[Scan]
initial_time=2016-02-16T04:49:54
final_time=2016-02-16T04:50:14
ip_count=19
run=1030
dataset=10
scan=771
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09665E0
qbias_imon=-1.08876E-4
ql1_vset=
ql1_vmon=-8.16965E-1
ql1_imon=5.97465E-10
ql2_vset=
ql2_vmon=-7.98249E-1
ql2_imon=2.74062E-10
ql3_vset=
ql3_vmon=-9.13141E0
ql3_imon=5.93317E-10
ql4_vset=
ql4_vmon=-9.14226E0
ql4_imon=5.02002E-10
mult1=-9.89692E-9
mult2=-2.78448E-9
rf_tmon=-4.4223E-3
rf_agc=3.22881E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.8651E-3
ql5_imon=3.6068E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64203E0
bslens_imon=2.73085E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19872E1
lens5a_imon=1.99218E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.05181E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53742E1
cs_ef1b_imon=3.09262E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02171E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04905E1
cs_ea1_imon=2.18932E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38908E0
lens1_imon=2.80517E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64314E1
os_ef1alow_imon=2.97225E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04162E1
cs_ea2_imon=1.5501E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84502E1
cs_ef1a_imon=3.03171E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=3.68547E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11003E1
os_restr1_imon=2.87026E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14993E1
os_ea1_imon=1.90935E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63539E1
os_ef1bup_imon=3.09731E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23322E0
cs_ionrep_imon=1.26589E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93519E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01773E1
cs_anode1_imon=3.28111E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20568E0
olens4_imon=6.69336E-10
tplens_vset=1.4E-1
tplens_vmon=1.61194E0
tplens_imon=-3.02427E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26633E1
iondef3_imon=1.5048E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26386E1
iondef2_imon=1.60567E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98555E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=3.44205E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27392E0
ionrepsh_imon=2.02438E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33634E1
lens5b_imon=2.19038E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74381E1
cs_ef2b_imon=3.13767E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.2036E-1
os_ea2_imon=-6.24513E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00839E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71096E1
cs_ef2a_imon=3.18921E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64381E0
os_ef2alow_imon=-2.50418E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.73998E-1
os_ef2bup_imon=-5.17111E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10679E1
os_restr2_imon=2.87963E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.32193E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01689E1
cs_anode2_imon=2.30299E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72835E1
iondef1_imon=1.10555E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6813E1
iondef4_imon=1.09927E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.85498E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=2.92015E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13074E0
cs_ionaccel_imon=-1.87348E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02024E2
cs_ionfocb_imon=1.47179E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56321E1
einzel_imon=7.6482E-6
window_vset=0.0E0
window_vmon=2.07732E-1
window_imon=-1.04457E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39217E-4
mask2_vset=0.0E0
mask2_vmon=-1.86536E1
mask2_imon=-5.86866E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92671E3
multa_neg_imon=7.3427E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.68791E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50107E3
multb_neg_imon=7.53382E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56501E0
defgridb_imon=6.19239E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33931E1
os_fil1_imon=4.85431E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.51524E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66832E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30836E1
cs_fil1_imon=1.00876E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63171E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67206E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20526E-2
os_fil2_imon=-2.41369E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.11859E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.5066E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29522E-1
