[Scan]
initial_time=2016-02-16T05:04:33
final_time=2016-02-16T05:04:52
ip_count=19
run=1030
dataset=10
scan=804
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08811E-4
ql1_vset=
ql1_vmon=-8.16393E-1
ql1_imon=5.49054E-10
ql2_vset=
ql2_vmon=-7.98273E-1
ql2_imon=2.77519E-10
ql3_vset=
ql3_vmon=-9.13107E0
ql3_imon=5.20921E-10
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=5.56648E-10
mult1=-9.88488E-9
mult2=-2.77849E-9
rf_tmon=-6.3149E-3
rf_agc=3.11646E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=3.98552E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61627E0
bslens_imon=2.63509E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20518E1
lens5a_imon=2.01371E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12469E2
lens4a_imon=2.05352E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53508E1
cs_ef1b_imon=3.08541E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.01851E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04676E1
cs_ea1_imon=2.23217E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42724E0
lens1_imon=2.56299E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64801E1
os_ef1alow_imon=2.97838E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03642E1
cs_ea2_imon=1.55769E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84442E1
cs_ef1a_imon=3.04433E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=3.96883E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11171E1
os_restr1_imon=2.89729E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14951E1
os_ea1_imon=1.89187E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63725E1
os_ef1bup_imon=3.08001E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.29416E0
cs_ionrep_imon=1.30282E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93312E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01833E1
cs_anode1_imon=3.30598E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=6.59096E-10
tplens_vset=1.4E-1
tplens_vmon=1.55792E0
tplens_imon=-3.24581E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25755E1
iondef3_imon=1.52957E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26843E1
iondef2_imon=1.57175E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02934E2
lens6_imon=2.98605E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=3.53765E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24609E0
ionrepsh_imon=2.02921E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34259E1
lens5b_imon=2.19288E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74513E1
cs_ef2b_imon=3.11857E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.16876E-1
os_ea2_imon=-5.04828E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06162E2
lens4b_imon=2.00334E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70849E1
cs_ef2a_imon=3.19606E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64261E0
os_ef2alow_imon=-2.46814E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.40361E-1
os_ef2bup_imon=-5.10624E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10835E1
os_restr2_imon=2.87386E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23035E2
cs_ionfoca_imon=6.36165E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01977E1
cs_anode2_imon=2.27524E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73243E1
iondef1_imon=1.06345E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67806E1
iondef4_imon=1.10503E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.90054E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=2.62141E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15537E0
cs_ionaccel_imon=-1.81582E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47259E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56039E1
einzel_imon=7.81037E-6
window_vset=0.0E0
window_vmon=2.17343E-1
window_imon=-1.01934E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82599E2
mask1_imon=2.39369E-4
mask2_vset=0.0E0
mask2_vmon=-1.86344E1
mask2_imon=-4.31896E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.20617E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.64019E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.2999E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.72037E0
defgridb_imon=6.19678E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33926E1
os_fil1_imon=5.34685E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.71345E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66886E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30804E1
cs_fil1_imon=1.00927E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62192E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66924E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.56381E-2
os_fil2_imon=-2.17943E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.01008E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.48392E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30558E-1
