[Scan]
initial_time=2016-02-16T05:01:53
final_time=2016-02-16T05:02:13
ip_count=19
run=1030
dataset=10
scan=798
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08796E-4
ql1_vset=
ql1_vmon=-8.16441E-1
ql1_imon=5.60951E-10
ql2_vset=
ql2_vmon=-7.97844E-1
ql2_imon=2.81918E-10
ql3_vset=
ql3_vmon=-9.13167E0
ql3_imon=4.90427E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=5.09739E-10
mult1=-9.86079E-9
mult2=-2.81243E-9
rf_tmon=-4.81885E-3
rf_agc=3.22221E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=3.38435E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6415E0
bslens_imon=3.19025E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19328E1
lens5a_imon=1.96901E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12574E2
lens4a_imon=2.05468E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53449E1
cs_ef1b_imon=3.07234E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04567E2
lens23_imon=1.02096E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05403E1
cs_ea1_imon=2.13953E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3281E0
lens1_imon=2.95593E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64646E1
os_ef1alow_imon=2.97279E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04537E1
cs_ea2_imon=1.57535E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84313E1
cs_ef1a_imon=3.02855E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=3.65341E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11117E1
os_restr1_imon=2.88297E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14458E1
os_ea1_imon=1.87961E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63623E1
os_ef1bup_imon=3.10079E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24549E0
cs_ionrep_imon=1.2592E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.94022E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01753E1
cs_anode1_imon=3.29503E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=6.26338E-10
tplens_vset=1.4E-1
tplens_vmon=1.6186E0
tplens_imon=-6.05767E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2626E1
iondef3_imon=1.5494E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26873E1
iondef2_imon=1.59734E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03012E2
lens6_imon=2.98173E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=3.38554E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22386E0
ionrepsh_imon=2.0339E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34216E1
lens5b_imon=2.18279E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74626E1
cs_ef2b_imon=3.13784E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.75756E-1
os_ea2_imon=-2.34457E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0611E2
lens4b_imon=2.00576E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71133E1
cs_ef2a_imon=3.18687E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63092E0
os_ef2alow_imon=-2.49572E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.67067E-1
os_ef2bup_imon=-5.13798E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10886E1
os_restr2_imon=2.8897E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.3155E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01977E1
cs_anode2_imon=2.29838E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73448E1
iondef1_imon=1.09048E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6807E1
iondef4_imon=1.10487E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.84782E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=2.79284E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14324E0
cs_ionaccel_imon=-1.92685E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02051E2
cs_ionfocb_imon=1.47294E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5638E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=2.05745E-1
window_imon=-1.02863E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.39193E-4
mask2_vset=0.0E0
mask2_vmon=-1.864E1
mask2_imon=-5.38351E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.60271E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93687E3
defgrida_imon=6.97185E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=7.04394E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.74743E0
defgridb_imon=5.68848E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33915E1
os_fil1_imon=4.59187E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.86662E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66865E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30833E1
cs_fil1_imon=1.00935E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6289E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6707E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35745E-2
os_fil2_imon=-2.33815E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.49285E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.45427E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28576E-1
