[Scan]
initial_time=2016-02-16T04:57:00
final_time=2016-02-16T04:57:20
ip_count=19
run=1030
dataset=10
scan=787
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.08758E-4
ql1_vset=
ql1_vmon=-8.16798E-1
ql1_imon=5.86844E-10
ql2_vset=
ql2_vmon=-7.98011E-1
ql2_imon=2.83992E-10
ql3_vset=
ql3_vmon=-9.13155E0
ql3_imon=5.33521E-10
ql4_vset=
ql4_vmon=-9.14164E0
ql4_imon=4.83191E-10
mult1=-1.12844E-8
mult2=-2.9114E-9
rf_tmon=-4.89291E-3
rf_agc=3.30672E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=3.64077E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61747E0
bslens_imon=2.77207E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20968E1
lens5a_imon=1.99641E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12451E2
lens4a_imon=2.05068E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53628E1
cs_ef1b_imon=3.08109E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02164E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05216E1
cs_ea1_imon=2.21992E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37496E0
lens1_imon=2.19168E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64656E1
os_ef1alow_imon=2.99063E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03564E1
cs_ea2_imon=1.6078E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84328E1
cs_ef1a_imon=3.01333E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=3.64864E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11201E1
os_restr1_imon=2.8771E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15985E1
os_ea1_imon=1.89223E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63503E1
os_ef1bup_imon=3.08397E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2521E0
cs_ionrep_imon=1.26136E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.93305E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02007E1
cs_anode1_imon=3.30742E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=6.75714E-10
tplens_vset=1.4E-1
tplens_vmon=1.67268E0
tplens_imon=-9.74686E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26425E1
iondef3_imon=1.51623E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26962E1
iondef2_imon=1.57968E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02933E2
lens6_imon=2.98609E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=3.46482E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27974E0
ionrepsh_imon=2.04688E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33808E1
lens5b_imon=2.21415E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74495E1
cs_ef2b_imon=3.13263E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.40308E-1
os_ea2_imon=-6.52631E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06146E2
lens4b_imon=2.01016E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.19101E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65101E0
os_ef2alow_imon=-2.4393E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.58982E-1
os_ef2bup_imon=-5.21796E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=2.87891E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.231E2
cs_ionfoca_imon=6.30397E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01887E1
cs_anode2_imon=2.29398E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73057E1
iondef1_imon=1.06849E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6786E1
iondef4_imon=1.08197E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.80994E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=3.1985E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11272E0
cs_ionaccel_imon=-1.96358E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02118E2
cs_ionfocb_imon=1.47302E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56303E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=1.93316E-1
window_imon=-9.76095E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39243E-4
mask2_vset=0.0E0
mask2_vmon=-1.86434E1
mask2_imon=-5.68847E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.46933E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93738E3
defgrida_imon=6.39505E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.26385E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56097E0
defgridb_imon=6.26527E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33931E1
os_fil1_imon=4.59002E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.89365E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66598E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30874E1
cs_fil1_imon=1.00936E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63285E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67116E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38325E-2
os_fil2_imon=-2.35362E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.07965E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.66309E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30688E-1
