[Scan]
initial_time=2016-02-16T04:52:34
final_time=2016-02-16T04:52:53
ip_count=19
run=1030
dataset=10
scan=777
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08796E-4
ql1_vset=
ql1_vmon=-8.16655E-1
ql1_imon=6.05369E-10
ql2_vset=
ql2_vmon=-7.97844E-1
ql2_imon=2.73693E-10
ql3_vset=
ql3_vmon=-9.13112E0
ql3_imon=5.76913E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=4.96352E-10
mult1=-9.35509E-9
mult2=-2.69865E-9
rf_tmon=-5.38963E-3
rf_agc=3.18495E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.65052E-3
ql5_imon=3.6447E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68871E0
bslens_imon=2.85526E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20123E1
lens5a_imon=1.99383E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.05276E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54055E1
cs_ef1b_imon=3.0883E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.0233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05049E1
cs_ea1_imon=2.17711E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37256E0
lens1_imon=2.43654E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6438E1
os_ef1alow_imon=2.98703E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03666E1
cs_ea2_imon=1.58062E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84376E1
cs_ef1a_imon=3.01405E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=3.61717E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11153E1
os_restr1_imon=2.85908E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15349E1
os_ea1_imon=1.88841E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63617E1
os_ef1bup_imon=3.09839E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26801E0
cs_ionrep_imon=1.24931E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93497E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02013E1
cs_anode1_imon=3.28183E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20554E0
olens4_imon=6.6427E-10
tplens_vset=1.4E-1
tplens_vmon=1.67265E0
tplens_imon=-1.12501E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26092E1
iondef3_imon=1.50495E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26963E1
iondef2_imon=1.56041E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02966E2
lens6_imon=2.98493E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=3.69227E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25822E0
ionrepsh_imon=2.02321E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33854E1
lens5b_imon=2.16535E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7479E1
cs_ef2b_imon=3.12866E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.59171E-1
os_ea2_imon=-2.74111E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06137E2
lens4b_imon=2.00707E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70687E1
cs_ef2a_imon=3.20759E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.642E0
os_ef2alow_imon=-2.49697E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.68592E-1
os_ef2bup_imon=-5.20715E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10415E1
os_restr2_imon=2.87999E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.30626E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.29614E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72781E1
iondef1_imon=1.11378E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68004E1
iondef4_imon=1.07656E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=1.86568E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=2.87807E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11032E0
cs_ionaccel_imon=-1.72932E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02119E2
cs_ionfocb_imon=1.47114E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56627E1
einzel_imon=7.74911E-6
window_vset=0.0E0
window_vmon=1.95118E-1
window_imon=-1.0734E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82603E2
mask1_imon=2.39253E-4
mask2_vset=0.0E0
mask2_vmon=-1.86722E1
mask2_imon=-4.60728E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92572E3
multa_neg_imon=7.66685E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.32622E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50175E3
multb_neg_imon=7.38403E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29324E0
defgridb_imon=5.91485E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33912E1
os_fil1_imon=4.35576E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.1159E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6666E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30826E1
cs_fil1_imon=1.00909E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62696E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67131E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.3577E-2
os_fil2_imon=-2.40768E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.23872E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.63504E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28746E-1
