[Scan]
initial_time=2016-02-16T05:00:06
final_time=2016-02-16T05:00:26
ip_count=19
run=1030
dataset=10
scan=794
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08766E-4
ql1_vset=
ql1_vmon=-8.16393E-1
ql1_imon=5.9582E-10
ql2_vset=
ql2_vmon=-7.98535E-1
ql2_imon=3.31271E-10
ql3_vset=
ql3_vmon=-9.13136E0
ql3_imon=4.82619E-10
ql4_vset=
ql4_vmon=-9.14164E0
ql4_imon=5.26881E-10
mult1=-8.84917E-9
mult2=-2.94079E-9
rf_tmon=-5.10528E-3
rf_agc=3.24066E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=3.7694E-10
bslens_vset=-6.2E0
bslens_vmon=-6.60014E0
bslens_imon=2.46893E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20367E1
lens5a_imon=1.9766E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.05603E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5346E1
cs_ef1b_imon=3.08974E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04733E2
lens23_imon=1.01965E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04516E1
cs_ea1_imon=2.21162E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43922E0
lens1_imon=2.77332E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6459E1
os_ef1alow_imon=2.99856E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03938E1
cs_ea2_imon=1.59576E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8404E1
cs_ef1a_imon=3.01874E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=3.65305E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11538E1
os_restr1_imon=2.86701E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15046E1
os_ea1_imon=1.86476E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63353E1
os_ef1bup_imon=3.10812E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24148E0
cs_ionrep_imon=1.29774E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.93572E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01701E1
cs_anode1_imon=3.29408E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=6.61981E-10
tplens_vset=1.4E-1
tplens_vmon=1.65854E0
tplens_imon=-2.74111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26166E1
iondef3_imon=1.50763E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26685E1
iondef2_imon=1.61487E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02984E2
lens6_imon=2.98671E-4
ql6_vset=1.0E-1
ql6_vmon=9.30071E-2
ql6_imon=3.60084E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22909E0
ionrepsh_imon=2.01235E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33964E1
lens5b_imon=2.20348E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74717E1
cs_ef2b_imon=3.13118E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.94688E-1
os_ea2_imon=-6.45749E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06126E2
lens4b_imon=2.00364E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70933E1
cs_ef2a_imon=3.20254E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65522E0
os_ef2alow_imon=-2.47895E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.54176E-1
os_ef2bup_imon=-5.19994E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10835E1
os_restr2_imon=2.87566E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.32441E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.28822E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73287E1
iondef1_imon=1.08503E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6795E1
iondef4_imon=1.09062E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.84312E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=3.0849E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10191E0
cs_ionaccel_imon=-2.0717E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02103E2
cs_ionfocb_imon=1.47421E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56099E1
einzel_imon=7.91129E-6
window_vset=0.0E0
window_vmon=1.84907E-1
window_imon=-1.10944E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39326E-4
mask2_vset=0.0E0
mask2_vmon=-1.86308E1
mask2_imon=-6.04886E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.86653E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93695E3
defgrida_imon=6.46846E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50159E3
multb_neg_imon=7.40995E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.97251E0
defgridb_imon=6.61712E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33931E1
os_fil1_imon=4.22361E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.67741E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66725E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30807E1
cs_fil1_imon=1.00806E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62768E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67152E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.45852E-2
os_fil2_imon=-2.3296E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.59912E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.65973E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28487E-1
