[Scan]
initial_time=2016-02-16T04:45:54
final_time=2016-02-16T04:46:14
ip_count=19
run=1030
dataset=10
scan=762
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08801E-4
ql1_vset=
ql1_vmon=-8.16798E-1
ql1_imon=6.69181E-10
ql2_vset=
ql2_vmon=-7.98035E-1
ql2_imon=2.84839E-10
ql3_vset=
ql3_vmon=-9.13186E0
ql3_imon=6.61468E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=5.01418E-10
mult1=-1.00294E-8
mult2=-2.69865E-9
rf_tmon=-4.48238E-3
rf_agc=3.40005E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=3.64792E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63082E0
bslens_imon=2.60697E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20096E1
lens5a_imon=2.00527E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12515E2
lens4a_imon=2.05072E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53676E1
cs_ef1b_imon=3.08001E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04567E2
lens23_imon=1.02199E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05118E1
cs_ea1_imon=2.17906E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37256E0
lens1_imon=2.55388E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=2.99423E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03543E1
cs_ea2_imon=1.57983E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8401E1
cs_ef1a_imon=3.04217E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=3.52705E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11256E1
os_restr1_imon=2.86521E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15683E1
os_ea1_imon=1.88564E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63707E1
os_ef1bup_imon=3.07604E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20727E0
cs_ionrep_imon=1.29845E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91902E2
cs_nozzle_imon=1.93501E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01587E1
cs_anode1_imon=3.293E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=6.43802E-10
tplens_vset=1.4E-1
tplens_vmon=1.61784E0
tplens_imon=-2.38717E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26488E1
iondef3_imon=1.50409E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26386E1
iondef2_imon=1.58691E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02968E2
lens6_imon=2.98781E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=3.89433E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27215E0
ionrepsh_imon=2.02474E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3354E1
lens5b_imon=2.19498E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74507E1
cs_ef2b_imon=3.1474E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.8407E-1
os_ea2_imon=-6.17434E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06119E2
lens4b_imon=2.00548E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71162E1
cs_ef2a_imon=3.16903E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.68285E0
os_ef2alow_imon=-2.42849E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.10929E-1
os_ef2bup_imon=-5.32608E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10733E1
os_restr2_imon=2.88035E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23084E2
cs_ionfoca_imon=6.35167E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01713E1
cs_anode2_imon=2.28713E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73369E1
iondef1_imon=1.10732E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67848E1
iondef4_imon=1.10179E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.82232E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81855E-1
olens1_imon=2.55072E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12894E0
cs_ionaccel_imon=-2.07891E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.47417E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56069E1
einzel_imon=7.90408E-6
window_vset=0.0E0
window_vmon=2.26953E-1
window_imon=-9.14827E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39073E-4
mask2_vset=0.0E0
mask2_vmon=-1.86752E1
mask2_imon=-6.98589E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.64709E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.75515E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.24359E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.62702E0
defgridb_imon=6.1216E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3394E1
os_fil1_imon=4.59602E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.63537E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66836E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30807E1
cs_fil1_imon=1.0085E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62552E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67109E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.35362E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.25985E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.62303E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-2.09534E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10618E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22514E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31555E-3
