[Scan]
initial_time=2016-02-16T04:57:53
final_time=2016-02-16T04:58:13
ip_count=19
run=1030
dataset=10
scan=789
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08839E-4
ql1_vset=
ql1_vmon=-8.16512E-1
ql1_imon=5.83625E-10
ql2_vset=
ql2_vmon=-7.97772E-1
ql2_imon=2.83861E-10
ql3_vset=
ql3_vmon=-9.13141E0
ql3_imon=4.5979E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=4.98986E-10
mult1=-1.15826E-8
mult2=-2.9801E-9
rf_tmon=-4.64461E-3
rf_agc=3.28589E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=3.79634E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67683E0
bslens_imon=2.56095E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1986E1
lens5a_imon=1.99359E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12516E2
lens4a_imon=2.05033E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53349E1
cs_ef1b_imon=3.0913E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.02153E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04941E1
cs_ea1_imon=2.17481E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41916E0
lens1_imon=2.70961E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64834E1
os_ef1alow_imon=2.97105E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03696E1
cs_ea2_imon=1.57311E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83983E1
cs_ef1a_imon=3.01901E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=3.70216E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10973E1
os_restr1_imon=2.88313E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14922E1
os_ea1_imon=1.87608E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63456E1
os_ef1bup_imon=3.09581E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24738E0
cs_ionrep_imon=1.29385E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91867E2
cs_nozzle_imon=1.93165E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02192E1
cs_anode1_imon=3.28695E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=6.60241E-10
tplens_vset=1.4E-1
tplens_vmon=1.62728E0
tplens_imon=-3.51978E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26446E1
iondef3_imon=1.52108E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26777E1
iondef2_imon=1.59718E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.98371E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=3.49319E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2639E0
ionrepsh_imon=2.04031E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33652E1
lens5b_imon=2.17764E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74513E1
cs_ef2b_imon=3.14829E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.85839E-1
os_ea2_imon=-6.20973E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06069E2
lens4b_imon=2.00821E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71026E1
cs_ef2a_imon=3.20146E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64825E0
os_ef2alow_imon=-2.64061E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.16721E-1
os_ef2bup_imon=-5.1706E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10979E1
os_restr2_imon=2.86992E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2311E2
cs_ionfoca_imon=6.31733E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01867E1
cs_anode2_imon=2.29894E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72835E1
iondef1_imon=1.11228E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6813E1
iondef4_imon=1.08434E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=1.87329E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=2.16329E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.07396E0
cs_ionaccel_imon=-2.04287E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02123E2
cs_ionfocb_imon=1.47247E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56289E1
einzel_imon=7.93458E-6
window_vset=0.0E0
window_vmon=2.24057E-1
window_imon=-8.43906E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82632E2
mask1_imon=2.39136E-4
mask2_vset=0.0E0
mask2_vmon=-1.8635E1
mask2_imon=-6.1454E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.87715E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.99229E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=6.90027E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42327E0
defgridb_imon=5.9871E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33922E1
os_fil1_imon=5.3181E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.01722E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66664E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30785E1
cs_fil1_imon=1.00716E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63241E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67181E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.30657E-2
os_fil2_imon=-2.32745E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.06092E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.52306E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30401E-1
