[Scan]
initial_time=2016-02-16T05:01:26
final_time=2016-02-16T05:01:46
ip_count=19
run=1030
dataset=10
scan=797
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09665E0
qbias_imon=-1.08746E-4
ql1_vset=
ql1_vmon=-8.16393E-1
ql1_imon=5.74136E-10
ql2_vset=
ql2_vmon=-7.98225E-1
ql2_imon=2.77352E-10
ql3_vset=
ql3_vmon=-9.13136E0
ql3_imon=5.21481E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=5.00405E-10
mult1=-9.5959E-9
mult2=-2.64875E-9
rf_tmon=-5.83424E-3
rf_agc=3.26126E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=3.71623E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66916E0
bslens_imon=3.02462E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19665E1
lens5a_imon=1.98651E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.0499E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53905E1
cs_ef1b_imon=3.08397E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04576E2
lens23_imon=1.02482E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05124E1
cs_ea1_imon=2.1603E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36312E0
lens1_imon=3.07063E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.9809E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03914E1
cs_ea2_imon=1.56461E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84274E1
cs_ef1a_imon=3.03712E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=3.84367E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11057E1
os_restr1_imon=2.88792E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15477E1
os_ea1_imon=1.92917E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63509E1
os_ef1bup_imon=3.07568E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21493E0
cs_ionrep_imon=1.24217E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93739E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01635E1
cs_anode1_imon=3.29156E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=6.65784E-10
tplens_vset=1.4E-1
tplens_vmon=1.63553E0
tplens_imon=-3.48439E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25659E1
iondef3_imon=1.50445E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26825E1
iondef2_imon=1.5816E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02968E2
lens6_imon=2.98887E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=3.44491E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28572E0
ionrepsh_imon=2.04704E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33097E1
lens5b_imon=2.18047E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.13226E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.62833E-1
os_ea2_imon=-3.4136E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.00938E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71114E1
cs_ef2a_imon=3.18921E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.68345E0
os_ef2alow_imon=-2.44651E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.58982E-1
os_ef2bup_imon=-5.18192E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10637E1
os_restr2_imon=2.86233E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23103E2
cs_ionfoca_imon=6.31627E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01899E1
cs_anode2_imon=2.28894E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73177E1
iondef1_imon=1.13033E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68034E1
iondef4_imon=1.07368E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.82942E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=2.9676E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14696E0
cs_ionaccel_imon=-1.85907E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02042E2
cs_ionfocb_imon=1.47352E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56255E1
einzel_imon=7.79236E-6
window_vset=0.0E0
window_vmon=2.11336E-1
window_imon=-8.13916E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82609E2
mask1_imon=2.39246E-4
mask2_vset=0.0E0
mask2_vmon=-1.86476E1
mask2_imon=-3.27381E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92626E3
multa_neg_imon=7.72141E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93682E3
defgrida_imon=6.54279E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=6.96044E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.1959E0
defgridb_imon=6.24902E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33913E1
os_fil1_imon=5.83939E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.80355E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66828E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30809E1
cs_fil1_imon=1.00992E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63249E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67181E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.4332E-2
