[Scan]
initial_time=2016-02-16T04:51:14
final_time=2016-02-16T04:51:33
ip_count=19
run=1030
dataset=10
scan=774
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08762E-4
ql1_vset=
ql1_vmon=-8.1625E-1
ql1_imon=5.54717E-10
ql2_vset=
ql2_vmon=-7.97939E-1
ql2_imon=2.53606E-10
ql3_vset=
ql3_vmon=-9.13134E0
ql3_imon=5.55122E-10
ql4_vset=
ql4_vmon=-9.14178E0
ql4_imon=4.6519E-10
mult1=-1.01859E-8
mult2=-3.12781E-9
rf_tmon=-5.10724E-3
rf_agc=3.28529E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.62668E-3
ql5_imon=3.61836E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65855E0
bslens_imon=2.47601E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20037E1
lens5a_imon=2.0212E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12531E2
lens4a_imon=2.05192E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53725E1
cs_ef1b_imon=3.08921E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02103E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04917E1
cs_ea1_imon=2.17587E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41798E0
lens1_imon=2.54326E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64464E1
os_ef1alow_imon=2.98669E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03767E1
cs_ea2_imon=1.58798E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84446E1
cs_ef1a_imon=3.02283E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=3.77452E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10869E1
os_restr1_imon=2.87861E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15182E1
os_ea1_imon=1.87184E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63861E1
os_ef1bup_imon=3.1045E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.30047E0
cs_ionrep_imon=1.29137E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91898E2
cs_nozzle_imon=1.93615E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01618E1
cs_anode1_imon=3.2734E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=6.53625E-10
tplens_vset=1.4E-1
tplens_vmon=1.61607E0
tplens_imon=-2.59954E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26176E1
iondef3_imon=1.51719E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26669E1
iondef2_imon=1.57771E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02948E2
lens6_imon=2.98399E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=3.44348E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25269E0
ionrepsh_imon=2.01695E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33941E1
lens5b_imon=2.20808E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74739E1
cs_ef2b_imon=3.13856E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.87019E-1
os_ea2_imon=-5.18331E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06125E2
lens4b_imon=2.00732E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70899E1
cs_ef2a_imon=3.18791E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.66389E0
os_ef2alow_imon=-2.54678E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.64795E-1
os_ef2bup_imon=-5.23315E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10457E1
os_restr2_imon=2.87618E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23035E2
cs_ionfoca_imon=6.33255E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01734E1
cs_anode2_imon=2.29094E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73375E1
iondef1_imon=1.08892E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6768E1
iondef4_imon=1.11944E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.83507E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=2.44033E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09133E0
cs_ionaccel_imon=-1.79265E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02119E2
cs_ionfocb_imon=1.47219E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56365E1
einzel_imon=7.7643E-6
window_vset=0.0E0
window_vmon=2.37958E-1
window_imon=-9.72491E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82609E2
mask1_imon=2.39244E-4
mask2_vset=0.0E0
mask2_vmon=-1.86483E1
mask2_imon=-6.59718E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.9267E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.48616E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.18696E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.64474E0
defgridb_imon=6.36936E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33912E1
os_fil1_imon=5.5382E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.99405E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66569E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3077E1
cs_fil1_imon=1.0061E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6364E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67173E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21793E-2
