[Scan]
initial_time=2016-02-16T05:02:46
final_time=2016-02-16T05:03:06
ip_count=19
run=1030
dataset=10
scan=800
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08836E-4
ql1_vset=
ql1_vmon=-8.16607E-1
ql1_imon=5.63228E-10
ql2_vset=
ql2_vmon=-7.97796E-1
ql2_imon=2.70188E-10
ql3_vset=
ql3_vmon=-9.13162E0
ql3_imon=5.005E-10
ql4_vset=
ql4_vmon=-9.14207E0
ql4_imon=5.16605E-10
mult1=-9.22746E-9
mult2=-2.80165E-9
rf_tmon=-3.68361E-3
rf_agc=3.32678E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=3.49295E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62728E0
bslens_imon=2.61051E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2042E1
lens5a_imon=1.96988E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12434E2
lens4a_imon=2.05369E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53556E1
cs_ef1b_imon=3.08685E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04684E2
lens23_imon=1.02093E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04032E1
cs_ea1_imon=2.16879E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43686E0
lens1_imon=2.56803E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64644E1
os_ef1alow_imon=2.99604E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04091E1
cs_ea2_imon=1.59399E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=3.02775E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=3.497E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11352E1
os_restr1_imon=2.88251E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15482E1
os_ea1_imon=1.87007E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63894E1
os_ef1bup_imon=3.09911E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27392E0
cs_ionrep_imon=1.29597E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91848E2
cs_nozzle_imon=1.93647E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01629E1
cs_anode1_imon=3.29516E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=6.48189E-10
tplens_vset=1.4E-1
tplens_vmon=1.65028E0
tplens_imon=-3.94451E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25812E1
iondef3_imon=1.51223E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26868E1
iondef2_imon=1.58585E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02962E2
lens6_imon=2.98983E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=3.94356E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26862E0
ionrepsh_imon=1.99925E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33805E1
lens5b_imon=2.21657E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74621E1
cs_ef2b_imon=3.12614E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.87019E-1
os_ea2_imon=-6.81143E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06189E2
lens4b_imon=2.00481E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71114E1
cs_ef2a_imon=3.20795E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65162E0
os_ef2alow_imon=-2.44651E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.37958E-1
os_ef2bup_imon=-5.22878E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11153E1
os_restr2_imon=2.86629E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23008E2
cs_ionfoca_imon=6.32335E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01575E1
cs_anode2_imon=2.30768E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72856E1
iondef1_imon=1.11405E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67788E1
iondef4_imon=1.08665E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.8115E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=2.55454E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10852E0
cs_ionaccel_imon=-1.78699E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02044E2
cs_ionfocb_imon=1.47313E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56423E1
einzel_imon=7.72748E-6
window_vset=0.0E0
window_vmon=2.40168E-1
window_imon=-8.60768E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39145E-4
mask2_vset=0.0E0
mask2_vmon=-1.8665E1
mask2_imon=-5.47223E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92661E3
multa_neg_imon=7.32854E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93681E3
defgrida_imon=6.27733E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.63293E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.83372E0
defgridb_imon=6.87903E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33905E1
os_fil1_imon=4.77022E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.51233E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66605E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30776E1
cs_fil1_imon=1.01055E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6296E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67143E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.57249E-2
os_fil2_imon=-2.25752E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.41892E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.63822E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28746E-1