os_fil2_imon=-2.22148E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.41892E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.58507E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28875E-1
cs_fil2_imon=-2.17943E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.42453E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22518E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=1.97216E-1
chamber_ion_pmon=1.73529E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.54196E-1
res40_imon=-2.67356E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.1687E-1	-7.97415E-1	-9.13165E0	-9.14192E0	5.03063E-3	9.30071E-2	2.73523E1	-3.26219E1	-3.25977E1	2.67752E1	1.73529E-7	2.51007E-3	2.51007E-3	6.31837E-3	1.97731E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.16607E-1	-7.98011E-1	-9.1315E0	-9.14209E0	5.05447E-3	9.31025E-2	2.73606E1	-3.26291E1	-3.26734E1	2.684E1	1.73531E-7	2.51954E-3	2.51954E-3	6.32356E-3	1.99E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.16965E-1	-7.98154E-1	-9.13136E0	-9.14204E0	4.98295E-3	9.31263E-2	2.72762E1	-3.26938E1	-3.25918E1	2.68221E1	1.73528E-7	2.51581E-3	2.51581E-3	6.29067E-3	1.99224E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.16751E-1	-7.98106E-1	-9.13129E0	-9.14221E0	5.29289E-3	9.31501E-2	2.73098E1	-3.2698E1	-3.26331E1	2.67914E1	1.73531E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.9951E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.16727E-1	-7.97915E-1	-9.13088E0	-9.14214E0	5.36442E-3	9.35555E-2	2.73015E1	-3.26494E1	-3.26182E1	2.67866E1	1.73309E-7	2.51525E-3	2.51525E-3	6.30202E-3	2.00705E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.16798E-1	-7.97606E-1	-9.13131E0	-9.14195E0	5.19753E-3	9.31501E-2	2.72618E1	-3.26218E1	-3.26314E1	2.67824E1	1.73605E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.99456E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.16774E-1	-7.97868E-1	-9.13141E0	-9.14207E0	5.14984E-3	9.30309E-2	2.72925E1	-3.26554E1	-3.26446E1	2.68064E1	1.73605E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.00325E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.17013E-1	-7.97677E-1	-9.13143E0	-9.14192E0	5.26905E-3	9.31263E-2	2.72775E1	-3.26969E1	-3.26092E1	2.68526E1	1.73529E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.98592E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.16703E-1	-7.97939E-1	-9.13155E0	-9.14202E0	5.22137E-3	9.34839E-2	2.72685E1	-3.26868E1	-3.25747E1	2.68298E1	1.73605E-7	2.51225E-3	2.51225E-3	6.3074E-3	1.99456E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.16751E-1	-7.97963E-1	-9.13136E0	-9.14214E0	4.98295E-3	9.32455E-2	2.72883E1	-3.26699E1	-3.25978E1	2.67728E1	1.73493E-7	2.51376E-3	2.51376E-3	6.30469E-3	1.99569E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.16894E-1	-7.97629E-1	-9.13157E0	-9.14195E0	5.38826E-3	9.3174E-2	2.73069E1	-3.26735E1	-3.2635E1	2.67794E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.16202E-1	-7.97749E-1	-9.13143E0	-9.1418E0	5.17368E-3	9.3317E-2	2.72949E1	-3.25882E1	-3.26416E1	2.68232E1	1.73451E-7	2.51359E-3	2.51359E-3	6.32418E-3	1.9852E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.16321E-1	-7.9782E-1	-9.13177E0	-9.14192E0	5.17368E-3	9.34362E-2	2.73297E1	-3.26861E1	-3.26038E1	2.67728E1	1.73454E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.98764E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.16703E-1	-7.97844E-1	-9.13172E0	-9.14199E0	5.38826E-3	9.3317E-2	2.73277E1	-3.26511E1	-3.2596E1	2.68004E1	1.73379E-7	2.5199E-3	2.5199E-3	6.34588E-3	1.9911E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.16488E-1	-7.97844E-1	-9.13165E0	-9.14183E0	5.60284E-3	9.34124E-2	2.72915E1	-3.26325E1	-3.26514E1	2.67806E1	1.73303E-7	2.51225E-3	2.51225E-3	6.31837E-3	1.9911E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.16154E-1	-7.98035E-1	-9.13143E0	-9.14202E0	5.31673E-3	9.31978E-2	2.73087E1	-3.26344E1	-3.25948E1	2.67746E1	1.73457E-7	2.51632E-3	2.51632E-3	6.32356E-3	1.9883E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.16512E-1	-7.98011E-1	-9.13143E0	-9.14202E0	5.38826E-3	9.32932E-2	2.73345E1	-3.26723E1	-3.26446E1	2.67752E1	1.73528E-7	2.51359E-3	2.51359E-3	6.31299E-3	1.98872E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09603E0	-8.16774E-1	-7.97868E-1	-9.13155E0	-9.14214E0	5.36442E-3	9.34124E-2	2.73092E1	-3.26579E1	-3.26207E1	2.66756E1	1.73605E-7	2.50989E-3	2.50989E-3	6.32356E-3	1.9968E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-8.16774E-1	-7.97629E-1	-9.13105E0	-9.14204E0	5.19753E-3	9.3174E-2	2.72907E1	-3.26957E1	-3.262E1	2.67956E1	1.73529E-7	2.52209E-3	2.52209E-3	6.31288E-3	1.98419E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09665E0	-8.16393E-1	-7.98225E-1	-9.13136E0	-9.14185E0	4.93526E-3	9.33647E-2	2.73177E1	-3.26825E1	-3.25659E1	2.68034E1	1.73529E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.97216E-1