[Scan]
initial_time=2016-02-16T05:01:00
final_time=2016-02-16T05:01:19
ip_count=19
run=1030
dataset=10
scan=796
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08741E-4
ql1_vset=
ql1_vmon=-8.16393E-1
ql1_imon=5.75125E-10
ql2_vset=
ql2_vmon=-7.97963E-1
ql2_imon=2.85995E-10
ql3_vset=
ql3_vmon=-9.13107E0
ql3_imon=5.01347E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=4.81522E-10
mult1=-9.21765E-9
mult2=-2.72803E-9
rf_tmon=-4.31959E-3
rf_agc=3.2704E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.34058E-3
ql5_imon=3.461E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65507E0
bslens_imon=2.75659E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1991E1
lens5a_imon=2.03339E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12494E2
lens4a_imon=2.04974E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53554E1
cs_ef1b_imon=3.07379E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04568E2
lens23_imon=1.02098E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04778E1
cs_ea1_imon=2.19065E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41773E0
lens1_imon=2.46268E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64544E1
os_ef1alow_imon=2.98661E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04295E1
cs_ea2_imon=1.56008E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84284E1
cs_ef1a_imon=3.0158E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=3.41058E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11136E1
os_restr1_imon=2.86867E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14663E1
os_ea1_imon=1.89407E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63823E1
os_ef1bup_imon=3.09637E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.32144E0
cs_ionrep_imon=1.25167E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.9355E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01867E1
cs_anode1_imon=3.29332E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=6.76036E-10
tplens_vset=1.4E-1
tplens_vmon=1.59754E0
tplens_imon=-4.26792E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26321E1
iondef3_imon=1.53069E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26854E1
iondef2_imon=1.58986E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02926E2
lens6_imon=2.98724E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=3.41642E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27691E0
ionrepsh_imon=2.025E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34033E1
lens5b_imon=2.21127E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.743E1
cs_ef2b_imon=3.14152E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.48861E-1
os_ea2_imon=-7.62689E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00634E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71297E1
cs_ef2a_imon=3.18044E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63386E0
os_ef2alow_imon=-2.35814E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.47257E-1
os_ef2bup_imon=-5.18005E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10721E1
os_restr2_imon=2.87334E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.32104E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01886E1
cs_anode2_imon=2.29222E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73473E1
iondef1_imon=1.0799E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67976E1
iondef4_imon=1.10118E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.78699E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=3.17264E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10938E0
cs_ionaccel_imon=-2.01173E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02058E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56418E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=2.19169E-1
window_imon=-9.8806E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.3924E-4
mask2_vset=0.0E0
mask2_vmon=-1.86526E1
mask2_imon=-5.2877E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92595E3
multa_neg_imon=7.50114E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.83316E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50104E3
multb_neg_imon=7.21486E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50011E0
defgridb_imon=6.06212E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33912E1
os_fil1_imon=5.39178E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.81148E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66891E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30806E1
cs_fil1_imon=1.00896E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63481E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.671E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.4538E-2
os_fil2_imon=-2.17222E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.02679E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.50196E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28114E-1
