[Scan]
initial_time=2016-02-16T04:49:01
final_time=2016-02-16T04:49:20
ip_count=19
run=1030
dataset=10
scan=769
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0968E0
qbias_imon=-1.08835E-4
ql1_vset=
ql1_vmon=-8.17227E-1
ql1_imon=6.41811E-10
ql2_vset=
ql2_vmon=-7.97749E-1
ql2_imon=2.65503E-10
ql3_vset=
ql3_vmon=-9.13107E0
ql3_imon=5.59092E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=4.97782E-10
mult1=-9.94858E-9
mult2=-2.65466E-9
rf_tmon=-4.91061E-3
rf_agc=3.32914E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.57899E-3
ql5_imon=3.66676E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64391E0
bslens_imon=2.66032E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19755E1
lens5a_imon=1.9892E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12519E2
lens4a_imon=2.05277E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53949E1
cs_ef1b_imon=3.07231E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04581E2
lens23_imon=1.01995E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05517E1
cs_ea1_imon=2.17413E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34793E0
lens1_imon=2.54496E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64305E1
os_ef1alow_imon=3.01039E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04441E1
cs_ea2_imon=1.59554E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84556E1
cs_ef1a_imon=3.00614E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=3.60537E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11094E1
os_restr1_imon=2.88123E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14807E1
os_ea1_imon=1.87528E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63768E1
os_ef1bup_imon=3.09566E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27733E0
cs_ionrep_imon=1.27938E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.93629E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01414E1
cs_anode1_imon=3.30691E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=6.59168E-10
tplens_vset=1.4E-1
tplens_vmon=1.60959E0
tplens_imon=-2.77716E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2652E1
iondef3_imon=1.51335E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26514E1
iondef2_imon=1.55841E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02943E2
lens6_imon=2.98681E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=3.79717E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26051E0
ionrepsh_imon=2.0047E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33562E1
lens5b_imon=2.20946E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74649E1
cs_ef2b_imon=3.13883E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.9318E-1
os_ea2_imon=-4.72384E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.00753E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70939E1
cs_ef2a_imon=3.19191E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.68352E0
os_ef2alow_imon=-2.36841E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.528E-1
os_ef2bup_imon=-5.46454E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10705E1
os_restr2_imon=2.87911E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23097E2
cs_ionfoca_imon=6.3155E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01904E1
cs_anode2_imon=2.2889E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73104E1
iondef1_imon=1.1013E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67914E1
iondef4_imon=1.10529E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=1.83923E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=2.92504E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14371E0
cs_ionaccel_imon=-2.07825E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02092E2
cs_ionfocb_imon=1.47591E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56069E1
einzel_imon=7.54984E-6
window_vset=0.0E0
window_vmon=2.2312E-1
window_imon=-8.04415E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82651E2
mask1_imon=2.38985E-4
mask2_vset=0.0E0
mask2_vmon=-1.86256E1
mask2_imon=-3.83341E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.53061E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93694E3
defgrida_imon=6.67263E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50174E3
multb_neg_imon=7.16651E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.54593E0
defgridb_imon=6.20399E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33931E1
os_fil1_imon=4.76312E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.85925E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66576E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30804E1
cs_fil1_imon=1.00707E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63009E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.671E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.56735E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.59038E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.47618E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29588E-1
