[Scan]
initial_time=2016-02-16T04:54:20
final_time=2016-02-16T04:54:40
ip_count=19
run=1030
dataset=10
scan=781
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08815E-4
ql1_vset=
ql1_vmon=-8.16464E-1
ql1_imon=5.93984E-10
ql2_vset=
ql2_vmon=-7.98178E-1
ql2_imon=2.63262E-10
ql3_vset=
ql3_vmon=-9.1316E0
ql3_imon=5.59962E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=4.58729E-10
mult1=-1.01377E-8
mult2=-2.67533E-9
rf_tmon=-6.31964E-3
rf_agc=3.14868E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.98295E-3
ql5_imon=3.64077E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6438E0
bslens_imon=2.7981E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19541E1
lens5a_imon=1.98262E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.05089E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53718E1
cs_ef1b_imon=3.08649E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.02411E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05448E1
cs_ea1_imon=2.16171E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35663E0
lens1_imon=2.84057E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64572E1
os_ef1alow_imon=2.98739E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03555E1
cs_ea2_imon=1.55117E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8449E1
cs_ef1a_imon=3.01622E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=3.456E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11171E1
os_restr1_imon=2.8926E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15081E1
os_ea1_imon=1.8952E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63683E1
os_ef1bup_imon=3.0955E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27864E0
cs_ionrep_imon=1.26518E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91901E2
cs_nozzle_imon=1.93664E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01641E1
cs_anode1_imon=3.28039E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20525E0
olens4_imon=6.47819E-10
tplens_vset=1.4E-1
tplens_vmon=1.6143E0
tplens_imon=-1.36074E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25759E1
iondef3_imon=1.50586E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26954E1
iondef2_imon=1.56568E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02973E2
lens6_imon=2.98491E-4
ql6_vset=1.0E-1
ql6_vmon=9.29594E-2
ql6_imon=3.6006E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26213E0
ionrepsh_imon=2.03606E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34088E1
lens5b_imon=2.19074E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74405E1
cs_ef2b_imon=3.13623E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.41597E-1
os_ea2_imon=-3.69675E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06151E2
lens4b_imon=2.00633E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71222E1
cs_ef2a_imon=3.18813E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61978E0
os_ef2alow_imon=-2.56905E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.41562E-1
os_ef2bup_imon=-5.26842E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10913E1
os_restr2_imon=2.86773E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23087E2
cs_ionfoca_imon=6.32193E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01575E1
cs_anode2_imon=2.29723E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73552E1
iondef1_imon=1.09635E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6802E1
iondef4_imon=1.08954E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.79514E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=2.72894E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09771E0
cs_ionaccel_imon=-1.85546E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02047E2
cs_ionfocb_imon=1.47287E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56297E1
einzel_imon=7.79596E-6
window_vset=0.0E0
window_vmon=2.35362E-1
window_imon=-8.5356E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82607E2
mask1_imon=2.39052E-4
mask2_vset=0.0E0
mask2_vmon=-1.8614E1
mask2_imon=-6.73362E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.325E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93693E3
defgrida_imon=6.41891E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=7.56922E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.68903E0
defgridb_imon=5.86676E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33934E1
os_fil1_imon=4.98045E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.14883E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66782E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30836E1
cs_fil1_imon=1.0104E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63669E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66799E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.52184E-2
