[Scan]
initial_time=2016-02-16T04:43:41
final_time=2016-02-16T04:44:01
ip_count=19
run=1030
dataset=10
scan=757
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08829E-4
ql1_vset=
ql1_vmon=-8.1718E-1
ql1_imon=6.73413E-10
ql2_vset=
ql2_vmon=-7.98583E-1
ql2_imon=2.82979E-10
ql3_vset=
ql3_vmon=-9.13112E0
ql3_imon=7.23314E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=4.83286E-10
mult1=-1.09298E-8
mult2=-2.87808E-9
rf_tmon=-4.40329E-3
rf_agc=3.35805E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=3.63851E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66621E0
bslens_imon=2.63882E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20226E1
lens5a_imon=2.01412E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.05493E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53632E1
cs_ef1b_imon=3.08643E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.02263E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0523E1
cs_ea1_imon=2.17835E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41798E0
lens1_imon=2.98214E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64574E1
os_ef1alow_imon=2.99677E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03761E1
cs_ea2_imon=1.56851E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84313E1
cs_ef1a_imon=2.99607E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=3.61288E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11297E1
os_restr1_imon=2.89842E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15565E1
os_ea1_imon=1.88918E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63369E1
os_ef1bup_imon=3.0833E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20137E0
cs_ionrep_imon=1.29951E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91923E2
cs_nozzle_imon=1.93583E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01763E1
cs_anode1_imon=3.30885E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=6.80518E-10
tplens_vset=1.4E-1
tplens_vmon=1.62079E0
tplens_imon=-1.78547E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26349E1
iondef3_imon=1.48639E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26467E1
iondef2_imon=1.57983E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02915E2
lens6_imon=2.98502E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=3.51799E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25918E0
ionrepsh_imon=2.02722E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33422E1
lens5b_imon=2.17587E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74617E1
cs_ef2b_imon=3.14481E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.90559E-1
os_ea2_imon=-4.51082E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06062E2
lens4b_imon=2.00591E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71084E1
cs_ef2a_imon=3.19903E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63435E0
os_ef2alow_imon=-2.52245E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.4684E-1
os_ef2bup_imon=-5.14627E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11031E1
os_restr2_imon=2.87096E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.32477E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02E1
cs_anode2_imon=2.28573E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72892E1
iondef1_imon=1.10131E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67722E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.86025E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=2.64192E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11392E0
cs_ionaccel_imon=-1.82393E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02047E2
cs_ionfocb_imon=1.47424E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56324E1
einzel_imon=7.94501E-6
window_vset=0.0E0
window_vmon=2.18265E-1
window_imon=-1.12193E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39341E-4
mask2_vset=0.0E0
mask2_vmon=-1.86246E1
mask2_imon=-6.1454E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=8.11783E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.3906E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50097E3
multb_neg_imon=7.25421E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56501E0
defgridb_imon=6.45784E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3391E1
os_fil1_imon=5.3934E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.87821E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66785E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30812E1
cs_fil1_imon=1.0087E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63148E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67127E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.2939E-2
os_fil2_imon=-2.35062E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.04533E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.57494E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27779E-1