cs_fil2_imon=-2.44372E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2083E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22644E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.9951E-1
chamber_ion_pmon=1.73309E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.23563E-1
res40_imon=-2.57626E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.16417E-1	-7.9813E-1	-9.13172E0	-9.14185E0	5.34058E-3	9.28164E-2	2.72691E1	-3.26921E1	-3.26425E1	2.68244E1	1.73605E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.9911E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09418E0	-8.16274E-1	-7.97844E-1	-9.13155E0	-9.14207E0	5.38826E-3	9.25303E-2	2.73222E1	-3.26866E1	-3.25972E1	2.68064E1	1.73383E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.00021E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0941E0	-8.16607E-1	-7.98225E-1	-9.13165E0	-9.14173E0	5.53131E-3	9.27687E-2	2.73411E1	-3.26413E1	-3.26296E1	2.67848E1	1.73528E-7	2.51804E-3	2.51804E-3	6.32418E-3	1.99401E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.16894E-1	-7.97796E-1	-9.13203E0	-9.14185E0	5.36442E-3	9.29594E-2	2.72769E1	-3.26561E1	-3.26536E1	2.68088E1	1.73383E-7	2.52169E-3	2.52169E-3	6.3074E-3	1.9917E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.16727E-1	-7.97534E-1	-9.13181E0	-9.14166E0	5.10216E-3	9.31025E-2	2.73438E1	-3.26818E1	-3.26123E1	2.67987E1	1.73454E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.99283E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.16512E-1	-7.97725E-1	-9.13198E0	-9.14161E0	5.03063E-3	9.31025E-2	2.73107E1	-3.27252E1	-3.25986E1	2.67951E1	1.73605E-7	2.52197E-3	2.52197E-3	6.3282E-3	1.99119E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.16584E-1	-7.98082E-1	-9.13172E0	-9.14166E0	4.98295E-3	9.32217E-2	2.72937E1	-3.26104E1	-3.26086E1	2.67938E1	1.73683E-7	2.51838E-3	2.51838E-3	6.33592E-3	1.99163E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.16464E-1	-7.97725E-1	-9.13174E0	-9.14176E0	5.05447E-3	9.31025E-2	2.73249E1	-3.2638E1	-3.26615E1	2.67728E1	1.73529E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.99283E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.16488E-1	-7.97677E-1	-9.1315E0	-9.14156E0	5.00679E-3	9.33647E-2	2.73228E1	-3.26446E1	-3.26264E1	2.68433E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.99456E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.16345E-1	-7.98178E-1	-9.1316E0	-9.14164E0	5.05447E-3	9.32693E-2	2.73277E1	-3.27031E1	-3.26236E1	2.67577E1	1.73388E-7	2.51754E-3	2.51754E-3	6.3153E-3	1.99283E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.16274E-1	-7.98082E-1	-9.13177E0	-9.14185E0	5.05447E-3	9.31978E-2	2.72833E1	-3.26938E1	-3.25812E1	2.68178E1	1.73605E-7	2.51804E-3	2.51804E-3	6.33538E-3	1.99577E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.15916E-1	-7.97939E-1	-9.13138E0	-9.1419E0	4.98295E-3	9.31978E-2	2.73742E1	-3.26675E1	-3.26254E1	2.68229E1	1.73531E-7	2.51203E-3	2.51203E-3	6.29665E-3	2.00534E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.16202E-1	-7.97892E-1	-9.13146E0	-9.14171E0	4.93526E-3	9.31978E-2	2.73405E1	-3.25791E1	-3.27089E1	2.67641E1	1.73454E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.9911E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.16393E-1	-7.98225E-1	-9.132E0	-9.14176E0	5.00679E-3	9.32455E-2	2.73562E1	-3.26242E1	-3.26729E1	2.677E1	1.73605E-7	2.51116E-3	2.51116E-3	6.3074E-3	1.9963E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.16345E-1	-7.98059E-1	-9.13186E0	-9.1419E0	4.91142E-3	9.36747E-2	2.73087E1	-3.2647E1	-3.2641E1	2.67895E1	1.73379E-7	2.51225E-3	2.51225E-3	6.31837E-3	1.99283E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.16488E-1	-7.98297E-1	-9.13162E0	-9.14171E0	4.69685E-3	9.33886E-2	2.73222E1	-3.26838E1	-3.25947E1	2.68007E1	1.73379E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.9911E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.16822E-1	-7.98059E-1	-9.13157E0	-9.14195E0	5.03063E-3	9.3174E-2	2.72806E1	-3.26236E1	-3.2678E1	2.67701E1	1.73457E-7	2.52276E-3	2.52276E-3	6.31278E-3	1.99E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.16679E-1	-7.98249E-1	-9.13148E0	-9.14197E0	4.95911E-3	9.33409E-2	2.73092E1	-3.2633E1	-3.26492E1	2.68256E1	1.73374E-7	2.52027E-3	2.52027E-3	6.3074E-3	1.99401E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.16703E-1	-7.98154E-1	-9.1315E0	-9.1418E0	5.17368E-3	9.30548E-2	2.72895E1	-3.26897E1	-3.26404E1	2.67891E1	1.73605E-7	2.52025E-3	2.52025E-3	6.3074E-3	1.99394E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.16798E-1	-7.98011E-1	-9.13155E0	-9.14164E0	4.95911E-3	9.3317E-2	2.73057E1	-3.26962E1	-3.26425E1	2.6786E1	1.73309E-7	2.5131E-3	2.5131E-3	6.31278E-3	1.9951E-1