os_fil2_imon=-2.37164E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.44005E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.59899E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27321E-1
cs_fil2_imon=-2.07131E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17226E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22371E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.00192E-1
chamber_ion_pmon=1.73531E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.0254E-1
res40_imon=-2.79249E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.16822E-1	-7.97963E-1	-9.13134E0	-9.14154E0	5.34058E-3	9.3317E-2	2.73289E1	-3.26585E1	-3.26185E1	2.67862E1	1.73454E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.98764E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.16631E-1	-7.97939E-1	-9.13174E0	-9.14159E0	5.22137E-3	9.31978E-2	2.73563E1	-3.27052E1	-3.26042E1	2.68082E1	1.73532E-7	2.51709E-3	2.51709E-3	6.31269E-3	2.00064E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.1687E-1	-7.97439E-1	-9.13169E0	-9.14166E0	5.17368E-3	9.31263E-2	2.73075E1	-3.26844E1	-3.26301E1	2.67989E1	1.73298E-7	2.52027E-3	2.52027E-3	6.30182E-3	2.00463E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09387E0	-8.16822E-1	-7.97987E-1	-9.13167E0	-9.14183E0	5.36442E-3	9.31978E-2	2.7301E1	-3.27145E1	-3.26101E1	2.67812E1	1.73531E-7	2.52169E-3	2.52169E-3	6.33436E-3	1.98661E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.16679E-1	-7.98035E-1	-9.13167E0	-9.14164E0	5.17368E-3	9.33409E-2	2.73051E1	-3.26759E1	-3.26236E1	2.6834E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.98937E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09634E0	-8.16917E-1	-7.97844E-1	-9.13129E0	-9.14204E0	5.4121E-3	9.31025E-2	2.72868E1	-3.2659E1	-3.2652E1	2.67613E1	1.73454E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.98937E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.16846E-1	-7.97915E-1	-9.13124E0	-9.1418E0	5.34058E-3	9.30309E-2	2.73321E1	-3.26639E1	-3.26579E1	2.68298E1	1.73457E-7	2.51847E-3	2.51847E-3	6.3074E-3	1.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.16321E-1	-7.97772E-1	-9.13103E0	-9.14164E0	5.29289E-3	9.31263E-2	2.72847E1	-3.26452E1	-3.2602E1	2.6771E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.98247E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.16298E-1	-7.9782E-1	-9.13126E0	-9.14152E0	5.38826E-3	9.26971E-2	2.73141E1	-3.26482E1	-3.26416E1	2.67914E1	1.73529E-7	2.51771E-3	2.51771E-3	6.34588E-3	1.98592E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09603E0	-8.16679E-1	-7.97462E-1	-9.13115E0	-9.14185E0	5.29289E-3	9.32217E-2	2.72892E1	-3.26779E1	-3.26496E1	2.6786E1	1.73531E-7	2.5131E-3	2.5131E-3	6.31817E-3	1.9951E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.1625E-1	-7.97939E-1	-9.13134E0	-9.14171E0	5.4121E-3	9.33886E-2	2.72961E1	-3.26518E1	-3.26212E1	2.67806E1	1.73531E-7	2.51847E-3	2.51847E-3	6.33436E-3	1.98322E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.16202E-1	-7.9813E-1	-9.13138E0	-9.14183E0	5.53131E-3	9.29356E-2	2.73193E1	-3.26638E1	-3.26142E1	2.67868E1	1.73529E-7	2.5068E-3	2.5068E-3	6.31837E-3	1.98419E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09595E0	-8.16512E-1	-7.97987E-1	-9.13122E0	-9.14192E0	5.60284E-3	9.32693E-2	2.73177E1	-3.27101E1	-3.25864E1	2.68058E1	1.73379E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.98764E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09619E0	-8.16584E-1	-7.97963E-1	-9.1316E0	-9.14166E0	5.29289E-3	9.3174E-2	2.72811E1	-3.26783E1	-3.26296E1	2.68058E1	1.73529E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.97731E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0965E0	-8.16512E-1	-7.98106E-1	-9.13165E0	-9.14171E0	5.36442E-3	9.29594E-2	2.72432E1	-3.26685E1	-3.26254E1	2.67884E1	1.73454E-7	2.51225E-3	2.51225E-3	6.3074E-3	1.98419E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0965E0	-8.16798E-1	-7.97844E-1	-9.13141E0	-9.14166E0	5.29289E-3	9.30548E-2	2.72636E1	-3.2611E1	-3.26224E1	2.68088E1	1.73457E-7	2.51203E-3	2.51203E-3	6.3074E-3	1.98153E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.16727E-1	-7.97963E-1	-9.13136E0	-9.14211E0	5.24521E-3	9.3174E-2	2.73045E1	-3.26718E1	-3.25884E1	2.67722E1	1.73605E-7	2.51525E-3	2.51525E-3	6.32356E-3	1.98322E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09619E0	-8.16917E-1	-7.97796E-1	-9.13141E0	-9.14242E0	5.14984E-3	9.33647E-2	2.73282E1	-3.26585E1	-3.26098E1	2.68207E1	1.73605E-7	2.5131E-3	2.5131E-3	6.30202E-3	1.9934E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-8.16679E-1	-7.97629E-1	-9.13131E0	-9.14199E0	4.95911E-3	9.33886E-2	2.73115E1	-3.26614E1	-3.26289E1	2.67763E1	1.73528E-7	2.51025E-3	2.51025E-3	6.29067E-3	1.98872E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.16464E-1	-7.98178E-1	-9.1316E0	-9.14195E0	4.98295E-3	9.29594E-2	2.73552E1	-3.26954E1	-3.25759E1	2.6802E1	1.73531E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.00192E-1