[Scan]
initial_time=2016-02-16T04:45:28
final_time=2016-02-16T04:45:47
ip_count=19
run=1030
dataset=10
scan=761
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08778E-4
ql1_vset=
ql1_vmon=-8.17299E-1
ql1_imon=6.47998E-10
ql2_vset=
ql2_vmon=-7.98011E-1
ql2_imon=2.61807E-10
ql3_vset=
ql3_vmon=-9.13157E0
ql3_imon=7.35343E-10
ql4_vset=
ql4_vmon=-9.14218E0
ql4_imon=5.02658E-10
mult1=-9.01795E-9
mult2=-2.78249E-9
rf_tmon=-4.91498E-3
rf_agc=3.28409E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=3.53146E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67275E0
bslens_imon=2.77928E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1937E1
lens5a_imon=1.99713E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12544E2
lens4a_imon=2.05273E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5362E1
cs_ef1b_imon=3.06486E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02305E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04856E1
cs_ea1_imon=2.17774E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40681E0
lens1_imon=2.81894E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64403E1
os_ef1alow_imon=3.00317E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04033E1
cs_ea2_imon=1.58797E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84201E1
cs_ef1a_imon=3.02925E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=3.48604E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11582E1
os_restr1_imon=2.88714E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15366E1
os_ea1_imon=1.90016E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63767E1
os_ef1bup_imon=3.09424E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20884E0
cs_ionrep_imon=1.25884E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91904E2
cs_nozzle_imon=1.93445E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01564E1
cs_anode1_imon=3.29179E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=6.76322E-10
tplens_vset=1.4E-1
tplens_vmon=1.6198E0
tplens_imon=-2.92136E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25834E1
iondef3_imon=1.52056E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26597E1
iondef2_imon=1.60599E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02957E2
lens6_imon=2.98476E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=3.45206E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29656E0
ionrepsh_imon=2.02453E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33808E1
lens5b_imon=2.18351E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7444E1
cs_ef2b_imon=3.12692E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.64942E-1
os_ea2_imon=-3.5342E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06121E2
lens4b_imon=2.00518E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71196E1
cs_ef2a_imon=3.18898E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64299E0
os_ef2alow_imon=-2.60835E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.43976E-1
os_ef2bup_imon=-5.15302E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10891E1
os_restr2_imon=2.86988E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.30721E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.28861E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73075E1
iondef1_imon=1.10995E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68046E1
iondef4_imon=1.08788E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.80404E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=2.43378E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16686E0
cs_ionaccel_imon=-1.8556E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02108E2
cs_ionfocb_imon=1.47285E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56209E1
einzel_imon=7.81636E-6
window_vset=0.0E0
window_vmon=2.16243E-1
window_imon=-8.23776E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82605E2
mask1_imon=2.3908E-4
mask2_vset=0.0E0
mask2_vmon=-1.86687E1
mask2_imon=-6.10802E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.35757E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.64019E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50108E3
multb_neg_imon=7.27106E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43765E0
defgridb_imon=6.45634E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33931E1
os_fil1_imon=5.18762E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.84367E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66961E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3083E1
cs_fil1_imon=1.01095E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62537E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67213E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.47353E-2
