[Scan]
initial_time=2016-02-16T04:53:54
final_time=2016-02-16T04:54:13
ip_count=19
run=1030
dataset=10
scan=780
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08777E-4
ql1_vset=
ql1_vmon=-8.16822E-1
ql1_imon=6.25968E-10
ql2_vset=
ql2_vmon=-7.98178E-1
ql2_imon=2.80964E-10
ql3_vset=
ql3_vmon=-9.132E0
ql3_imon=5.51379E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=4.95923E-10
mult1=-1.06401E-8
mult2=-2.7765E-9
rf_tmon=-5.92819E-3
rf_agc=3.26022E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=3.62492E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65265E0
bslens_imon=2.34151E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19653E1
lens5a_imon=1.98333E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12511E2
lens4a_imon=2.05316E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53784E1
cs_ef1b_imon=3.08325E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04675E2
lens23_imon=1.02139E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04723E1
cs_ea1_imon=2.18861E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39144E0
lens1_imon=2.7804E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64638E1
os_ef1alow_imon=2.98739E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04068E1
cs_ea2_imon=1.60815E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84142E1
cs_ef1a_imon=3.01694E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=3.71456E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11087E1
os_restr1_imon=2.87819E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14757E1
os_ea1_imon=1.92386E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63455E1
os_ef1bup_imon=3.10019E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25741E0
cs_ionrep_imon=1.26447E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91847E2
cs_nozzle_imon=1.93703E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02007E1
cs_anode1_imon=3.29408E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=6.68514E-10
tplens_vset=1.4E-1
tplens_vmon=1.65382E0
tplens_imon=-3.51978E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25818E1
iondef3_imon=1.48533E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26816E1
iondef2_imon=1.58833E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02975E2
lens6_imon=2.98728E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=3.50833E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22201E0
ionrepsh_imon=2.00315E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33451E1
lens5b_imon=2.22259E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74615E1
cs_ef2b_imon=3.13154E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.05306E-1
os_ea2_imon=-3.90912E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06119E2
lens4b_imon=2.00619E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.20218E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6402E0
os_ef2alow_imon=-2.4321E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.3015E-1
os_ef2bup_imon=-5.15309E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10727E1
os_restr2_imon=2.87386E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22977E2
cs_ionfoca_imon=6.31379E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01515E1
cs_anode2_imon=2.29146E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72967E1
iondef1_imon=1.11263E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6792E1
iondef4_imon=1.09242E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=1.84225E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=2.94518E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10792E0
cs_ionaccel_imon=-1.93115E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02037E2
cs_ionfocb_imon=1.46996E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56129E1
einzel_imon=7.85002E-6
window_vset=0.0E0
window_vmon=2.07131E-1
window_imon=-8.1752E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82626E2
mask1_imon=2.39171E-4
mask2_vset=0.0E0
mask2_vmon=-1.86795E1
mask2_imon=-5.47223E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9271E3
multa_neg_imon=7.76035E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93697E3
defgrida_imon=6.52509E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.501E3
multb_neg_imon=7.22944E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.62702E0
defgridb_imon=6.3552E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33927E1
os_fil1_imon=5.22071E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=6.96863E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66876E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30834E1
cs_fil1_imon=1.00921E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62636E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67327E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26858E-2
