[Scan]
initial_time=2016-02-16T04:59:13
final_time=2016-02-16T04:59:33
ip_count=19
run=1030
dataset=10
scan=792
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08744E-4
ql1_vset=
ql1_vmon=-8.1625E-1
ql1_imon=5.97846E-10
ql2_vset=
ql2_vmon=-7.97534E-1
ql2_imon=2.51937E-10
ql3_vset=
ql3_vmon=-9.13095E0
ql3_imon=5.14364E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=4.92883E-10
mult1=-9.54665E-9
mult2=-3.05446E-9
rf_tmon=-3.7426E-3
rf_agc=3.36689E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=3.54874E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68356E0
bslens_imon=2.68916E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19538E1
lens5a_imon=1.98235E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.0554E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53532E1
cs_ef1b_imon=3.05478E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.01959E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04604E1
cs_ea1_imon=2.1781E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37797E0
lens1_imon=3.11094E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64897E1
os_ef1alow_imon=3.0155E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04039E1
cs_ea2_imon=1.59518E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8386E1
cs_ef1a_imon=3.0155E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=3.67951E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11574E1
os_restr1_imon=2.87746E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14771E1
os_ea1_imon=1.88105E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63377E1
os_ef1bup_imon=3.10812E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21425E0
cs_ionrep_imon=1.27686E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93611E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01677E1
cs_anode1_imon=3.29012E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=6.7327E-10
tplens_vset=1.4E-1
tplens_vmon=1.62641E0
tplens_imon=-2.23642E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26071E1
iondef3_imon=1.51515E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26762E1
iondef2_imon=1.60707E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02982E2
lens6_imon=2.98649E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=3.42965E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.21845E0
ionrepsh_imon=2.01624E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33568E1
lens5b_imon=2.20874E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74531E1
cs_ef2b_imon=3.13263E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.16613E-1
os_ea2_imon=-2.20037E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06062E2
lens4b_imon=2.00482E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71029E1
cs_ef2a_imon=3.20254E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6396E0
os_ef2alow_imon=-2.66635E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.90817E-1
os_ef2bup_imon=-5.16751E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10613E1
os_restr2_imon=2.87386E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.33353E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01851E1
cs_anode2_imon=2.28281E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73134E1
iondef1_imon=1.12293E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6834E1
iondef4_imon=1.08269E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.86768E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=2.68114E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14095E0
cs_ionaccel_imon=-2.09332E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02014E2
cs_ionfocb_imon=1.47486E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55961E1
einzel_imon=7.54008E-6
window_vset=0.0E0
window_vmon=1.84907E-1
window_imon=-9.11223E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82591E2
mask1_imon=2.39167E-4
mask2_vset=0.0E0
mask2_vmon=-1.8647E1
mask2_imon=-8.21124E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92701E3
multa_neg_imon=7.83343E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93685E3
defgrida_imon=6.65821E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=6.96824E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.78052E0
defgridb_imon=6.15352E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33918E1
os_fil1_imon=5.31682E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.08276E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66697E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30812E1
cs_fil1_imon=1.00787E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6269E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67094E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.28007E-2
os_fil2_imon=-2.35362E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.07615E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.62313E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31076E-1
