0	5.57899E-3	9.32217E-2	2.73045E1	-3.2652E1	-3.26018E1	2.67416E1	1.73153E-7	2.51225E-3	2.51225E-3	6.3074E-3	1.99803E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0965E0	-8.17657E-1	-7.98512E-1	-9.13126E0	-9.14173E0	5.22137E-3	9.3317E-2	2.73163E1	-3.26691E1	-3.25818E1	2.67656E1	1.73531E-7	2.52276E-3	2.52276E-3	6.31817E-3	1.98661E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.17919E-1	-7.98154E-1	-9.13186E0	-9.14204E0	5.57899E-3	9.34124E-2	2.7288E1	-3.26773E1	-3.26119E1	2.68389E1	1.73457E-7	2.51203E-3	2.51203E-3	6.31817E-3	2.00534E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09611E0	-8.17966E-1	-7.98655E-1	-9.13134E0	-9.14173E0	5.36442E-3	9.3317E-2	2.7288E1	-3.26461E1	-3.26278E1	2.6801E1	1.73531E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.00192E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.178E-1	-7.98106E-1	-9.1315E0	-9.1418E0	5.24521E-3	9.33409E-2	2.72943E1	-3.26909E1	-3.26128E1	2.67908E1	1.73531E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.00705E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.17394E-1	-7.98416E-1	-9.1316E0	-9.14207E0	5.24521E-3	9.32932E-2	2.73225E1	-3.26837E1	-3.26242E1	2.6798E1	1.73454E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.98937E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.17466E-1	-7.98273E-1	-9.13107E0	-9.14187E0	5.67436E-3	9.3317E-2	2.73027E1	-3.26874E1	-3.26366E1	2.67668E1	1.73528E-7	2.5147E-3	2.5147E-3	6.31299E-3	1.98696E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.17537E-1	-7.98059E-1	-9.13124E0	-9.14197E0	5.65052E-3	9.31025E-2	2.73075E1	-3.26682E1	-3.26199E1	2.68166E1	1.73455E-7	2.51484E-3	2.51484E-3	6.32099E-3	1.99741E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.17776E-1	-7.98249E-1	-9.13107E0	-9.14168E0	5.88894E-3	9.32693E-2	2.73189E1	-3.26603E1	-3.26567E1	2.68184E1					
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.17537E-1	-7.98392E-1	-9.13143E0	-9.14156E0	6.00815E-3	9.31501E-2	2.73009E1	-3.26669E1	-3.26344E1	2.68046E1	1.73379E-7	2.51116E-3	2.51116E-3	6.32936E-3	1.9911E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.17728E-1	-7.98368E-1	-9.1311E0	-9.14192E0	5.22137E-3	9.29832E-2	2.73399E1	-3.27185E1	-3.26254E1	2.67752E1	1.73605E-7	2.51007E-3	2.51007E-3	6.3074E-3	1.99283E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.17657E-1	-7.98559E-1	-9.13119E0	-9.14195E0	5.60284E-3	9.31025E-2	2.73111E1	-3.26482E1	-3.26242E1	2.67854E1	1.73529E-7	2.51443E-3	2.51443E-3	6.29098E-3	1.98764E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.17752E-1	-7.98392E-1	-9.13119E0	-9.14159E0	5.4121E-3	9.29832E-2	2.73309E1	-3.26957E1	-3.26242E1	2.67649E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.98937E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.178E-1	-7.98655E-1	-9.13129E0	-9.14166E0	5.84126E-3	9.31025E-2	2.73163E1	-3.2659E1	-3.26354E1	2.68192E1	1.73379E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.98937E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.17442E-1	-7.98416E-1	-9.13136E0	-9.14168E0	5.88894E-3	9.29832E-2	2.72967E1	-3.26753E1	-3.26236E1	2.67976E1	1.73605E-7	2.51096E-3	2.51096E-3	6.31278E-3	1.9951E-1