[Scan]
initial_time=2016-02-16T05:04:06
final_time=2016-02-16T05:04:26
ip_count=19
run=1030
dataset=10
scan=803
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08803E-4
ql1_vset=
ql1_vmon=-8.16154E-1
ql1_imon=5.67496E-10
ql2_vset=
ql2_vmon=-7.97844E-1
ql2_imon=2.66039E-10
ql3_vset=
ql3_vmon=-9.13134E0
ql3_imon=3.90673E-10
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=5.1769E-10
mult1=-9.45073E-9
mult2=-2.79717E-9
rf_tmon=-5.47046E-3
rf_agc=3.11797E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=3.73161E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67742E0
bslens_imon=2.54326E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19748E1
lens5a_imon=1.9812E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.05312E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53562E1
cs_ef1b_imon=3.07857E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.02337E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04616E1
cs_ea1_imon=2.16596E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36135E0
lens1_imon=2.81225E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64704E1
os_ef1alow_imon=2.99063E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04021E1
cs_ea2_imon=1.5855E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84022E1
cs_ef1a_imon=3.02883E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=3.74973E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11502E1
os_restr1_imon=2.87494E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14916E1
os_ea1_imon=1.90404E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63864E1
os_ef1bup_imon=3.09947E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22142E0
cs_ionrep_imon=1.27049E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93721E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01695E1
cs_anode1_imon=3.28687E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=6.63757E-10
tplens_vset=1.4E-1
tplens_vmon=1.64143E0
tplens_imon=-3.37821E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26248E1
iondef3_imon=1.48923E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26542E1
iondef2_imon=1.60319E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02979E2
lens6_imon=2.98572E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=3.52776E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31581E0
ionrepsh_imon=2.01695E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33304E1
lens5b_imon=2.18118E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74321E1
cs_ef2b_imon=3.12289E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.01767E-1
os_ea2_imon=-5.92658E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00485E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7151E1
cs_ef2a_imon=3.19678E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.636E0
os_ef2alow_imon=-2.38525E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.33153E-1
os_ef2bup_imon=-5.2504E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10841E1
os_restr2_imon=2.87422E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.32795E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01647E1
cs_anode2_imon=2.29146E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73155E1
iondef1_imon=1.10131E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67734E1
iondef4_imon=1.08954E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.89303E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=2.72667E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11452E0
cs_ionaccel_imon=-1.8014E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02042E2
cs_ionfocb_imon=1.47248E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56597E1
einzel_imon=7.66261E-6
window_vset=0.0E0
window_vmon=2.16742E-1
window_imon=-8.31936E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82592E2
mask1_imon=2.39189E-4
mask2_vset=0.0E0
mask2_vmon=-1.86746E1
mask2_imon=-5.32807E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.7108E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.44723E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=6.81178E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.60045E0
defgridb_imon=6.40475E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33889E1
os_fil1_imon=4.73418E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.4792E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66876E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30774E1
cs_fil1_imon=1.00909E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63087E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66854E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38254E-2