cs_fil2_imon=-2.04897E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.20109E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2257E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.98469E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51181E-3
foreline_cvt_pmon=2.51181E-3
chamber_tmon=1.40059E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.70414E-1
res40_imon=-2.54887E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.16369E-1	-7.97772E-1	-9.13136E0	-9.14173E0	5.03063E-3	9.32455E-2	2.72249E1	-3.26384E1	-3.26567E1	2.68123E1	1.73525E-7	2.51065E-3	2.51065E-3	6.34231E-3	1.99466E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.15964E-1	-7.98011E-1	-9.13141E0	-9.14199E0	5.55515E-3	9.29117E-2	2.73039E1	-3.26585E1	-3.26168E1	2.68007E1	1.73457E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.98491E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.1656E-1	-7.97915E-1	-9.13153E0	-9.14183E0	5.60284E-3	9.33409E-2	2.72786E1	-3.26461E1	-3.2603E1	2.6803E1	1.73605E-7	2.51693E-3	2.51693E-3	6.31858E-3	1.9852E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09619E0	-8.16369E-1	-7.97725E-1	-9.13129E0	-9.14216E0	5.24521E-3	9.32455E-2	2.73364E1	-3.2688E1	-3.25995E1	2.67656E1	1.73531E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.9934E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09611E0	-8.16441E-1	-7.97963E-1	-9.13119E0	-9.14192E0	5.126E-3	9.33886E-2	2.73155E1	-3.27071E1	-3.26422E1	2.68496E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.98764E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09704E0	-8.16178E-1	-7.97629E-1	-9.13136E0	-9.14204E0	5.26905E-3	9.3174E-2	2.73151E1	-3.26497E1	-3.26329E1	2.67855E1	1.73533E-7	2.51472E-3	2.51472E-3	6.3126E-3	1.99283E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09611E0	-8.16393E-1	-7.97892E-1	-9.13126E0	-9.14192E0	5.50747E-3	9.3174E-2	2.72991E1	-3.26404E1	-3.26098E1	2.6783E1	1.73445E-7	2.5118E-3	2.5118E-3	6.3074E-3	1.98734E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.16441E-1	-7.97987E-1	-9.13136E0	-9.14173E0	5.126E-3	9.30548E-2	2.73093E1	-3.26549E1	-3.26242E1	2.6783E1	1.73605E-7	2.52384E-3	2.52384E-3	6.32356E-3	1.98661E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.16131E-1	-7.98607E-1	-9.13122E0	-9.14183E0	5.19753E-3	9.32455E-2	2.72703E1	-3.26874E1	-3.25977E1	2.67989E1	1.73528E-7	2.51136E-3	2.51136E-3	6.30182E-3	1.98872E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.16298E-1	-7.98059E-1	-9.13112E0	-9.14192E0	5.34058E-3	9.30786E-2	2.73277E1	-3.2675E1	-3.25942E1	2.6774E1	1.73679E-7	2.51203E-3	2.51203E-3	6.31817E-3	1.9934E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.1594E-1	-7.98225E-1	-9.13105E0	-9.14192E0	5.26905E-3	9.32693E-2	2.72955E1	-3.2647E1	-3.26458E1	2.6816E1	1.73529E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.00151E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.16274E-1	-7.98345E-1	-9.13107E0	-9.14209E0	5.34058E-3	9.33409E-2	2.72774E1	-3.2652E1	-3.26372E1	2.67764E1	1.73605E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.99283E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09665E0	-8.16441E-1	-7.97892E-1	-9.13105E0	-9.14183E0	5.24521E-3	9.32932E-2	2.72998E1	-3.26885E1	-3.2616E1	2.67986E1	1.73605E-7	2.51417E-3	2.51417E-3	6.32896E-3	1.9883E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09665E0	-8.16607E-1	-7.97844E-1	-9.13086E0	-9.14226E0	5.43594E-3	9.31978E-2	2.72967E1	-3.26362E1	-3.2617E1	2.68169E1	1.73454E-7	2.51007E-3	2.51007E-3	6.33486E-3	1.99456E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09634E0	-8.16154E-1	-7.97915E-1	-9.13095E0	-9.14197E0	5.38826E-3	9.31263E-2	2.72951E1	-3.26691E1	-3.26236E1	2.68274E1	1.73457E-7	2.51954E-3	2.51954E-3	6.32896E-3	1.98661E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0958E0	-8.16584E-1	-7.97558E-1	-9.13076E0	-9.14161E0	5.34058E-3	9.33886E-2	2.74229E1	-3.2653E1	-3.25912E1	2.6783E1	1.73383E-7	2.51632E-3	2.51632E-3	6.34518E-3	2.00363E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.16131E-1	-7.98154E-1	-9.13074E0	-9.1418E0	5.17368E-3	9.3317E-2	2.72818E1	-3.26609E1	-3.26144E1	2.67926E1	1.73454E-7	2.51552E-3	2.51552E-3	6.33486E-3	1.99456E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09588E0	-8.1656E-1	-7.97892E-1	-9.13105E0	-9.14202E0	5.34058E-3	9.3627E-2	2.73474E1	-3.2659E1	-3.26521E1	2.66863E1	1.73451E-7	2.51359E-3	2.51359E-3	6.31858E-3	1.99577E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-8.16154E-1	-7.98321E-1	-9.13103E0	-9.14178E0	5.126E-3	9.32693E-2	2.72833E1	-3.26726E1	-3.26467E1	2.6792E1	1.73532E-7	2.51077E-3	2.51077E-3	6.32858E-3	1.99394E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.16393E-1	-7.97963E-1	-9.13107E0	-9.1419E0	5.34058E-3	9.33886E-2	2.73473E1	-3.26854E1	-3.26321E1	2.67976E1	1.73605E-7	2.51181E-3	2.51181E-3	6.3074E-3	1.98469E-1