[Scan]
initial_time=2016-02-16T04:51:41
final_time=2016-02-16T04:52:00
ip_count=19
run=1030
dataset=10
scan=775
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08826E-4
ql1_vset=
ql1_vmon=-8.16488E-1
ql1_imon=6.10662E-10
ql2_vset=
ql2_vmon=-7.97892E-1
ql2_imon=2.66492E-10
ql3_vset=
ql3_vmon=-9.13179E0
ql3_imon=5.57458E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=5.05924E-10
mult1=-1.03831E-8
mult2=-2.86429E-9
rf_tmon=-4.58282E-3
rf_agc=3.49628E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=3.77774E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66734E0
bslens_imon=2.4981E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19965E1
lens5a_imon=2.00001E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12453E2
lens4a_imon=2.0519E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5322E1
cs_ef1b_imon=3.07712E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02096E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0515E1
cs_ea1_imon=2.16188E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39779E0
lens1_imon=2.58462E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64855E1
os_ef1alow_imon=2.98414E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03804E1
cs_ea2_imon=1.57787E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84154E1
cs_ef1a_imon=3.02198E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=3.60441E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1137E1
os_restr1_imon=2.86737E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15558E1
os_ea1_imon=1.89115E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.0955E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26532E0
cs_ionrep_imon=1.26929E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.9351E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01497E1
cs_anode1_imon=3.29913E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=6.65402E-10
tplens_vset=1.4E-1
tplens_vmon=1.60959E0
tplens_imon=-1.11888E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25832E1
iondef3_imon=1.48306E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26854E1
iondef2_imon=1.57319E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03E2
lens6_imon=2.98577E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=3.53384E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26532E0
ionrepsh_imon=2.02561E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3418E1
lens5b_imon=2.19288E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74748E1
cs_ef2b_imon=3.12686E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.73954E-1
os_ea2_imon=-1.83987E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00587E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71288E1
cs_ef2a_imon=3.19786E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6384E0
os_ef2alow_imon=-2.66996E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.77602E-1
os_ef2bup_imon=-5.21436E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10769E1
os_restr2_imon=2.86881E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23084E2
cs_ionfoca_imon=6.31118E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01875E1
cs_anode2_imon=2.26948E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73094E1
iondef1_imon=1.11211E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6807E1
iondef4_imon=1.0953E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.83418E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=2.78437E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12894E0
cs_ionaccel_imon=-1.81942E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47475E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56429E1
einzel_imon=7.76713E-6
window_vset=0.0E0
window_vmon=1.97521E-1
window_imon=-1.04457E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82597E2
mask1_imon=2.39362E-4
mask2_vset=0.0E0
mask2_vmon=-1.86482E1
mask2_imon=-4.96767E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.51259E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93685E3
defgrida_imon=6.4996E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.25664E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36247E0
defgridb_imon=6.2112E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33934E1
os_fil1_imon=5.18467E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.74349E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66839E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30804E1
cs_fil1_imon=1.00789E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63147E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66946E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.37035E-2
os_fil2_imon=-2.29956E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.19978E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.61153E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28228E-1