os_fil2_imon=-2.38275E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.95458E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.39369E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29586E-1
cs_fil2_imon=-2.19303E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.39325E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22557E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=1.9968E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.64906E-1
res40_imon=-2.58265E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.17394E-1	-7.97987E-1	-9.13179E0	-9.1419E0	5.17368E-3	9.33647E-2	2.72502E1	-3.26195E1	-3.2636E1	2.67999E1	1.73454E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.98764E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09634E0	-8.16989E-1	-7.9813E-1	-9.13157E0	-9.14197E0	5.14984E-3	9.33409E-2	2.73419E1	-3.2656E1	-3.26142E1	2.68144E1	1.73605E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.9917E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.1737E-1	-7.98106E-1	-9.13148E0	-9.14209E0	5.05447E-3	9.31025E-2	2.72976E1	-3.26359E1	-3.26295E1	2.67873E1	1.73605E-7	2.51158E-3	2.51158E-3	6.30171E-3	1.99163E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.1687E-1	-7.98249E-1	-9.13167E0	-9.14197E0	5.53131E-3	9.31025E-2	2.72865E1	-3.26723E1	-3.25858E1	2.67914E1	1.73459E-7	2.52659E-3	2.52659E-3	6.29684E-3	1.99061E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09595E0	-8.16774E-1	-7.97725E-1	-9.13131E0	-9.14183E0	5.14984E-3	9.32217E-2	2.73297E1	-3.2653E1	-3.26056E1	2.67607E1	1.73529E-7	2.51225E-3	2.51225E-3	6.3074E-3	1.99283E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.16894E-1	-7.97915E-1	-9.1316E0	-9.14199E0	5.48363E-3	9.32217E-2	2.72915E1	-3.26384E1	-3.26313E1	2.681E1	1.73605E-7	2.52647E-3	2.52647E-3	6.32386E-3	1.98419E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.16798E-1	-7.97892E-1	-9.13146E0	-9.1419E0	5.60284E-3	9.32217E-2	2.72751E1	-3.26738E1	-3.26125E1	2.67944E1	1.73531E-7	2.51096E-3	2.51096E-3	6.3074E-3	2.00534E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-8.16679E-1	-7.9813E-1	-9.13165E0	-9.14178E0	5.79357E-3	9.31978E-2	2.73291E1	-3.26422E1	-3.26392E1	2.68022E1	1.73528E-7	2.5147E-3	2.5147E-3	6.29067E-3	1.99224E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09619E0	-8.16798E-1	-7.98321E-1	-9.13153E0	-9.14207E0	5.43594E-3	9.29594E-2	2.72933E1	-3.26632E1	-3.26213E1	2.6774E1	1.73379E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.99283E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.16774E-1	-7.9813E-1	-9.1315E0	-9.14176E0	5.19753E-3	9.31501E-2	2.73088E1	-3.26731E1	-3.26254E1	2.6798E1	1.73531E-7	2.51847E-3	2.51847E-3	6.3074E-3	1.9934E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.17251E-1	-7.97939E-1	-9.13153E0	-9.14204E0	5.76973E-3	9.30309E-2	2.73075E1	-3.26494E1	-3.2638E1	2.67902E1	1.73605E-7	2.51581E-3	2.51581E-3	6.3074E-3	1.99754E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.17084E-1	-7.98106E-1	-9.13172E0	-9.14211E0	5.67436E-3	9.30786E-2	2.73309E1	-3.26206E1	-3.26302E1	2.67866E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.00499E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09603E0	-8.16941E-1	-7.98464E-1	-9.13155E0	-9.14192E0	5.34058E-3	9.31025E-2	2.72991E1	-3.26777E1	-3.25773E1	2.67956E1	1.73454E-7	2.51225E-3	2.51225E-3	6.32386E-3	1.9963E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09603E0	-8.17204E-1	-7.97987E-1	-9.13177E0	-9.14216E0	5.19753E-3	9.30786E-2	2.73045E1	-3.26579E1	-3.2675E1	2.67866E1	1.73529E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.98161E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.16917E-1	-7.98464E-1	-9.13157E0	-9.14233E0	5.50747E-3	9.31501E-2	2.72549E1	-3.26836E1	-3.25911E1	2.68028E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.17323E-1	-7.98368E-1	-9.13141E0	-9.14214E0	5.4121E-3	9.29594E-2	2.73003E1	-3.26657E1	-3.26242E1	2.67758E1	1.73303E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.97559E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09603E0	-8.16846E-1	-7.98249E-1	-9.13138E0	-9.14183E0	5.72205E-3	9.29356E-2	2.72903E1	-3.27033E1	-3.26095E1	2.67677E1	1.73529E-7	2.51225E-3	2.51225E-3	6.32386E-3	1.98764E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-8.17013E-1	-7.98035E-1	-9.13138E0	-9.14199E0	5.55515E-3	9.29356E-2	2.73003E1	-3.26837E1	-3.25948E1	2.68436E1	1.73531E-7	2.51739E-3	2.51739E-3	6.3074E-3	1.97815E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.17418E-1	-7.98368E-1	-9.1315E0	-9.14168E0	5.65052E-3	9.32455E-2	2.72774E1	-3.26354E1	-3.25989E1	2.6795E1	1.73454E-7	2.52209E-3	2.52209E-3	6.29098E-3	1.9911E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.17299E-1	-7.98011E-1	-9.13157E0	-9.14218E0	5.55515E-3	9.32693E-2	2.73075E1	-3.26597E1	-3.25834E1	2.68046E1	1.73605E-7	2.52061E-3	2.52061E-3	6.29128E-3	1.9968E-1