[Scan]
initial_time=2016-02-16T04:47:41
final_time=2016-02-16T04:48:00
ip_count=19
run=1030
dataset=10
scan=766
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09394E0
qbias_imon=-1.08789E-4
ql1_vset=
ql1_vmon=-8.16941E-1
ql1_imon=6.38974E-10
ql2_vset=
ql2_vmon=-7.98345E-1
ql2_imon=2.85316E-10
ql3_vset=
ql3_vmon=-9.13088E0
ql3_imon=6.23202E-10
ql4_vset=
ql4_vmon=-9.14207E0
ql4_imon=4.77469E-10
mult1=-9.12632E-9
mult2=-2.63677E-9
rf_tmon=-5.0772E-3
rf_agc=3.29671E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=3.62587E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62168E0
bslens_imon=2.6459E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19628E1
lens5a_imon=2.00254E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12498E2
lens4a_imon=2.05129E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53628E1
cs_ef1b_imon=3.06992E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02186E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05463E1
cs_ea1_imon=2.17702E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4014E0
lens1_imon=2.78289E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64578E1
os_ef1alow_imon=3.00288E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04195E1
cs_ea2_imon=1.60635E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84124E1
cs_ef1a_imon=3.02379E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=3.43812E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11213E1
os_restr1_imon=2.88143E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15528E1
os_ea1_imon=1.88033E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63287E1
os_ef1bup_imon=3.10127E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22086E0
cs_ionrep_imon=1.29741E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91888E2
cs_nozzle_imon=1.93297E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01755E1
cs_anode1_imon=3.28579E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=6.38998E-10
tplens_vset=1.4E-1
tplens_vmon=1.57895E0
tplens_imon=-1.47938E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25876E1
iondef3_imon=1.48739E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26488E1
iondef2_imon=1.584E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03E2
lens6_imon=2.9853E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=3.54528E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22326E0
ionrepsh_imon=2.02417E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33742E1
lens5b_imon=2.19612E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74471E1
cs_ef2b_imon=3.15065E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.73353E-1
os_ea2_imon=-6.67051E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00601E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70993E1
cs_ef2a_imon=3.17912E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.66303E0
os_ef2alow_imon=-2.50057E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.85411E-1
os_ef2bup_imon=-5.37293E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10877E1
os_restr2_imon=2.8771E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.33389E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01569E1
cs_anode2_imon=2.28605E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73165E1
iondef1_imon=1.09769E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67686E1
iondef4_imon=1.08449E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.8314E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=2.90203E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13495E0
cs_ionaccel_imon=-1.72932E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02107E2
cs_ionfocb_imon=1.47172E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56423E1
einzel_imon=7.94012E-6
window_vset=0.0E0
window_vmon=2.21547E-1
window_imon=-1.00132E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82598E2
mask1_imon=2.39221E-4
mask2_vset=0.0E0
mask2_vmon=-1.86939E1
mask2_imon=-5.21995E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92662E3
multa_neg_imon=6.61856E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93738E3
defgrida_imon=6.81323E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=6.76997E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56999E0
defgridb_imon=6.08863E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3392E1
os_fil1_imon=4.83028E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.19999E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66731E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30807E1
cs_fil1_imon=1.00974E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63429E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6703E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.42194E-2