os_fil2_imon=-2.3356E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.02209E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.55723E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30299E-1
cs_fil2_imon=-2.23349E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.86051E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22455E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=1.9951E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.36777E-1
res40_imon=-2.55103E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.16369E-1	-7.98011E-1	-9.13193E0	-9.14176E0	4.74453E-3	9.33886E-2	2.72921E1	-3.26543E1	-3.26266E1	2.67812E1	1.73383E-7	2.51417E-3	2.51417E-3	6.33436E-3	1.9968E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0941E0	-8.16536E-1	-7.97963E-1	-9.13162E0	-9.1419E0	5.07832E-3	9.35793E-2	2.7359E1	-3.2686E1	-3.26034E1	2.68202E1	1.73309E-7	2.51525E-3	2.51525E-3	6.3074E-3	1.98491E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.16464E-1	-7.97319E-1	-9.13126E0	-9.14204E0	5.17368E-3	9.36508E-2	2.73482E1	-3.26124E1	-3.26738E1	2.6785E1	1.73605E-7	2.5147E-3	2.5147E-3	6.31299E-3	1.98872E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.16655E-1	-7.97939E-1	-9.13115E0	-9.14197E0	4.88758E-3	9.33886E-2	2.72774E1	-3.26278E1	-3.26213E1	2.678E1	1.73532E-7	2.51603E-3	2.51603E-3	6.31269E-3	1.98727E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.16226E-1	-7.97915E-1	-9.13129E0	-9.14204E0	4.98295E-3	9.35555E-2	2.73069E1	-3.26404E1	-3.26813E1	2.68118E1	1.73454E-7	2.51334E-3	2.51334E-3	6.29645E-3	1.9911E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.16202E-1	-7.97796E-1	-9.13122E0	-9.14164E0	5.03063E-3	9.34839E-2	2.73034E1	-3.26614E1	-3.26167E1	2.68053E1	1.73605E-7	2.51096E-3	2.51096E-3	6.31278E-3	1.9951E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.16607E-1	-7.98011E-1	-9.13165E0	-9.14187E0	5.24521E-3	9.35078E-2	2.72654E1	-3.26302E1	-3.26657E1	2.68184E1	1.73531E-7	2.51203E-3	2.51203E-3	6.31817E-3	1.98661E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.16298E-1	-7.98249E-1	-9.13141E0	-9.14187E0	5.05447E-3	9.3627E-2	2.72456E1	-3.26873E1	-3.2605E1	2.68268E1	1.73454E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.97903E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.16226E-1	-7.98416E-1	-9.13172E0	-9.14178E0	5.48363E-3	9.34362E-2	2.72931E1	-3.26458E1	-3.26657E1	2.68094E1	1.73531E-7	2.52169E-3	2.52169E-3	6.28592E-3	1.98491E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.16202E-1	-7.97677E-1	-9.13162E0	-9.14183E0	5.43594E-3	9.32217E-2	2.73207E1	-3.26536E1	-3.2647E1	2.6768E1	1.73298E-7	2.51693E-3	2.51693E-3	6.30182E-3	1.99224E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.16107E-1	-7.97915E-1	-9.13165E0	-9.14171E0	5.38826E-3	9.30071E-2	2.72715E1	-3.27086E1	-3.26054E1	2.67637E1	1.72402E-7	2.51662E-3	2.51662E-3	6.29645E-3	1.99283E-1
1.5E1	0.0E0	1.0E0	6.06E2	4.11E2	-2.09572E0	-8.16178E-1	-7.98059E-1	-9.13157E0	-9.14185E0	5.22137E-3	9.3317E-2	2.72702E1	-3.27125E1	-3.26615E1	2.68226E1	1.73605E-7	2.52061E-3	2.52061E-3	6.30202E-3	1.9883E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.16226E-1	-7.9782E-1	-9.13162E0	-9.14164E0	5.03063E-3	9.30071E-2	2.72769E1	-3.26741E1	-3.2644E1	2.67873E1	1.73605E-7	2.51443E-3	2.51443E-3	6.32936E-3	1.98937E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.16345E-1	-7.97629E-1	-9.13143E0	-9.14156E0	5.10216E-3	9.3174E-2	2.73222E1	-3.25989E1	-3.26762E1	2.67872E1	1.73454E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.97731E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.16178E-1	-7.97939E-1	-9.13157E0	-9.14199E0	5.10216E-3	9.31263E-2	2.73207E1	-3.26699E1	-3.2593E1	2.68154E1	1.73457E-7	2.52061E-3	2.52061E-3	6.32356E-3	1.97815E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.16441E-1	-7.97844E-1	-9.13165E0	-9.14185E0	5.60284E-3	9.30071E-2	2.73664E1	-3.265E1	-3.26266E1	2.67782E1	1.73228E-7	2.51662E-3	2.51662E-3	6.32936E-3	1.97731E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09619E0	-8.16369E-1	-7.97844E-1	-9.13157E0	-9.14202E0	5.60284E-3	9.34124E-2	2.7367E1	-3.25711E1	-3.26885E1	2.68268E1	1.73531E-7	2.51417E-3	2.51417E-3	6.31278E-3	1.9934E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09619E0	-8.16417E-1	-7.97987E-1	-9.1316E0	-9.1419E0	5.53131E-3	9.32932E-2	2.73812E1	-3.26868E1	-3.26307E1	2.69264E1	1.73379E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.9911E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09603E0	-8.16035E-1	-7.98154E-1	-9.13141E0	-9.14192E0	5.43594E-3	9.33886E-2	2.73352E1	-3.26602E1	-3.26036E1	2.68202E1	1.73605E-7	2.51525E-3	2.51525E-3	6.32356E-3	1.9985E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.16154E-1	-7.97844E-1	-9.13134E0	-9.14211E0	5.36442E-3	9.32217E-2	2.73155E1	-3.26542E1	-3.26248E1	2.67734E1	1.73605E-7	2.5131E-3	2.5131E-3	6.32356E-3	1.9951E-1