cs_fil2_imon=-2.30786E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31904E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22569E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.99456E-1
chamber_ion_pmon=1.73529E-7
chamber_cvt_pmon=2.50789E-3
foreline_cvt_pmon=2.50789E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.76646E-1
res40_imon=-2.39671E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.16321E-1	-7.9844E-1	-9.13169E0	-9.14192E0	5.6982E-3	9.32455E-2	2.73015E1	-3.26669E1	-3.2644E1	2.681E1	1.73531E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.99E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.16393E-1	-7.98249E-1	-9.13169E0	-9.1419E0	5.67436E-3	9.3174E-2	2.72861E1	-3.26652E1	-3.26425E1	2.6845E1	1.73529E-7	2.51225E-3	2.51225E-3	6.33486E-3	2.00499E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.16464E-1	-7.98273E-1	-9.13153E0	-9.14216E0	5.57899E-3	9.36508E-2	2.73039E1	-3.26455E1	-3.25942E1	2.6752E1	1.73221E-7	2.51136E-3	2.51136E-3	6.33538E-3	2.00818E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09619E0	-8.16512E-1	-7.97868E-1	-9.13146E0	-9.14202E0	5.17368E-3	9.32932E-2	2.73016E1	-3.26325E1	-3.26543E1	2.67571E1	1.73457E-7	2.51203E-3	2.51203E-3	6.30202E-3	2.00192E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.1656E-1	-7.98202E-1	-9.13141E0	-9.14195E0	5.17368E-3	9.35555E-2	2.73239E1	-3.26784E1	-3.26067E1	2.68032E1	1.73454E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.98592E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.16441E-1	-7.98178E-1	-9.13141E0	-9.1419E0	5.57899E-3	9.30786E-2	2.72851E1	-3.26472E1	-3.26129E1	2.67776E1	1.73533E-7	2.51679E-3	2.51679E-3	6.31779E-3	1.99776E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.16727E-1	-7.98035E-1	-9.13122E0	-9.14199E0	5.31673E-3	9.29832E-2	2.73219E1	-3.26196E1	-3.26457E1	2.67873E1	1.73374E-7	2.51581E-3	2.51581E-3	6.31299E-3	1.99577E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.16393E-1	-7.98345E-1	-9.13136E0	-9.14209E0	5.36442E-3	9.31501E-2	2.72895E1	-3.26503E1	-3.26279E1	2.68244E1	1.73454E-7	2.51389E-3	2.51389E-3	6.29919E-3	1.99197E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09665E0	-8.16512E-1	-7.9813E-1	-9.13129E0	-9.14204E0	5.55515E-3	9.3174E-2	2.73087E1	-3.26663E1	-3.262E1	2.67656E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09734E0	-8.1656E-1	-7.98321E-1	-9.13129E0	-9.14211E0	5.24521E-3	9.34124E-2	2.72751E1	-3.26518E1	-3.26356E1	2.67962E1	1.73451E-7	2.52473E-3	2.52473E-3	6.31858E-3	1.99048E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09711E0	-8.16536E-1	-7.97772E-1	-9.13107E0	-9.14237E0	5.65052E-3	9.34601E-2	2.73147E1	-3.26957E1	-3.25864E1	2.67966E1	1.73454E-7	2.51552E-3	2.51552E-3	6.34037E-3	1.9911E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09704E0	-8.16059E-1	-7.98225E-1	-9.13112E0	-9.14185E0	5.53131E-3	9.33886E-2	2.73189E1	-3.26693E1	-3.26038E1	2.67563E1	1.73454E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.98937E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0968E0	-8.16607E-1	-7.97796E-1	-9.13136E0	-9.14209E0	5.17368E-3	9.30548E-2	2.72915E1	-3.26531E1	-3.25953E1	2.68118E1	1.73235E-7	2.50882E-3	2.50882E-3	6.34518E-3	1.9951E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.16131E-1	-7.98368E-1	-9.13138E0	-9.14209E0	5.65052E-3	9.3174E-2	2.72648E1	-3.26591E1	-3.2599E1	2.67968E1	1.73457E-7	2.51739E-3	2.51739E-3	6.32356E-3	1.9917E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09611E0	-8.16369E-1	-7.98726E-1	-9.13124E0	-9.14209E0	5.19753E-3	9.32932E-2	2.73509E1	-3.26492E1	-3.26023E1	2.67775E1	1.73451E-7	2.51693E-3	2.51693E-3	6.33538E-3	1.98872E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09611E0	-8.16488E-1	-7.98011E-1	-9.13122E0	-9.14166E0	5.34058E-3	9.34362E-2	2.73088E1	-3.26474E1	-3.26113E1	2.68038E1	1.73532E-7	2.51814E-3	2.51814E-3	6.33388E-3	1.98727E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.16679E-1	-7.98178E-1	-9.13115E0	-9.14207E0	5.50747E-3	9.35316E-2	2.73033E1	-3.26873E1	-3.25942E1	2.6796E1	1.73451E-7	2.51025E-3	2.51025E-3	6.3074E-3	1.99754E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.1706E-1	-7.97582E-1	-9.13103E0	-9.14187E0	5.53131E-3	9.34601E-2	2.72597E1	-3.26077E1	-3.2652E1	2.68358E1	1.73605E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.98419E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09642E0	-8.17108E-1	-7.98202E-1	-9.13117E0	-9.14199E0	5.55515E-3	9.35793E-2	2.72849E1	-3.2686E1	-3.26076E1	2.67986E1	1.73457E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.9934E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0968E0	-8.17227E-1	-7.97749E-1	-9.13107E0	-9.14176E0	5.57899E-3	9.34839E-2	2.73104E1	-3.26514E1	-3.2652E1	2.67914E1	1.73529E-7	2.50789E-3	2.50789E-3	6.3074E-3	1.99456E-1