[Scan]
initial_time=2016-02-16T04:52:07
final_time=2016-02-16T04:52:27
ip_count=19
run=1030
dataset=10
scan=776
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08832E-4
ql1_vset=
ql1_vmon=-8.16512E-1
ql1_imon=6.38604E-10
ql2_vset=
ql2_vmon=-7.98059E-1
ql2_imon=2.71666E-10
ql3_vset=
ql3_vmon=-9.1316E0
ql3_imon=5.80573E-10
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=5.00584E-10
mult1=-1.11491E-8
mult2=-2.78049E-9
rf_tmon=-5.34757E-3
rf_agc=3.27748E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=3.63326E-10
bslens_vset=-6.2E0
bslens_vmon=-6.58865E0
bslens_imon=2.87881E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20309E1
lens5a_imon=1.97419E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1253E2
lens4a_imon=2.05277E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53453E1
cs_ef1b_imon=3.07566E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02316E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05011E1
cs_ea1_imon=2.20292E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36561E0
lens1_imon=2.41647E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64713E1
os_ef1alow_imon=2.99329E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04078E1
cs_ea2_imon=1.58207E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84446E1
cs_ef1a_imon=3.02075E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=3.70336E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11176E1
os_restr1_imon=2.87201E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14888E1
os_ea1_imon=1.92656E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63716E1
os_ef1bup_imon=3.10033E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25499E0
cs_ionrep_imon=1.25983E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91865E2
cs_nozzle_imon=1.93451E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01902E1
cs_anode1_imon=3.29321E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=6.35409E-10
tplens_vset=1.4E-1
tplens_vmon=1.67677E0
tplens_imon=-5.24398E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25978E1
iondef3_imon=1.52923E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26518E1
iondef2_imon=1.58033E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03002E2
lens6_imon=2.98436E-4
ql6_vset=1.0E-1
ql6_vmon=9.30548E-2
ql6_imon=3.57234E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25442E0
ionrepsh_imon=2.04823E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33837E1
lens5b_imon=2.19979E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74576E1
cs_ef2b_imon=3.13578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.93594E-1
os_ea2_imon=-3.29731E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06164E2
lens4b_imon=2.00293E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70956E1
cs_ef2a_imon=3.18652E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6413E0
os_ef2alow_imon=-2.52593E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.78696E-1
os_ef2bup_imon=-5.2262E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10921E1
os_restr2_imon=2.86054E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23103E2
cs_ionfoca_imon=6.33161E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01838E1
cs_anode2_imon=2.28052E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72985E1
iondef1_imon=1.1034E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67734E1
iondef4_imon=1.08434E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.83823E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=2.91491E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13941E0
cs_ionaccel_imon=-1.92819E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02103E2
cs_ionfocb_imon=1.47369E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5593E1
einzel_imon=7.79557E-6
window_vset=0.0E0
window_vmon=1.93359E-1
window_imon=-1.08022E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.39133E-4
mask2_vset=0.0E0
mask2_vmon=-1.86674E1
mask2_imon=-4.99856E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92599E3
multa_neg_imon=7.84283E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93739E3
defgrida_imon=6.54968E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50158E3
multb_neg_imon=7.12673E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.67042E0
defgridb_imon=6.37934E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33906E1
os_fil1_imon=4.76206E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.98826E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66524E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30771E1
cs_fil1_imon=1.00849E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63246E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67146E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38187E-2
