[Scan]
initial_time=2016-02-16T04:48:08
final_time=2016-02-16T04:48:27
ip_count=19
run=1030
dataset=10
scan=767
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08795E-4
ql1_vset=
ql1_vmon=-8.17204E-1
ql1_imon=6.39629E-10
ql2_vset=
ql2_vmon=-7.98154E-1
ql2_imon=2.81048E-10
ql3_vset=
ql3_vmon=-9.13117E0
ql3_imon=6.35433E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=4.83573E-10
mult1=-9.86583E-9
mult2=-2.60567E-9
rf_tmon=-4.32071E-3
rf_agc=3.4778E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.38826E-3
ql5_imon=3.63863E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66326E0
bslens_imon=2.67422E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19547E1
lens5a_imon=1.99571E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.05118E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.538E1
cs_ef1b_imon=3.06905E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.02337E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05136E1
cs_ea1_imon=2.18472E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40205E0
lens1_imon=2.58219E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64672E1
os_ef1alow_imon=2.97383E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03537E1
cs_ea2_imon=1.58054E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84452E1
cs_ef1a_imon=3.04334E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=3.7781E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11019E1
os_restr1_imon=2.88695E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15252E1
os_ea1_imon=1.88706E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6345E1
os_ef1bup_imon=3.07809E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22732E0
cs_ionrep_imon=1.26872E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91852E2
cs_nozzle_imon=1.93569E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01792E1
cs_anode1_imon=3.26853E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20554E0
olens4_imon=6.93858E-10
tplens_vset=1.4E-1
tplens_vmon=1.60663E0
tplens_imon=-2.38717E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26767E1
iondef3_imon=1.50586E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.25759E1
iondef2_imon=1.58302E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02969E2
lens6_imon=2.98544E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=3.47102E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3164E0
ionrepsh_imon=2.0304E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33569E1
lens5b_imon=2.19251E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74716E1
cs_ef2b_imon=3.14064E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.54575E-1
os_ea2_imon=-6.03276E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06123E2
lens4b_imon=2.00509E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71159E1
cs_ef2a_imon=3.20216E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6384E0
os_ef2alow_imon=-2.37302E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.27726E-1
os_ef2bup_imon=-5.30613E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10695E1
os_restr2_imon=2.88035E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.32795E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01925E1
cs_anode2_imon=2.28851E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73033E1
iondef1_imon=1.10697E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6819E1
iondef4_imon=1.0965E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.86989E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=2.87652E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08438E0
cs_ionaccel_imon=-2.03939E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02023E2
cs_ionfocb_imon=1.47487E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55988E1
einzel_imon=7.59401E-6
window_vset=0.0E0
window_vmon=1.82354E-1
window_imon=-6.84045E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39098E-4
mask2_vset=0.0E0
mask2_vmon=-1.86512E1
mask2_imon=-3.26094E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92664E3
multa_neg_imon=7.6931E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.72684E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50154E3
multb_neg_imon=7.59399E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47938E0
defgridb_imon=6.01542E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3392E1
os_fil1_imon=5.45132E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.05197E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66981E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30763E1
cs_fil1_imon=1.00809E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61729E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66931E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.44586E-2
