[Scan]
initial_time=2016-02-16T04:58:20
final_time=2016-02-16T04:58:40
ip_count=19
run=1030
dataset=10
scan=790
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08793E-4
ql1_vset=
ql1_vmon=-8.16679E-1
ql1_imon=5.7162E-10
ql2_vset=
ql2_vmon=-7.97725E-1
ql2_imon=2.61009E-10
ql3_vset=
ql3_vmon=-9.13157E0
ql3_imon=4.866E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=5.14758E-10
mult1=-9.25806E-9
mult2=-2.87478E-9
rf_tmon=-4.30567E-3
rf_agc=3.37245E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.4121E-3
ql5_imon=3.56591E-10
bslens_vset=-6.2E0
bslens_vmon=-6.70519E0
bslens_imon=2.6423E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19358E1
lens5a_imon=1.98632E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.0514E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53808E1
cs_ef1b_imon=3.07496E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02366E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05535E1
cs_ea1_imon=2.1608E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38818E0
lens1_imon=2.94872E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64891E1
os_ef1alow_imon=3.00649E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03864E1
cs_ea2_imon=1.60491E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8407E1
cs_ef1a_imon=3.0328E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=3.65245E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11574E1
os_restr1_imon=2.88107E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15155E1
os_ea1_imon=1.90484E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63371E1
os_ef1bup_imon=3.05478E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21304E0
cs_ionrep_imon=1.2646E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93521E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01851E1
cs_anode1_imon=3.30814E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20554E0
olens4_imon=6.33872E-10
tplens_vset=1.4E-1
tplens_vmon=1.60298E0
tplens_imon=-2.89745E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26343E1
iondef3_imon=1.49424E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26655E1
iondef2_imon=1.58977E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02956E2
lens6_imon=2.98649E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=3.61085E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27673E0
ionrepsh_imon=2.03102E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33021E1
lens5b_imon=2.18243E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74399E1
cs_ef2b_imon=3.15245E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.03995E-1
os_ea2_imon=-2.84926E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00724E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71294E1
cs_ef2a_imon=3.18813E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.66183E0
os_ef2alow_imon=-2.30956E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.17536E-1
os_ef2bup_imon=-5.05939E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10703E1
os_restr2_imon=2.88107E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.29496E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01755E1
cs_anode2_imon=2.29434E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72949E1
iondef1_imon=1.11608E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68038E1
iondef4_imon=1.08377E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.8459E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=2.15602E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14636E0
cs_ionaccel_imon=-2.01404E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47345E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56003E1
einzel_imon=7.73109E-6
window_vset=0.0E0
window_vmon=1.76498E-1
window_imon=-8.78788E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82609E2
mask1_imon=2.38889E-4
mask2_vset=0.0E0
mask2_vmon=-1.86578E1
mask2_imon=-7.56253E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.97402E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.99347E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.501E3
multb_neg_imon=6.89614E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28728E0
defgridb_imon=6.23283E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33926E1
os_fil1_imon=5.40692E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.56329E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66824E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30822E1
cs_fil1_imon=1.01032E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61699E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67182E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.46063E-2
os_fil2_imon=-2.21547E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.44005E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.53548E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31076E-1