cs_fil2_imon=-2.19423E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.46057E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.226E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=1.98419E-1
chamber_ion_pmon=1.73454E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.56889E-1
res40_imon=-2.51203E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.16607E-1	-7.98392E-1	-9.1315E0	-9.14183E0	5.31673E-3	9.34601E-2	2.73184E1	-3.26382E1	-3.26162E1	2.67781E1	1.73457E-7	2.52061E-3	2.52061E-3	6.32356E-3	1.9934E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.16631E-1	-7.97868E-1	-9.13136E0	-9.14197E0	5.50747E-3	9.32932E-2	2.72901E1	-3.26741E1	-3.25842E1	2.68119E1	1.73532E-7	2.51709E-3	2.51709E-3	6.31269E-3	1.99562E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09634E0	-8.16774E-1	-7.98011E-1	-9.13126E0	-9.14176E0	5.43594E-3	9.34124E-2	2.7298E1	-3.27104E1	-3.26201E1	2.68052E1	1.73605E-7	2.52293E-3	2.52293E-3	6.3245E-3	1.99343E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09634E0	-8.1687E-1	-7.97749E-1	-9.13148E0	-9.14192E0	5.65052E-3	9.33647E-2	2.72284E1	-3.26396E1	-3.26284E1	2.67966E1	1.73531E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.97984E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09611E0	-8.16941E-1	-7.98059E-1	-9.1315E0	-9.14171E0	5.50747E-3	9.31501E-2	2.7379E1	-3.26458E1	-3.26356E1	2.6849E1	1.73457E-7	2.51096E-3	2.51096E-3	6.30202E-3	1.98322E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.17037E-1	-7.9782E-1	-9.13155E0	-9.14173E0	5.43594E-3	9.3174E-2	2.72865E1	-3.262E1	-3.25984E1	2.67896E1	1.73531E-7	2.51203E-3	2.51203E-3	6.31278E-3	1.97984E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.16464E-1	-7.98202E-1	-9.13169E0	-9.14185E0	5.14984E-3	9.3317E-2	2.73016E1	-3.26408E1	-3.26213E1	2.6813E1	1.73451E-7	2.51581E-3	2.51581E-3	6.31299E-3	1.97818E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.16607E-1	-7.98249E-1	-9.1316E0	-9.14183E0	5.57899E-3	9.31978E-2	2.72564E1	-3.26789E1	-3.25978E1	2.68016E1	1.73457E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.9883E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.16131E-1	-7.97892E-1	-9.1315E0	-9.14185E0	5.43594E-3	9.31978E-2	2.73261E1	-3.26987E1	-3.26002E1	2.6801E1	1.73454E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.99456E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.16274E-1	-7.98225E-1	-9.1315E0	-9.14178E0	5.22137E-3	9.32217E-2	2.72799E1	-3.27017E1	-3.26314E1	2.67866E1	1.73454E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.99977E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-8.1625E-1	-7.98154E-1	-9.13134E0	-9.14154E0	5.26905E-3	9.3174E-2	2.73087E1	-3.26831E1	-3.2614E1	2.68112E1	1.73454E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.98419E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.16751E-1	-7.97749E-1	-9.1315E0	-9.1418E0	5.10216E-3	9.33886E-2	2.73063E1	-3.26506E1	-3.26104E1	2.68004E1	1.73529E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.98592E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09348E0	-8.16751E-1	-7.97939E-1	-9.13181E0	-9.14192E0	4.98295E-3	9.33409E-2	2.73099E1	-3.26032E1	-3.26633E1	2.67872E1	1.73454E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.98592E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09371E0	-8.1656E-1	-7.97606E-1	-9.1315E0	-9.14152E0	5.10216E-3	9.36031E-2	2.72727E1	-3.27263E1	-3.26356E1	2.67962E1	1.73454E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.97903E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09402E0	-8.16631E-1	-7.97606E-1	-9.13153E0	-9.14166E0	5.14984E-3	9.3627E-2	2.73027E1	-3.26236E1	-3.26476E1	2.6792E1	1.73529E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.98247E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09402E0	-8.16298E-1	-7.97749E-1	-9.13153E0	-9.14176E0	5.07832E-3	9.32455E-2	2.72945E1	-3.26449E1	-3.26649E1	2.67989E1	1.73529E-7	2.51771E-3	2.51771E-3	6.34037E-3	1.97388E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.16751E-1	-7.97749E-1	-9.13148E0	-9.1418E0	5.14984E-3	9.35793E-2	2.72841E1	-3.26506E1	-3.26194E1	2.6795E1	1.73457E-7	2.51525E-3	2.51525E-3	6.32896E-3	1.99E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.16703E-1	-7.97844E-1	-9.13131E0	-9.14166E0	5.24521E-3	9.3317E-2	2.72357E1	-3.26123E1	-3.26425E1	2.66941E1	1.73383E-7	2.51525E-3	2.51525E-3	6.32356E-3	1.99E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.16798E-1	-7.97677E-1	-9.13117E0	-9.14209E0	5.45979E-3	9.32455E-2	2.72781E1	-3.26897E1	-3.25647E1	2.68232E1	1.73532E-7	2.51709E-3	2.51709E-3	6.3074E-3	1.99061E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.16512E-1	-7.97772E-1	-9.13141E0	-9.14195E0	5.31673E-3	9.31025E-2	2.72835E1	-3.26777E1	-3.26446E1	2.6813E1	1.73454E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.98419E-1