[Scan]
initial_time=2016-02-16T04:53:00
final_time=2016-02-16T04:53:20
ip_count=19
run=1030
dataset=10
scan=778
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09619E0
qbias_imon=-1.08786E-4
ql1_vset=
ql1_vmon=-8.16584E-1
ql1_imon=6.10185E-10
ql2_vset=
ql2_vmon=-7.97892E-1
ql2_imon=2.75731E-10
ql3_vset=
ql3_vmon=-9.13157E0
ql3_imon=5.79202E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=4.88949E-10
mult1=-9.25877E-9
mult2=-2.71063E-9
rf_tmon=-5.70807E-3
rf_agc=3.28229E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.6982E-3
ql5_imon=3.58009E-10
bslens_vset=-6.2E0
bslens_vmon=-6.59764E0
bslens_imon=2.5738E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19899E1
lens5a_imon=1.98415E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12543E2
lens4a_imon=2.05046E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5361E1
cs_ef1b_imon=3.08577E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04583E2
lens23_imon=1.02229E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04844E1
cs_ea1_imon=2.15719E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35273E0
lens1_imon=2.84057E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64578E1
os_ef1alow_imon=2.97549E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03858E1
cs_ea2_imon=1.56237E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84304E1
cs_ef1a_imon=3.02847E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=3.40128E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11111E1
os_restr1_imon=2.89621E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15137E1
os_ea1_imon=1.89511E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.10163E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23287E0
cs_ionrep_imon=1.26388E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91908E2
cs_nozzle_imon=1.93377E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02127E1
cs_anode1_imon=3.29697E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=6.61421E-10
tplens_vset=1.4E-1
tplens_vmon=1.60779E0
tplens_imon=-2.92136E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2644E1
iondef3_imon=1.53245E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26212E1
iondef2_imon=1.59806E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02947E2
lens6_imon=2.98656E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=3.53575E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2533E0
ionrepsh_imon=2.05373E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33652E1
lens5b_imon=2.20045E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74183E1
cs_ef2b_imon=3.13154E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.54127E-1
os_ea2_imon=-7.8241E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.00803E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71186E1
cs_ef2a_imon=3.21299E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60356E0
os_ef2alow_imon=-2.51499E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.54777E-1
os_ef2bup_imon=-5.11345E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10439E1
os_restr2_imon=2.86269E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.33461E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01581E1
cs_anode2_imon=2.2929E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72438E1
iondef1_imon=1.09445E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68064E1
iondef4_imon=1.10431E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.86373E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=2.52068E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10611E0
cs_ionaccel_imon=-1.84825E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47201E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56297E1
einzel_imon=7.79596E-6
window_vset=0.0E0
window_vmon=2.09534E-1
window_imon=-1.08061E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82603E2
mask1_imon=2.39336E-4
mask2_vset=0.0E0
mask2_vmon=-1.86494E1
mask2_imon=-6.76965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.6676E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.83125E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=7.5198E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.60307E0
defgridb_imon=6.25446E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33926E1
os_fil1_imon=4.21761E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.67741E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66588E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30879E1
cs_fil1_imon=1.01269E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62984E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6674E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.37035E-2
os_fil2_imon=-2.29956E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.3978E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.77136E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28616E-1