cs_fil2_imon=-2.21547E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.40651E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22531E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31555E-3
inlet_lpb_pmon=1.98456E-1
chamber_ion_pmon=1.73455E-7
chamber_cvt_pmon=2.50944E-3
foreline_cvt_pmon=2.50944E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.65008E-1
res40_imon=-2.57986E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=180
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09642E0	-8.16441E-1	-7.98011E-1	-9.13193E0	-9.14145E0	5.26905E-3	9.30071E-2	2.73193E1	-3.26997E1	-3.2613E1	2.68076E1	1.73605E-7	2.51739E-3	2.51739E-3	6.29128E-3	1.9951E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09642E0	-8.16059E-1	-7.98035E-1	-9.13141E0	-9.1418E0	5.38826E-3	9.31263E-2	2.72964E1	-3.26316E1	-3.26709E1	2.6792E1	1.73531E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.9934E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09642E0	-8.16345E-1	-7.97749E-1	-9.13167E0	-9.14173E0	4.93526E-3	9.31025E-2	2.73057E1	-3.26538E1	-3.26196E1	2.67891E1	1.73605E-7	2.50931E-3	2.50931E-3	6.31879E-3	2.00606E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09611E0	-8.16751E-1	-7.97749E-1	-9.13179E0	-9.1419E0	5.07832E-3	9.31263E-2	2.72715E1	-3.26555E1	-3.2649E1	2.67728E1	1.73459E-7	2.51814E-3	2.51814E-3	6.32328E-3	1.99729E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.1656E-1	-7.97725E-1	-9.13148E0	-9.1418E0	5.07832E-3	9.32932E-2	2.72997E1	-3.26825E1	-3.25791E1	2.68022E1	1.73605E-7	2.51417E-3	2.51417E-3	6.34518E-3	2.00534E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.16703E-1	-7.98059E-1	-9.13188E0	-9.1419E0	5.05447E-3	9.31263E-2	2.73081E1	-3.26314E1	-3.26356E1	2.68052E1	1.73454E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.98937E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.16607E-1	-7.97963E-1	-9.13157E0	-9.14197E0	5.48363E-3	9.3174E-2	2.73051E1	-3.26777E1	-3.26476E1	2.68012E1	1.73529E-7	2.51225E-3	2.51225E-3	6.32936E-3	1.98419E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.1625E-1	-7.97796E-1	-9.13143E0	-9.14195E0	5.126E-3	9.30548E-2	2.73187E1	-3.26632E1	-3.26248E1	2.67776E1	1.73605E-7	2.52099E-3	2.52099E-3	6.3074E-3	1.98075E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.1625E-1	-7.97629E-1	-9.13153E0	-9.14183E0	5.14984E-3	9.31978E-2	2.73123E1	-3.26476E1	-3.2626E1	2.68106E1	1.73531E-7	2.50775E-3	2.50775E-3	6.3074E-3	1.98153E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.16369E-1	-7.97939E-1	-9.13186E0	-9.14156E0	5.31673E-3	9.32932E-2	2.73183E1	-3.26092E1	-3.26885E1	2.67992E1	1.73529E-7	2.51116E-3	2.51116E-3	6.31288E-3	1.98419E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0941E0	-8.16512E-1	-7.98035E-1	-9.13181E0	-9.14176E0	5.05447E-3	9.32217E-2	2.73135E1	-3.26458E1	-3.26561E1	2.68034E1	1.73454E-7	2.52318E-3	2.52318E-3	6.29098E-3	1.97559E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09394E0	-8.16441E-1	-7.97987E-1	-9.13181E0	-9.14204E0	5.14984E-3	9.31978E-2	2.73069E1	-3.26838E1	-3.26254E1	2.6822E1	1.73454E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.97731E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.16011E-1	-7.97939E-1	-9.13136E0	-9.14195E0	5.36442E-3	9.32693E-2	2.73466E1	-3.26518E1	-3.26176E1	2.67543E1	1.73531E-7	2.51632E-3	2.51632E-3	6.32896E-3	1.98153E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.16035E-1	-7.97606E-1	-9.13141E0	-9.14207E0	5.24521E-3	9.32217E-2	2.73033E1	-3.26627E1	-3.26008E1	2.68038E1	1.73529E-7	2.51225E-3	2.51225E-3	6.33486E-3	1.98075E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.16298E-1	-7.97963E-1	-9.13155E0	-9.14185E0	5.34058E-3	9.32932E-2	2.73328E1	-3.26496E1	-3.26236E1	2.67949E1	1.73379E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.98247E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.16393E-1	-7.97701E-1	-9.13169E0	-9.14187E0	5.07832E-3	9.31263E-2	2.73192E1	-3.26658E1	-3.26125E1	2.67938E1	1.71984E-7	2.50989E-3	2.50989E-3	6.31278E-3	1.9985E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.16321E-1	-7.97725E-1	-9.13165E0	-9.14171E0	5.24521E-3	9.30309E-2	2.72775E1	-3.2623E1	-3.26428E1	2.67764E1	1.73451E-7	2.51359E-3	2.51359E-3	6.33538E-3	2.0064E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.16298E-1	-7.97486E-1	-9.13157E0	-9.14173E0	5.29289E-3	9.30786E-2	2.7286E1	-3.26839E1	-3.26144E1	2.69217E1	1.73529E-7	2.51443E-3	2.51443E-3	6.34037E-3	1.9911E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.16059E-1	-7.97653E-1	-9.1316E0	-9.14192E0	5.48363E-3	9.33647E-2	2.73033E1	-3.26826E1	-3.26254E1	2.6781E1	1.73605E-7	2.52025E-3	2.52025E-3	6.32858E-3	1.98561E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.16607E-1	-7.97796E-1	-9.13162E0	-9.14207E0	5.45979E-3	9.3174E-2	2.72856E1	-3.26868E1	-3.25812E1	2.67788E1	1.73455E-7	2.50944E-3	2.50944E-3	6.31555E-3	1.98456E-1