cs_fil2_imon=-2.19145E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16024E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22455E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.97815E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.18757E-1
res40_imon=-2.48255E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=147
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.16393E-1	-7.98535E-1	-9.13138E0	-9.1419E0	5.34058E-3	9.34362E-2	2.72984E1	-3.26891E1	-3.26125E1	2.68004E1	1.73454E-7	2.51552E-3	2.51552E-3	6.33486E-3	1.9963E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.16441E-1	-7.98202E-1	-9.13155E0	-9.14171E0	5.55515E-3	9.29117E-2	2.73045E1	-3.26783E1	-3.26056E1	2.67902E1	1.73605E-7	2.51693E-3	2.51693E-3	6.3074E-3	1.98344E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.16202E-1	-7.98559E-1	-9.13155E0	-9.14183E0	4.98295E-3	9.29356E-2	2.73167E1	-3.26561E1	-3.26376E1	2.68154E1	1.73605E-7	2.51334E-3	2.51334E-3	6.32936E-3	1.99977E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09603E0	-8.16751E-1	-7.98392E-1	-9.13153E0	-9.14187E0	4.93526E-3	9.33886E-2	2.72781E1	-3.26675E1	-3.2644E1	2.67804E1	1.73532E-7	2.51287E-3	2.51287E-3	6.3074E-3	2.00735E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-8.16727E-1	-7.98106E-1	-9.13146E0	-9.1418E0	5.24521E-3	9.31263E-2	2.72892E1	-3.26644E1	-3.26272E1	2.68268E1	1.73303E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.00673E-1
6.0E0	0.0E0	1.0E0	9.93E2	6.35E2	-2.09549E0	-8.17037E-1	-7.98225E-1	-9.1316E0	-9.1418E0	5.26905E-3	9.29117E-2	2.73177E1	-3.26789E1	-3.25972E1	2.67619E1	1.73531E-7	2.51203E-3	2.51203E-3	6.31278E-3	2.00192E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.16941E-1	-7.98082E-1	-9.13181E0	-9.1418E0	5.00679E-3	9.31263E-2	2.72865E1	-3.26777E1	-3.25876E1	2.67704E1	1.73529E-7	2.51225E-3	2.51225E-3	6.30192E-3	2.01022E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09627E0	-8.16584E-1	-7.98416E-1	-9.13179E0	-9.14185E0	5.19753E-3	9.30786E-2	2.73219E1	-3.26591E1	-3.2638E1	2.68112E1	1.73454E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.00847E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.16083E-1	-7.98297E-1	-9.13131E0	-9.14197E0	5.07832E-3	9.31501E-2	2.72961E1	-3.26416E1	-3.25864E1	2.68304E1	1.73379E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.00847E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09603E0	-8.16584E-1	-7.9844E-1	-9.13141E0	-9.14207E0	5.10216E-3	9.29832E-2	2.72781E1	-3.26494E1	-3.26122E1	2.68082E1	1.73454E-7	2.51116E-3	2.51116E-3	6.33486E-3	2.00499E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09642E0	-8.16298E-1	-7.98059E-1	-9.13157E0	-9.14183E0	5.31673E-3	9.32217E-2	2.73015E1	-3.26538E1	-3.26178E1	2.68026E1	1.73379E-7	2.51225E-3	2.51225E-3	6.32936E-3	2.00499E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.16655E-1	-7.98464E-1	-9.13119E0	-9.14171E0	5.19753E-3	9.30309E-2	2.73977E1	-3.2672E1	-3.26561E1	2.68076E1	1.73501E-7	2.51923E-3	2.51923E-3	6.32498E-3	2.00024E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.16727E-1	-7.98059E-1	-9.1316E0	-9.14199E0	5.43594E-3	9.31978E-2	2.73198E1	-3.26776E1	-3.26467E1	2.67736E1					
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.16584E-1	-7.9782E-1	-9.1315E0	-9.14159E0	5.38826E-3	9.34124E-2	2.72528E1	-3.26597E1	-3.26104E1	2.678E1	1.73512E-7	2.51766E-3	2.51766E-3	6.32761E-3	2.00705E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.16822E-1	-7.98178E-1	-9.13177E0	-9.14183E0	5.65052E-3	9.33886E-2	2.73267E1	-3.26735E1	-3.26422E1	2.68046E1	1.73605E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.9985E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.1625E-1	-7.98273E-1	-9.13181E0	-9.14235E0	5.29289E-3	9.3317E-2	2.72973E1	-3.26476E1	-3.262E1	2.67908E1	1.73451E-7	2.51359E-3	2.51359E-3	6.31858E-3	1.99754E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.16655E-1	-7.97796E-1	-9.13122E0	-9.14185E0	5.34058E-3	9.30309E-2	2.73033E1	-3.26837E1	-3.26074E1	2.67806E1	1.73605E-7	2.50789E-3	2.50789E-3	6.31288E-3	1.98247E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09642E0	-8.16083E-1	-7.98202E-1	-9.13136E0	-9.14173E0	5.17368E-3	9.3317E-2	2.72951E1	-3.26756E1	-3.26207E1	2.68094E1	1.73605E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.98247E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-8.16178E-1	-7.97868E-1	-9.13146E0	-9.14185E0	5.4121E-3	9.31263E-2	2.72833E1	-3.26732E1	-3.26402E1	2.68154E1	1.73605E-7	2.51096E-3	2.51096E-3	6.31278E-3	1.9731E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.16488E-1	-7.97892E-1	-9.13179E0	-9.14202E0	5.126E-3	9.32932E-2	2.73094E1	-3.26854E1	-3.25832E1	2.6807E1	1.73605E-7	2.51203E-3	2.51203E-3	6.3074E-3	1.97815E-1