[Scan]
initial_time=2016-02-16T04:50:47
final_time=2016-02-16T04:51:07
ip_count=19
run=1030
dataset=10
scan=773
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09426E0
qbias_imon=-1.0876E-4
ql1_vset=
ql1_vmon=-8.16631E-1
ql1_imon=6.64759E-10
ql2_vset=
ql2_vmon=-7.98035E-1
ql2_imon=2.60425E-10
ql3_vset=
ql3_vmon=-9.13169E0
ql3_imon=6.21784E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=5.0354E-10
mult1=-9.5357E-9
mult2=-2.92022E-9
rf_tmon=-4.52444E-3
rf_agc=3.37181E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=3.7111E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64811E0
bslens_imon=2.80091E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19971E1
lens5a_imon=2.00398E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.0523E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53286E1
cs_ef1b_imon=3.08181E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04593E2
lens23_imon=1.02381E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05276E1
cs_ea1_imon=2.18098E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4044E0
lens1_imon=2.60264E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65101E1
os_ef1alow_imon=2.98414E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03798E1
cs_ea2_imon=1.60527E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84082E1
cs_ef1a_imon=3.04253E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=3.72827E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11382E1
os_restr1_imon=2.85152E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15216E1
os_ea1_imon=1.89295E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63419E1
os_ef1bup_imon=3.10343E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27914E0
cs_ionrep_imon=1.26857E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91858E2
cs_nozzle_imon=1.9351E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01869E1
cs_anode1_imon=3.27859E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=7.04026E-10
tplens_vset=1.4E-1
tplens_vmon=1.60538E0
tplens_imon=-1.19098E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26014E1
iondef3_imon=1.52236E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26687E1
iondef2_imon=1.58977E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02997E2
lens6_imon=2.98724E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=3.61538E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27373E0
ionrepsh_imon=2.00722E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33646E1
lens5b_imon=2.18783E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74279E1
cs_ef2b_imon=3.13551E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.29493E-1
os_ea2_imon=-4.47149E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0614E2
lens4b_imon=2.00662E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71096E1
cs_ef2a_imon=3.1838E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65282E0
os_ef2alow_imon=-2.36362E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.72797E-1
os_ef2bup_imon=-5.08101E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10607E1
os_restr2_imon=2.86918E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.30721E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01425E1
cs_anode2_imon=2.28822E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73069E1
iondef1_imon=1.10851E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67782E1
iondef4_imon=1.09963E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.84791E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=2.43855E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11933E0
cs_ionaccel_imon=-2.07891E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02109E2
cs_ionfocb_imon=1.47219E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56135E1
einzel_imon=7.87164E-6
window_vset=0.0E0
window_vmon=1.98722E-1
window_imon=-1.00493E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82607E2
mask1_imon=2.39286E-4
mask2_vset=0.0E0
mask2_vmon=-1.86963E1
mask2_imon=-5.58035E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92608E3
multa_neg_imon=8.04612E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.51762E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.46933E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56097E0
defgridb_imon=6.00211E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33922E1
os_fil1_imon=4.73418E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.71946E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66785E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30777E1
cs_fil1_imon=1.00902E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62852E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67072E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.31876E-2
