[Scan]
initial_time=2016-02-16T04:43:15
final_time=2016-02-16T04:43:34
ip_count=19
run=1030
dataset=10
scan=756
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09611E0
qbias_imon=-1.08797E-4
ql1_vset=
ql1_vmon=-8.1718E-1
ql1_imon=6.71196E-10
ql2_vset=
ql2_vmon=-7.98512E-1
ql2_imon=2.75969E-10
ql3_vset=
ql3_vmon=-9.13157E0
ql3_imon=7.40528E-10
ql4_vset=
ql4_vmon=-9.14207E0
ql4_imon=4.96566E-10
mult1=-1.04989E-8
mult2=-2.74855E-9
rf_tmon=-5.84626E-3
rf_agc=3.2174E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=3.57687E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62846E0
bslens_imon=2.46539E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19813E1
lens5a_imon=1.98156E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12516E2
lens4a_imon=2.05302E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53658E1
cs_ef1b_imon=3.07172E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02146E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05018E1
cs_ea1_imon=2.1695E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36017E0
lens1_imon=2.82641E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64476E1
os_ef1alow_imon=2.99099E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04274E1
cs_ea2_imon=1.57169E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84466E1
cs_ef1a_imon=3.01009E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=3.6577E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10919E1
os_restr1_imon=2.88828E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15252E1
os_ea1_imon=1.8821E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63743E1
os_ef1bup_imon=3.07568E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22142E0
cs_ionrep_imon=1.27934E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91897E2
cs_nozzle_imon=1.93434E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01611E1
cs_anode1_imon=3.29372E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=6.27387E-10
tplens_vset=1.4E-1
tplens_vmon=1.57772E0
tplens_imon=-3.4136E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26615E1
iondef3_imon=1.5002E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26314E1
iondef2_imon=1.58833E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0299E2
lens6_imon=2.98675E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=3.27361E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24089E0
ionrepsh_imon=2.02297E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34035E1
lens5b_imon=2.20029E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74489E1
cs_ef2b_imon=3.12253E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.61653E-1
os_ea2_imon=-3.4136E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.00679E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71126E1
cs_ef2a_imon=3.19065E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65522E0
os_ef2alow_imon=-2.44291E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.22341E-1
os_ef2bup_imon=-5.38014E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10763E1
os_restr2_imon=2.88287E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2311E2
cs_ionfoca_imon=6.31556E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01671E1
cs_anode2_imon=2.29398E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73117E1
iondef1_imon=1.12007E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67752E1
iondef4_imon=1.08918E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.76528E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=2.33543E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08149E0
cs_ionaccel_imon=-1.76897E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.47111E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56147E1
einzel_imon=7.75632E-6
window_vset=0.0E0
window_vmon=1.8731E-1
window_imon=-1.06619E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82574E2
mask1_imon=2.3929E-4
mask2_vset=0.0E0
mask2_vmon=-1.86807E1
mask2_imon=-7.05797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=8.07889E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.85426E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50107E3
multb_neg_imon=7.18342E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.63293E0
defgridb_imon=6.57111E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33924E1
os_fil1_imon=5.37688E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.33504E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6677E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30851E1
cs_fil1_imon=1.00848E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62798E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67192E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.54716E-2
os_fil2_imon=-2.40768E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.25985E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.48636E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3017E-1