cs_fil2_imon=-2.1494E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.55668E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22499E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=1.99E-1
chamber_ion_pmon=1.73457E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.2147E-1
res40_imon=-2.5258E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.16226E-1	-7.97963E-1	-9.13165E0	-9.14168E0	5.62668E-3	9.34839E-2	2.7321E1	-3.26307E1	-3.26183E1	2.68041E1	1.73529E-7	2.52428E-3	2.52428E-3	6.30192E-3	1.99803E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.16441E-1	-7.97534E-1	-9.13126E0	-9.14195E0	5.67436E-3	9.32932E-2	2.734E1	-3.26903E1	-3.25985E1	2.68119E1	1.73529E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.01022E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.1656E-1	-7.97105E-1	-9.13141E0	-9.14187E0	5.88894E-3	9.29832E-2	2.72976E1	-3.26405E1	-3.26277E1	2.67897E1	1.73605E-7	2.51581E-3	2.51581E-3	6.32978E-3	2.00463E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09634E0	-8.16441E-1	-7.97391E-1	-9.13155E0	-9.1419E0	5.38826E-3	9.29832E-2	2.72805E1	-3.26428E1	-3.25948E1	2.67577E1	1.73387E-7	2.51182E-3	2.51182E-3	6.31798E-3	1.99061E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09642E0	-8.16512E-1	-7.97534E-1	-9.13179E0	-9.14195E0	5.72205E-3	9.29594E-2	2.73165E1	-3.26795E1	-3.25467E1	2.68172E1	1.73529E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.98937E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09603E0	-8.16536E-1	-7.972E-1	-9.13148E0	-9.14171E0	5.74589E-3	9.32455E-2	2.73381E1	-3.259E1	-3.2652E1	2.67956E1	1.73531E-7	2.52169E-3	2.52169E-3	6.32356E-3	1.99E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-8.16417E-1	-7.97606E-1	-9.13157E0	-9.14183E0	5.62668E-3	9.31501E-2	2.73051E1	-3.26711E1	-3.26266E1	2.6804E1	1.73153E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.99283E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.16488E-1	-7.97677E-1	-9.13136E0	-9.14199E0	5.36442E-3	9.30786E-2	2.73261E1	-3.27035E1	-3.26056E1	2.67824E1	1.73454E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.99283E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.16083E-1	-7.97868E-1	-9.13146E0	-9.14168E0	5.57899E-3	9.30309E-2	2.73676E1	-3.2626E1	-3.26494E1	2.67966E1	1.70097E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.98764E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.16154E-1	-7.97629E-1	-9.13117E0	-9.14178E0	5.6982E-3	9.31501E-2	2.73021E1	-3.27045E1	-3.26225E1	2.67541E1	1.73605E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.98075E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.16417E-1	-7.97319E-1	-9.13155E0	-9.14176E0	5.26905E-3	9.33647E-2	2.73165E1	-3.2644E1	-3.26458E1	2.68316E1	1.73457E-7	2.51525E-3	2.51525E-3	6.3074E-3	1.98153E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.1656E-1	-7.97129E-1	-9.13148E0	-9.14202E0	5.05447E-3	9.35078E-2	2.7352E1	-3.26561E1	-3.26242E1	2.67992E1	1.73605E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.98247E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09619E0	-8.16011E-1	-7.97534E-1	-9.13174E0	-9.14197E0	4.95911E-3	9.30548E-2	2.7269E1	-3.26621E1	-3.26681E1	2.67589E1	1.73303E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.97903E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.16107E-1	-7.97725E-1	-9.13153E0	-9.14187E0	5.14984E-3	9.32217E-2	2.72997E1	-3.26476E1	-3.26278E1	2.68064E1	1.73529E-7	2.5188E-3	2.5188E-3	6.30192E-3	1.98592E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09588E0	-8.16083E-1	-7.97772E-1	-9.1315E0	-9.14187E0	4.673E-3	9.31501E-2	2.72626E1	-3.26738E1	-3.26101E1	2.68163E1	1.73457E-7	2.51096E-3	2.51096E-3	6.33436E-3	1.98661E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.16345E-1	-7.97725E-1	-9.1315E0	-9.14216E0	5.03063E-3	9.29117E-2	2.72991E1	-3.265E1	-3.26308E1	2.67901E1	1.73383E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.9968E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.16226E-1	-7.98011E-1	-9.13157E0	-9.14173E0	5.19753E-3	9.31025E-2	2.73009E1	-3.26753E1	-3.25533E1	2.67487E1	1.73605E-7	2.51248E-3	2.51248E-3	6.30182E-3	1.98344E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.1625E-1	-7.97844E-1	-9.13126E0	-9.14199E0	5.26905E-3	9.31501E-2	2.73225E1	-3.26521E1	-3.26179E1	2.67283E1	1.73303E-7	2.51225E-3	2.51225E-3	6.33486E-3	1.9911E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.16202E-1	-7.97892E-1	-9.13107E0	-9.14173E0	5.43594E-3	9.33409E-2	2.72957E1	-3.2659E1	-3.26065E1	2.68059E1	1.73459E-7	2.51182E-3	2.51182E-3	6.3074E-3	1.98894E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.16393E-1	-7.98273E-1	-9.13107E0	-9.14183E0	5.126E-3	9.33886E-2	2.73243E1	-3.26843E1	-3.25755E1	2.67806E1	1.73457E-7	2.51739E-3	2.51739E-3	6.33436E-3	1.99E-1