inlet_lpb_pmon=1.99913E-1
chamber_ion_pmon=1.73455E-7
chamber_cvt_pmon=2.51376E-3
foreline_cvt_pmon=2.51376E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.92328E-1
res40_imon=-2.42489E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.17156E-1	-7.97987E-1	-9.13153E0	-9.14228E0	5.53131E-3	9.31501E-2	2.73183E1	-3.26603E1	-3.25809E1	2.68012E1	1.73605E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.00151E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.17037E-1	-7.97772E-1	-9.13143E0	-9.14218E0	5.29289E-3	9.32217E-2	2.72895E1	-3.26278E1	-3.26086E1	2.68137E1	1.73605E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.00325E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09611E0	-8.16488E-1	-7.98106E-1	-9.13153E0	-9.14204E0	5.10216E-3	9.31263E-2	2.73237E1	-3.27245E1	-3.25984E1	2.6774E1	1.73529E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.01022E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.17204E-1	-7.97677E-1	-9.13169E0	-9.14197E0	5.4121E-3	9.31263E-2	2.73068E1	-3.26724E1	-3.26631E1	2.67932E1	1.73303E-7	2.5188E-3	2.5188E-3	6.29098E-3	1.9963E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.16774E-1	-7.97796E-1	-9.13167E0	-9.14185E0	5.74589E-3	9.30548E-2	2.73021E1	-3.26747E1	-3.262E1	2.6803E1	1.73383E-7	2.51203E-3	2.51203E-3	6.31817E-3	2.00705E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.16774E-1	-7.97868E-1	-9.1311E0	-9.1419E0	5.48363E-3	9.29832E-2	2.73087E1	-3.26717E1	-3.26014E1	2.6774E1	1.73457E-7	2.51847E-3	2.51847E-3	6.34518E-3	1.9951E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.17347E-1	-7.98249E-1	-9.13148E0	-9.14195E0	5.55515E-3	9.29832E-2	2.73104E1	-3.26649E1	-3.25883E1	2.67932E1	1.73605E-7	2.51443E-3	2.51443E-3	6.32936E-3	1.99803E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.17299E-1	-7.98273E-1	-9.13165E0	-9.14185E0	5.67436E-3	9.30309E-2	2.72813E1	-3.26596E1	-3.26446E1	2.68151E1	1.73457E-7	2.51739E-3	2.51739E-3	6.32356E-3	1.9968E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.17132E-1	-7.98321E-1	-9.13153E0	-9.14168E0	5.67436E-3	9.30309E-2	2.73248E1	-3.26515E1	-3.25942E1	2.68313E1	1.73532E-7	2.51814E-3	2.51814E-3	6.32858E-3	1.98561E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.17013E-1	-7.98202E-1	-9.13148E0	-9.14176E0	5.26905E-3	9.29594E-2	2.72841E1	-3.26266E1	-3.26212E1	2.68052E1	1.73605E-7	2.51411E-3	2.51411E-3	6.31321E-3	1.98917E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09611E0	-8.17132E-1	-7.97629E-1	-9.13153E0	-9.14195E0	5.36442E-3	9.3317E-2	2.73057E1	-3.27292E1	-3.26071E1	2.67908E1	1.73529E-7	2.51225E-3	2.51225E-3	6.3074E-3	1.9963E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09611E0	-8.17394E-1	-7.97749E-1	-9.13143E0	-9.14176E0	5.24521E-3	9.3174E-2	2.7352E1	-3.26326E1	-3.26609E1	2.68076E1	1.73161E-7	2.51525E-3	2.51525E-3	6.3074E-3	1.9934E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09619E0	-8.1749E-1	-7.97749E-1	-9.13177E0	-9.14176E0	5.55515E-3	9.31501E-2	2.73482E1	-3.26644E1	-3.26048E1	2.67583E1	1.73529E-7	2.51334E-3	2.51334E-3	6.32936E-3	1.98764E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09588E0	-8.16774E-1	-7.98154E-1	-9.13126E0	-9.1418E0	5.38826E-3	9.29832E-2	2.73237E1	-3.26579E1	-3.26128E1	2.6774E1	1.73605E-7	2.51417E-3	2.51417E-3	6.32896E-3	1.9917E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09634E0	-8.17323E-1	-7.97844E-1	-9.13153E0	-9.14171E0	5.36442E-3	9.32217E-2	2.72958E1	-3.26648E1	-3.26469E1	2.6783E1	1.73605E-7	2.51116E-3	2.51116E-3	6.32936E-3	1.98419E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.16989E-1	-7.98392E-1	-9.1315E0	-9.14183E0	5.67436E-3	9.31025E-2	2.73303E1	-3.26567E1	-3.2626E1	2.68088E1	1.73387E-7	2.51603E-3	2.51603E-3	6.31269E-3	1.97897E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.17013E-1	-7.98202E-1	-9.13179E0	-9.14159E0	4.93526E-3	9.30786E-2	2.72811E1	-3.26897E1	-3.26452E1	2.67523E1	1.73454E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.98075E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.16894E-1	-7.98345E-1	-9.1316E0	-9.14152E0	5.60284E-3	9.29117E-2	2.72962E1	-3.26437E1	-3.26325E1	2.68118E1	1.73379E-7	2.51225E-3	2.51225E-3	6.32936E-3	1.9911E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-8.17084E-1	-7.98202E-1	-9.13174E0	-9.14173E0	5.62668E-3	9.34601E-2	2.72379E1	-3.26083E1	-3.26703E1	2.67514E1	1.73235E-7	2.51417E-3	2.51417E-3	6.29665E-3	1.9883E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.16798E-1	-7.98035E-1	-9.13186E0	-9.14195E0	5.19753E-3	9.32693E-2	2.73369E1	-3.26386E1	-3.26488E1	2.67848E1	1.73455E-7	2.51376E-3	2.51376E-3	6.31555E-3	1.99913E-1