cs_fil2_imon=-2.13854E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.92948E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22509E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=1.9951E-1
chamber_ion_pmon=1.73383E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40076E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.83513E-1
res40_imon=-2.55186E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.16584E-1	-7.97939E-1	-9.13172E0	-9.14187E0	5.43594E-3	9.30786E-2	2.72856E1	-3.26756E1	-3.26266E1	2.68059E1	1.73454E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.9911E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.16226E-1	-7.98154E-1	-9.13153E0	-9.14211E0	5.126E-3	9.35793E-2	2.7318E1	-3.26719E1	-3.26266E1	2.67938E1	1.73531E-7	2.51203E-3	2.51203E-3	6.31817E-3	1.97984E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.1594E-1	-7.98535E-1	-9.1315E0	-9.14235E0	5.36442E-3	9.31263E-2	2.72901E1	-3.26819E1	-3.26235E1	2.68041E1	1.73528E-7	2.51136E-3	2.51136E-3	6.31858E-3	1.99048E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.16298E-1	-7.97653E-1	-9.13165E0	-9.14223E0	5.19753E-3	9.32932E-2	2.73237E1	-3.26446E1	-3.26458E1	2.67908E1	1.73542E-7	2.51294E-3	2.51294E-3	6.33021E-3	1.98804E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.1625E-1	-7.98178E-1	-9.13153E0	-9.14237E0	5.34058E-3	9.3317E-2	2.73352E1	-3.26956E1	-3.26065E1	2.67992E1	1.73605E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.00325E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09603E0	-8.16202E-1	-7.98154E-1	-9.1315E0	-9.14221E0	5.4121E-3	9.29356E-2	2.72799E1	-3.26224E1	-3.26397E1	2.68082E1	1.73457E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.00363E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.16131E-1	-7.97939E-1	-9.13148E0	-9.14199E0	5.43594E-3	9.3174E-2	2.73051E1	-3.26691E1	-3.26254E1	2.67872E1	1.73514E-7	2.51072E-3	2.51072E-3	6.30083E-3	2.00534E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.16178E-1	-7.97987E-1	-9.13184E0	-9.14223E0	5.57899E-3	9.31263E-2	2.73213E1	-3.26735E1	-3.25864E1	2.67955E1	1.73531E-7	2.52061E-3	2.52061E-3	6.33977E-3	1.9951E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.16369E-1	-7.97963E-1	-9.13129E0	-9.14218E0	5.81741E-3	9.29832E-2	2.73063E1	-3.26437E1	-3.26337E1	2.68514E1	1.73605E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.98419E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.16441E-1	-7.97915E-1	-9.13157E0	-9.14221E0	5.62668E-3	9.31025E-2	2.72672E1	-3.26819E1	-3.2623E1	2.6798E1	1.73529E-7	2.51116E-3	2.51116E-3	6.32386E-3	1.97045E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.16798E-1	-7.97629E-1	-9.13148E0	-9.14207E0	5.45979E-3	9.32455E-2	2.72895E1	-3.26579E1	-3.2629E1	2.67752E1	1.73605E-7	2.51918E-3	2.51918E-3	6.31555E-3	1.97348E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.17037E-1	-7.97629E-1	-9.13148E0	-9.14209E0	5.72205E-3	9.3174E-2	2.73363E1	-3.26759E1	-3.2611E1	2.68106E1					
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.16488E-1	-7.98154E-1	-9.13143E0	-9.14185E0	5.126E-3	9.3174E-2	2.73261E1	-3.26482E1	-3.25665E1	2.67662E1	1.73379E-7	2.52099E-3	2.52099E-3	6.3074E-3	1.97216E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09619E0	-8.15988E-1	-7.98059E-1	-9.13143E0	-9.14176E0	5.03063E-3	9.29832E-2	2.73772E1	-3.27101E1	-3.2611E1	2.67728E1	1.73529E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.97559E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.16417E-1	-7.97796E-1	-9.13141E0	-9.14183E0	4.88758E-3	9.30548E-2	2.73327E1	-3.26801E1	-3.2605E1	2.68202E1	1.73454E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.98419E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0958E0	-8.16369E-1	-7.98416E-1	-9.13148E0	-9.14204E0	5.29289E-3	9.29832E-2	2.73169E1	-3.26644E1	-3.25977E1	2.6798E1	1.73529E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.99456E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.16178E-1	-7.98154E-1	-9.13155E0	-9.14209E0	4.91142E-3	9.30786E-2	2.72829E1	-3.26705E1	-3.26777E1	2.67926E1	1.73531E-7	2.51954E-3	2.51954E-3	6.30202E-3	1.9883E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.16202E-1	-7.98225E-1	-9.13141E0	-9.14209E0	5.38826E-3	9.30786E-2	2.72738E1	-3.26384E1	-3.27145E1	2.68823E1	1.73529E-7	2.52318E-3	2.52318E-3	6.33486E-3	1.9963E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.16321E-1	-7.98106E-1	-9.13138E0	-9.14183E0	5.38826E-3	9.34124E-2	2.73016E1	-3.26903E1	-3.26555E1	2.68082E1	1.71252E-7	2.51632E-3	2.51632E-3	6.32356E-3	1.9883E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.16441E-1	-7.97844E-1	-9.13167E0	-9.14204E0	5.22137E-3	9.3174E-2	2.73448E1	-3.26873E1	-3.2626E1	2.6807E1	1.73383E-7	2.51203E-3	2.51203E-3	6.30202E-3	1.9951E-1