os_fil2_imon=-2.31587E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.11884E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.60152E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28279E-1
cs_fil2_imon=-2.26374E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.81389E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22668E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.01047E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.16172E-1
res40_imon=-2.56068E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.16679E-1	-7.97319E-1	-9.1315E0	-9.14197E0	5.65052E-3	9.31978E-2	2.72815E1	-3.26213E1	-3.2603E1	2.6807E1	1.73457E-7	2.52061E-3	2.52061E-3	6.32356E-3	1.99E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.16321E-1	-7.97844E-1	-9.13153E0	-9.14192E0	5.17368E-3	9.29356E-2	2.72861E1	-3.2667E1	-3.26107E1	2.67908E1	1.73531E-7	2.51847E-3	2.51847E-3	6.32356E-3	1.9934E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.16965E-1	-7.97987E-1	-9.13184E0	-9.14171E0	5.36442E-3	9.29832E-2	2.72809E1	-3.26472E1	-3.25977E1	2.67914E1	1.73528E-7	2.51693E-3	2.51693E-3	6.31858E-3	1.9852E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.16798E-1	-7.97892E-1	-9.13174E0	-9.14176E0	5.72205E-3	9.3174E-2	2.73063E1	-3.26307E1	-3.26431E1	2.67989E1	1.73605E-7	2.51739E-3	2.51739E-3	6.30202E-3	1.9968E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.16703E-1	-7.97796E-1	-9.13157E0	-9.14178E0	5.48363E-3	9.28879E-2	2.73009E1	-3.26837E1	-3.26543E1	2.67944E1	1.73457E-7	2.51739E-3	2.51739E-3	6.29128E-3	1.9883E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-8.16965E-1	-7.97677E-1	-9.13148E0	-9.14207E0	5.45979E-3	9.29117E-2	2.73153E1	-3.26663E1	-3.2653E1	2.67746E1	1.73454E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.98419E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.17037E-1	-7.97796E-1	-9.13136E0	-9.14199E0	5.55515E-3	9.31263E-2	2.73081E1	-3.26543E1	-3.25936E1	2.67619E1	1.73528E-7	2.51248E-3	2.51248E-3	6.29624E-3	1.98344E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.16536E-1	-7.97582E-1	-9.13162E0	-9.1419E0	5.48363E-3	9.30786E-2	2.72997E1	-3.26639E1	-3.26116E1	2.68052E1	1.73605E-7	2.51632E-3	2.51632E-3	6.32356E-3	1.98491E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.16345E-1	-7.98011E-1	-9.1315E0	-9.14168E0	5.53131E-3	9.30071E-2	2.73117E1	-3.2653E1	-3.26146E1	2.67848E1	1.73529E-7	2.51443E-3	2.51443E-3	6.32936E-3	1.98592E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.16321E-1	-7.98059E-1	-9.13155E0	-9.14209E0	5.79357E-3	9.30786E-2	2.72988E1	-3.26521E1	-3.26341E1	2.67726E1	1.73529E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.01197E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.15821E-1	-7.98106E-1	-9.13131E0	-9.14209E0	5.34058E-3	9.34124E-2	2.73045E1	-3.26573E1	-3.2623E1	2.68064E1	1.73492E-7	2.52072E-3	2.52072E-3	6.31563E-3	2.00586E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.16274E-1	-7.97892E-1	-9.13138E0	-9.14187E0	5.93662E-3	9.32693E-2	2.7298E1	-3.26596E1	-3.26183E1	2.67974E1	1.73605E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.00325E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.16679E-1	-7.97868E-1	-9.1315E0	-9.14199E0	5.57899E-3	9.32932E-2	2.73201E1	-3.26897E1	-3.26434E1	2.68022E1	1.73383E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.00876E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.16607E-1	-7.97772E-1	-9.13141E0	-9.14187E0	5.45979E-3	9.29832E-2	2.73105E1	-3.26554E1	-3.2626E1	2.68028E1	1.73605E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.99456E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.16321E-1	-7.98106E-1	-9.13131E0	-9.14233E0	5.93662E-3	9.31263E-2	2.73369E1	-3.26468E1	-3.26285E1	2.6789E1	1.73529E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.98592E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09642E0	-8.16441E-1	-7.97987E-1	-9.13143E0	-9.14202E0	5.72205E-3	9.29832E-2	2.72937E1	-3.2626E1	-3.26254E1	2.68053E1	1.73528E-7	2.51693E-3	2.51693E-3	6.31299E-3	1.99754E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.16703E-1	-7.97939E-1	-9.1315E0	-9.14202E0	5.26905E-3	9.30786E-2	2.73313E1	-3.26329E1	-3.26166E1	2.68119E1	1.73319E-7	2.5199E-3	2.5199E-3	6.29185E-3	1.98955E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.16655E-1	-7.97987E-1	-9.13138E0	-9.14202E0	5.07832E-3	9.30548E-2	2.7346E1	-3.2641E1	-3.26332E1	2.67607E1	1.73526E-7	2.51271E-3	2.51271E-3	6.3131E-3	1.98804E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.16011E-1	-7.97796E-1	-9.13124E0	-9.14192E0	5.29289E-3	9.31978E-2	2.73128E1	-3.2672E1	-3.26001E1	2.68111E1	1.73605E-7	2.51334E-3	2.51334E-3	6.33486E-3	1.98937E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.1625E-1	-7.97939E-1	-9.13134E0	-9.14178E0	5.62668E-3	9.32932E-2	2.73375E1	-3.26669E1	-3.26176E1	2.6768E1	1.73605E-7	2.5131E-3	2.5131E-3	6.31817E-3	2.01047E-1