cs_fil2_imon=-2.26953E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1242E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22327E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.99283E-1
chamber_ion_pmon=1.73454E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.77022E-1
res40_imon=-2.73123E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09371E0	-8.16321E-1	-7.97868E-1	-9.1316E0	-9.14183E0	5.43594E-3	9.34362E-2	2.72921E1	-3.26526E1	-3.26213E1	2.68004E1	1.73454E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.97903E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09394E0	-8.16488E-1	-7.97844E-1	-9.13165E0	-9.14221E0	5.38826E-3	9.32217E-2	2.73499E1	-3.26815E1	-3.26301E1	2.67902E1	1.73531E-7	2.5131E-3	2.5131E-3	6.31278E-3	1.98491E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.16584E-1	-7.98035E-1	-9.13157E0	-9.1419E0	5.19753E-3	9.32932E-2	2.72853E1	-3.26801E1	-3.2638E1	2.68148E1	1.73454E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.00325E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.16274E-1	-7.98202E-1	-9.1316E0	-9.14204E0	5.19753E-3	9.33409E-2	2.7266E1	-3.26554E1	-3.25725E1	2.6804E1	1.73605E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.98937E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-8.16512E-1	-7.9751E-1	-9.1315E0	-9.14202E0	5.34058E-3	9.34124E-2	2.73327E1	-3.26518E1	-3.26206E1	2.67487E1	1.73379E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.98247E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09619E0	-8.16226E-1	-7.97987E-1	-9.13126E0	-9.14207E0	5.26905E-3	9.3317E-2	2.73303E1	-3.265E1	-3.2602E1	2.68226E1	1.73454E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.98419E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-8.16607E-1	-7.97677E-1	-9.13124E0	-9.14168E0	5.36442E-3	9.32693E-2	2.73399E1	-3.26633E1	-3.26188E1	2.6801E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.98592E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.16178E-1	-7.97939E-1	-9.13129E0	-9.14171E0	5.26905E-3	9.33409E-2	2.7321E1	-3.26431E1	-3.26596E1	2.67878E1	1.73605E-7	2.51225E-3	2.51225E-3	6.31837E-3	1.98764E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.16536E-1	-7.98011E-1	-9.13107E0	-9.14161E0	5.38826E-3	9.32217E-2	2.72702E1	-3.26512E1	-3.26044E1	2.67938E1	1.73383E-7	2.51096E-3	2.51096E-3	6.30202E-3	1.97984E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.17323E-1	-7.97868E-1	-9.13119E0	-9.1419E0	5.48363E-3	9.34601E-2	2.73375E1	-3.26699E1	-3.26224E1	2.67992E1	1.73529E-7	2.52099E-3	2.52099E-3	6.29645E-3	1.99456E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.16655E-1	-7.97892E-1	-9.13103E0	-9.14192E0	5.24521E-3	9.32455E-2	2.73369E1	-3.26597E1	-3.26158E1	2.6786E1	1.73605E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.00151E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09657E0	-8.16321E-1	-7.97915E-1	-9.1311E0	-9.14195E0	5.29289E-3	9.32455E-2	2.72817E1	-3.26771E1	-3.2644E1	2.67938E1	1.73379E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.00499E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09634E0	-8.16178E-1	-7.97963E-1	-9.13117E0	-9.14183E0	5.74589E-3	9.32217E-2	2.7321E1	-3.26627E1	-3.26138E1	2.68118E1	1.73454E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.99803E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09657E0	-8.16488E-1	-7.97725E-1	-9.13134E0	-9.14192E0	5.57899E-3	9.33409E-2	2.72829E1	-3.26837E1	-3.26579E1	2.67818E1	1.73605E-7	2.51225E-3	2.51225E-3	6.32936E-3	1.99456E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09603E0	-8.16393E-1	-7.98321E-1	-9.1311E0	-9.1419E0	5.62668E-3	9.32693E-2	2.72895E1	-3.26723E1	-3.265E1	2.6798E1	1.73528E-7	2.5225E-3	2.5225E-3	6.3074E-3	1.99754E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-8.16488E-1	-7.97987E-1	-9.13134E0	-9.14168E0	5.91278E-3	9.32217E-2	2.73381E1	-3.26783E1	-3.26356E1	2.67854E1	1.73454E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.98937E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.16584E-1	-7.97796E-1	-9.13122E0	-9.14178E0	5.67436E-3	9.3317E-2	2.72901E1	-3.26759E1	-3.26068E1	2.68178E1	1.73379E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.99803E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.16917E-1	-7.98345E-1	-9.13153E0	-9.14173E0	5.74589E-3	9.31978E-2	2.72477E1	-3.26556E1	-3.26335E1	2.67653E1	1.73605E-7	2.51443E-3	2.51443E-3	6.28552E-3	1.99283E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.16679E-1	-7.97963E-1	-9.1315E0	-9.14202E0	5.55515E-3	9.33886E-2	2.73237E1	-3.26783E1	-3.26386E1	2.68136E1	1.73532E-7	2.51287E-3	2.51287E-3	6.32328E-3	1.99061E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.16655E-1	-7.97844E-1	-9.13112E0	-9.14195E0	5.65052E-3	9.34839E-2	2.72781E1	-3.26963E1	-3.26092E1	2.68004E1	1.73454E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.99283E-1