cs_fil2_imon=-2.11894E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.62454E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22477E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=1.9963E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.94162E-1
res40_imon=-2.5016E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=183
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.1737E-1	-7.98225E-1	-9.13157E0	-9.14154E0	5.10216E-3	9.31978E-2	2.73358E1	-3.2685E1	-3.25947E1	2.681E1	1.73457E-7	2.51739E-3	2.51739E-3	6.33436E-3	1.98491E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.17156E-1	-7.98488E-1	-9.13138E0	-9.14192E0	5.34058E-3	9.3627E-2	2.72853E1	-3.26512E1	-3.262E1	2.68034E1	1.73457E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.97647E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.16917E-1	-7.98559E-1	-9.13138E0	-9.14204E0	5.55515E-3	9.35316E-2	2.73092E1	-3.26301E1	-3.2626E1	2.6792E1	1.73529E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.98419E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.17299E-1	-7.98416E-1	-9.13124E0	-9.14183E0	5.45979E-3	9.35793E-2	2.72354E1	-3.26518E1	-3.26332E1	2.67914E1	1.73605E-7	2.51739E-3	2.51739E-3	6.29665E-3	1.97647E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.17037E-1	-7.98512E-1	-9.13138E0	-9.1419E0	5.48363E-3	9.36508E-2	2.73153E1	-3.26494E1	-3.262E1	2.67836E1	1.73383E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.97647E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.16822E-1	-7.98368E-1	-9.13138E0	-9.14202E0	5.19753E-3	9.34362E-2	2.72672E1	-3.26975E1	-3.26524E1	2.6795E1	1.73529E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.96874E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.16965E-1	-7.98297E-1	-9.13134E0	-9.14199E0	5.60284E-3	9.34601E-2	2.72715E1	-3.26194E1	-3.2611E1	2.68124E1	1.73605E-7	2.51334E-3	2.51334E-3	6.30192E-3	1.98247E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.1718E-1	-7.98368E-1	-9.13138E0	-9.14204E0	5.36442E-3	9.30071E-2	2.72921E1	-3.26467E1	-3.26596E1	2.67816E1	1.73605E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.98247E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.17323E-1	-7.98273E-1	-9.1315E0	-9.14171E0	5.48363E-3	9.32932E-2	2.72685E1	-3.2649E1	-3.25995E1	2.67758E1	1.73454E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.97731E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.1737E-1	-7.98321E-1	-9.13129E0	-9.14173E0	5.36442E-3	9.31978E-2	2.73135E1	-3.26645E1	-3.26374E1	2.68112E1	1.73605E-7	2.51632E-3	2.51632E-3	6.30202E-3	1.97478E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09634E0	-8.17037E-1	-7.98273E-1	-9.13134E0	-9.14156E0	5.24521E-3	9.3317E-2	2.73257E1	-3.26714E1	-3.25894E1	2.6798E1	1.73605E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.9883E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09611E0	-8.17132E-1	-7.98321E-1	-9.13138E0	-9.14195E0	5.48363E-3	9.29594E-2	2.73014E1	-3.26634E1	-3.26346E1	2.68106E1	1.73454E-7	2.51225E-3	2.51225E-3	6.30192E-3	1.98937E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09611E0	-8.16941E-1	-7.98702E-1	-9.13165E0	-9.14178E0	5.26905E-3	9.33647E-2	2.72847E1	-3.26891E1	-3.26056E1	2.67553E1	1.73492E-7	2.51279E-3	2.51279E-3	6.32936E-3	1.99456E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09588E0	-8.16989E-1	-7.98464E-1	-9.13146E0	-9.14173E0	4.95911E-3	9.32693E-2	2.73207E1	-3.26771E1	-3.25942E1	2.68046E1					
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09704E0	-8.17084E-1	-7.98988E-1	-9.13131E0	-9.1418E0	5.6982E-3	9.34362E-2	2.73357E1	-3.26909E1	-3.2629E1	2.67992E1	1.73454E-7	2.51225E-3	2.51225E-3	6.32386E-3	1.99283E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09619E0	-8.17037E-1	-7.98965E-1	-9.13122E0	-9.14197E0	5.60284E-3	9.32217E-2	2.72901E1	-3.26795E1	-3.26146E1	2.68028E1	1.73374E-7	2.51804E-3	2.51804E-3	6.32978E-3	1.99048E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.17204E-1	-7.9844E-1	-9.13129E0	-9.1418E0	5.74589E-3	9.34601E-2	2.73027E1	-3.26408E1	-3.26236E1	2.67578E1	1.73379E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.9911E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.16894E-1	-7.98655E-1	-9.13136E0	-9.14202E0	5.38826E-3	9.31501E-2	2.7266E1	-3.26669E1	-3.26392E1	2.6813E1	1.73459E-7	2.51182E-3	2.51182E-3	6.32328E-3	1.99227E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.17132E-1	-7.98559E-1	-9.13129E0	-9.14197E0	5.84126E-3	9.31978E-2	2.73159E1	-3.26903E1	-3.2596E1	2.68136E1	1.73454E-7	2.51662E-3	2.51662E-3	6.34037E-3	1.99283E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.1718E-1	-7.98583E-1	-9.13112E0	-9.14199E0	5.24521E-3	9.31025E-2	2.72892E1	-3.26467E1	-3.26349E1	2.67722E1	1.73605E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.9963E-1