os_fil2_imon=-2.38366E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.01608E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.44009E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28357E-1
cs_fil2_imon=-2.25752E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.77932E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2254E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=1.9934E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.8452E-1
res40_imon=-2.6159E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.1656E-1	-7.98273E-1	-9.1315E0	-9.14164E0	5.29289E-3	9.33886E-2	2.7334E1	-3.26744E1	-3.26024E1	2.68192E1	1.73605E-7	2.51225E-3	2.51225E-3	6.33486E-3	2.00673E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.16536E-1	-7.98082E-1	-9.13153E0	-9.1419E0	5.126E-3	9.31025E-2	2.73143E1	-3.26591E1	-3.26021E1	2.68288E1	1.73383E-7	2.51954E-3	2.51954E-3	6.31817E-3	1.99E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09364E0	-8.16631E-1	-7.98202E-1	-9.13098E0	-9.14197E0	5.26905E-3	9.32217E-2	2.73312E1	-3.26654E1	-3.25907E1	2.68082E1	1.73605E-7	2.51359E-3	2.51359E-3	6.31858E-3	2.00285E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09333E0	-8.1687E-1	-7.97844E-1	-9.13107E0	-9.14161E0	5.19753E-3	9.32932E-2	2.72727E1	-3.26837E1	-3.2584E1	2.68112E1	1.73605E-7	2.51709E-3	2.51709E-3	6.3074E-3	2.00064E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.16607E-1	-7.98059E-1	-9.13119E0	-9.14202E0	5.19753E-3	9.33409E-2	2.73086E1	-3.26514E1	-3.26366E1	2.68209E1	1.73454E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.01022E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.16679E-1	-7.97796E-1	-9.13153E0	-9.1418E0	5.53131E-3	9.3174E-2	2.73285E1	-3.26741E1	-3.26332E1	2.68136E1	1.73531E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.00192E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.16679E-1	-7.9844E-1	-9.13105E0	-9.14178E0	5.48363E-3	9.30548E-2	2.73511E1	-3.2662E1	-3.26024E1	2.6813E1	1.73454E-7	2.50898E-3	2.50898E-3	6.32386E-3	1.99803E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.16536E-1	-7.97653E-1	-9.13107E0	-9.14199E0	5.34058E-3	9.27687E-2	2.72799E1	-3.26747E1	-3.26302E1	2.67944E1	1.73379E-7	2.51552E-3	2.51552E-3	6.29098E-3	1.98937E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.16512E-1	-7.97868E-1	-9.13105E0	-9.1418E0	5.22137E-3	9.29594E-2	2.72991E1	-3.26579E1	-3.2611E1	2.67577E1	1.73493E-7	2.5143E-3	2.5143E-3	6.31827E-3	1.98798E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.16774E-1	-7.97892E-1	-9.13119E0	-9.14195E0	5.38826E-3	9.28402E-2	2.73299E1	-3.26354E1	-3.26307E1	2.68348E1					
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.16107E-1	-7.98225E-1	-9.13107E0	-9.14197E0	5.36442E-3	9.3174E-2	2.7263E1	-3.26356E1	-3.26392E1	2.67926E1	1.73531E-7	2.5131E-3	2.5131E-3	6.32356E-3	1.9968E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.16393E-1	-7.98321E-1	-9.13126E0	-9.14164E0	5.72205E-3	9.3174E-2	2.73081E1	-3.26759E1	-3.26134E1	2.67866E1	1.73529E-7	2.51116E-3	2.51116E-3	6.30192E-3	1.9963E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09603E0	-8.16488E-1	-7.98249E-1	-9.13122E0	-9.1418E0	5.38826E-3	9.32217E-2	2.72895E1	-3.2644E1	-3.26086E1	2.68214E1	1.73529E-7	2.51116E-3	2.51116E-3	6.33486E-3	1.9963E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09611E0	-8.1687E-1	-7.97963E-1	-9.13136E0	-9.14161E0	5.53131E-3	9.32455E-2	2.72961E1	-3.26687E1	-3.25876E1	2.68101E1	1.73379E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.99977E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.16464E-1	-7.97844E-1	-9.13124E0	-9.14168E0	5.53131E-3	9.35078E-2	2.72824E1	-3.26817E1	-3.26125E1	2.6807E1	1.73605E-7	2.51804E-3	2.51804E-3	6.32418E-3	2.00108E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.16417E-1	-7.97915E-1	-9.13167E0	-9.1419E0	5.65052E-3	9.32932E-2	2.73147E1	-3.26741E1	-3.26332E1	2.67896E1	1.73529E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.9963E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.16298E-1	-7.98059E-1	-9.13153E0	-9.14185E0	5.29289E-3	9.33886E-2	2.72915E1	-3.26573E1	-3.26402E1	2.68472E1	1.73379E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.98592E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09611E0	-8.16655E-1	-7.97987E-1	-9.13157E0	-9.14214E0	5.19753E-3	9.32455E-2	2.72715E1	-3.26685E1	-3.26083E1	2.68036E1	1.73567E-7	2.51755E-3	2.51755E-3	6.31555E-3	1.9914E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.16607E-1	-7.98106E-1	-9.13184E0	-9.1419E0	5.65052E-3	9.33409E-2	2.73147E1	-3.26801E1	-3.26056E1	2.6828E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09426E0	-8.16631E-1	-7.98035E-1	-9.13169E0	-9.14197E0	5.45979E-3	9.31978E-2	2.73069E1	-3.26687E1	-3.26014E1	2.67782E1	1.73605E-7	2.51847E-3	2.51847E-3	6.32356E-3	1.9934E-1