os_fil2_imon=-2.35362E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.95952E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.56512E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28487E-1
cs_fil2_imon=-2.28755E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2143E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2255E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.00363E-1
chamber_ion_pmon=1.73531E-7
chamber_cvt_pmon=2.50989E-3
foreline_cvt_pmon=2.50989E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.25965E-1
res40_imon=-2.59788E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.16917E-1	-7.97987E-1	-9.13148E0	-9.14187E0	5.55515E-3	9.33886E-2	2.73051E1	-3.26585E1	-3.26508E1	2.67978E1	1.73529E-7	2.51225E-3	2.51225E-3	6.32936E-3	1.98592E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.17943E-1	-7.97844E-1	-9.13148E0	-9.14195E0	5.48363E-3	9.33409E-2	2.731E1	-3.26731E1	-3.26034E1	2.67957E1	1.73383E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.9985E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.16989E-1	-7.9782E-1	-9.13162E0	-9.14161E0	5.43594E-3	9.34362E-2	2.73115E1	-3.26677E1	-3.26503E1	2.67798E1	1.7353E-7	2.51755E-3	2.51755E-3	6.30469E-3	1.99569E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-8.17084E-1	-7.9782E-1	-9.13124E0	-9.14171E0	5.36442E-3	9.35555E-2	2.73303E1	-3.26452E1	-3.26278E1	2.67944E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.1656E-1	-7.97749E-1	-9.13105E0	-9.14197E0	5.29289E-3	9.3317E-2	2.72632E1	-3.26089E1	-3.2626E1	2.68169E1	1.73454E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.00673E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09394E0	-8.16727E-1	-7.97844E-1	-9.13134E0	-9.1419E0	5.03063E-3	9.32932E-2	2.73177E1	-3.26621E1	-3.2632E1	2.67992E1	1.73605E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.00363E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.16751E-1	-7.98273E-1	-9.13136E0	-9.14199E0	5.17368E-3	9.29594E-2	2.72997E1	-3.26494E1	-3.2614E1	2.68238E1	1.73379E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.00499E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.16536E-1	-7.98345E-1	-9.13153E0	-9.14209E0	5.6982E-3	9.33409E-2	2.73177E1	-3.26795E1	-3.25996E1	2.68146E1	1.73379E-7	2.51225E-3	2.51225E-3	6.3074E-3	2.00847E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.16631E-1	-7.98845E-1	-9.13134E0	-9.14192E0	5.93662E-3	9.3174E-2	2.73045E1	-3.26753E1	-3.26122E1	2.68132E1	1.73454E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.98764E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.16965E-1	-7.9844E-1	-9.13155E0	-9.14192E0	5.34058E-3	9.29117E-2	2.72805E1	-3.26789E1	-3.26356E1	2.67769E1	1.73303E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.98937E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.16917E-1	-7.98464E-1	-9.13155E0	-9.14199E0	5.48363E-3	9.30071E-2	2.73093E1	-3.27053E1	-3.2602E1	2.67908E1	1.73309E-7	2.5131E-3	2.5131E-3	6.32356E-3	1.98153E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.16441E-1	-7.98273E-1	-9.1315E0	-9.14214E0	5.38826E-3	9.34362E-2	2.72437E1	-3.26844E1	-3.26213E1	2.67986E1	1.73529E-7	2.5068E-3	2.5068E-3	6.3074E-3	1.97903E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.16989E-1	-7.98059E-1	-9.13165E0	-9.1419E0	5.4121E-3	9.30786E-2	2.72961E1	-3.26645E1	-3.26332E1	2.67884E1	1.73529E-7	2.51225E-3	2.51225E-3	6.32386E-3	1.98592E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.16965E-1	-7.97606E-1	-9.13122E0	-9.1419E0	5.48363E-3	9.30309E-2	2.73291E1	-3.26783E1	-3.26543E1	2.68052E1	1.73531E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.97647E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.17037E-1	-7.9782E-1	-9.13136E0	-9.14202E0	5.53131E-3	9.29117E-2	2.73063E1	-3.26095E1	-3.26431E1	2.6828E1	1.73605E-7	2.51225E-3	2.51225E-3	6.3074E-3	1.98592E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.17084E-1	-7.97582E-1	-9.13146E0	-9.14173E0	5.34058E-3	9.28164E-2	2.73069E1	-3.26873E1	-3.26657E1	2.6789E1	1.73454E-7	2.52538E-3	2.52538E-3	6.3074E-3	1.9963E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.17037E-1	-7.97582E-1	-9.13136E0	-9.14192E0	5.60284E-3	9.31978E-2	2.72953E1	-3.26585E1	-3.26083E1	2.67992E1	1.73605E-7	2.51552E-3	2.51552E-3	6.29098E-3	1.9911E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.17108E-1	-7.97415E-1	-9.13162E0	-9.1418E0	5.19753E-3	9.30309E-2	2.73493E1	-3.26762E1	-3.26508E1	2.68343E1	1.73605E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.99283E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.16703E-1	-7.98011E-1	-9.13143E0	-9.14221E0	5.48363E-3	9.31025E-2	2.7301E1	-3.26457E1	-3.26393E1	2.6801E1	1.73457E-7	2.51203E-3	2.51203E-3	6.29128E-3	1.9934E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09394E0	-8.16941E-1	-7.98345E-1	-9.13088E0	-9.14207E0	5.19753E-3	9.32455E-2	2.73165E1	-3.26488E1	-3.25876E1	2.67686E1	1.73531E-7	2.50989E-3	2.50989E-3	6.32896E-3	2.00363E-1