os_fil2_imon=-2.34483E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.91414E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.42687E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29777E-1
cs_fil2_imon=-2.67498E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08409E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22462E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=1.9951E-1
chamber_ion_pmon=1.73531E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.0786E-1
res40_imon=-2.59196E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-8.16941E-1	-7.98035E-1	-9.13148E0	-9.14197E0	5.31673E-3	9.32932E-2	2.73375E1	-3.26797E1	-3.26455E1	2.6783E1	1.73605E-7	2.52061E-3	2.52061E-3	6.28056E-3	2.00021E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.16822E-1	-7.98655E-1	-9.13148E0	-9.14199E0	5.45979E-3	9.32932E-2	2.7272E1	-3.26485E1	-3.26354E1	2.68144E1	1.73454E-7	2.51007E-3	2.51007E-3	6.3074E-3	1.97731E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.16679E-1	-7.98297E-1	-9.13126E0	-9.14197E0	5.07832E-3	9.32217E-2	2.73068E1	-3.26712E1	-3.26509E1	2.67572E1	1.73528E-7	2.51359E-3	2.51359E-3	6.31858E-3	1.98696E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0941E0	-8.1706E-1	-7.98345E-1	-9.13095E0	-9.14197E0	5.65052E-3	9.31025E-2	2.73213E1	-3.2626E1	-3.26747E1	2.68004E1	1.73309E-7	2.51096E-3	2.51096E-3	6.31278E-3	1.9917E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.16965E-1	-7.98368E-1	-9.13115E0	-9.14209E0	5.17368E-3	9.3317E-2	2.73562E1	-3.26176E1	-3.26428E1	2.67764E1	1.73379E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.98764E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.16846E-1	-7.98345E-1	-9.13105E0	-9.14199E0	5.126E-3	9.31978E-2	2.72721E1	-3.26667E1	-3.26101E1	2.68364E1	1.73529E-7	2.51443E-3	2.51443E-3	6.30192E-3	1.9911E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.17156E-1	-7.97939E-1	-9.13122E0	-9.14185E0	5.55515E-3	9.34839E-2	2.73553E1	-3.2667E1	-3.2615E1	2.67914E1	1.73531E-7	2.51954E-3	2.51954E-3	6.3074E-3	1.9968E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.17013E-1	-7.97892E-1	-9.13129E0	-9.14207E0	5.17368E-3	9.28402E-2	2.72782E1	-3.27289E1	-3.25578E1	2.67635E1	1.73531E-7	2.51192E-3	2.51192E-3	6.31808E-3	1.99958E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.17108E-1	-7.98202E-1	-9.13126E0	-9.14199E0	5.36442E-3	9.30786E-2	2.7328E1	-3.26286E1	-3.25745E1	2.67835E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.1687E-1	-7.98631E-1	-9.13105E0	-9.14207E0	5.26905E-3	9.30309E-2	2.73219E1	-3.26663E1	-3.26356E1	2.68136E1	1.73605E-7	2.52222E-3	2.52222E-3	6.33065E-3	1.98551E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.16751E-1	-7.98345E-1	-9.13117E0	-9.14202E0	5.29289E-3	9.29832E-2	2.72757E1	-3.26062E1	-3.26597E1	2.6803E1	1.73605E-7	2.51662E-3	2.51662E-3	6.33486E-3	1.98937E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.16798E-1	-7.98798E-1	-9.13112E0	-9.14192E0	5.24521E-3	9.3174E-2	2.72961E1	-3.27179E1	-3.25797E1	2.68202E1	1.73379E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.99283E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.17013E-1	-7.98249E-1	-9.13131E0	-9.14202E0	5.36442E-3	9.30548E-2	2.73151E1	-3.26402E1	-3.26508E1	2.67902E1	1.73529E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.98247E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.16822E-1	-7.98559E-1	-9.13122E0	-9.1418E0	5.45979E-3	9.29832E-2	2.73369E1	-3.26771E1	-3.26098E1	2.67764E1	1.73383E-7	2.51525E-3	2.51525E-3	6.33977E-3	1.97815E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.16989E-1	-7.98035E-1	-9.13103E0	-9.14156E0	5.34058E-3	9.3174E-2	2.7346E1	-3.26404E1	-3.26753E1	2.68136E1	1.73454E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.97388E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.1687E-1	-7.97892E-1	-9.13143E0	-9.14178E0	5.07832E-3	9.3174E-2	2.73086E1	-3.26543E1	-3.26372E1	2.68124E1	1.73531E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.97984E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.16822E-1	-7.98059E-1	-9.13131E0	-9.14164E0	4.86374E-3	9.2864E-2	2.72883E1	-3.26723E1	-3.26086E1	2.67926E1	1.73605E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.99283E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09619E0	-8.16846E-1	-7.98392E-1	-9.13131E0	-9.1418E0	5.53131E-3	9.32693E-2	2.73141E1	-3.26783E1	-3.26122E1	2.67856E1	1.73529E-7	2.52209E-3	2.52209E-3	6.31837E-3	1.99283E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.1656E-1	-7.98488E-1	-9.13126E0	-9.14185E0	5.24521E-3	9.3174E-2	2.73135E1	-3.26945E1	-3.26543E1	2.68141E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.00151E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.17204E-1	-7.98154E-1	-9.13117E0	-9.14199E0	5.38826E-3	9.31978E-2	2.73033E1	-3.25759E1	-3.26767E1	2.6819E1	1.73531E-7	2.5131E-3	2.5131E-3	6.30202E-3	1.9951E-1