cs_fil2_imon=-2.19745E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31041E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22562E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.98419E-1
chamber_ion_pmon=1.73379E-7
chamber_cvt_pmon=2.51116E-3
foreline_cvt_pmon=2.51116E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.44586E-1
res40_imon=-2.59428E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09642E0	-8.16131E-1	-7.98035E-1	-9.1316E0	-9.14204E0	5.26905E-3	9.31978E-2	2.73145E1	-3.27275E1	-3.25688E1	2.68065E1	1.73454E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.98592E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.16059E-1	-7.97796E-1	-9.13167E0	-9.1418E0	5.26905E-3	9.32693E-2	2.72861E1	-3.27246E1	-3.26144E1	2.68088E1	1.73532E-7	2.51393E-3	2.51393E-3	6.32858E-3	1.99562E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.16226E-1	-7.97963E-1	-9.13155E0	-9.14166E0	5.29289E-3	9.3317E-2	2.72992E1	-3.26791E1	-3.26638E1	2.68007E1	1.73448E-7	2.51271E-3	2.51271E-3	6.3074E-3	1.98625E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.16274E-1	-7.97343E-1	-9.13131E0	-9.14192E0	5.10216E-3	9.31978E-2	2.72656E1	-3.26933E1	-3.25446E1	2.68364E1	1.73459E-7	2.51393E-3	2.51393E-3	6.30212E-3	1.98063E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.16393E-1	-7.97725E-1	-9.13141E0	-9.14152E0	4.95911E-3	9.32932E-2	2.73141E1	-3.26633E1	-3.2617E1	2.6786E1	1.73454E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.97559E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.16154E-1	-7.97224E-1	-9.13136E0	-9.14176E0	4.88758E-3	9.34124E-2	2.73189E1	-3.26386E1	-3.26512E1	2.68238E1	1.73454E-7	2.5188E-3	2.5188E-3	6.33486E-3	1.98247E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.16178E-1	-7.97939E-1	-9.13157E0	-9.1419E0	4.673E-3	9.32932E-2	2.73174E1	-3.26165E1	-3.26663E1	2.68032E1	1.73457E-7	2.5131E-3	2.5131E-3	6.31817E-3	1.98491E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.16441E-1	-7.97868E-1	-9.13146E0	-9.14164E0	5.14984E-3	9.31263E-2	2.72962E1	-3.26508E1	-3.26305E1	2.67982E1	1.73533E-7	2.51575E-3	2.51575E-3	6.33863E-3	1.97975E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.16226E-1	-7.97915E-1	-9.13126E0	-9.14164E0	5.19753E-3	9.32455E-2	2.73135E1	-3.2635E1	-3.26116E1	2.67758E1	1.73445E-7	2.51411E-3	2.51411E-3	6.33065E-3	1.99283E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09402E0	-8.1625E-1	-7.98035E-1	-9.13105E0	-9.14154E0	5.29289E-3	9.32693E-2	2.72588E1	-3.27191E1	-3.25936E1	2.67902E1	1.73529E-7	2.51116E-3	2.51116E-3	6.31837E-3	1.98937E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.16464E-1	-7.98106E-1	-9.13141E0	-9.14176E0	4.72069E-3	9.32932E-2	2.73427E1	-3.27154E1	-3.25867E1	2.67902E1	1.73531E-7	2.51954E-3	2.51954E-3	6.32356E-3	1.99E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.16512E-1	-7.98106E-1	-9.13174E0	-9.14168E0	5.24521E-3	9.32217E-2	2.73755E1	-3.26076E1	-3.26854E1	2.67854E1	1.73605E-7	2.51287E-3	2.51287E-3	6.33388E-3	1.99729E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.16154E-1	-7.98416E-1	-9.13138E0	-9.14202E0	5.19753E-3	9.33409E-2	2.72528E1	-3.26573E1	-3.26543E1	2.681E1	1.73374E-7	2.51693E-3	2.51693E-3	6.31858E-3	1.99224E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.16607E-1	-7.98059E-1	-9.13138E0	-9.1419E0	5.4121E-3	9.33409E-2	2.72865E1	-3.26597E1	-3.26176E1	2.6804E1	1.73529E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.98937E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.16393E-1	-7.98345E-1	-9.13136E0	-9.14178E0	5.43594E-3	9.32932E-2	2.72943E1	-3.26254E1	-3.26446E1	2.67782E1	1.73379E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.9963E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09603E0	-8.16345E-1	-7.97939E-1	-9.13105E0	-9.14192E0	5.36442E-3	9.30309E-2	2.72847E1	-3.2635E1	-3.26374E1	2.6804E1	1.73457E-7	2.52276E-3	2.52276E-3	6.3074E-3	1.9917E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.15916E-1	-7.98035E-1	-9.13129E0	-9.14168E0	5.07832E-3	9.30786E-2	2.72992E1	-3.26567E1	-3.26054E1	2.68394E1	1.73605E-7	2.51116E-3	2.51116E-3	6.32386E-3	1.9963E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-8.16345E-1	-7.98345E-1	-9.13138E0	-9.14195E0	5.45979E-3	9.3174E-2	2.73334E1	-3.26756E1	-3.26496E1	2.69229E1	1.73494E-7	2.51686E-3	2.51686E-3	6.30202E-3	1.9917E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.15845E-1	-7.98273E-1	-9.13131E0	-9.1418E0	5.24521E-3	9.30071E-2	2.7367E1	-3.2623E1	-3.26386E1	2.68172E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.16393E-1	-7.98535E-1	-9.13136E0	-9.14164E0	5.45979E-3	9.30071E-2	2.73287E1	-3.26685E1	-3.26166E1	2.6795E1	1.73379E-7	2.51116E-3	2.51116E-3	6.3074E-3	1.98419E-1