cs_fil2_imon=-2.26353E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.51463E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2239E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.00363E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.68612E-1
res40_imon=-2.72041E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=150
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.16035E-1	-7.97987E-1	-9.13165E0	-9.14207E0	5.34058E-3	9.36031E-2	2.72895E1	-3.2626E1	-3.26776E1	2.67792E1	1.73309E-7	2.51417E-3	2.51417E-3	6.33436E-3	1.9951E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.16345E-1	-7.97653E-1	-9.13136E0	-9.14221E0	5.81741E-3	9.37223E-2	2.73149E1	-3.26768E1	-3.25764E1	2.67932E1	1.73531E-7	2.51525E-3	2.51525E-3	6.3074E-3	1.9917E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.16822E-1	-7.98059E-1	-9.1316E0	-9.1419E0	5.48363E-3	9.34839E-2	2.73116E1	-3.26856E1	-3.2629E1	2.6763E1	1.73528E-7	2.51581E-3	2.51581E-3	6.3074E-3	1.98872E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.16798E-1	-7.98249E-1	-9.13141E0	-9.14195E0	5.24521E-3	9.3174E-2	2.73075E1	-3.26809E1	-3.26508E1	2.68004E1	1.73605E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.9883E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.16679E-1	-7.98082E-1	-9.1316E0	-9.14197E0	4.98295E-3	9.32693E-2	2.7248E1	-3.27041E1	-3.2587E1	2.6792E1	1.73457E-7	2.51739E-3	2.51739E-3	6.32896E-3	1.9917E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.16703E-1	-7.9751E-1	-9.13153E0	-9.14192E0	4.91142E-3	9.32693E-2	2.73529E1	-3.2685E1	-3.25788E1	2.6804E1	1.73531E-7	2.51954E-3	2.51954E-3	6.33977E-3	1.98491E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.16941E-1	-7.97081E-1	-9.13136E0	-9.14209E0	5.31673E-3	9.30548E-2	2.72855E1	-3.26823E1	-3.25942E1	2.68256E1	1.73454E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.9911E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.16822E-1	-7.97486E-1	-9.13143E0	-9.1419E0	5.03063E-3	9.29594E-2	2.73664E1	-3.26332E1	-3.26579E1	2.67886E1	1.73454E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.98937E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.16679E-1	-7.97677E-1	-9.13138E0	-9.14192E0	5.05447E-3	9.31263E-2	2.72979E1	-3.26416E1	-3.26302E1	2.67984E1	1.73454E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.98075E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09588E0	-8.16679E-1	-7.97629E-1	-9.13148E0	-9.14168E0	4.95911E-3	9.31263E-2	2.72997E1	-3.26543E1	-3.26182E1	2.68065E1	1.73379E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.99283E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.1656E-1	-7.98035E-1	-9.13122E0	-9.14207E0	5.05447E-3	9.35316E-2	2.73176E1	-3.26539E1	-3.26118E1	2.68105E1	1.73379E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.98764E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-8.16369E-1	-7.97868E-1	-9.13122E0	-9.14185E0	5.05447E-3	9.38892E-2	2.73039E1	-3.26747E1	-3.26017E1	2.68263E1	1.73459E-7	2.51393E-3	2.51393E-3	6.3445E-3	1.98894E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.16107E-1	-7.97868E-1	-9.13119E0	-9.14187E0	4.88758E-3	9.35316E-2	2.72973E1	-3.26735E1	-3.25731E1	2.67625E1	1.73448E-7	2.51158E-3	2.51158E-3	6.31879E-3	1.99163E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.1625E-1	-7.97558E-1	-9.13095E0	-9.14202E0	4.91142E-3	9.34839E-2	2.72943E1	-3.27047E1	-3.2593E1	2.67884E1	1.73454E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.98419E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.16178E-1	-7.97534E-1	-9.13084E0	-9.14202E0	5.62668E-3	9.36031E-2	2.73405E1	-3.2603E1	-3.26596E1	2.6774E1	1.73379E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.99977E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.16464E-1	-7.97129E-1	-9.13084E0	-9.14171E0	5.07832E-3	9.33886E-2	2.72751E1	-3.26401E1	-3.26334E1	2.67878E1	1.73457E-7	2.51525E-3	2.51525E-3	6.33436E-3	1.9917E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09426E0	-8.16107E-1	-7.97606E-1	-9.13091E0	-9.14202E0	5.126E-3	9.3317E-2	2.72998E1	-3.2662E1	-3.26596E1	2.67493E1	1.73454E-7	2.51552E-3	2.51552E-3	6.29645E-3	1.9911E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-8.16488E-1	-7.97462E-1	-9.13098E0	-9.14183E0	5.03063E-3	9.32932E-2	2.73163E1	-3.26526E1	-3.2629E1	2.66646E1	1.73454E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.98764E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.16154E-1	-7.98106E-1	-9.13122E0	-9.14176E0	5.34058E-3	9.38654E-2	2.73417E1	-3.26703E1	-3.26425E1	2.67833E1	1.73605E-7	2.51603E-3	2.51603E-3	6.3074E-3	1.98894E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.1625E-1	-7.97534E-1	-9.13095E0	-9.14176E0	5.29289E-3	9.34362E-2	2.73134E1	-3.26762E1	-3.26071E1	2.6834E1	1.73605E-7	2.51203E-3	2.51203E-3	6.32896E-3	2.00363E-1