cs_fil2_imon=-2.37164E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.56018E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22524E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.98661E-1
chamber_ion_pmon=1.73457E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.71305E-1
res40_imon=-2.59067E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09611E0	-8.17418E-1	-7.9782E-1	-9.13119E0	-9.14197E0	5.60284E-3	9.31025E-2	2.73375E1	-3.26509E1	-3.26167E1	2.67792E1	1.73532E-7	2.51919E-3	2.51919E-3	6.31798E-3	1.99896E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.1749E-1	-7.98297E-1	-9.13155E0	-9.14204E0	5.50747E-3	9.29356E-2	2.72837E1	-3.26756E1	-3.2637E1	2.67876E1	1.73457E-7	2.50882E-3	2.50882E-3	6.31817E-3	2.00021E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09603E0	-8.1749E-1	-7.98368E-1	-9.13141E0	-9.14202E0	5.36442E-3	9.32693E-2	2.72774E1	-3.2652E1	-3.25788E1	2.6803E1	1.73298E-7	2.51581E-3	2.51581E-3	6.32978E-3	1.99224E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.17227E-1	-7.98559E-1	-9.13126E0	-9.14216E0	5.45979E-3	9.32217E-2	2.72827E1	-3.2649E1	-3.26189E1	2.67955E1	1.73605E-7	2.51077E-3	2.51077E-3	6.31269E-3	1.99394E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.16989E-1	-7.9844E-1	-9.13122E0	-9.14192E0	5.57899E-3	9.3174E-2	2.73291E1	-3.26729E1	-3.2629E1	2.6819E1	1.73379E-7	2.51334E-3	2.51334E-3	6.32936E-3	1.99977E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.17227E-1	-7.98583E-1	-9.13117E0	-9.14149E0	5.67436E-3	9.32693E-2	2.73428E1	-3.26938E1	-3.26048E1	2.6774E1	1.73383E-7	2.5131E-3	2.5131E-3	6.31817E-3	1.9883E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.16941E-1	-7.98321E-1	-9.13105E0	-9.14178E0	5.26905E-3	9.3317E-2	2.73009E1	-3.26909E1	-3.26092E1	2.67728E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.9963E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-8.17251E-1	-7.98678E-1	-9.13136E0	-9.14195E0	5.38826E-3	9.33886E-2	2.72925E1	-3.26807E1	-3.26194E1	2.6855E1	1.73457E-7	2.5131E-3	2.5131E-3	6.31817E-3	1.98491E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09634E0	-8.17251E-1	-7.98321E-1	-9.13131E0	-9.14197E0	5.34058E-3	9.35555E-2	2.73081E1	-3.26855E1	-3.26002E1	2.6786E1	1.73529E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.98937E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.17466E-1	-7.98583E-1	-9.13136E0	-9.14218E0	5.79357E-3	9.33886E-2	2.73225E1	-3.26561E1	-3.26086E1	2.67686E1	1.73454E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.98592E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.17037E-1	-7.9844E-1	-9.13124E0	-9.14216E0	5.38826E-3	9.34839E-2	2.73222E1	-3.26508E1	-3.26319E1	2.68124E1	1.73529E-7	2.51552E-3	2.51552E-3	6.30192E-3	1.9911E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.17132E-1	-7.98345E-1	-9.13136E0	-9.14204E0	5.6982E-3	9.34362E-2	2.73237E1	-3.26795E1	-3.2632E1	2.67839E1	1.73379E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.00325E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09611E0	-8.17156E-1	-7.98559E-1	-9.13141E0	-9.14183E0	5.38826E-3	9.29832E-2	2.73098E1	-3.26644E1	-3.26384E1	2.68142E1	1.73605E-7	2.51203E-3	2.51203E-3	6.28592E-3	1.9934E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09619E0	-8.17227E-1	-7.98321E-1	-9.13126E0	-9.14216E0	5.14984E-3	9.31501E-2	2.72817E1	-3.26897E1	-3.2611E1	2.67565E1	1.73454E-7	2.51552E-3	2.51552E-3	6.34037E-3	1.98937E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.17037E-1	-7.98297E-1	-9.13148E0	-9.14199E0	5.24521E-3	9.33647E-2	2.73112E1	-3.26352E1	-3.26572E1	2.67662E1	1.73454E-7	2.52209E-3	2.52209E-3	6.31288E-3	1.98764E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09627E0	-8.17108E-1	-7.98559E-1	-9.1316E0	-9.14237E0	5.24521E-3	9.34124E-2	2.72284E1	-3.26632E1	-3.26455E1	2.6789E1	1.73605E-7	2.51225E-3	2.51225E-3	6.29098E-3	1.98247E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.16822E-1	-7.98678E-1	-9.13157E0	-9.14214E0	5.17368E-3	9.29356E-2	2.73623E1	-3.27186E1	-3.26136E1	2.68076E1	1.73379E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.98592E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09588E0	-8.16703E-1	-7.98583E-1	-9.13172E0	-9.14211E0	5.36442E-3	9.3317E-2	2.7275E1	-3.26313E1	-3.26331E1	2.6831E1	1.73532E-7	2.51603E-3	2.51603E-3	6.2863E-3	1.99061E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09619E0	-8.16774E-1	-7.98774E-1	-9.13155E0	-9.1418E0	5.24521E-3	9.31263E-2	2.73243E1	-3.26639E1	-3.26218E1	2.678E1	1.73529E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.98937E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09611E0	-8.1718E-1	-7.98512E-1	-9.13157E0	-9.14207E0	5.126E-3	9.30786E-2	2.73117E1	-3.26314E1	-3.26615E1	2.67752E1	1.73457E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.98661E-1