cs_fil2_imon=-2.39567E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17226E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22591E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.9968E-1
chamber_ion_pmon=1.73457E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.2116E-1
res40_imon=-2.72041E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.17251E-1	-7.98345E-1	-9.13117E0	-9.14204E0	5.10216E-3	9.32217E-2	2.73051E1	-3.26579E1	-3.26194E1	2.68238E1	1.73531E-7	2.51417E-3	2.51417E-3	6.30202E-3	1.98322E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.17037E-1	-7.98035E-1	-9.13124E0	-9.14211E0	4.98295E-3	9.29832E-2	2.73283E1	-3.26625E1	-3.26538E1	2.67902E1	1.73454E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.98937E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.1718E-1	-7.97772E-1	-9.13112E0	-9.14207E0	5.00679E-3	9.31978E-2	2.73375E1	-3.26756E1	-3.26627E1	2.67812E1	1.73387E-7	2.51919E-3	2.51919E-3	6.31798E-3	2.00567E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.16989E-1	-7.98225E-1	-9.13143E0	-9.14228E0	5.10216E-3	9.31025E-2	2.73135E1	-3.26987E1	-3.25942E1	2.67938E1	1.73528E-7	2.50914E-3	2.50914E-3	6.32418E-3	1.99754E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.17013E-1	-7.97701E-1	-9.13095E0	-9.1419E0	5.84126E-3	9.3317E-2	2.7288E1	-3.26596E1	-3.26437E1	2.67469E1	1.73454E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.00499E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.16607E-1	-7.98297E-1	-9.13119E0	-9.14187E0	5.72205E-3	9.33409E-2	2.73111E1	-3.26777E1	-3.26062E1	2.68088E1	1.73235E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.00021E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.1718E-1	-7.9813E-1	-9.13105E0	-9.14207E0	5.38826E-3	9.34362E-2	2.73216E1	-3.26644E1	-3.26307E1	2.6803E1	1.73605E-7	2.51443E-3	2.51443E-3	6.30192E-3	1.98075E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.16846E-1	-7.98035E-1	-9.13079E0	-9.14176E0	5.38826E-3	9.32932E-2	2.72799E1	-3.26326E1	-3.26368E1	2.68214E1	1.73457E-7	2.51739E-3	2.51739E-3	6.3074E-3	1.98153E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.16917E-1	-7.97892E-1	-9.13124E0	-9.14192E0	5.36442E-3	9.34362E-2	2.72642E1	-3.26567E1	-3.26176E1	2.67746E1	1.73379E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.96874E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.16727E-1	-7.98154E-1	-9.13098E0	-9.1418E0	5.26905E-3	9.34124E-2	2.73027E1	-3.26278E1	-3.26325E1	2.67782E1	1.73379E-7	2.51007E-3	2.51007E-3	6.3074E-3	1.96361E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.16822E-1	-7.98106E-1	-9.13124E0	-9.14178E0	5.45979E-3	9.3174E-2	2.73094E1	-3.26725E1	-3.26181E1	2.68022E1	1.73379E-7	2.51552E-3	2.51552E-3	6.28006E-3	1.97045E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.16321E-1	-7.98035E-1	-9.13105E0	-9.14216E0	5.26905E-3	9.30786E-2	2.72727E1	-3.2662E1	-3.2593E1	2.68106E1	1.73454E-7	2.52428E-3	2.52428E-3	6.32936E-3	1.98075E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.16607E-1	-7.97677E-1	-9.13105E0	-9.14202E0	5.65052E-3	9.32932E-2	2.73039E1	-3.26651E1	-3.26536E1	2.68052E1	1.73457E-7	2.52276E-3	2.52276E-3	6.31817E-3	1.9951E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-8.16488E-1	-7.9813E-1	-9.13141E0	-9.14199E0	5.62668E-3	9.32932E-2	2.73027E1	-3.26531E1	-3.26113E1	2.68151E1	1.73379E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.99803E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0965E0	-8.16488E-1	-7.98106E-1	-9.1316E0	-9.14178E0	5.81741E-3	9.31025E-2	2.73269E1	-3.26856E1	-3.26431E1	2.681E1	1.73605E-7	2.51417E-3	2.51417E-3	6.31817E-3	1.99E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09734E0	-8.16584E-1	-7.98011E-1	-9.1315E0	-9.14185E0	5.55515E-3	9.3317E-2	2.73189E1	-3.26488E1	-3.2644E1	2.67716E1	1.73457E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.98491E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09688E0	-8.16607E-1	-7.98059E-1	-9.13122E0	-9.14176E0	5.76973E-3	9.29356E-2	2.73087E1	-3.26687E1	-3.26338E1	2.6822E1	1.73529E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.9963E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09734E0	-8.17108E-1	-7.97987E-1	-9.13129E0	-9.14199E0	5.14984E-3	9.3317E-2	2.72951E1	-3.26608E1	-3.26148E1	2.67873E1	1.73454E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.99977E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09673E0	-8.17156E-1	-7.97653E-1	-9.13124E0	-9.14187E0	5.48363E-3	9.33886E-2	2.72892E1	-3.2672E1	-3.26024E1	2.68154E1	1.73605E-7	2.51203E-3	2.51203E-3	6.32896E-3	1.9951E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09665E0	-8.16965E-1	-7.98249E-1	-9.13141E0	-9.14226E0	5.8651E-3	9.32455E-2	2.72835E1	-3.26386E1	-3.26633E1	2.6813E1	1.73457E-7	2.5131E-3	2.5131E-3	6.3074E-3	1.9968E-1