cs_fil2_imon=-2.28755E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1182E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22649E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30221E-3
inlet_lpb_pmon=1.98301E-1
chamber_ion_pmon=1.73462E-7
chamber_cvt_pmon=2.51472E-3
foreline_cvt_pmon=2.51472E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.7582E-1
res40_imon=-2.76006E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.16751E-1	-7.97749E-1	-9.1316E0	-9.14195E0	5.38826E-3	9.33409E-2	2.7275E1	-3.2672E1	-3.2593E1	2.67998E1	1.73529E-7	2.51116E-3	2.51116E-3	6.3074E-3	1.98419E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.16369E-1	-7.98011E-1	-9.13167E0	-9.14197E0	5.45979E-3	9.35793E-2	2.73219E1	-3.26675E1	-3.26398E1	2.67974E1	1.73531E-7	2.51417E-3	2.51417E-3	6.31278E-3	1.97815E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.16655E-1	-7.97915E-1	-9.1315E0	-9.14204E0	5.10216E-3	9.3174E-2	2.73216E1	-3.26815E1	-3.26402E1	2.67549E1	1.73454E-7	2.51662E-3	2.51662E-3	6.34037E-3	1.97559E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0941E0	-8.16631E-1	-7.97296E-1	-9.13148E0	-9.14204E0	5.53131E-3	9.35078E-2	2.72929E1	-3.26419E1	-3.26303E1	2.68107E1	1.73531E-7	2.52169E-3	2.52169E-3	6.30202E-3	1.97984E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.16631E-1	-7.98035E-1	-9.13136E0	-9.14178E0	5.4121E-3	9.34124E-2	2.73417E1	-3.26248E1	-3.2682E1	2.67995E1	1.73374E-7	2.5147E-3	2.5147E-3	6.3074E-3	1.97818E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09426E0	-8.16989E-1	-7.97915E-1	-9.13174E0	-9.1418E0	5.26905E-3	9.30786E-2	2.72787E1	-3.26693E1	-3.26098E1	2.67716E1	1.73605E-7	2.51954E-3	2.51954E-3	6.33977E-3	1.9917E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.16655E-1	-7.98059E-1	-9.13167E0	-9.14187E0	5.38826E-3	9.34362E-2	2.73021E1	-3.26476E1	-3.26332E1	2.6798E1	1.73529E-7	2.51116E-3	2.51116E-3	6.31288E-3	1.98247E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.16798E-1	-7.9813E-1	-9.1316E0	-9.14192E0	5.43594E-3	9.31501E-2	2.73123E1	-3.26416E1	-3.26422E1	2.6819E1	1.73379E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.98937E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.16345E-1	-7.97987E-1	-9.13153E0	-9.14199E0	4.98295E-3	9.33647E-2	2.72823E1	-3.26723E1	-3.26134E1	2.6774E1	1.72477E-7	2.51116E-3	2.51116E-3	6.31837E-3	2.00673E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.16536E-1	-7.9813E-1	-9.13143E0	-9.14197E0	4.8399E-3	9.31978E-2	2.72985E1	-3.27294E1	-3.2593E1	2.67842E1	1.73454E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.00499E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.16393E-1	-7.98273E-1	-9.13146E0	-9.14183E0	5.24521E-3	9.31978E-2	2.72168E1	-3.2647E1	-3.26981E1	2.67926E1	1.73529E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.9963E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.16798E-1	-7.97701E-1	-9.13169E0	-9.14164E0	5.31673E-3	9.32455E-2	2.73075E1	-3.26368E1	-3.26224E1	2.67613E1	1.73531E-7	2.52276E-3	2.52276E-3	6.32896E-3	2.00534E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.16512E-1	-7.98273E-1	-9.13177E0	-9.14195E0	5.43594E-3	9.3317E-2	2.72174E1	-3.26158E1	-3.26759E1	2.68142E1	1.73528E-7	2.51915E-3	2.51915E-3	6.31299E-3	2.00285E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.16393E-1	-7.98059E-1	-9.13169E0	-9.14204E0	5.17368E-3	9.30071E-2	2.72968E1	-3.26543E1	-3.25936E1	2.68082E1	1.73605E-7	2.51525E-3	2.51525E-3	6.29128E-3	2.00534E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.16536E-1	-7.9751E-1	-9.13157E0	-9.14216E0	5.38826E-3	9.30548E-2	2.73393E1	-3.26909E1	-3.26026E1	2.67619E1	1.73529E-7	2.51443E-3	2.51443E-3	6.32936E-3	1.99977E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.16703E-1	-7.97772E-1	-9.1315E0	-9.14209E0	5.53131E-3	9.30548E-2	2.72732E1	-3.26437E1	-3.26071E1	2.67984E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.00151E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.16751E-1	-7.97701E-1	-9.13148E0	-9.14216E0	5.79357E-3	9.30071E-2	2.73241E1	-3.26615E1	-3.26438E1	2.68232E1	1.73459E-7	2.51919E-3	2.51919E-3	6.3074E-3	1.99394E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09402E0	-8.16798E-1	-7.97844E-1	-9.13155E0	-9.14187E0	5.22137E-3	9.33647E-2	2.73039E1	-3.26801E1	-3.2614E1	2.6737E1	1.73605E-7	2.51838E-3	2.51838E-3	6.3074E-3	2.00425E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-8.16441E-1	-7.98011E-1	-9.13143E0	-9.1418E0	5.45979E-3	9.31025E-2	2.73213E1	-3.26176E1	-3.26428E1	2.67972E1	1.73531E-7	2.51203E-3	2.51203E-3	6.3074E-3	1.9985E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.16679E-1	-7.97725E-1	-9.13157E0	-9.14197E0	5.4121E-3	9.29832E-2	2.72949E1	-3.26655E1	-3.26343E1	2.68038E1	1.73462E-7	2.51472E-3	2.51472E-3	6.30221E-3	1.98301E-1