cs_fil2_imon=-2.31158E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08816E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22311E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.99E-1
chamber_ion_pmon=1.73457E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.67701E-1
res40_imon=-2.55824E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.1706E-1	-7.97868E-1	-9.13155E0	-9.14204E0	5.45979E-3	9.35793E-2	2.73311E1	-3.26537E1	-3.26325E1	2.67595E1	1.73605E-7	2.51417E-3	2.51417E-3	6.31817E-3	1.98153E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.16751E-1	-7.97749E-1	-9.13146E0	-9.14209E0	5.34058E-3	9.3627E-2	2.72935E1	-3.26511E1	-3.26064E1	2.67914E1	1.73605E-7	2.50989E-3	2.50989E-3	6.32896E-3	1.97815E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.16607E-1	-7.98202E-1	-9.13165E0	-9.14207E0	5.34058E-3	9.37462E-2	2.72605E1	-3.2666E1	-3.26173E1	2.6797E1	1.73526E-7	2.51498E-3	2.51498E-3	6.29603E-3	1.99163E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.16631E-1	-7.98178E-1	-9.13131E0	-9.14228E0	5.00679E-3	9.32693E-2	2.73529E1	-3.26549E1	-3.26219E1	2.67852E1	1.73459E-7	2.51498E-3	2.51498E-3	6.3074E-3	1.99061E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.16703E-1	-7.98273E-1	-9.13141E0	-9.14204E0	5.36442E-3	9.33647E-2	2.73387E1	-3.26825E1	-3.26518E1	2.67932E1	1.73605E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.99E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.17084E-1	-7.97629E-1	-9.1316E0	-9.14185E0	5.4121E-3	9.29832E-2	2.73033E1	-3.26741E1	-3.25773E1	2.6807E1	1.73454E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.98764E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.16965E-1	-7.97939E-1	-9.13181E0	-9.14187E0	5.45979E-3	9.32693E-2	2.72817E1	-3.26512E1	-3.25695E1	2.6804E1	1.73531E-7	2.51203E-3	2.51203E-3	6.32356E-3	1.98491E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.16751E-1	-7.98011E-1	-9.13179E0	-9.14176E0	5.31673E-3	9.3174E-2	2.73375E1	-3.26554E1	-3.26326E1	2.68076E1	1.73529E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.9911E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.16464E-1	-7.98225E-1	-9.13167E0	-9.1419E0	4.98295E-3	9.34124E-2	2.7352E1	-3.26735E1	-3.26092E1	2.68034E1	1.73605E-7	2.51007E-3	2.51007E-3	6.31288E-3	1.9963E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.16607E-1	-7.9844E-1	-9.13162E0	-9.14211E0	4.57764E-3	9.31025E-2	2.73754E1	-3.2644E1	-3.26735E1	2.68136E1	1.73451E-7	2.51915E-3	2.51915E-3	6.3074E-3	1.99224E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.16464E-1	-7.98559E-1	-9.13191E0	-9.1419E0	4.88758E-3	9.3317E-2	2.73177E1	-3.26735E1	-3.25743E1	2.67896E1	1.73457E-7	2.51417E-3	2.51417E-3	6.32896E-3	1.9985E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.16703E-1	-7.97915E-1	-9.1315E0	-9.14202E0	5.24521E-3	9.34362E-2	2.73195E1	-3.26699E1	-3.26428E1	2.67746E1	1.73379E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.00499E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.16703E-1	-7.98178E-1	-9.13174E0	-9.14223E0	5.48363E-3	9.31978E-2	2.73381E1	-3.26844E1	-3.259E1	2.67937E1	1.73451E-7	2.51136E-3	2.51136E-3	6.3074E-3	1.99931E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.16321E-1	-7.98059E-1	-9.13141E0	-9.14204E0	5.50747E-3	9.35793E-2	2.72666E1	-3.26506E1	-3.2614E1	2.68196E1	1.73605E-7	2.50775E-3	2.50775E-3	6.31278E-3	1.9951E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0965E0	-8.16536E-1	-7.97987E-1	-9.13162E0	-9.14195E0	5.60284E-3	9.35793E-2	2.72919E1	-3.26639E1	-3.26176E1	2.67962E1	1.73605E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.98592E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.16607E-1	-7.97987E-1	-9.13177E0	-9.14197E0	5.62668E-3	9.31978E-2	2.73634E1	-3.26801E1	-3.26074E1	2.6774E1	1.73529E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.97731E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09642E0	-8.16727E-1	-7.98059E-1	-9.13186E0	-9.14204E0	5.36442E-3	9.34601E-2	2.72951E1	-3.26844E1	-3.26266E1	2.678E1	1.73454E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.98075E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-8.16655E-1	-7.97629E-1	-9.13155E0	-9.14209E0	5.31673E-3	9.33886E-2	2.7301E1	-3.26891E1	-3.25888E1	2.67955E1	1.73531E-7	2.51954E-3	2.51954E-3	6.3074E-3	1.99E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.16679E-1	-7.98273E-1	-9.13177E0	-9.14197E0	5.24521E-3	9.32932E-2	2.73134E1	-3.26567E1	-3.25776E1	2.67704E1	1.73457E-7	2.51203E-3	2.51203E-3	6.3074E-3	1.9917E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09619E0	-8.16584E-1	-7.97892E-1	-9.13157E0	-9.14202E0	5.6982E-3	9.34839E-2	2.72438E1	-3.26212E1	-3.2644E1	2.68064E1	1.73457E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.99E-1