os_fil2_imon=-2.39696E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.08409E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.55334E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29777E-1
cs_fil2_imon=-2.07839E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.39686E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22527E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.98153E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.79682E-1
res40_imon=-2.57458E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.16846E-1	-7.98655E-1	-9.13155E0	-9.14171E0	5.03063E-3	9.31978E-2	2.73169E1	-3.2698E1	-3.25782E1	2.68192E1	1.73459E-7	2.51498E-3	2.51498E-3	6.32328E-3	2.00064E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.17251E-1	-7.97629E-1	-9.13162E0	-9.14161E0	5.126E-3	9.32455E-2	2.72794E1	-3.26174E1	-3.26272E1	2.68026E1	1.73457E-7	2.51525E-3	2.51525E-3	6.30202E-3	2.00534E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.17013E-1	-7.98535E-1	-9.1315E0	-9.14171E0	4.88758E-3	9.30786E-2	2.73234E1	-3.26349E1	-3.26472E1	2.67752E1	1.73451E-7	2.51581E-3	2.51581E-3	6.31299E-3	1.99931E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09603E0	-8.17204E-1	-7.98416E-1	-9.13141E0	-9.14204E0	5.31673E-3	9.33647E-2	2.7255E1	-3.27086E1	-3.25529E1	2.68052E1	1.73605E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.9951E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.16989E-1	-7.98583E-1	-9.1316E0	-9.14207E0	5.26905E-3	9.30786E-2	2.7262E1	-3.2659E1	-3.26508E1	2.68065E1	1.73383E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.99E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09619E0	-8.16798E-1	-7.9844E-1	-9.13165E0	-9.14187E0	5.26905E-3	9.31978E-2	2.73375E1	-3.26823E1	-3.25991E1	2.67701E1	1.73531E-7	2.51739E-3	2.51739E-3	6.33436E-3	1.9883E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09634E0	-8.17156E-1	-7.98249E-1	-9.13177E0	-9.14185E0	5.10216E-3	9.29356E-2	2.73111E1	-3.26741E1	-3.26152E1	2.67878E1	1.73605E-7	2.51007E-3	2.51007E-3	6.29645E-3	1.9963E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09619E0	-8.16488E-1	-7.98273E-1	-9.13153E0	-9.14216E0	5.17368E-3	9.29594E-2	2.72913E1	-3.2632E1	-3.26284E1	2.67968E1	1.73221E-7	2.5147E-3	2.5147E-3	6.32978E-3	1.98872E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09611E0	-8.16488E-1	-7.97677E-1	-9.13143E0	-9.14214E0	5.05447E-3	9.3317E-2	2.73123E1	-3.26579E1	-3.26296E1	2.68106E1	1.73379E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.99456E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09588E0	-8.16631E-1	-7.97915E-1	-9.13157E0	-9.14226E0	5.29289E-3	9.33409E-2	2.73359E1	-3.26803E1	-3.26126E1	2.68076E1	1.73605E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.98592E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.17013E-1	-7.97868E-1	-9.13134E0	-9.14211E0	5.26905E-3	9.31263E-2	2.72986E1	-3.26604E1	-3.26091E1	2.6744E1	1.73534E-7	2.51447E-3	2.51447E-3	6.29211E-3	1.97411E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.16345E-1	-7.98178E-1	-9.13124E0	-9.14237E0	5.05447E-3	9.35078E-2	2.72859E1	-3.26897E1	-3.26248E1	2.68004E1	1.73523E-7	2.51675E-3	2.51675E-3	6.31925E-3	1.98288E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.16798E-1	-7.98273E-1	-9.13143E0	-9.14204E0	5.55515E-3	9.32217E-2	2.73435E1	-3.26933E1	-3.26284E1	2.6804E1	1.73605E-7	2.51632E-3	2.51632E-3	6.29128E-3	1.97478E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.16512E-1	-7.98559E-1	-9.13138E0	-9.1418E0	5.03063E-3	9.31025E-2	2.72998E1	-3.26667E1	-3.26419E1	2.67949E1	1.73528E-7	2.51804E-3	2.51804E-3	6.31299E-3	1.98696E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.16917E-1	-7.97653E-1	-9.13146E0	-9.14192E0	5.126E-3	9.30786E-2	2.73112E1	-3.26285E1	-3.26236E1	2.67988E1	1.73531E-7	2.52169E-3	2.52169E-3	6.31278E-3	1.97815E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.16679E-1	-7.9782E-1	-9.13169E0	-9.1419E0	5.48363E-3	9.28879E-2	2.72961E1	-3.26963E1	-3.26362E1	2.67962E1	1.73528E-7	2.51693E-3	2.51693E-3	6.33538E-3	1.9852E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.16393E-1	-7.98225E-1	-9.132E0	-9.14187E0	5.6982E-3	9.30309E-2	2.73273E1	-3.26621E1	-3.26554E1	2.67848E1	1.73529E-7	2.51007E-3	2.51007E-3	6.30192E-3	1.97903E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.16393E-1	-7.98345E-1	-9.13186E0	-9.14199E0	5.4121E-3	9.3174E-2	2.72797E1	-3.26933E1	-3.26166E1	2.6796E1	1.73454E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.98247E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.16798E-1	-7.98035E-1	-9.13191E0	-9.14223E0	5.43594E-3	9.31025E-2	2.73334E1	-3.26296E1	-3.26549E1	2.68082E1	1.73383E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.99E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-8.16512E-1	-7.98059E-1	-9.1316E0	-9.1418E0	5.60284E-3	9.30548E-2	2.72985E1	-3.26518E1	-3.25978E1	2.67734E1	1.73605E-7	2.5131E-3	2.5131E-3	6.3074E-3	1.98153E-1