os_fil2_imon=-2.34161E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.01608E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.52685E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29911E-1
cs_fil2_imon=-2.25752E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04011E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22618E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=1.9951E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.77622E-1
res40_imon=-2.39966E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.16631E-1	-7.98178E-1	-9.13155E0	-9.14176E0	5.4121E-3	9.32217E-2	2.73057E1	-3.26793E1	-3.26382E1	2.67908E1	1.73387E-7	2.51077E-3	2.51077E-3	6.31269E-3	2.00567E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.16441E-1	-7.98035E-1	-9.13157E0	-9.14197E0	5.76973E-3	9.3174E-2	2.73014E1	-3.26572E1	-3.26591E1	2.67956E1	1.73383E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.9951E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.16226E-1	-7.98011E-1	-9.13117E0	-9.14195E0	5.60284E-3	9.32217E-2	2.72738E1	-3.2635E1	-3.26501E1	2.67646E1	1.73451E-7	2.52027E-3	2.52027E-3	6.31858E-3	1.99754E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.16464E-1	-7.98202E-1	-9.1315E0	-9.14221E0	5.45979E-3	9.33886E-2	2.73163E1	-3.26419E1	-3.26142E1	2.67938E1	1.73394E-7	2.50838E-3	2.50838E-3	6.3074E-3	1.9966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.16631E-1	-7.97677E-1	-9.1316E0	-9.14166E0	5.29289E-3	9.31263E-2	2.73231E1	-3.26518E1	-3.26452E1	2.6777E1	1.73532E-7	2.51603E-3	2.51603E-3	6.33919E-3	2.00567E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.16464E-1	-7.97868E-1	-9.13181E0	-9.14192E0	5.31673E-3	9.32693E-2	2.73279E1	-3.26206E1	-3.26404E1	2.68178E1	1.73529E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.00673E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.16679E-1	-7.97653E-1	-9.13193E0	-9.14204E0	5.34058E-3	9.31501E-2	2.72949E1	-3.26675E1	-3.26326E1	2.68198E1	1.73529E-7	2.51552E-3	2.51552E-3	6.33486E-3	1.99977E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-8.16464E-1	-7.97963E-1	-9.13184E0	-9.1418E0	5.36442E-3	9.31501E-2	2.72526E1	-3.26307E1	-3.26284E1	2.6798E1	1.73529E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.00151E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.16393E-1	-7.98488E-1	-9.13188E0	-9.14214E0	5.26905E-3	9.30071E-2	2.73321E1	-3.26711E1	-3.25936E1	2.67956E1	1.73531E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.9883E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.16298E-1	-7.98297E-1	-9.13167E0	-9.14221E0	5.34058E-3	9.30786E-2	2.73093E1	-3.26476E1	-3.26416E1	2.68058E1	1.73454E-7	2.52209E-3	2.52209E-3	6.30192E-3	2.00673E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.16298E-1	-7.98368E-1	-9.1315E0	-9.14171E0	4.98295E-3	9.30548E-2	2.73417E1	-3.26732E1	-3.26219E1	2.68082E1	1.73454E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.01197E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.16488E-1	-7.98297E-1	-9.13157E0	-9.14168E0	4.88758E-3	9.32217E-2	2.7257E1	-3.26404E1	-3.26494E1	2.67782E1	1.73454E-7	2.51225E-3	2.51225E-3	6.31288E-3	2.00151E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.16822E-1	-7.97749E-1	-9.13134E0	-9.14164E0	5.17368E-3	9.33409E-2	2.73594E1	-3.2652E1	-3.26632E1	2.6818E1	1.73457E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.00705E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.16751E-1	-7.98059E-1	-9.13186E0	-9.14168E0	5.34058E-3	9.27687E-2	2.73093E1	-3.26807E1	-3.26374E1	2.67986E1	1.73454E-7	2.52428E-3	2.52428E-3	6.31288E-3	1.98592E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.16202E-1	-7.98154E-1	-9.13157E0	-9.14192E0	5.24521E-3	9.2864E-2	2.73486E1	-3.26615E1	-3.26205E1	2.67876E1	1.73529E-7	2.51662E-3	2.51662E-3	6.28552E-3	1.98937E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09627E0	-8.16917E-1	-7.97701E-1	-9.13146E0	-9.14187E0	5.14984E-3	9.2864E-2	2.72709E1	-3.26638E1	-3.26543E1	2.67856E1	1.73303E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.99283E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09603E0	-8.16584E-1	-7.97772E-1	-9.13115E0	-9.14173E0	5.43594E-3	9.31025E-2	2.73105E1	-3.26681E1	-3.26224E1	2.68046E1	1.73161E-7	2.51954E-3	2.51954E-3	6.31817E-3	1.9934E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.16631E-1	-7.98035E-1	-9.13131E0	-9.1418E0	5.36442E-3	9.29117E-2	2.73364E1	-3.26832E1	-3.25546E1	2.67722E1	1.73379E-7	2.51007E-3	2.51007E-3	6.32386E-3	1.98764E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.16607E-1	-7.98273E-1	-9.13174E0	-9.14202E0	5.48363E-3	9.30786E-2	2.73183E1	-3.26855E1	-3.26266E1	2.68088E1	1.73529E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.99977E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.16822E-1	-7.98178E-1	-9.132E0	-9.14185E0	5.05447E-3	9.31025E-2	2.72967E1	-3.26816E1	-3.25818E1	2.6792E1	1.73605E-7	2.51203E-3	2.51203E-3	6.29665E-3	1.9951E-1